基于LIGA技术的光热微驱动机构研究
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摘要
微纳米技术及微光机电系统(Micro-Opto-Electro-Mechanical System, MOEMS)代表着未来科技的发展趋势。微驱动机构作为MOEMS的重要组成部分,已成为各国学者研究的热点。本文提出了一种新型微驱动技术——光热微驱动技术,设计了多种光热微驱动机构,并采用LIGA(Lithographe Galvanoformung Abformtechnik,德文,可翻译为：同步辐射X光光刻电铸成型)技术加工制备了多种金属光热微驱动器,对其进行了实验研究和探索性应用研究。光热微驱动器具有原理新颖、结构简单、选材广泛、操控简便、输出力大、可非接触控制、易于微小化和集成化等优点,是一种具有广泛发展和应用前景的新型微驱动器。
本文首先介绍了MOEMS技术和微驱动器的发展历史及现状。随后介绍了与微驱动器加工密切相关的微纳米加工技术的发展现状。回顾了LIGA加工技术的发展历史,详细描述了LIGA技术的典型工艺流程、各种应用及优点。介绍了北京同步辐射装置LIGA工作站的相关情况以及LIGA加工过程中涉及到的一些工艺与参数的选择。
开展了对光热膨胀机制的理论及仿真研究。分析了光热膨胀的微观机制,建立了微膨胀臂热学模型。用有限元分析软件ANSYS对所建模型进行了仿真研究,分析了导热系数、激光功率、光斑照射位置等因素对微膨胀臂温度场及形变量的影响。
在对微膨胀臂光热膨胀机制理论及仿真研究的基础上,设计了多种光热微驱动机构。重点对开关型和V型光热微驱动器的驱动机制开展了理论及仿真研究,并利用纯镍与黑镍等金属材料及LIGA技术加工制备了开关型、V型光热微驱动器及其他一些光热微驱动机构。
建立了光热微驱动机构的驱动控制及显微观测系统。根据需要设计了整个实验系统,包括激光光源的选择、驱动控制光路的构建、显微成像光路及CCD成像模块的设计。编制和优化了用于光热微驱动测量与分析的软件系统。
开展了光热微驱动机构的一系列实验研究。重点对开关型光热微驱动器和V型光热微驱动器进行了实验研究,包括不同激光光斑照射位置、不同激光功率对微驱动器驱动量的影响,不同激光频率下微驱动器的驱动量及响应速度。同时还开展了一些光热微驱动器的探索性应用研究。
最后,本文对课题的研究内容和研究成果作了总结,阐述了研究的特色和创新之处,同时也指出了工作中的不足和有待完善的地方,并对今后的工作给出了方向性的建议。
Micro/Nano technique and Micro-Opto-Electro-Mechanical System(MOEMS) represent the research tendency of future science and technology. Micro drive technique, as an important part of MOEMS, gets more and more attention of researchers all over the world. A new micro drive technique is introduced in this dissertation, which is called photo-thermal micro drive technique. Several kinds of metal photo-thermal micro drive structures are designed and manufactured by LIGA technique. Photo-thermal micro actuators have advantages of simple structure, a wide range of optional materials, easy manipulation, relatively large output force, non-contact control, high degree of miniaturization and integration. They are a kind of innovate micro actuator with comprehensive application prospect.
The development of MOEMS, micro actuator and micro/nano manufacturing technique are first introduced at the beginning of this dissertation. Then the classic process, applications, and advantages of LIGA technique are described in detail. The LIGA station of Beijing Synchrotron Radiation Facility is also described in detail, including some selections of parameter for manufacturing metal micro actuators.
The mechanism of thermal expansion is analyzed by both theoretical and simulative method. Simulations of micro expansion arm's thermal model are carried out using the finite element analysis software ANSYS. Simulations reveal the effect of thermal conductivity, laser power and laser spot's position on micro expansion arm's temperature and deformation.
On the basis of theoretical and simulative research, several kinds of photo-thermal micro drive structures are designed. Some simulations of switch-type and V-type photo-thermal micro actuators are carried out. By LIGA technique, switch-type photo-thermal micro actuators, V-type photo-thermal micro actuators and other photo-thermal micro structures are manufactured using nickel.
A control and microscopic observation system of photo-thermal micro drive structures is built, which includes Laser, light path of drive control, light path of microscopy imaging, CCD imaging module and software for measurement and analysis.
A series of experiments are carried out on the photo-thermal micro drive structures, especially on the switch-type and V-type photo-thermal micro actuators, in order to reveal the effect of laser spot's position and laser power on micro actuator's deformation. Micro actuators' speed of response under Lasers of different frequency is also tested. Moreover, some exploratory researches for application are done on photo-thermal micro actuators.
