非回转非容积型无阀压电泵的动力学分析和实验研究
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摘要
随着生物、医学、保健、化学、化工、安全监测、航空航天等领域的飞速发展，对流控器件的集成度和流体输送的精密度提出了更高的要求，传统的电磁泵由于结构原理的原因已不能满足科学研究和工程实践的特殊需要。结构简单、体积小、重量轻、耗能低、无噪声、无电磁干扰的无阀压电泵就是在这样的背景下应运而生的。由于其广阔的应用前景，自1993年瑞典的E Steme提出并发明第一个无阀压电泵以来，各种新原理、新结构的无阀压电泵不断涌现出来，现已成为世界各国研究的热点问题。但目前的无阀压电泵由于其固有的回流现象严重、流动波动大、流量小、效率低等问题，距离实际需求尚有一定的距离。基于上述研究现状，在国家自然科学基金的资助下，本文开展了具有原始创新和完全自主知识产权新型无阀压电泵的探索性研究，主要研究内容如下：
1.受到鱼尾摆动的启发，首次提出了在泵的分类学上既不属于容积型又不属于回转型的柔性尾鳍结构压电层合振子无阀压电泵；研制了样机，进行了泵流量测试、振子的仿真与测振、流场模拟等研究工作；实验结果表明，通过在振子的端部构造柔性尾鳍，并做适当的结构优化后，单位面积压电陶瓷片产生的泵流量较无柔性尾鳍时提高了43倍；和传统的容积差型无阀压电泵相比，具有流量大、流动脉动小、无回流现象等优点。
2.研究了压电振子在水中的绝缘、压电振子的工作空间、柔性尾鳍的结构、压电层合板梁的构成形式、基体和陶瓷片的厚度比和振子-固壁距离等因素对泵性能的影响；建立了外电场激励下压电双晶片的振动方程，分析了模态力的影响因素；基于最小作用原理，利用瑞利-利兹法给出了突变截面压电层合梁模态振型的近似解；通过合理的选择容许函数序列，模态频率近似解逼近实验结果，显示出较好的一致性，二阶谐振频率的相对误差为2.1%。
3.针对压电层合振子（单晶片和双晶片）浸没在泵腔内容易出现的陶瓷片电极层破坏、流体电离和流体温升等问题，提出并设计了能够实现干湿分离的仿尾鳍变截面摆动振子压电叠堆泵；对振子工作在泵腔内和近似无限水域（水槽）分别进行了泵水能力测试；80V电压激励下，振子工作在水槽中，一、二阶弯振的模态频率分别为680Hz和1370Hz，30mm水柱被压下，泵的最大流量可达560mL/min；振子工作在泵腔中，一、二阶弯振的模态频率分别为617Hz、1356Hz，泵的最大流量为400mL/min；对影响泵性能的关键结构参数——柔性尾长和振臂长度，进行了实验研究；结果表明，谐振频率随柔性尾长的变化规律符合线性振动理论；但端部振幅随柔性尾长和振臂长度的变化却呈现出先增加后减小的趋势；通过建立摆动振子的伪刚体动力学模型，从理论上分析了振臂和柔性尾鳍之间的弱耦合关系。
4.提出了仿尾鳍泵的工作机理，解释了产生单向流动的主要动力是来源于振子周围流体随振子做圆弧摆动而受到的离心力；从动量的角度分析了摆动振子和流体微团之间的相互作用并给出了泵流量的解析式。
With the development of biologic, medical science, health care, chemical industry, chemical safetymonitoring and aerospace technology, higher requirements are proposed on the micro fluidic deviceintegration and fluid delivery precision. Traditional electromagnetic pumps are increasingly unable tomeet the needs of scientific research and engineering practice due to their structure and workingprinciple. Valveless piezoelectric pump with the characteristic of simple structure, small volume, lightweight, low energy consumption, low noise, no electromagnetic interference emerges as required bythe time. Because of its broad application prospect, since Sweden's E Steme proposed the concept ofvalveless piezoelectric pump in1993, a variety of valveless piezoelectric pumps with new principle,new structure have came into being in large numbers and have become the hot issue of researchworldwide. However, there is still a long way to go before it can meet the actual demands due to theirshortness of reflow phenomenon by nature, the large flow fluctuation, low flow rate, low efficiency,ect.. Supported by the National Natural Science Foundation of China, this paper carried out theexploratory study on valveless piezoelectric pump with original innovation and completelyindependent intellectual property rights based on the current research,. The main research contents areas follows:
1. Inspired by the fish-tail swing, caudal-fin imitation type valveless piezoelectric pump withlaminated piezoelectric vibrator are presented, which belongs to neither volume type norrotary type taxonomically. A prototype is fabricated, and researches on flow testing, vibrationexperiment, flow simulation have been conducted. The experimental results show that, withconstruction of flexible caudal-fin in the end of the vibrator and appropriate optimization, theflow rate of the pump was increased by43times in per unit volume of piezoelectric ceramicsheet than that of non flexible caudal-fin; the flow rate was266mL/min under the60V voltage.Compared to the traditional volumetric type of valveless piezoelectric pump, valvelesspiezoelectric pump with laminated piezoelectric vibrator in flexible caudal-fin structure hasadvantages of large flow rate, small flow pulsation, non backflow phenomenon, etc..
