超声悬浮/气浮的混合悬浮及其行波驱动机理及实验研究
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摘要
随着科技与产业的迅猛增长，新型的技术也不断完善，同时一些精密部件的运输也对现有运输平台提出了新的要求。由于传统的接触式传送平台必然要有因接触而产生摩擦生热等物理现象。同时接触式的传送平台还会伴随产生相应机械振动及散失能量的问题。本论文利用气浮可提供一定的支撑力和超声波可产生驱动行波提供驱动力的特性，提出了采用超声悬浮/气浮的混合悬浮的方式来完成对物体的运输。
由于气动悬浮的支承结构和圆盘与空气介质有着很好的匹配阻抗特性，本文对圆盘夹心式压电换能器进行了分析，通过利用固体弹性振动理论以及圆盘纵-弯设计压电换能器的设计理论，计算出了圆盘压电换能器的各个部件和结构的尺寸。之后运用ANSYS和COMSOL这两个仿真软件对圆盘振子和圆盘压电换能器进行结构仿真分析，从而得出圆盘压电振子声压分布状况，确定圆盘尺寸数据。以上对圆盘夹心式压电换能器的解析为本文混合悬浮的悬浮特性研究打下了理论和实验基础。最后从超声悬浮与气浮悬浮相结合的混合悬浮的特性研究和实验中得出：在气动悬浮工作的同时，加入了超声悬浮系统，一是保证原有的气动悬浮支承的振动幅值，即维持气动悬浮系统中的被悬浮物件高度，二是提高了悬浮平台自身的承载力。而且这种混合式悬浮的承载力要大于超声悬浮和气动悬浮这两者单独工作时的承载力的和。
本文应用了激振—吸振法能产生行波的原理，利用欧拉-伯努利梁理论和振动平板前后端的压电换能器谐振时的等效电路，确定了发射式压电换能器和接收式压电换能器二者之间距离与位置，对接收端的压电换能器的匹配阻抗进行了分析，最后利用ANSYS软件对振动平板两端的换能器上的支撑力和整个混合悬浮运输系统进行模态分析，通过改变其工作频率，从而使混合悬浮运输系统产生激励信号，激发出高效的振动行波来驱动被悬浮物体前进。最后本文构建了混合悬浮运输系统平台，并且做了相关的实验测试，得出了混合悬浮可以实现较大负载物体的非接触式运输。进而得出混合式悬浮运输的相关特性。
通过对混合悬浮特性的研究，本文发现并首次提出在混合悬浮系统中，超声波悬浮可以改善气动悬浮单独工作时的气旋现象和气锤振动，较单一气浮装置单独工作时有着更高的悬浮刚度和能减小气浮装置自身存在的微小低频振动等特点。本文也对这一部分进行了讨论和分析。并以此申请国家发明专利（专利号：201110414297.2）。
With the rapid growth of technology and industry, some of the new technology is alsoconstantly being improved, but also on the existing precision delivery platform put forwardnew requirements. Because of traditional contact delivery platform is bound to causefriction, heat and other physical phenomena. Bring rigid structure will be accompanied bymechanical vibration, energy consumption and other issues. In this thesis, there is a strongcapacity pneumatic suspension and ultrasonic wave is capable of driving the twocharacteristics, the paper introduces ultrasonic suspension/flotation mixed suspension waysto accomplish the object of transport.
From the air bearing structure and the disc and the air has a good performance ofthese two starting impedance matching, this paper uses a piezoelectric transducer is apiezoelectric transducer disc. By using a solid elastic vibration theory and thevertical-bending mode piezoelectric transducer disk curved design theory. Thepiezoelectric disc is given of the structure of the transducer size.
Thereafter, the two ANSYS and COMSOL simulation software disc and disc vibratorpiezoelectric transducer for structural optimization design to arrive disc vibration modepiezoelectric vibrator and sandwich-type disc piezoelectric transducer distribution of soundpressure to finalize the disc itself, accurate data, and trial of the experimental prototype.More on disc sandwich piezoelectric transducer resolve this mixed suspension suspensioncharacteristics laid a theoretical and experimental basis. Finally suspended from theultrasonic flotation suspension combined with a hybrid suspension experiment: thepneumatic suspension work, joined the ultrasound suspension system, first ensure that theoriginal pneumatic suspension supporting the vibration amplitude of maintaining pneumaticsuspension system is suspended height of an object, the second is to improve the bearingcapacity of the suspended platform itself; Moreover, this hybrid is greater than the capacityof ultrasound suspended suspension and pneumatic suspension, both working alone andbearing capacity.
The paper also uses a vibrating-vibration absorption method, as wave formationmethod. Eular-Bernouli using beam theory and the resonance of the transducer equivalent circuit, the piezoelectric transducer distance and position of the selection, and the receivetransducer impedance matching two problems are analyzed,
ANSYS software using the transducer on a supporting force of the vibrating plate andthe whole mixed suspension transportation system modal analysis, by adjusting thefrequency so that the mixed suspension transport system can inspire a highly efficientvibration wave. The article also constructed mixed suspension transportation system, andmade relevant experimental tests. The conclusion that the hybrid can achieve greater weightof objects suspended non-contact transport. And then come to a hybrid suspension transportrelated characteristics.
