激光层裂法检测薄膜与基体结合强度有限元分析
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摘要
激光层裂技术,最近几年已被成功地用于测量强但脆的非消耗、非扩散性微米厚薄膜与基体界面拉伸强度。本文对激光层裂技术测量薄膜和基体结合强度进行了初步的有限元数值研究,获得以下的成果:
在激光层裂实验中,激光脉冲触发介质在高应变力下变形,在介质动态断裂数值模拟中使用弹性理论。根据激光与材料作用机理,将实验过程简化为两个相关但不耦合过程,即热在双层介质中的瞬态热传导,局部体积膨胀和等离子体反冲压力引起的瞬态弹性波在双层介质中的传播结构分析。在瞬态热传导分析,将介质在空间域离散为热影响区和非热影响区,在时间域的离散采用通用梯形法。在弹性波传播结构分析,将介质在空间域离散为单元尺寸数倍于瞬态热传导单元尺寸,在时间域的离散采用中心差分法。
在有限元分析中采用激光加载而非实验测得的瞬时表面速度作为模型的输入,模拟了高脉冲能量脉冲激光冲击试样表面产生向基体内部传播的高幅应力波传播,并将结构分析的结果与实验测量值作了对比验证。基于实验的激光冲击单层介质和双层介质热分析,证明了热弹、熔融机制下激光穿透介质的热影响深度仅为1～2μm,故基体/薄膜界面力学性能不受激光冲击的热影响。结构分析得到垂直于自由表面304不锈钢/氮化钛薄膜界面应力为183.64MPa。从而在数值模拟上证明,引发薄膜/基体界面脱粘的应力并非压应力波与反射的拉应力波的单次耦合,而是在界面与自由表面来回反射和透射的应力波的多次叠加。
The laser pulse induced spallation technique has been used in recent years to successfully measure the tensile strength of interfaces between coatings of micron thickness and substrates in nondispersive and nondissipative bimaterial systems of interest in composites with strong but brittle components. Finite element simulation of in situ measurement of the film-matrix interface strength was the most concern of this paper.
Instead of in previously reported measurements the experimentally measured free surface velocity, enegry and pessure of laser pulse in the present article allowed definition of the loading conditions in the numerical model. On the basis of theory for laser hypervelocity impact dynamics, experiment was predigested into two relative but non-coupling processes, i.e. transient thermal analysis and transient dynamics analysis. In the former, the procedure employed for the solution of thermal equation was the generalized trapezoidal rule. In the latter, the Crank-Nicholson difference time integration method was employed for the solution of wave equation.
Based on the experiments, we firstly have analyzed the process of laser shocking single substrate to verify the computer programs by confrontation the laser-induced epicentral displacements at the opposite side with experimental displacement. A two-layer model for the laser generation of ultrasound in films-matrix laminates has been secondly proposed to study the propagation of stress wave and to evaluate the spall resistance of sputtered films. The analyzed result showed the dynamic adhesive strength of the TiN coating and the 304 stainless steel substrates is 183.64Mpa. It is theoretically proved that the interface stress triggering the film pry-offs was not single superimposition of pressure pulse and reflected tensile pulse, but multi-superimposition of pressure and tensile pulses.
在激光层裂实验中,激光脉冲触发介质在高应变力下变形,在介质动态断裂数值模拟中使用弹性理论。根据激光与材料作用机理,将实验过程简化为两个相关但不耦合过程,即热在双层介质中的瞬态热传导,局部体积膨胀和等离子体反冲压力引起的瞬态弹性波在双层介质中的传播结构分析。在瞬态热传导分析,将介质在空间域离散为热影响区和非热影响区,在时间域的离散采用通用梯形法。在弹性波传播结构分析,将介质在空间域离散为单元尺寸数倍于瞬态热传导单元尺寸,在时间域的离散采用中心差分法。
在有限元分析中采用激光加载而非实验测得的瞬时表面速度作为模型的输入,模拟了高脉冲能量脉冲激光冲击试样表面产生向基体内部传播的高幅应力波传播,并将结构分析的结果与实验测量值作了对比验证。基于实验的激光冲击单层介质和双层介质热分析,证明了热弹、熔融机制下激光穿透介质的热影响深度仅为1～2μm,故基体/薄膜界面力学性能不受激光冲击的热影响。结构分析得到垂直于自由表面304不锈钢/氮化钛薄膜界面应力为183.64MPa。从而在数值模拟上证明,引发薄膜/基体界面脱粘的应力并非压应力波与反射的拉应力波的单次耦合,而是在界面与自由表面来回反射和透射的应力波的多次叠加。
The laser pulse induced spallation technique has been used in recent years to successfully measure the tensile strength of interfaces between coatings of micron thickness and substrates in nondispersive and nondissipative bimaterial systems of interest in composites with strong but brittle components. Finite element simulation of in situ measurement of the film-matrix interface strength was the most concern of this paper.
Instead of in previously reported measurements the experimentally measured free surface velocity, enegry and pessure of laser pulse in the present article allowed definition of the loading conditions in the numerical model. On the basis of theory for laser hypervelocity impact dynamics, experiment was predigested into two relative but non-coupling processes, i.e. transient thermal analysis and transient dynamics analysis. In the former, the procedure employed for the solution of thermal equation was the generalized trapezoidal rule. In the latter, the Crank-Nicholson difference time integration method was employed for the solution of wave equation.
