MEMS汽车传感器设计关键技术的研究
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摘要
随着MEMS技术的深入发展、需要采用多种手段在器件材料、结构、制作工艺或器件工作原理等方面进行针对汽车具体应用问题的技术改进,传感器件性能价格比的进一步提高可以有力促进MEMS汽车传感器面向应用实现实用化和产品化。
MEMS要实现市场化和产业化,提高MEMS产品的设计能力是急需解决的问题。研究MEMS的设计方法和理论以及优化设计、建模仿真等,使其更加快速和准确,能够缩短产品的研发周期,降低反复试制和试验的高额成本；研究MEMS的多学科优化设计方法可以更快速、更准确的建立优化模型,降低设计难度,提高MEMS的整体设计水平,更好的改善器件的综合性能。
在研究中,本论文不仅对MEMS汽车传感器的理论和设计方法进行了研究,对MEMS传感器智能化设计和器件的可靠性研究做了有益的探索,并且对MEMS设计中的多域耦合和仿真,以梳齿结构微谐振器为例进行了分析；并针对MEMS的多学科特性,以梳齿式MEMS加速度计这种典型MEMS器件为例,对MEMS的多学科优化设计和算法进行了深入地研究和探讨。这些研究对MEMS汽车传感器的研究和发展具有一定的促进。
本文主要的创新点如下：
1、本文研究了MEMS汽车传感器可靠性,提出了基于阶段主导可靠性因素的MEMS汽车传感器可靠性设计方法。通过分析在传感器开发过程中不同阶段的可靠性因素的实现,以及设计过程中器件结构、材料特性与设计参数的相互影响,在MEMS汽车传感器整体可靠性设计中提出基于阶段主导可靠性因素的方法。对汽车应用环境下的失效模式、失效机理进行了讨论,建立了失效分析模型和可靠性因素评估方法；并对如何对MEMS传感器系统寿命分布模型进行定量描述做了研究。提高了MEMS汽车传感器可靠性设计的准确性和效率。
2、在分析MEMS系统的多域耦合特性的基础上,利用数值计算、有限元等方法以梳齿结构微谐振器为例详细进行了多域耦合分析；提出了基于边缘效应的微尺度下的平板电容和静电梳齿的静电场的分析方法,推导出了驱动静电力、位移等参数表达式以及考虑边缘效应之后的静电力表达式；分析了动力学模型,求解振动频率,研究了影响梳齿结构动态特性的空气阻尼。提高了MEMS系统多域耦合分析的准确性。
3、运用多学科设计优化思想与MEMS系统优化相结合的设计方法,建立了梳齿式MEMS加速度计分解为子系统的优化模型；采用多学科变量耦合的优化策略与方法,构造耦合函数,建立了梳齿式MEMS加速度计的整体系统协调与优化模型。进行了结构、稳定性、静电力、最大量程、分辨率以及热学影响设计分析；运用模拟随机搜索算法、多目标遗传算法和差分进化算法分别进行优化设计,利用有限元进行了仿真,结果表明系统性能得到提高。
Along with the further development of Micro-Electro-Mechanical System (MEMS) technology, researches into the improvement of automobile application technology and cost performance of the sensors are carried out in aspects of material, structure, manufacturing process and working principle of parts. Consequently, both application and production of the automotive sensors based on MEMS are promoted effectively.
In order to realize the marketization and industrialization of MEMS, what shall be resolved urgently is to improve the design capacity of MEMS. It is essential for the study on design methods and theories, modeling optimization and simulation of MEMS to make designing more rapid and accurate, so that the development cycle of product is shortened, and the expensive cost of repetition tests reduced. The Multidisciplinary Design Optimization method of MEMS can help establish the Optimization model more quickly and accurately and increase the ease of design, thus improve the overall design and the comprehensive function of parts.
On the basis of a research on theories and design methods of MEMS, the paper makes a beneficial exploration on intelligent design and reliability of parts:by the example of comb-finger micro-resonator, it analyses the coupling between multi physics fields and Simulation of MEMS; with the example of the comb-finger micro-accelerometer, a typical kind of MEMS part, it researches into the Multidisciplinary Design Optimization and calculation of MEMS.
