软X射线掠入射成像光学系统设计与检测技术研究
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摘要
近年来随着空间技术的发展，人们对太阳活动和空间环境的变化越来越关注。太阳软X射线成像望远镜是用于太阳观测，进行空间天气预报研究的核心设备。它能够在软X射线波段对太阳的日冕层成像，在观测太阳活动方面具有不可替代的优势。本文的工作就是围绕太阳软X射线成像望远镜研制过程中所需的掠入射光学系统设计、系统工程应用分析和大离轴筒状非球面面形检测三项关键技术展开。
根据观测太阳活动，进行空间天气预报研究的应用要求，设计了一种太阳软X射线掠入射成像光学系统。在深入研究经典Wolter I型掠入射光学系统结构特点的基础上，使用ZPL语言对ZEMAX软件进行了二次开发，定义编写了掠入射成像光学系统优化时所需的限制条件和评价函数。使用这些限制条件和评价函数，对Wolter I型掠入射成像光学系统进行了优化。优化后双曲面-双曲面结构的掠入射光学系统全视场的平均弥散斑半径达到2.67′′，相比优化前Wolter I型结构（全视场平均弥散斑半径为4.54′′）提高了41%。详细分析了掠入射成像光学系统中的杂散光和鬼像，并设计了满足系统渐晕和杂散光要求的光阑结构。
分析和研究了掠入射成像光学系统工程应用时，环形入瞳的衍射、光学表面的散射、装配公差和环境因素对成像质量的影响。编写了掠入射成像光学系统像质分析软件，该软件能够用来分析计算包含几何像差、孔径衍射、表面散射、公差及环境影响作用下的掠入射成像光学系统的成像质量。软件的计算结果能够用于指导掠入射成像光学系统进一步的优化和制造，并对其工程应用的可行性进行评估。最后，使用该软件详细分析了本文中设计的掠入射光学系统的成像质量，根据分析计算的结果制定了系统研制过程中的“误差分配图”和加工装调公差。
设计了用于掠入射成像光学系统筒状非球面面形测量的共路扫描长程轮廓仪（CSLTP）的光学结构。该CSLTP中偏振分光棱镜置于光学扫描头的设计以及光束调制器的使用，降低了测量中误差的影响，提高了测量精度。分析和研究了CSLTP中影响测量结果的主要误差源。针对影响较大的两种系统误差，提出了采用反转方法校正转台自身转动误差，采用滤波算法校正系统倾斜偏心误差的方法。
With the development of space technology in recent years, people areincreasingly concerned about the solar activity and changes of space environment.The solar soft X-ray imaging telescope is the core equipment for solar observationand space weather prediction. It could get the solar corona image in the soft X-rayspectral band, and couldn’t be replaced in the observation of solar activity. Thispaper is about three key technologies during development of solar soft X-rayimaging telescope, including grazing incidence optical system design, systemsengineering analysis and large off-axis cylindrical aspherical surface figure testing.
According to the requirements of solar activity observation and space weatherprediction, a solar soft X-ray grazing incidence imaging optical system is designed.After a detailed study on the structure of classic Wolter type I grazing incidenceoptical system, a secondary development on ZEMAX software has executed usingZPL language. With the restrictions and evaluation functions developed, Wolter typeI grazing incidence imaging optical system is optimized. The resolution of optimizedhyperboloid-hyperboloid grazing incidence optical system with full field weightedaverage rms spot radius2.67'' has been increased41%, compared to the Wolter typeI system (full field weighted average rms spot radius4.54''). After a detailed analysisof the stray light and ghost image in grazing incidence imaging optical system, theparameters of aperture that met the requirements of stray light and vignette are presented.
A systems engineering analysis on grazing incidence imaging optical systemhas been performed. And the impacts of circular entrance pupil diffraction, opticalsurface scatter, assembly errors and environmental effects on the imaging quality arepresented. An image quality analysis software which can be used to analyze andcalculate the imaging quality of grazing incidence imaging optical system isprogrammed. The software could be used to guide the optimization, development,and assessing the engineering applications feasibility of grazing incidence imagingoptical system. Finally using the software, a detailed image quality analysis of thegrazing incidence imaging optical system is performed. Following the analysisresults, the imaging error budget tree and tolerances during system developmentprocess have been given.