Based on the experiments, we firstly have analyzed the process of laser shocking single substrate to verify the computer programs by confrontation the laser-induced epicentral displacements at the opposite side with experimental displacement. A two-layer model for the laser generation of ultrasound in films-matrix laminates has been secondly proposed to study the propagation of stress wave and to evaluate the spall resistance of sputtered films. The analyzed result showed the dynamic adhesive strength of the TiN coating and the 304 stainless steel substrates is 183.64Mpa. It is theoretically proved that the interface stress triggering the film pry-offs was not single superimposition of pressure pulse and reflected tensile pulse, but multi-superimposition of pressure and tensile pulses.
引文
[1]王力衡,黄运添,郑海涛,薄膜技术,清华大学出版社,1991
[2]表面处理工艺手册编审委员会会编,表面处理工艺手册,上海科学技术出版社,1991,1
[3]崔春翔,吴人洁,王浩伟,金属基材料界面特征与力学性能,宇航材料工艺,No.1,1997
[4]Herrera-Franco,P.J.,et.al,Comparison of methods for the measurement of fibre/matrix adhesion in composites,Composites,2,23(1),1992
[5]Fouad Attar,Thomas Johannesson,Adhesion evaluation of thin ceramic coatings on tool using the scratch testing technique,Surf.Coat.Tech.,78,87,1996
[6]B.Rother,D.A.Dietrich,Evaluation of interface strength between TiN coatings and hardened high speed steel substrates,Thin Solid Films,625,74-75,1995
[7]H.Ollendorf,D.Schneider,A comparative study of adhesion test methods for hard coatings,Surf.Coat.Tech.,113,86,1996
[8]D.Lian,Y.Suga & S.Kurihara,Application of Ultrasonic Testing Robot with Five Axes for Evaluating Adhesion of Thermal Sprayed Coating.Porc.ITC"95,May,879-884
[9]B.Rother,L.A.Donohue & H.Kappl,Quantification of the interface strength between(Ti,Zr)N coatings a high speed steel,Surf.Coat.Tech.,82,214-217,1996
[10]J.Lesage,P.Demarecaux,D.Chicot,et.al,Adhesion of Thermal Sprayed Coatings:A Model for the Interface Indentation Test,Porc.ITSC"95,May,891-896
[11]S.Amada,T.Hirose & K.Tomoyasu,Introduction of Factual Dimension to Evaluation of Adhesive Strength,Porc.ITC"95,May,885-890
[12]M.Sexsmith & T.Troczynski,Development of Peel adhesion Test for Thermal Spray Coatings.Proc.,ITC"95,May.897-901
[13]D.Muller,Y.R.Cho & E.Fromn,Adhesion strength of ductile aluminum and brittle TiN coatings on steel,aluminum and copper,measured by fracture mechanics tests,Surf.Coat.Tech.,74-75,849-856,1995
[14]V.Gupta,A.S.Argon et al.,Measurement of Interface Strength by Laser-pulse induced Spallation,Mater.Sci,A126,105-117,1990
[15]V.Gupta,A.S.Argon et al.,Measurement of Interface Strength by a Laser Spallation Technique,J.Mech.Phys.Solids,40(1),141-180,1992
[16]R.Loh,C.Rossington,et al.,Laser technique for evaluating spall resistance of brittle coatings,J.Am.Ceram.Soc,139,69(2),1986
[17]Vijay Gupta,Hanover,N.H.,System and method for measuring the interface tensile strength of planar interfaces,United States Patent,5438402
[18]Allen Yu & Vijay Gupta,Measurement of in Situ fiber/matrix interface strength in graphite/epoxy composites,Composites Science and Technology,58,1827,1998
[19]Vossen,J.L.,Adhesion measurement of thin films,thick films and bulk,coatings,p122-133,STP-640,ASTM,1978
[20]I.G.Epishine et al.,Physics and chemistry of Materials Treatment.22(5),485,1988
[21]Paul Archer,Vijay Gupta,Measurement and control of ice adhesion to Aluminum 6061 alloy,J.Mech.Phys.Solids,Vol.46,No.10,pp.1745-1771,1998
[22]Gerald L.Nutt,Wayne E.King,Comments on the bond strength measurements of Gupta and co-workers,Materials Science and Engineering,A159(1992),135-142
[23]Gerald L.Nutt,Finite element simulation of exfoliation experiments,J.Mater.Res.,Vol.7,No.1,Jan 1992
[24]Markus W.Sigrist,Laser photo acoustics for gas analysis and materials testing,Optical Engineering,34(7),1919,1995
[25]C.Sartori,R.Oltra& P.Dubief,A pulsed laser technique for an evaluation of the spall resistace of sputtered oxide films:diagnostic by interferometric probing,Surf.Coat.Tech.,106,251,1998
[26]A.G.Youtsos,M.Kiriakopoulos,Th.Timke,Experimental and theoretical/numerical investigations of thin films bonding strength,Theoretical and Applied Fracture Mechanics,31,1999,p47-59
[27]F.Cottet,M.Boustie,Spallation studies in aluminum targets using shock waves induced by laser irradiation at various pulse duration,J.Appl.Phys.66,4067,1989
