高性能高温超导线性相位滤波器的研究
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摘要
利用高温超导(HTSC)薄膜研制的微波滤波器具有体积小、重量轻、插损小、Q值高和滤波特性好等优点,这是波导腔、介质谐振器或常规平面结构设计的滤波器所无法比拟的。这些优点对于减轻通信系统的重量和缩小体积降低成本都是非常有利的。
本论文首先介绍了高温超导材料的基本特性,在对当前国内外文献中已报道的部分同类产品做了简要归纳的基础上对高温超导线性相位滤波器的应用进行了分析。本论文在解决了高温超导微波无源器件的设计、光刻工艺、密封封装和低温测量等难点之后,不仅分别采用了自均衡法和外均衡法来进行多种结构的高温超导线性相位滤波器的设计,而且还分别利用不同的设计方法,对不同阶数,不同相对带宽的高温超导线性相位滤波器进行了多角度的研制。第二章主要分析了谐振器间各类耦合及给出Extracted-pole结构高温超导线性相位滤波器的实验结果和结果分析。实测线性相位滤波器指标为:中心频率为1740MHz,带宽为80MHz,带内群时延波动(线性相位特性)<±1.5 ns,带外抑制>20dB,带内插损最好可达到0.141dB。第三章主要介绍利用原型结构直接进行高温超导自均衡线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率为1993MHz,带宽55MHz,通带内最优插损为0.22dB,回波损耗优于-13.8dB,群时延起伏<±1 ns的有效带宽约占通带的75%。第四章主要介绍利用并联结构进行高温超导线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率为2000 MHz,带宽40 MHz,通带内最优插损为0.264 dB,回波损耗优于-17.6 dB,群时延起伏<±1.5 ns的有效带宽约占通带的70%以上。第五章主要介绍交叉线结构自均衡小型化高温超导线性相位滤波器的研制。实测线性相位滤波器指标为:带宽15 MHz,中心频率2514 MHz,通带内最优插损为2.96 dB。群时延起伏<±10 ns的有效带宽约占通带的70%。第六章主要介绍高温超导外均衡线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率2250.86 MHz,带宽14 MHz,通带内最优插损为2.092 dB,回波损耗优于-18.97 dB,群时延起伏< 50ns有效带宽约占通带的78.57%。第七章主要讨论了利用低阶线性相位滤波器通过级联的方式构造高阶线性相位滤波器的方法,并给出仿真实例。
第三章和第五章还给出了部分自行综合出的线性相位滤波器低通原型参数或归一化耦合矩阵,今后在此基础上还可根据实际设计目标综合出对应的低通原型参数或归一化耦合矩阵作为设计工作的理论指导。
在论文设计过程中,所采用的基片均采用YBCO/LaAlO3/YBCO双面薄膜。设计各器件的主要过程为:首先给出线性相位滤波器的原理参数模型和设计原理,利用电磁仿真工具建立高温超导滤波器的理论仿真模型以获取理论理想结果,然后采用全波电磁仿真方法,综合设计符合要求的高温超导线性相位滤波器,并完成设计结果与理论结果比对。最后完成器件的制作、封装和测量,将试验结果与仿真结果进行比较。从基片介电常数、厚度、加工工艺等多种因素以不同角度针对测试结果与理想结果之间的差异进行分析。
The microwave filters using HTSC (high temperature superconductivity) thin films that are small in size and mass have the advantages of low resistance and high quality factor, so its performances are much better than the filters using wave-guide, dielectric resonance or conventional planar structures, offer the potential of large reduction in mass and volume of communication systems, and lead to significant cost reduction of communication systems.