The achievements of this whole subject are concluded at the end of this dissertation. Meanwhile some insufficient points of our works are pointed out, and some directional advices on the future research are provided as well.
本文首先介绍了MOEMS技术和微驱动器的发展历史及现状。随后介绍了与微驱动器加工密切相关的微纳米加工技术的发展现状。回顾了LIGA加工技术的发展历史,详细描述了LIGA技术的典型工艺流程、各种应用及优点。介绍了北京同步辐射装置LIGA工作站的相关情况以及LIGA加工过程中涉及到的一些工艺与参数的选择。
开展了对光热膨胀机制的理论及仿真研究。分析了光热膨胀的微观机制,建立了微膨胀臂热学模型。用有限元分析软件ANSYS对所建模型进行了仿真研究,分析了导热系数、激光功率、光斑照射位置等因素对微膨胀臂温度场及形变量的影响。
在对微膨胀臂光热膨胀机制理论及仿真研究的基础上,设计了多种光热微驱动机构。重点对开关型和V型光热微驱动器的驱动机制开展了理论及仿真研究,并利用纯镍与黑镍等金属材料及LIGA技术加工制备了开关型、V型光热微驱动器及其他一些光热微驱动机构。
建立了光热微驱动机构的驱动控制及显微观测系统。根据需要设计了整个实验系统,包括激光光源的选择、驱动控制光路的构建、显微成像光路及CCD成像模块的设计。编制和优化了用于光热微驱动测量与分析的软件系统。
开展了光热微驱动机构的一系列实验研究。重点对开关型光热微驱动器和V型光热微驱动器进行了实验研究,包括不同激光光斑照射位置、不同激光功率对微驱动器驱动量的影响,不同激光频率下微驱动器的驱动量及响应速度。同时还开展了一些光热微驱动器的探索性应用研究。
最后,本文对课题的研究内容和研究成果作了总结,阐述了研究的特色和创新之处,同时也指出了工作中的不足和有待完善的地方,并对今后的工作给出了方向性的建议。
Micro/Nano technique and Micro-Opto-Electro-Mechanical System(MOEMS) represent the research tendency of future science and technology. Micro drive technique, as an important part of MOEMS, gets more and more attention of researchers all over the world. A new micro drive technique is introduced in this dissertation, which is called photo-thermal micro drive technique. Several kinds of metal photo-thermal micro drive structures are designed and manufactured by LIGA technique. Photo-thermal micro actuators have advantages of simple structure, a wide range of optional materials, easy manipulation, relatively large output force, non-contact control, high degree of miniaturization and integration. They are a kind of innovate micro actuator with comprehensive application prospect.
The development of MOEMS, micro actuator and micro/nano manufacturing technique are first introduced at the beginning of this dissertation. Then the classic process, applications, and advantages of LIGA technique are described in detail. The LIGA station of Beijing Synchrotron Radiation Facility is also described in detail, including some selections of parameter for manufacturing metal micro actuators.
The mechanism of thermal expansion is analyzed by both theoretical and simulative method. Simulations of micro expansion arm's thermal model are carried out using the finite element analysis software ANSYS. Simulations reveal the effect of thermal conductivity, laser power and laser spot's position on micro expansion arm's temperature and deformation.
On the basis of theoretical and simulative research, several kinds of photo-thermal micro drive structures are designed. Some simulations of switch-type and V-type photo-thermal micro actuators are carried out. By LIGA technique, switch-type photo-thermal micro actuators, V-type photo-thermal micro actuators and other photo-thermal micro structures are manufactured using nickel.
A control and microscopic observation system of photo-thermal micro drive structures is built, which includes Laser, light path of drive control, light path of microscopy imaging, CCD imaging module and software for measurement and analysis.
A series of experiments are carried out on the photo-thermal micro drive structures, especially on the switch-type and V-type photo-thermal micro actuators, in order to reveal the effect of laser spot's position and laser power on micro actuator's deformation. Micro actuators' speed of response under Lasers of different frequency is also tested. Moreover, some exploratory researches for application are done on photo-thermal micro actuators.
The achievements of this whole subject are concluded at the end of this dissertation. Meanwhile some insufficient points of our works are pointed out, and some directional advices on the future research are provided as well.
引文
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[3]田文超.微机电系统(MOEMS)原理、设计和分析.西安,电子科技大学出版社,2009
[4]蒋二龙,张志伟.微型高分辨率光纤光谱仪在LED测量领域的应用.生命科学仪器,2008,6(4)：57-59
[5]Brennan Desmond, et al. Development of a micro-spectrometer system for process control application. Infrared Physics and Technology,2002,43(2):69-76
[6]Meng Kun, et al. The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle. Microsystem Technologies,2011,18:127-136
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