[28]王亚苠,贺鹏飞等,用脉冲激光法测量金属基复合材料界面强度,复合材料学报,14(2),50,1997
[29]张永康,激光冲击在金属强化及检测中的应用研究,南京大学博士后研究工作报告,1997,12
[30]M.Scot Breitenfeld,Philippe H.Geubelle,Numerical analysis of dynamic debonding under 2D in-plane and 3D loading,International Journal of Fracture 93:13-38,1998
[31]A.G.Varias,I.Mastorakos,E.C.Aifantis,Numerical simulation of interface crack in thin films,International Journal of Fracture 98:195-207,1999
[32]B.Cotterell,Z.Chen,Buckling and cracking of thin films on compliant substrates under compression,International Journal of Fracture 104:169-179,2000
[33]J.Yuan,V.Gupta,Measurement of interface strength by the modified laser spallation technique,Ⅰ.Experiment and simulation of the spallation process,J.Appl.Phys,74(4),2388,1993
[34]Y.Gupta,J.Yuan,Measurement of interface strength by the modified laser spallation technique.Ⅱ.Application to metal/ceramic interfaces,J.Appl.Phys,74(4),2397,1993
[35]J.Yuan,V.Gupta,A.Pronin,Measurement of interface strength by the modified laser spallation technique.Ⅲ.Experiment optimization of the stress pulse,J.Appl.Phys,74(4),2405,1993
[36]V.Gupta,Alexander Pronin,New Technique to Measure the Toughness of Thin-Film Interfaces,J.Am.Ceram.Soc.,78(5),1397,1995
[37]V.Gupta,Jianxin Wu,et al.,Effect of Substrate Orientation,Roughness,and Film Deposition Mode on the Tensile Strength and Toughness of Niobium-Sapphire Interfaces,J.Am.Ceram.Soc.,80(12),3172,1995
[38]R.M.White,Generation of Elastic Waves by Transient Surface Heating,J.Appl.Phys.,34(12),3559,1963
[39]C.B.Scruby,R.J.Dewhurst et al.,Quantitative studies of thermally generated elastic waves in laser-irradiated metals,J.Appl.Phys.,51(12),6210,1980
[40]C.R.Phipps,et al.,Impulse coupling to targets in vacuum by KrF,HF,and CO_2single-pulse lasers,J.Appl.Phys.64(3),1083,1998
[41]K.L.Telschow,R.J.Conant,Optical and thermal parameter effects on laser-generated ultrasound,J.Acoust.Soc.Am.,88(3),1494,1990
[42]L.R.F.Rose,Point-source representation for laser-generated ultrasound,J.Acoust.Soc.Am.,75(3),723,1984
[43]R.J.Dewhurst,D.A.Hutchins & S.B.Palmer,Quantitative measurement of laser-generated acoustic waveforms,J.Appl.Phys.,53(6),4064,1982
[44]李志勇,朱文辉,程经毅等,试验研究脉冲强激光在铝靶中诱导的冲击波,中国激光,A24,259,1997
[45]S.Couturier,T.De Resseguier et al.,Shock profile induced by short laser pulses,J.Appl.Phys.19(12),9338,1996
[46]袁钢,周光泉,唐志平等,高压短脉冲激光波的传播与衰减,爆炸与冲击,12(4),307,1992
[47]孙承纬,庄仕明,脉冲激光引起金属靶靶层裂的阈值条件,强激光与粒子束,2(3),345,1990
[48]陈大年,王德生,层裂判据与过程模拟,爆炸与冲击,10,50,1982,p50-54
[49]王泽平,郑坚,延性介质动态损伤模型,爆炸与冲击,12(2),138,1992
[50]刑立平,周光泉,延性材料动态损伤演化模型研究,爆炸与冲击,16(4),341,1996
[51]朱兆祥,王肖钧,爆炸作用下钢板层裂的数值研究,应用数学和力学,2(4),353,1981
[52]V.Gupta,A.Pronin & K.Anand,Mechanisms and Quantification of Spalling Failure in Laminated Composites under:Shock Loading,Journal of Composite Materials,30(6),722,1996
[53]R.Fabbro,J.Fournier,et al.,Physical study of laser-produced plasma in confined geometry,J.Appl.Phys.68(2),775,1990
[54]T.de Resseguier,S.Couturier& M.Boustie C.,Characterization of laser-driven shocks of high intensity using pieaoelectric polymers,J.Appl.Phys.,80(7),3656,1996
[55]Phipps C.R.,Tuner T.P.,Harrison R.F.,et al.,Impulse coupling to targets in vacuum by KrF,HF,and CO_2 single-pulse lasers,J.Appl.Phys.,1988,64(3),1083-1093
[56]陈大年,经福谦,强激光的冲击力学效应,王礼立编,冲击动力学进展,中国科学技术大学出版社,1992
[57]James B.Spicer,David H.Hurley,Epicentral and near epicenter surface displacements on plused laser irradiated surfaces,Appl.Phys.Lett.,68(25),17,1996
[58]蔡兰,周明,张永康,激光薄膜层裂技术的理论建模及相关诊析技术,江苏理工大学学报,Vol.21,No.6,2000
[59]Zhou,Ming;Wang,Xiao;Gao,Chuanyu;Zhang,Yongkang;Cai,Lan,Theoretic analysis and numerical simulation on quantitative evaluation of interface strength by pulsed laser technology,Proceedings of the 1999 International Conference on Industrial Lasers(IL '99),Proceedings of SPIE-The International Society for Optical Engineering v 3862 1999.p 433-437,1999
[60]L.C.Lev,A.S.Argon,Spallation of thin elastic coatings from elastic substrates by laser induced pressure pulses,J.Appl.Phys.80(1),529,1996
[61]王礼立,应力波基础,国防工业出版社,1985,5
[62]P.M.莫尔斯,K.U.英格特(著),吕如榆,杨训仁(译),理论声学,科学出版社,1984
[63]马晓青,冲击动力学,北京理工大学出版社,1992
[64]S.U.Fassbender,W.Amold,Measurement of adhesion strength of bonds using nonlinear acoustics,Review of Progress in Quantitative Nondestructive Evaluation,15,1321,1996