2. Some researches about influencing factors of pump performance are conducted, such aspiezoelectric vibrator’s dielectric in water, piezoelectric vibrator’s working space, flexiblecaudal-fin’s structure, piezoelectric laminated beam’s pattern, thickness ratio between matrixand ceramic sheet and the vibrator ‘s distance from solid wall. Vibration equation of the vibrator was derived under the external electric field and modal force factors were analyzed.Based on the principle of least action, modal approximation for the mutant cross-sectionlaminated piezoelectric beam was gained by using Rayleigh-Liz law. Through the reasonableselection of permissible function sequence, the approximate solution of modal frequency andthe experimental results are well consistent and the relative error of the second orderresonance frequency is2.1%.
3. As result of the PZT electrode layer damage which is easy to happen when the laminatedpiezoelectric vibrator (single chip and double wafer) is immersed in the pump chamber, andthe phenomenon of fluid ionization and fluid heat, a novel piezoelectric stack pump which hasa variable cross-section swinging vibrator imitating caudal fin capable of separation thevibrator from the water has been put forward and designed. Pumping capacity is tested as thevibrator working in pump cavity and in approximate infinite waters (sink), respectively.Under80V voltage, if vibrator works in sink, the first and second order bending modalfrequencies are680Hz and1370Hz respectively. With the backpressure of30mm watercolumn, the maximum flow rate is560mL/min. If vibrator works in pump chamber, the firstand second order bending modal frequencies are617Hz and1356Hz respectively and themaximum flow rate reaches400mL/min. The key structure parameters—flexible tail lengthand arm length, which have important influence on the pump performance, have been studiedin the experiment. The result shows that the resonant frequency changes with flexiblecaudal-fin, whose evolution is consistent with the linear vibration theory. But the amplitude ofthe end part changes with the flexible tail length and arm length tending to increase at first andthen decrease. Pseudo rigid body dynamics model of the swinging vibrator is established,which describes theoretically the weak coupling between vibrator arm and flexible caudal-fin.
4. The author explained the working principle of this type of bionic pump, and proposed that theunidirectional flow is mainly originated from centrifugal force from the fluid around thevibrator which does arc swing movement accompanying with the vibrator. From the aspect ofmomentum, interactions between swinging vibrator and fluid particles is analyzed, and theformula of flow rate is deduced.
1.受到鱼尾摆动的启发，首次提出了在泵的分类学上既不属于容积型又不属于回转型的柔性尾鳍结构压电层合振子无阀压电泵；研制了样机，进行了泵流量测试、振子的仿真与测振、流场模拟等研究工作；实验结果表明，通过在振子的端部构造柔性尾鳍，并做适当的结构优化后，单位面积压电陶瓷片产生的泵流量较无柔性尾鳍时提高了43倍；和传统的容积差型无阀压电泵相比，具有流量大、流动脉动小、无回流现象等优点。
2.研究了压电振子在水中的绝缘、压电振子的工作空间、柔性尾鳍的结构、压电层合板梁的构成形式、基体和陶瓷片的厚度比和振子-固壁距离等因素对泵性能的影响；建立了外电场激励下压电双晶片的振动方程，分析了模态力的影响因素；基于最小作用原理，利用瑞利-利兹法给出了突变截面压电层合梁模态振型的近似解；通过合理的选择容许函数序列，模态频率近似解逼近实验结果，显示出较好的一致性，二阶谐振频率的相对误差为2.1%。
3.针对压电层合振子（单晶片和双晶片）浸没在泵腔内容易出现的陶瓷片电极层破坏、流体电离和流体温升等问题，提出并设计了能够实现干湿分离的仿尾鳍变截面摆动振子压电叠堆泵；对振子工作在泵腔内和近似无限水域（水槽）分别进行了泵水能力测试；80V电压激励下，振子工作在水槽中，一、二阶弯振的模态频率分别为680Hz和1370Hz，30mm水柱被压下，泵的最大流量可达560mL/min；振子工作在泵腔中，一、二阶弯振的模态频率分别为617Hz、1356Hz，泵的最大流量为400mL/min；对影响泵性能的关键结构参数——柔性尾长和振臂长度，进行了实验研究；结果表明，谐振频率随柔性尾长的变化规律符合线性振动理论；但端部振幅随柔性尾长和振臂长度的变化却呈现出先增加后减小的趋势；通过建立摆动振子的伪刚体动力学模型，从理论上分析了振臂和柔性尾鳍之间的弱耦合关系。
4.提出了仿尾鳍泵的工作机理，解释了产生单向流动的主要动力是来源于振子周围流体随振子做圆弧摆动而受到的离心力；从动量的角度分析了摆动振子和流体微团之间的相互作用并给出了泵流量的解析式。
With the development of biologic, medical science, health care, chemical industry, chemical safetymonitoring and aerospace technology, higher requirements are proposed on the micro fluidic deviceintegration and fluid delivery precision. Traditional electromagnetic pumps are increasingly unable tomeet the needs of scientific research and engineering practice due to their structure and workingprinciple. Valveless piezoelectric pump with the characteristic of simple structure, small volume, lightweight, low energy consumption, low noise, no electromagnetic interference emerges as required bythe time. Because of its broad application prospect, since Sweden's E Steme proposed the concept ofvalveless piezoelectric pump in1993, a variety of valveless piezoelectric pumps with new principle,new structure have came into being in large numbers and have become the hot issue of researchworldwide. However, there is still a long way to go before it can meet the actual demands due to theirshortness of reflow phenomenon by nature, the large flow fluctuation, low flow rate, low efficiency,ect.. Supported by the National Natural Science Foundation of China, this paper carried out theexploratory study on valveless piezoelectric pump with original innovation and completelyindependent intellectual property rights based on the current research,. The main research contents areas follows:
1. Inspired by the fish-tail swing, caudal-fin imitation type valveless piezoelectric pump withlaminated piezoelectric vibrator are presented, which belongs to neither volume type norrotary type taxonomically. A prototype is fabricated, and researches on flow testing, vibrationexperiment, flow simulation have been conducted. The experimental results show that, withconstruction of flexible caudal-fin in the end of the vibrator and appropriate optimization, theflow rate of the pump was increased by43times in per unit volume of piezoelectric ceramicsheet than that of non flexible caudal-fin; the flow rate was266mL/min under the60V voltage.Compared to the traditional volumetric type of valveless piezoelectric pump, valvelesspiezoelectric pump with laminated piezoelectric vibrator in flexible caudal-fin structure hasadvantages of large flow rate, small flow pulsation, non backflow phenomenon, etc..
2. Some researches about influencing factors of pump performance are conducted, such aspiezoelectric vibrator’s dielectric in water, piezoelectric vibrator’s working space, flexiblecaudal-fin’s structure, piezoelectric laminated beam’s pattern, thickness ratio between matrixand ceramic sheet and the vibrator ‘s distance from solid wall. Vibration equation of the vibrator was derived under the external electric field and modal force factors were analyzed.Based on the principle of least action, modal approximation for the mutant cross-sectionlaminated piezoelectric beam was gained by using Rayleigh-Liz law. Through the reasonableselection of permissible function sequence, the approximate solution of modal frequency andthe experimental results are well consistent and the relative error of the second orderresonance frequency is2.1%.
3. As result of the PZT electrode layer damage which is easy to happen when the laminatedpiezoelectric vibrator (single chip and double wafer) is immersed in the pump chamber, andthe phenomenon of fluid ionization and fluid heat, a novel piezoelectric stack pump which hasa variable cross-section swinging vibrator imitating caudal fin capable of separation thevibrator from the water has been put forward and designed. Pumping capacity is tested as thevibrator working in pump cavity and in approximate infinite waters (sink), respectively.Under80V voltage, if vibrator works in sink, the first and second order bending modalfrequencies are680Hz and1370Hz respectively. With the backpressure of30mm watercolumn, the maximum flow rate is560mL/min. If vibrator works in pump chamber, the firstand second order bending modal frequencies are617Hz and1356Hz respectively and themaximum flow rate reaches400mL/min. The key structure parameters—flexible tail lengthand arm length, which have important influence on the pump performance, have been studiedin the experiment. The result shows that the resonant frequency changes with flexiblecaudal-fin, whose evolution is consistent with the linear vibration theory. But the amplitude ofthe end part changes with the flexible tail length and arm length tending to increase at first andthen decrease. Pseudo rigid body dynamics model of the swinging vibrator is established,which describes theoretically the weak coupling between vibrator arm and flexible caudal-fin.
4. The author explained the working principle of this type of bionic pump, and proposed that theunidirectional flow is mainly originated from centrifugal force from the fluid around thevibrator which does arc swing movement accompanying with the vibrator. From the aspect ofmomentum, interactions between swinging vibrator and fluid particles is analyzed, and theformula of flow rate is deduced.
引文
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