The optical system of co-path scanning long trace profiler (CSLTP), which isused for grazing incidence imaging optical system large off-axis cylindricalaspherical surfaces figure testing, is presented. In CSLTP system, the design ofoptical scanning head could reduce the impacts of testing errors, and the using ofbeam modulator could improve the measurement accuracy. For two systematicerrors influencing result very much, we present the correcting methods: usingreversal method to correct the spindle error of rotary table, and filtering algorithm tocorrect tilt and eccentric error.
根据观测太阳活动，进行空间天气预报研究的应用要求，设计了一种太阳软X射线掠入射成像光学系统。在深入研究经典Wolter I型掠入射光学系统结构特点的基础上，使用ZPL语言对ZEMAX软件进行了二次开发，定义编写了掠入射成像光学系统优化时所需的限制条件和评价函数。使用这些限制条件和评价函数，对Wolter I型掠入射成像光学系统进行了优化。优化后双曲面-双曲面结构的掠入射光学系统全视场的平均弥散斑半径达到2.67′′，相比优化前Wolter I型结构（全视场平均弥散斑半径为4.54′′）提高了41%。详细分析了掠入射成像光学系统中的杂散光和鬼像，并设计了满足系统渐晕和杂散光要求的光阑结构。
分析和研究了掠入射成像光学系统工程应用时，环形入瞳的衍射、光学表面的散射、装配公差和环境因素对成像质量的影响。编写了掠入射成像光学系统像质分析软件，该软件能够用来分析计算包含几何像差、孔径衍射、表面散射、公差及环境影响作用下的掠入射成像光学系统的成像质量。软件的计算结果能够用于指导掠入射成像光学系统进一步的优化和制造，并对其工程应用的可行性进行评估。最后，使用该软件详细分析了本文中设计的掠入射光学系统的成像质量，根据分析计算的结果制定了系统研制过程中的“误差分配图”和加工装调公差。
设计了用于掠入射成像光学系统筒状非球面面形测量的共路扫描长程轮廓仪（CSLTP）的光学结构。该CSLTP中偏振分光棱镜置于光学扫描头的设计以及光束调制器的使用，降低了测量中误差的影响，提高了测量精度。分析和研究了CSLTP中影响测量结果的主要误差源。针对影响较大的两种系统误差，提出了采用反转方法校正转台自身转动误差，采用滤波算法校正系统倾斜偏心误差的方法。
With the development of space technology in recent years, people areincreasingly concerned about the solar activity and changes of space environment.The solar soft X-ray imaging telescope is the core equipment for solar observationand space weather prediction. It could get the solar corona image in the soft X-rayspectral band, and couldn’t be replaced in the observation of solar activity. Thispaper is about three key technologies during development of solar soft X-rayimaging telescope, including grazing incidence optical system design, systemsengineering analysis and large off-axis cylindrical aspherical surface figure testing.
According to the requirements of solar activity observation and space weatherprediction, a solar soft X-ray grazing incidence imaging optical system is designed.After a detailed study on the structure of classic Wolter type I grazing incidenceoptical system, a secondary development on ZEMAX software has executed usingZPL language. With the restrictions and evaluation functions developed, Wolter typeI grazing incidence imaging optical system is optimized. The resolution of optimizedhyperboloid-hyperboloid grazing incidence optical system with full field weightedaverage rms spot radius2.67'' has been increased41%, compared to the Wolter typeI system (full field weighted average rms spot radius4.54''). After a detailed analysisof the stray light and ghost image in grazing incidence imaging optical system, theparameters of aperture that met the requirements of stray light and vignette are presented.
A systems engineering analysis on grazing incidence imaging optical systemhas been performed. And the impacts of circular entrance pupil diffraction, opticalsurface scatter, assembly errors and environmental effects on the imaging quality arepresented. An image quality analysis software which can be used to analyze andcalculate the imaging quality of grazing incidence imaging optical system isprogrammed. The software could be used to guide the optimization, development,and assessing the engineering applications feasibility of grazing incidence imagingoptical system. Finally using the software, a detailed image quality analysis of thegrazing incidence imaging optical system is performed. Following the analysisresults, the imaging error budget tree and tolerances during system developmentprocess have been given.
The optical system of co-path scanning long trace profiler (CSLTP), which isused for grazing incidence imaging optical system large off-axis cylindricalaspherical surfaces figure testing, is presented. In CSLTP system, the design ofoptical scanning head could reduce the impacts of testing errors, and the using ofbeam modulator could improve the measurement accuracy. For two systematicerrors influencing result very much, we present the correcting methods: usingreversal method to correct the spindle error of rotary table, and filtering algorithm tocorrect tilt and eccentric error.
引文
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