[65]Shoufeng Hu,Douglas,B.Gundel,et al.,Quantitative ultrasonic Characterization of metal matrix composite fiber/matrix interfacial failure,Review of Progress in Quantitative Nondestructive Evaluation,15,1363,1996
[66]唐长国,朱金华,郑修麟,激光层裂法测涂层/基体结合力,材料研究学报,vol10,no.4,1996
[67]Derick Wu,Y.C.Lee,Reliability Study of an Epoxy-bonded Laser-to-Fiber Assembly,Electronic Components and Technology Conference,1186-1191,1998
[68]Oltra,R.;Sartori,C.;Boquillon,J.P.,Pulse laser removal of sputtered oxide films:measurement of adhesion strength,Proceedings of the 1998International Symposium on Information Theory,CLEO/EUROPE'98,Conference on Lasers and Electro-Optics Europe-Technical Digest 1998.IEEE,Piscataway,NJ,USA.,p 24 CMF6
[69]Van Dijk,K.;Gupta,V.;Yu,A.K.;Jansen,J.A.Measurement and control of interface strength of RF magnetron-sputtered Ca-PO coatings on Ti-6Al-4V substrates using a laser spallation technique,Journal of Biomedical Materials Research v 41 n 4 Sep 15 1998.p 624-632
[70]Gundel,D.B.;Warrier,S.G.;Miracle,D.B.,Transverse tensile behavior of SiC-fiber/Ti-6Al-4V composites 2.Stress distribution and interface failure,Composites Science and Technology v 59 n 71
[71]Kinbara,A.;Kusano,E.;Kamiya,T.;Kondo,I.;Takenaka,O.,Evaluation of adhesion strength of Ti films on Si(100)by the internal stress method,Thin Solid Films v 317 n 1-2 Apr 1 1998.p 165-168
[72]Park,J.K.;Mukherjee,K.,Excimer laser surface treatment of sheet molding compound for adhesive bonding,Materials and Manufacturing Processes v 13n 3 May 1998.p 359-368
[73]Gupta,Vijay;Yu,Allen,Characterizing adhesion of thermal barrier coatings, Composites and Functionally Graded Materials American Society of Mechanical Engineers,Materials Division(Publication)MD v 80 1997.ASME,Fairfield,NJ,USA.p 399-400
[74]Jordan,Erie H.;Gell,Maurice;Pease,Doug M.;et al,Bond strength and stress measurements in thermal barrier coatings,American Society of Mechanical Engineers(Paper)1997.ASME,New York,NY,USA.7p 97-GT-363
[75]Mhatre,U.R.;Kale,A.N.;Kothari,D.C.,et al,Adhesion improvement of diamond and other films after MeV ion irradiation,Vacuum v 48 n 12 Dec 1997.p 999-1003
[76]Vijay Gupta,Jun Yuan,Doris Martinez,Calculation,measurement,and control of interface strength in composites,J.Am.Ceram.Soc.,76(2),305-15(1993)
[77]Jeffery Scott Mech,Stephen John Bennlson,Determination of coating adhesion,United States Patent,5838446
[78]朱文辉,李志勇,周光泉等,利用激光冲击波对材料进行动态加载,应用激光,15(2),52,1996
[79]Anthony N.Pirri,Theory for laser simulation of hypervelocity impact,The Physics of Fluids,Vol.20,No.2,1977
[80]王勋成,邵敏,有限单元法基本原理和数值方法,清华大学出版社,1995
[81]朱伯芳,有限单元法原理和应用,水利电力出版社,1979
[82]Hughes,T.J.R.,The finite element method linear static and dynamic finite element anaiysis,Prentice-Hall,Inc.,Englewood Cliffs,NJ,1987
[83]王国强,实用工程数值模拟技术及其在ANSYS上的实践,西北工业大学出版社,2000
[84]ANSYS,Inc.Theory,Release5.7
[85]Livermore Software Technology Corporation,LS-DYNA Theoretical Manual,1998
[86]Ready J.F.,Effects of high-power laser radiation,Academic Press,New York,1971
[87]曾正明,使用工程材料技术手册,机械工业出版社,2000,12
[88]工程材料实用手册,中国标准出版社,1988,10
[89]J.N.Johnson,Dynamic fracture and spallation in ductile solids,J.Appl.Phys.,52(4),2812,1981
[90]Youtsos,A.G.,Kiriakopoulos,M.,Timke,Th.,Experimental and theoretical/numerical investigations of thin films bonding strength,Theoretical and Applied Fracture Mechanics v 31 n 1 Feb-Mar 1999.p 47-59
[91]Wei,Yueguang;Hutchinson,John W.,Models of interface separation accompanied by plastic dissipation at multiple scales,International Journal of Fracture v 95 n 1-4 1999.p 1-17
[92]Amada,Shigeyasu;Hirose,Tohru,Planar fractal characteristics of blasted surfaces and its relation with adhesion strength of coatings,Surface and Coatings Technology v 130 n 2 Aug 2000.p 158-163
[93]Gell,Maurice;Jordan,Eric;Vaidyanathan,Krishnakumar,et al,Bond strength,bond stress and spallation mechanisms of thermal barrier coatings,Surface and Coatings Technology v 120 1999.p 53-60
[94]P.R.Tavernier,D.R.Clarke,Mechanics of laser-assisted debonding of films,J.Appl.Phys.,Vol.89,No.3,1,2001
[95]H.Frost and M.Ashby,Motion of a dislocation acted on by a viscous drag through an array of discrete obstacles,Journal of Applied Physics,vol.42,no.13,pp.5273-5279,1971.
