机刻光栅制造系统结构特性与精度控制研究
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摘要
目前,大型光学系统和科学仪器发展的重要趋势是：视场不断增大,分辨力不断提高,相应地要求光学元器件扩大口径和提高精度。本论文涉及的光栅是一类以机械刻划方式制造的具有宏观尺度的纳米精度周期性特种功能结构,是大型光学系统和科学仪器的核心光学元件,需要纳米级的加工精度和表面粗糙度。其制造技术的主要特点是特种功能结构精细度、超精密的制造系统与数字化制造过程等都达到了相关领域的顶尖水平。但是,基础研究方面的工作尚且存在以下问题：基于光栅光学性能的机械系统精度规划研究欠缺、光栅刻划机系统关键运动部件的动力学特性研究尚显薄弱、长行程纳米精度定位系统控制策略研究不足等。这些问题制约了大面积、高精度光栅的成功制造。
基于上述大面积机刻光栅制造技术的研究不足,以提高机刻光栅光学性能为目标,本文拟分四个部分对机刻光栅制造系统的结构特性与精度控制展开探索：(1)机刻光栅光学性能与机械性能的映射机制；(2)衍射光栅刻划机结构特性解析；(3)基于果蝇优化算法的微位移部件多目标优化；(4)机刻光栅精密定位信号测量分析及精度控制。
文中分析机刻光栅的加工和工作原理,以及影响光栅质量的关键性能指标。针对光栅误差特点,分析光栅刻划机系统精度规划。在此基础上分析机刻光栅光学性能与机械性能的映射机制,为光栅制造系统的进一步研究提供参考。
鉴于光谱质量中的鬼线强度和杂散光这两个性能指标直接受到工作台定位精度的影响,分析光栅运动宏／微驱动副,包括丝杠螺母宏动机构和压电驱动微动机构的动力学特性。在光栅毛坯运动阶段充分考虑工作台在导轨上运动可能产生的爬行现象,就爬行现象出现与否展开分析。
考虑到微位移部件驱动工作台是刻槽位置不确定度的决定性因素之一,而刻槽位置的不确定度将直接影响到杂散光性能指标,分析了果蝇优化算法求极值的快速和准确性,建立光栅工作台微位移部件-弹性片的多目标优化模型,将果蝇优化算法嵌入多目标优化中,最终得到微位移部件在约束条件下的最优解。
针对波前质量高频部分和杂散光与光栅工作台的精密定位密切相关,以及在整个长刻划行程内必须保持低周期误差以减少杂散光的需求,分析了测量系统的精度水平,基于HHT对机刻光栅定位工作台进行非线性特征识别,将RBF神经网络与PID控制相结合作为智能控制策略,最终实现长行程、重载光栅工作台纳米精度定位运动控制,支持高质量的光栅刻划。
本文得到国家重大科研装备研制项目(No.ZBYZ2008-1)的资助。本文的研究属于其研究内容的一部分预研工作。
Currently, the important trend in the development of the large-scale optical system and scientific instruments is that continuously increasing the field of view and improving the resolution, so it requires that optical components must expand diameter and improve accuracy. The grating manufactured by mechanical ruling in this paper has periodic special functional structure with macroscopic scale and nanometer precision. It is the core optical element of the large optical system and scientific instruments, which need nanoscale machining accuracy and surface roughness. The special function structure finesse, the ultra-precision manufacturing system and the digital manufacturing process have achieved the top level of the related fields is the main features of this grating. However, there are lots of problems have not been solved in the basic research work, such as lacking the fundamental research of the mechanical system accuracy planning based on the grating optical performance, less research of the parts dynamics of grating ruling machine, significantly weak on the research of key moving parts of the mechanical system dynamics and lack of depth of the control strategy study of the long stroke nanometer precision positioning system. All these problems restrict the large area and high-precision grating manufacturing.
Based on the blank of the research on the large area ruling grating manufacturing technology, there are four parts for the structural characteristics and accuracy control of the machine gratings manufacturing with the goal of improving the optical performance of the ruling grating in this paper:(1) The map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine;(2) The analysis of the structural characteristics of diffraction grating ruling machine;(3) Multi-objective optimization of the micro-displacement part based on the Drosophila optimization algorithm;(4) Signal measurement、analysis and precision motion control of the precision positioning system of mechanical ruling grating.
First of all, this paper analyzes the processing and working principle of the machine gratings, and optical performance indicators which are the key factors that affect the final quality of the grating. The content analyzes the grating ruling machine system accuracy planning for gratings error characteristics. Basis on that, the paper analyzes the map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine to provide a reference for the research on the grating manufacturing system.
In view of the positioning accuracy of the grating table directly affect the quality of the grating spectral stray light and ghost line intensity, the paper analyzes the dynamic characteristics of the grating macro/micro-drive device, including the screw-nut-driven mechanism and piezoelectric-driven system. Considerating the creeping phenomenon arisng from the table moving on the guide rail, the paper analyzes the presence or absence of the crawling phenomenon, and gives some preventive measures.
The Micro-displacement of stage driving by micro-displacement structural component is the decisive factor that determines the uncertainty of the location of the groove, which will directly affect the stray light performance indicators. the paper analyzes the ability of calculate the extremum of drosophila optimization algorithm, establishs the multi-objective optimization model of the micro-displacement structural component of the grating table, embeds, and ultimately obtains the optimal solution of micro-displacement component by embedding the drosophila optimization algorithm into the multi-objective optimization model.