In this thesis, the characteristics of HTSC materials are presented first. Then some examples announced in some recent papers are given, and the using of HTSC filters is analyzed too. Difficulties such as the design of HTSC microwave passive component , the lithographic processing technology , the encapsulation and the measurement in low temperature and so on have been solved in this thesis. After this, a series of HTSC linear phase filters of different orders, structures and fractional bandwidths are simulated and designed in different ways, using self-equalization or external equalization of group delay. In chapter 2, the couplings of open-loop microstrip resonators are studied and the measured results of a HTSC filter designed with extracted-pole techenology, whose bandwidth is 80 MHz and center frequency is 1750 MHz, has been given. The best measured insertion loss is less than 0.141 dB and the group delay fluctuates about±1.5 ns across the pass band. In chapter 3, a six-pole HTSC linear phase filter is designed and manufactured with prototype structure. The measured filter has a 55 MHz pass band at a center frequency of 1993 MHz. The measured return loss is better than 13.8 dB across the pass band and the best insertion loss is 0.22 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±1 ns, is over 75% of the filter bandwidth. In chapter 4, a specific parallel structure is used to develop a six-pole HTSC linear phase filter. The measured filter has a 40 MHz pass band at a center frequency of 2000 MHz. The measured return loss is better than 17.6 dB across the pass band and the best insertion loss is 0.264 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±1.5 ns, is over 70% of the filter bandwidth. The measured results well satisfy the performance of simulation. In chapter 5, the process of synthesizing and simulating a series of HTSC linear phase filters of different orders with cross-coupled quadruplet structures to realize the self-equalization. The measured 8-order filter has a 15 MHz pass band at a center frequency of 2514 MHz. The best insertion loss is 2.96 dB across the pass band. The linear phase bandwidth, where the variation of group delay fluctuates about±10 ns, is over 70% of the filter bandwidth. In chapter 6, with external equalization technique, an eight-pole HTSC linear phase filter is designed and manufactured, getting access to a single pole group delay equalizer to compensate the variation. And this results in a much flatter group delay in the pass band of filter. The measured filter has a 14 MHz pass band at a center frequency of 2250.86 MHz. The measured return loss is better than 18.97 dB and the best insertion loss is 2.092 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±50 ns, is over 78.57% of the filter bandwidth. In chapter 7, the method and design process of cascaded linear phase filter are discussed. And the simulated data of two classes of 12-order linear phase filter cascaded from different kinds of 6-order linear phase filter with different structures are given respectively.
In chapter 3 and chapter 5, some prototype parameters of low-pass linear phase filters are synthesized and given by this thesis itself. Those parameters can play an extremely important role in guiding the following design of various linear phase filters.
All the HTSC linear phase filters are manufactured on the double-sided HTSC YBCO (YBa2Cu3O7) films of about 400nm thickness on a LaAlO3 substrate of 0.5 mm. The whole process in developing the filters can be illustrated as follows. First of all, the prototype parameters are cited from other papers or synthesized by this thesis itself with specific optimization methods. Secondly, the lumped parameter models are given, getting access to some formulations to convert low-pass forms to band-pass forms. Then the theoretical responses are achieved by EM simulation solvers. Thirdly, the modes of HTSC resonators and the linear phase filters are built using CAD programs by full-wave field solvers. Subsequently, the simulated responses and theoretical responses are compared. Finally, the HTSC filters are fabricated, installed in metal shielding boxes and measured; the measured results are given and analyzed as well.
本论文首先介绍了高温超导材料的基本特性,在对当前国内外文献中已报道的部分同类产品做了简要归纳的基础上对高温超导线性相位滤波器的应用进行了分析。本论文在解决了高温超导微波无源器件的设计、光刻工艺、密封封装和低温测量等难点之后,不仅分别采用了自均衡法和外均衡法来进行多种结构的高温超导线性相位滤波器的设计,而且还分别利用不同的设计方法,对不同阶数,不同相对带宽的高温超导线性相位滤波器进行了多角度的研制。第二章主要分析了谐振器间各类耦合及给出Extracted-pole结构高温超导线性相位滤波器的实验结果和结果分析。实测线性相位滤波器指标为:中心频率为1740MHz,带宽为80MHz,带内群时延波动(线性相位特性)<±1.5 ns,带外抑制>20dB,带内插损最好可达到0.141dB。第三章主要介绍利用原型结构直接进行高温超导自均衡线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率为1993MHz,带宽55MHz,通带内最优插损为0.22dB,回波损耗优于-13.8dB,群时延起伏<±1 ns的有效带宽约占通带的75%。第四章主要介绍利用并联结构进行高温超导线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率为2000 MHz,带宽40 MHz,通带内最优插损为0.264 dB,回波损耗优于-17.6 dB,群时延起伏<±1.5 ns的有效带宽约占通带的70%以上。第五章主要介绍交叉线结构自均衡小型化高温超导线性相位滤波器的研制。实测线性相位滤波器指标为:带宽15 MHz,中心频率2514 MHz,通带内最优插损为2.96 dB。群时延起伏<±10 ns的有效带宽约占通带的70%。第六章主要介绍高温超导外均衡线性相位滤波器的研制。实测线性相位滤波器指标为:中心频率2250.86 MHz,带宽14 MHz,通带内最优插损为2.092 dB,回波损耗优于-18.97 dB,群时延起伏< 50ns有效带宽约占通带的78.57%。第七章主要讨论了利用低阶线性相位滤波器通过级联的方式构造高阶线性相位滤波器的方法,并给出仿真实例。
第三章和第五章还给出了部分自行综合出的线性相位滤波器低通原型参数或归一化耦合矩阵,今后在此基础上还可根据实际设计目标综合出对应的低通原型参数或归一化耦合矩阵作为设计工作的理论指导。
在论文设计过程中,所采用的基片均采用YBCO/LaAlO3/YBCO双面薄膜。设计各器件的主要过程为:首先给出线性相位滤波器的原理参数模型和设计原理,利用电磁仿真工具建立高温超导滤波器的理论仿真模型以获取理论理想结果,然后采用全波电磁仿真方法,综合设计符合要求的高温超导线性相位滤波器,并完成设计结果与理论结果比对。最后完成器件的制作、封装和测量,将试验结果与仿真结果进行比较。从基片介电常数、厚度、加工工艺等多种因素以不同角度针对测试结果与理想结果之间的差异进行分析。
The microwave filters using HTSC (high temperature superconductivity) thin films that are small in size and mass have the advantages of low resistance and high quality factor, so its performances are much better than the filters using wave-guide, dielectric resonance or conventional planar structures, offer the potential of large reduction in mass and volume of communication systems, and lead to significant cost reduction of communication systems.