[96]J.Weertman and P.Follansbee,Finite amplitude plastic shock wave treated with summed infinitesimal amplitude elastic-plastic waves through dislocation dynamics,Mechanics of Materials,vol.2,pp.265-285,1983.
[97]J.Weertman,Plastic deformation behind strong shock waves,Mechanics of Materials,vol.5,pp.13-28,1986.
[98]Kong,D.I.;Park,C.E.;Hong,S.T.;Yang,H.C.;Kim,K.T.,Effects of coupling agent thickness on residual stress in polyimide/gamma-APS/silicon wafer joints,Journal of Adhesion Science and Technology v 13 n 7 1999.p 805-818
[99]S.Atluri and T.Nishioka,Numerical studies in dynamic fracture mechanics,International Journal of Fracture vol.27,pp.245-261,1985.
[100]W.Nix,Mechanical properties of thin films,Metallurgical Transactions A,vol.20A,November 1989.
[101]T.Nakamura,C.Shih,and L.Freund,Computational methods based on an energy integral in dynamic fracture,International Journal of Fracture,vol.27,pp.229-243,1985.
[102]L.Freund,Dynamic Fracture Mechanics.Cambridge:Cambridge University Press,1990.
[103]冯若等编,超声手册,南京大学出版社,1999,10
[104]Sitharam,T.G.;Kumar,I.V.V.,Non-linear analysis of geomechanical problems using coupled finite and infinite elements,Geotechnical and Geological Engineering v 16 n 2 June 1998.p 129-149
[105]M.Dubois,F.Enguehard,L.Bertrand,A two-layer model for the laser generation of ultrasound in the graphite-epoxy laminates,Review of Progress in Quantitative Nondestructive Evaluation,Vol.14,p529-536,1995
[106]Shiuh-Chuan Her,Fracture analysis of interfacial crack by global-local finite element,International Journal of Practure,vol.106,pp.177-193,2000.
[107]G.Regazzoni,U.Kocks,and P.Follansbee,Dislocation kinetics at high strain rates,Acta Metallurgica,vol.35,no.12,pp.2865-2875,1987.
[108]中国齿轮专业协会编,《氮化钛涂层高速钢刀具的应用》,机械工业出版社,1991,10
[109]X.Jiang,M.Wang and K.Schmidt,Elastic constants and hardness of ion-beam-sputtered TiNx films measured by Brillouin scattering and depth-sensing indentation,J.Appl.Phys.,69(5),1991,p3053-3057
[110]H.Ollendorf,D.Schneider,Th.Schwarz,et al,A comparative study of the mechanical properties of TiN coatings using the non-destructive surface acoustic wave method,scratch test and four-point bending test,Surface and Coatings Technology,84(1996),p458-464
[11 1]范钦珊等编,材料力学,高等教育出版社,2000,2
[112]关振中主编,激光加工工艺手册,中国计量出版社,1998,6
[2]表面处理工艺手册编审委员会会编,表面处理工艺手册,上海科学技术出版社,1991,1
[3]崔春翔,吴人洁,王浩伟,金属基材料界面特征与力学性能,宇航材料工艺,No.1,1997
[4]Herrera-Franco,P.J.,et.al,Comparison of methods for the measurement of fibre/matrix adhesion in composites,Composites,2,23(1),1992
[5]Fouad Attar,Thomas Johannesson,Adhesion evaluation of thin ceramic coatings on tool using the scratch testing technique,Surf.Coat.Tech.,78,87,1996
[6]B.Rother,D.A.Dietrich,Evaluation of interface strength between TiN coatings and hardened high speed steel substrates,Thin Solid Films,625,74-75,1995
[7]H.Ollendorf,D.Schneider,A comparative study of adhesion test methods for hard coatings,Surf.Coat.Tech.,113,86,1996
[8]D.Lian,Y.Suga & S.Kurihara,Application of Ultrasonic Testing Robot with Five Axes for Evaluating Adhesion of Thermal Sprayed Coating.Porc.ITC"95,May,879-884
[9]B.Rother,L.A.Donohue & H.Kappl,Quantification of the interface strength between(Ti,Zr)N coatings a high speed steel,Surf.Coat.Tech.,82,214-217,1996
[10]J.Lesage,P.Demarecaux,D.Chicot,et.al,Adhesion of Thermal Sprayed Coatings:A Model for the Interface Indentation Test,Porc.ITSC"95,May,891-896
[11]S.Amada,T.Hirose & K.Tomoyasu,Introduction of Factual Dimension to Evaluation of Adhesive Strength,Porc.ITC"95,May,885-890
[12]M.Sexsmith & T.Troczynski,Development of Peel adhesion Test for Thermal Spray Coatings.Proc.,ITC"95,May.897-901
[13]D.Muller,Y.R.Cho & E.Fromn,Adhesion strength of ductile aluminum and brittle TiN coatings on steel,aluminum and copper,measured by fracture mechanics tests,Surf.Coat.Tech.,74-75,849-856,1995
[14]V.Gupta,A.S.Argon et al.,Measurement of Interface Strength by Laser-pulse induced Spallation,Mater.Sci,A126,105-117,1990
[15]V.Gupta,A.S.Argon et al.,Measurement of Interface Strength by a Laser Spallation Technique,J.Mech.Phys.Solids,40(1),141-180,1992