Then, for the stray light and high-frequency part of the wavefront quality is closely related to the precision positioning signal of the grating table, and the requirement of low cycle error in the long ruled trip to reduce the stray light, the paper gives a detailed analysis of the level of accuracy of the measurement system, analyzes the non-linear characteristic by the combination of the Hilbert transform and empirical mode decomposition. The content also combines the RBF neural network and PID control as intelligent control strategy, and ultimately achieves the accuracy positioning motion control of the long stroke and overloaded grating stage to support the ruling of the high-quality grating.
This research is sponsored by Chinese National Major Research Project for Equipment Development (No.ZBYZ2008-1). The research in this paper is one part of
基于上述大面积机刻光栅制造技术的研究不足,以提高机刻光栅光学性能为目标,本文拟分四个部分对机刻光栅制造系统的结构特性与精度控制展开探索：(1)机刻光栅光学性能与机械性能的映射机制；(2)衍射光栅刻划机结构特性解析；(3)基于果蝇优化算法的微位移部件多目标优化；(4)机刻光栅精密定位信号测量分析及精度控制。
文中分析机刻光栅的加工和工作原理,以及影响光栅质量的关键性能指标。针对光栅误差特点,分析光栅刻划机系统精度规划。在此基础上分析机刻光栅光学性能与机械性能的映射机制,为光栅制造系统的进一步研究提供参考。
鉴于光谱质量中的鬼线强度和杂散光这两个性能指标直接受到工作台定位精度的影响,分析光栅运动宏／微驱动副,包括丝杠螺母宏动机构和压电驱动微动机构的动力学特性。在光栅毛坯运动阶段充分考虑工作台在导轨上运动可能产生的爬行现象,就爬行现象出现与否展开分析。
考虑到微位移部件驱动工作台是刻槽位置不确定度的决定性因素之一,而刻槽位置的不确定度将直接影响到杂散光性能指标,分析了果蝇优化算法求极值的快速和准确性,建立光栅工作台微位移部件-弹性片的多目标优化模型,将果蝇优化算法嵌入多目标优化中,最终得到微位移部件在约束条件下的最优解。
针对波前质量高频部分和杂散光与光栅工作台的精密定位密切相关,以及在整个长刻划行程内必须保持低周期误差以减少杂散光的需求,分析了测量系统的精度水平,基于HHT对机刻光栅定位工作台进行非线性特征识别,将RBF神经网络与PID控制相结合作为智能控制策略,最终实现长行程、重载光栅工作台纳米精度定位运动控制,支持高质量的光栅刻划。
本文得到国家重大科研装备研制项目(No.ZBYZ2008-1)的资助。本文的研究属于其研究内容的一部分预研工作。
Currently, the important trend in the development of the large-scale optical system and scientific instruments is that continuously increasing the field of view and improving the resolution, so it requires that optical components must expand diameter and improve accuracy. The grating manufactured by mechanical ruling in this paper has periodic special functional structure with macroscopic scale and nanometer precision. It is the core optical element of the large optical system and scientific instruments, which need nanoscale machining accuracy and surface roughness. The special function structure finesse, the ultra-precision manufacturing system and the digital manufacturing process have achieved the top level of the related fields is the main features of this grating. However, there are lots of problems have not been solved in the basic research work, such as lacking the fundamental research of the mechanical system accuracy planning based on the grating optical performance, less research of the parts dynamics of grating ruling machine, significantly weak on the research of key moving parts of the mechanical system dynamics and lack of depth of the control strategy study of the long stroke nanometer precision positioning system. All these problems restrict the large area and high-precision grating manufacturing.
Based on the blank of the research on the large area ruling grating manufacturing technology, there are four parts for the structural characteristics and accuracy control of the machine gratings manufacturing with the goal of improving the optical performance of the ruling grating in this paper:(1) The map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine;(2) The analysis of the structural characteristics of diffraction grating ruling machine;(3) Multi-objective optimization of the micro-displacement part based on the Drosophila optimization algorithm;(4) Signal measurement、analysis and precision motion control of the precision positioning system of mechanical ruling grating.
First of all, this paper analyzes the processing and working principle of the machine gratings, and optical performance indicators which are the key factors that affect the final quality of the grating. The content analyzes the grating ruling machine system accuracy planning for gratings error characteristics. Basis on that, the paper analyzes the map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine to provide a reference for the research on the grating manufacturing system.
In view of the positioning accuracy of the grating table directly affect the quality of the grating spectral stray light and ghost line intensity, the paper analyzes the dynamic characteristics of the grating macro/micro-drive device, including the screw-nut-driven mechanism and piezoelectric-driven system. Considerating the creeping phenomenon arisng from the table moving on the guide rail, the paper analyzes the presence or absence of the crawling phenomenon, and gives some preventive measures.
The Micro-displacement of stage driving by micro-displacement structural component is the decisive factor that determines the uncertainty of the location of the groove, which will directly affect the stray light performance indicators. the paper analyzes the ability of calculate the extremum of drosophila optimization algorithm, establishs the multi-objective optimization model of the micro-displacement structural component of the grating table, embeds, and ultimately obtains the optimal solution of micro-displacement component by embedding the drosophila optimization algorithm into the multi-objective optimization model.
Then, for the stray light and high-frequency part of the wavefront quality is closely related to the precision positioning signal of the grating table, and the requirement of low cycle error in the long ruled trip to reduce the stray light, the paper gives a detailed analysis of the level of accuracy of the measurement system, analyzes the non-linear characteristic by the combination of the Hilbert transform and empirical mode decomposition. The content also combines the RBF neural network and PID control as intelligent control strategy, and ultimately achieves the accuracy positioning motion control of the long stroke and overloaded grating stage to support the ruling of the high-quality grating.
This research is sponsored by Chinese National Major Research Project for Equipment Development (No.ZBYZ2008-1). The research in this paper is one part of
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