Through the mixed suspension characteristics, this paper also found in the mixedsuspension systems, pneumatic suspension ultrasonic levitation can improve working alonecyclonic phenomena and hammer vibration than a single flotation device when workingalone has a higher suspension stiffness and can be cut little tiny flotation device itself hasthe characteristics of low-frequency vibration, so this part of the paper also discussed andanalyzed. And thus declared a national invention patent (patent number:201110414297.2)
由于气动悬浮的支承结构和圆盘与空气介质有着很好的匹配阻抗特性，本文对圆盘夹心式压电换能器进行了分析，通过利用固体弹性振动理论以及圆盘纵-弯设计压电换能器的设计理论，计算出了圆盘压电换能器的各个部件和结构的尺寸。之后运用ANSYS和COMSOL这两个仿真软件对圆盘振子和圆盘压电换能器进行结构仿真分析，从而得出圆盘压电振子声压分布状况，确定圆盘尺寸数据。以上对圆盘夹心式压电换能器的解析为本文混合悬浮的悬浮特性研究打下了理论和实验基础。最后从超声悬浮与气浮悬浮相结合的混合悬浮的特性研究和实验中得出：在气动悬浮工作的同时，加入了超声悬浮系统，一是保证原有的气动悬浮支承的振动幅值，即维持气动悬浮系统中的被悬浮物件高度，二是提高了悬浮平台自身的承载力。而且这种混合式悬浮的承载力要大于超声悬浮和气动悬浮这两者单独工作时的承载力的和。
本文应用了激振—吸振法能产生行波的原理，利用欧拉-伯努利梁理论和振动平板前后端的压电换能器谐振时的等效电路，确定了发射式压电换能器和接收式压电换能器二者之间距离与位置，对接收端的压电换能器的匹配阻抗进行了分析，最后利用ANSYS软件对振动平板两端的换能器上的支撑力和整个混合悬浮运输系统进行模态分析，通过改变其工作频率，从而使混合悬浮运输系统产生激励信号，激发出高效的振动行波来驱动被悬浮物体前进。最后本文构建了混合悬浮运输系统平台，并且做了相关的实验测试，得出了混合悬浮可以实现较大负载物体的非接触式运输。进而得出混合式悬浮运输的相关特性。
通过对混合悬浮特性的研究，本文发现并首次提出在混合悬浮系统中，超声波悬浮可以改善气动悬浮单独工作时的气旋现象和气锤振动，较单一气浮装置单独工作时有着更高的悬浮刚度和能减小气浮装置自身存在的微小低频振动等特点。本文也对这一部分进行了讨论和分析。并以此申请国家发明专利（专利号：201110414297.2）。
With the rapid growth of technology and industry, some of the new technology is alsoconstantly being improved, but also on the existing precision delivery platform put forwardnew requirements. Because of traditional contact delivery platform is bound to causefriction, heat and other physical phenomena. Bring rigid structure will be accompanied bymechanical vibration, energy consumption and other issues. In this thesis, there is a strongcapacity pneumatic suspension and ultrasonic wave is capable of driving the twocharacteristics, the paper introduces ultrasonic suspension/flotation mixed suspension waysto accomplish the object of transport.
From the air bearing structure and the disc and the air has a good performance ofthese two starting impedance matching, this paper uses a piezoelectric transducer is apiezoelectric transducer disc. By using a solid elastic vibration theory and thevertical-bending mode piezoelectric transducer disk curved design theory. Thepiezoelectric disc is given of the structure of the transducer size.
Thereafter, the two ANSYS and COMSOL simulation software disc and disc vibratorpiezoelectric transducer for structural optimization design to arrive disc vibration modepiezoelectric vibrator and sandwich-type disc piezoelectric transducer distribution of soundpressure to finalize the disc itself, accurate data, and trial of the experimental prototype.More on disc sandwich piezoelectric transducer resolve this mixed suspension suspensioncharacteristics laid a theoretical and experimental basis. Finally suspended from theultrasonic flotation suspension combined with a hybrid suspension experiment: thepneumatic suspension work, joined the ultrasound suspension system, first ensure that theoriginal pneumatic suspension supporting the vibration amplitude of maintaining pneumaticsuspension system is suspended height of an object, the second is to improve the bearingcapacity of the suspended platform itself; Moreover, this hybrid is greater than the capacityof ultrasound suspended suspension and pneumatic suspension, both working alone andbearing capacity.
The paper also uses a vibrating-vibration absorption method, as wave formationmethod. Eular-Bernouli using beam theory and the resonance of the transducer equivalent circuit, the piezoelectric transducer distance and position of the selection, and the receivetransducer impedance matching two problems are analyzed,
ANSYS software using the transducer on a supporting force of the vibrating plate andthe whole mixed suspension transportation system modal analysis, by adjusting thefrequency so that the mixed suspension transport system can inspire a highly efficientvibration wave. The article also constructed mixed suspension transportation system, andmade relevant experimental tests. The conclusion that the hybrid can achieve greater weightof objects suspended non-contact transport. And then come to a hybrid suspension transportrelated characteristics.
Through the mixed suspension characteristics, this paper also found in the mixedsuspension systems, pneumatic suspension ultrasonic levitation can improve working alonecyclonic phenomena and hammer vibration than a single flotation device when workingalone has a higher suspension stiffness and can be cut little tiny flotation device itself hasthe characteristics of low-frequency vibration, so this part of the paper also discussed andanalyzed. And thus declared a national invention patent (patent number:201110414297.2)
引文
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