[16]R.Loh,C.Rossington,et al.,Laser technique for evaluating spall resistance of brittle coatings,J.Am.Ceram.Soc,139,69(2),1986
[17]Vijay Gupta,Hanover,N.H.,System and method for measuring the interface tensile strength of planar interfaces,United States Patent,5438402
[18]Allen Yu & Vijay Gupta,Measurement of in Situ fiber/matrix interface strength in graphite/epoxy composites,Composites Science and Technology,58,1827,1998
[19]Vossen,J.L.,Adhesion measurement of thin films,thick films and bulk,coatings,p122-133,STP-640,ASTM,1978
[20]I.G.Epishine et al.,Physics and chemistry of Materials Treatment.22(5),485,1988
[21]Paul Archer,Vijay Gupta,Measurement and control of ice adhesion to Aluminum 6061 alloy,J.Mech.Phys.Solids,Vol.46,No.10,pp.1745-1771,1998
[22]Gerald L.Nutt,Wayne E.King,Comments on the bond strength measurements of Gupta and co-workers,Materials Science and Engineering,A159(1992),135-142
[23]Gerald L.Nutt,Finite element simulation of exfoliation experiments,J.Mater.Res.,Vol.7,No.1,Jan 1992
[24]Markus W.Sigrist,Laser photo acoustics for gas analysis and materials testing,Optical Engineering,34(7),1919,1995
[25]C.Sartori,R.Oltra& P.Dubief,A pulsed laser technique for an evaluation of the spall resistace of sputtered oxide films:diagnostic by interferometric probing,Surf.Coat.Tech.,106,251,1998
[26]A.G.Youtsos,M.Kiriakopoulos,Th.Timke,Experimental and theoretical/numerical investigations of thin films bonding strength,Theoretical and Applied Fracture Mechanics,31,1999,p47-59
[27]F.Cottet,M.Boustie,Spallation studies in aluminum targets using shock waves induced by laser irradiation at various pulse duration,J.Appl.Phys.66,4067,1989
[28]王亚苠,贺鹏飞等,用脉冲激光法测量金属基复合材料界面强度,复合材料学报,14(2),50,1997
[29]张永康,激光冲击在金属强化及检测中的应用研究,南京大学博士后研究工作报告,1997,12
[30]M.Scot Breitenfeld,Philippe H.Geubelle,Numerical analysis of dynamic debonding under 2D in-plane and 3D loading,International Journal of Fracture 93:13-38,1998
[31]A.G.Varias,I.Mastorakos,E.C.Aifantis,Numerical simulation of interface crack in thin films,International Journal of Fracture 98:195-207,1999
[32]B.Cotterell,Z.Chen,Buckling and cracking of thin films on compliant substrates under compression,International Journal of Fracture 104:169-179,2000
[33]J.Yuan,V.Gupta,Measurement of interface strength by the modified laser spallation technique,Ⅰ.Experiment and simulation of the spallation process,J.Appl.Phys,74(4),2388,1993
[34]Y.Gupta,J.Yuan,Measurement of interface strength by the modified laser spallation technique.Ⅱ.Application to metal/ceramic interfaces,J.Appl.Phys,74(4),2397,1993
[35]J.Yuan,V.Gupta,A.Pronin,Measurement of interface strength by the modified laser spallation technique.Ⅲ.Experiment optimization of the stress pulse,J.Appl.Phys,74(4),2405,1993
[36]V.Gupta,Alexander Pronin,New Technique to Measure the Toughness of Thin-Film Interfaces,J.Am.Ceram.Soc.,78(5),1397,1995
[37]V.Gupta,Jianxin Wu,et al.,Effect of Substrate Orientation,Roughness,and Film Deposition Mode on the Tensile Strength and Toughness of Niobium-Sapphire Interfaces,J.Am.Ceram.Soc.,80(12),3172,1995
[38]R.M.White,Generation of Elastic Waves by Transient Surface Heating,J.Appl.Phys.,34(12),3559,1963
[39]C.B.Scruby,R.J.Dewhurst et al.,Quantitative studies of thermally generated elastic waves in laser-irradiated metals,J.Appl.Phys.,51(12),6210,1980
[40]C.R.Phipps,et al.,Impulse coupling to targets in vacuum by KrF,HF,and CO_2single-pulse lasers,J.Appl.Phys.64(3),1083,1998
[41]K.L.Telschow,R.J.Conant,Optical and thermal parameter effects on laser-generated ultrasound,J.Acoust.Soc.Am.,88(3),1494,1990
[42]L.R.F.Rose,Point-source representation for laser-generated ultrasound,J.Acoust.Soc.Am.,75(3),723,1984
[43]R.J.Dewhurst,D.A.Hutchins & S.B.Palmer,Quantitative measurement of laser-generated acoustic waveforms,J.Appl.Phys.,53(6),4064,1982
[44]李志勇,朱文辉,程经毅等,试验研究脉冲强激光在铝靶中诱导的冲击波,中国激光,A24,259,1997
[45]S.Couturier,T.De Resseguier et al.,Shock profile induced by short laser pulses,J.Appl.Phys.19(12),9338,1996
[46]袁钢,周光泉,唐志平等,高压短脉冲激光波的传播与衰减,爆炸与冲击,12(4),307,1992
[47]孙承纬,庄仕明,脉冲激光引起金属靶靶层裂的阈值条件,强激光与粒子束,2(3),345,1990
[48]陈大年,王德生,层裂判据与过程模拟,爆炸与冲击,10,50,1982,p50-54
[49]王泽平,郑坚,延性介质动态损伤模型,爆炸与冲击,12(2),138,1992