In this thesis, the characteristics of HTSC materials are presented first. Then some examples announced in some recent papers are given, and the using of HTSC filters is analyzed too. Difficulties such as the design of HTSC microwave passive component , the lithographic processing technology , the encapsulation and the measurement in low temperature and so on have been solved in this thesis. After this, a series of HTSC linear phase filters of different orders, structures and fractional bandwidths are simulated and designed in different ways, using self-equalization or external equalization of group delay. In chapter 2, the couplings of open-loop microstrip resonators are studied and the measured results of a HTSC filter designed with extracted-pole techenology, whose bandwidth is 80 MHz and center frequency is 1750 MHz, has been given. The best measured insertion loss is less than 0.141 dB and the group delay fluctuates about±1.5 ns across the pass band. In chapter 3, a six-pole HTSC linear phase filter is designed and manufactured with prototype structure. The measured filter has a 55 MHz pass band at a center frequency of 1993 MHz. The measured return loss is better than 13.8 dB across the pass band and the best insertion loss is 0.22 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±1 ns, is over 75% of the filter bandwidth. In chapter 4, a specific parallel structure is used to develop a six-pole HTSC linear phase filter. The measured filter has a 40 MHz pass band at a center frequency of 2000 MHz. The measured return loss is better than 17.6 dB across the pass band and the best insertion loss is 0.264 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±1.5 ns, is over 70% of the filter bandwidth. The measured results well satisfy the performance of simulation. In chapter 5, the process of synthesizing and simulating a series of HTSC linear phase filters of different orders with cross-coupled quadruplet structures to realize the self-equalization. The measured 8-order filter has a 15 MHz pass band at a center frequency of 2514 MHz. The best insertion loss is 2.96 dB across the pass band. The linear phase bandwidth, where the variation of group delay fluctuates about±10 ns, is over 70% of the filter bandwidth. In chapter 6, with external equalization technique, an eight-pole HTSC linear phase filter is designed and manufactured, getting access to a single pole group delay equalizer to compensate the variation. And this results in a much flatter group delay in the pass band of filter. The measured filter has a 14 MHz pass band at a center frequency of 2250.86 MHz. The measured return loss is better than 18.97 dB and the best insertion loss is 2.092 dB. The linear phase bandwidth, where the variation of group delay fluctuates about±50 ns, is over 78.57% of the filter bandwidth. In chapter 7, the method and design process of cascaded linear phase filter are discussed. And the simulated data of two classes of 12-order linear phase filter cascaded from different kinds of 6-order linear phase filter with different structures are given respectively.
In chapter 3 and chapter 5, some prototype parameters of low-pass linear phase filters are synthesized and given by this thesis itself. Those parameters can play an extremely important role in guiding the following design of various linear phase filters.
All the HTSC linear phase filters are manufactured on the double-sided HTSC YBCO (YBa2Cu3O7) films of about 400nm thickness on a LaAlO3 substrate of 0.5 mm. The whole process in developing the filters can be illustrated as follows. First of all, the prototype parameters are cited from other papers or synthesized by this thesis itself with specific optimization methods. Secondly, the lumped parameter models are given, getting access to some formulations to convert low-pass forms to band-pass forms. Then the theoretical responses are achieved by EM simulation solvers. Thirdly, the modes of HTSC resonators and the linear phase filters are built using CAD programs by full-wave field solvers. Subsequently, the simulated responses and theoretical responses are compared. Finally, the HTSC filters are fabricated, installed in metal shielding boxes and measured; the measured results are given and analyzed as well.
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