[50]刑立平,周光泉,延性材料动态损伤演化模型研究,爆炸与冲击,16(4),341,1996
[51]朱兆祥,王肖钧,爆炸作用下钢板层裂的数值研究,应用数学和力学,2(4),353,1981
[52]V.Gupta,A.Pronin & K.Anand,Mechanisms and Quantification of Spalling Failure in Laminated Composites under:Shock Loading,Journal of Composite Materials,30(6),722,1996
[53]R.Fabbro,J.Fournier,et al.,Physical study of laser-produced plasma in confined geometry,J.Appl.Phys.68(2),775,1990
[54]T.de Resseguier,S.Couturier& M.Boustie C.,Characterization of laser-driven shocks of high intensity using pieaoelectric polymers,J.Appl.Phys.,80(7),3656,1996
[55]Phipps C.R.,Tuner T.P.,Harrison R.F.,et al.,Impulse coupling to targets in vacuum by KrF,HF,and CO_2 single-pulse lasers,J.Appl.Phys.,1988,64(3),1083-1093
[56]陈大年,经福谦,强激光的冲击力学效应,王礼立编,冲击动力学进展,中国科学技术大学出版社,1992
[57]James B.Spicer,David H.Hurley,Epicentral and near epicenter surface displacements on plused laser irradiated surfaces,Appl.Phys.Lett.,68(25),17,1996
[58]蔡兰,周明,张永康,激光薄膜层裂技术的理论建模及相关诊析技术,江苏理工大学学报,Vol.21,No.6,2000
[59]Zhou,Ming;Wang,Xiao;Gao,Chuanyu;Zhang,Yongkang;Cai,Lan,Theoretic analysis and numerical simulation on quantitative evaluation of interface strength by pulsed laser technology,Proceedings of the 1999 International Conference on Industrial Lasers(IL '99),Proceedings of SPIE-The International Society for Optical Engineering v 3862 1999.p 433-437,1999
[60]L.C.Lev,A.S.Argon,Spallation of thin elastic coatings from elastic substrates by laser induced pressure pulses,J.Appl.Phys.80(1),529,1996
[61]王礼立,应力波基础,国防工业出版社,1985,5
[62]P.M.莫尔斯,K.U.英格特(著),吕如榆,杨训仁(译),理论声学,科学出版社,1984
[63]马晓青,冲击动力学,北京理工大学出版社,1992
[64]S.U.Fassbender,W.Amold,Measurement of adhesion strength of bonds using nonlinear acoustics,Review of Progress in Quantitative Nondestructive Evaluation,15,1321,1996
[65]Shoufeng Hu,Douglas,B.Gundel,et al.,Quantitative ultrasonic Characterization of metal matrix composite fiber/matrix interfacial failure,Review of Progress in Quantitative Nondestructive Evaluation,15,1363,1996
[66]唐长国,朱金华,郑修麟,激光层裂法测涂层/基体结合力,材料研究学报,vol10,no.4,1996
[67]Derick Wu,Y.C.Lee,Reliability Study of an Epoxy-bonded Laser-to-Fiber Assembly,Electronic Components and Technology Conference,1186-1191,1998
[68]Oltra,R.;Sartori,C.;Boquillon,J.P.,Pulse laser removal of sputtered oxide films:measurement of adhesion strength,Proceedings of the 1998International Symposium on Information Theory,CLEO/EUROPE'98,Conference on Lasers and Electro-Optics Europe-Technical Digest 1998.IEEE,Piscataway,NJ,USA.,p 24 CMF6
[69]Van Dijk,K.;Gupta,V.;Yu,A.K.;Jansen,J.A.Measurement and control of interface strength of RF magnetron-sputtered Ca-PO coatings on Ti-6Al-4V substrates using a laser spallation technique,Journal of Biomedical Materials Research v 41 n 4 Sep 15 1998.p 624-632
[70]Gundel,D.B.;Warrier,S.G.;Miracle,D.B.,Transverse tensile behavior of SiC-fiber/Ti-6Al-4V composites 2.Stress distribution and interface failure,Composites Science and Technology v 59 n 71
[71]Kinbara,A.;Kusano,E.;Kamiya,T.;Kondo,I.;Takenaka,O.,Evaluation of adhesion strength of Ti films on Si(100)by the internal stress method,Thin Solid Films v 317 n 1-2 Apr 1 1998.p 165-168
[72]Park,J.K.;Mukherjee,K.,Excimer laser surface treatment of sheet molding compound for adhesive bonding,Materials and Manufacturing Processes v 13n 3 May 1998.p 359-368
[73]Gupta,Vijay;Yu,Allen,Characterizing adhesion of thermal barrier coatings, Composites and Functionally Graded Materials American Society of Mechanical Engineers,Materials Division(Publication)MD v 80 1997.ASME,Fairfield,NJ,USA.p 399-400
[74]Jordan,Erie H.;Gell,Maurice;Pease,Doug M.;et al,Bond strength and stress measurements in thermal barrier coatings,American Society of Mechanical Engineers(Paper)1997.ASME,New York,NY,USA.7p 97-GT-363
[75]Mhatre,U.R.;Kale,A.N.;Kothari,D.C.,et al,Adhesion improvement of diamond and other films after MeV ion irradiation,Vacuum v 48 n 12 Dec 1997.p 999-1003
[76]Vijay Gupta,Jun Yuan,Doris Martinez,Calculation,measurement,and control of interface strength in composites,J.Am.Ceram.Soc.,76(2),305-15(1993)
[77]Jeffery Scott Mech,Stephen John Bennlson,Determination of coating adhesion,United States Patent,5838446
[78]朱文辉,李志勇,周光泉等,利用激光冲击波对材料进行动态加载,应用激光,15(2),52,1996
[79]Anthony N.Pirri,Theory for laser simulation of hypervelocity impact,The Physics of Fluids,Vol.20,No.2,1977
[80]王勋成,邵敏,有限单元法基本原理和数值方法,清华大学出版社,1995
[81]朱伯芳,有限单元法原理和应用,水利电力出版社,1979
[82]Hughes,T.J.R.,The finite element method linear static and dynamic finite element anaiysis,Prentice-Hall,Inc.,Englewood Cliffs,NJ,1987
[83]王国强,实用工程数值模拟技术及其在ANSYS上的实践,西北工业大学出版社,2000
[84]ANSYS,Inc.Theory,Release5.7
[85]Livermore Software Technology Corporation,LS-DYNA Theoretical Manual,1998
[86]Ready J.F.,Effects of high-power laser radiation,Academic Press,New York,1971
[87]曾正明,使用工程材料技术手册,机械工业出版社,2000,12
[88]工程材料实用手册,中国标准出版社,1988,10
[89]J.N.Johnson,Dynamic fracture and spallation in ductile solids,J.Appl.Phys.,52(4),2812,1981
[90]Youtsos,A.G.,Kiriakopoulos,M.,Timke,Th.,Experimental and theoretical/numerical investigations of thin films bonding strength,Theoretical and Applied Fracture Mechanics v 31 n 1 Feb-Mar 1999.p 47-59
[91]Wei,Yueguang;Hutchinson,John W.,Models of interface separation accompanied by plastic dissipation at multiple scales,International Journal of Fracture v 95 n 1-4 1999.p 1-17
[92]Amada,Shigeyasu;Hirose,Tohru,Planar fractal characteristics of blasted surfaces and its relation with adhesion strength of coatings,Surface and Coatings Technology v 130 n 2 Aug 2000.p 158-163
[93]Gell,Maurice;Jordan,Eric;Vaidyanathan,Krishnakumar,et al,Bond strength,bond stress and spallation mechanisms of thermal barrier coatings,Surface and Coatings Technology v 120 1999.p 53-60
[94]P.R.Tavernier,D.R.Clarke,Mechanics of laser-assisted debonding of films,J.Appl.Phys.,Vol.89,No.3,1,2001
[95]H.Frost and M.Ashby,Motion of a dislocation acted on by a viscous drag through an array of discrete obstacles,Journal of Applied Physics,vol.42,no.13,pp.5273-5279,1971.
[96]J.Weertman and P.Follansbee,Finite amplitude plastic shock wave treated with summed infinitesimal amplitude elastic-plastic waves through dislocation dynamics,Mechanics of Materials,vol.2,pp.265-285,1983.
[97]J.Weertman,Plastic deformation behind strong shock waves,Mechanics of Materials,vol.5,pp.13-28,1986.
[98]Kong,D.I.;Park,C.E.;Hong,S.T.;Yang,H.C.;Kim,K.T.,Effects of coupling agent thickness on residual stress in polyimide/gamma-APS/silicon wafer joints,Journal of Adhesion Science and Technology v 13 n 7 1999.p 805-818
[99]S.Atluri and T.Nishioka,Numerical studies in dynamic fracture mechanics,International Journal of Fracture vol.27,pp.245-261,1985.
[100]W.Nix,Mechanical properties of thin films,Metallurgical Transactions A,vol.20A,November 1989.
[101]T.Nakamura,C.Shih,and L.Freund,Computational methods based on an energy integral in dynamic fracture,International Journal of Fracture,vol.27,pp.229-243,1985.
[102]L.Freund,Dynamic Fracture Mechanics.Cambridge:Cambridge University Press,1990.
[103]冯若等编,超声手册,南京大学出版社,1999,10
[104]Sitharam,T.G.;Kumar,I.V.V.,Non-linear analysis of geomechanical problems using coupled finite and infinite elements,Geotechnical and Geological Engineering v 16 n 2 June 1998.p 129-149
[105]M.Dubois,F.Enguehard,L.Bertrand,A two-layer model for the laser generation of ultrasound in the graphite-epoxy laminates,Review of Progress in Quantitative Nondestructive Evaluation,Vol.14,p529-536,1995
[106]Shiuh-Chuan Her,Fracture analysis of interfacial crack by global-local finite element,International Journal of Practure,vol.106,pp.177-193,2000.
[107]G.Regazzoni,U.Kocks,and P.Follansbee,Dislocation kinetics at high strain rates,Acta Metallurgica,vol.35,no.12,pp.2865-2875,1987.
[108]中国齿轮专业协会编,《氮化钛涂层高速钢刀具的应用》,机械工业出版社,1991,10
[109]X.Jiang,M.Wang and K.Schmidt,Elastic constants and hardness of ion-beam-sputtered TiNx films measured by Brillouin scattering and depth-sensing indentation,J.Appl.Phys.,69(5),1991,p3053-3057
[110]H.Ollendorf,D.Schneider,Th.Schwarz,et al,A comparative study of the mechanical properties of TiN coatings using the non-destructive surface acoustic wave method,scratch test and four-point bending test,Surface and Coatings Technology,84(1996),p458-464
[11 1]范钦珊等编,材料力学,高等教育出版社,2000,2
[112]关振中主编,激光加工工艺手册,中国计量出版社,1998,6