The three main innovative points of this paper are as following:
1. The paper studies reliability of the MEMS automotive sensor and puts forward the design method of it that is based on predominant reliability factors at different stages. Through the analysis of realization of reliability factors at different stages of the sensor development process, and the mutual influence among part structure, material characteristics and design parameter, the paper not only comes up with the design method based on stage predominant reliability factors, but also discusses expiration model and mechanism of automobiles in application environment, establishes integral analytical model and reliability factors valuation system, and studies how to quantitatively describe the model of life distribution of the MEMS automotive sensor.
2. Based on the characteristic of multi physics fields of the MEMS system, illustrated by the example of comb-finger micro-resonator, the paper carries out the analysis of multi physics fields coupling analyses in detail by means of numerical calculation and finite element method, etc.: firstly, it analyzes the static electricity field edge effect of a Flat panel electric capacity and static electricity comb structure under the micro measure, and deduces parameter expressions such as static electricity drive and move, and static electricity drive expressions with consideration of the edge effect; secondly, it analyzes dynamics model to solve vibration frequency problems, and studies the air damping that influences comb-finger structure dynamic characteristics.
3. The paper makes use of the design method of combining the MEMS system Optimization with the idea of Multidisciplinary Design Optimization and adopts the optimization tactics and means of Multidisciplinary variable coupling to analyze the structure, stability, static electricity power, the maximum, resolution, and the influence analysis of calorifics by the example of a comb-finger micro-accelerometer. In the paper, the system is broken down into 2 or 3 sub-systems, so as to build up optimization model respectively, to optimize with simulation random search algorithm, multi-objective genetic algorithm, and difference evolution algorithm, and to simulate with finite element method. Eventually, the paper constructs the coupling function, and builds up the whole system's coordinated optimization model of comb-finger MEMS accelerometer.
MEMS要实现市场化和产业化,提高MEMS产品的设计能力是急需解决的问题。研究MEMS的设计方法和理论以及优化设计、建模仿真等,使其更加快速和准确,能够缩短产品的研发周期,降低反复试制和试验的高额成本；研究MEMS的多学科优化设计方法可以更快速、更准确的建立优化模型,降低设计难度,提高MEMS的整体设计水平,更好的改善器件的综合性能。
在研究中,本论文不仅对MEMS汽车传感器的理论和设计方法进行了研究,对MEMS传感器智能化设计和器件的可靠性研究做了有益的探索,并且对MEMS设计中的多域耦合和仿真,以梳齿结构微谐振器为例进行了分析；并针对MEMS的多学科特性,以梳齿式MEMS加速度计这种典型MEMS器件为例,对MEMS的多学科优化设计和算法进行了深入地研究和探讨。这些研究对MEMS汽车传感器的研究和发展具有一定的促进。
本文主要的创新点如下：
1、本文研究了MEMS汽车传感器可靠性,提出了基于阶段主导可靠性因素的MEMS汽车传感器可靠性设计方法。通过分析在传感器开发过程中不同阶段的可靠性因素的实现,以及设计过程中器件结构、材料特性与设计参数的相互影响,在MEMS汽车传感器整体可靠性设计中提出基于阶段主导可靠性因素的方法。对汽车应用环境下的失效模式、失效机理进行了讨论,建立了失效分析模型和可靠性因素评估方法；并对如何对MEMS传感器系统寿命分布模型进行定量描述做了研究。提高了MEMS汽车传感器可靠性设计的准确性和效率。
2、在分析MEMS系统的多域耦合特性的基础上,利用数值计算、有限元等方法以梳齿结构微谐振器为例详细进行了多域耦合分析；提出了基于边缘效应的微尺度下的平板电容和静电梳齿的静电场的分析方法,推导出了驱动静电力、位移等参数表达式以及考虑边缘效应之后的静电力表达式；分析了动力学模型,求解振动频率,研究了影响梳齿结构动态特性的空气阻尼。提高了MEMS系统多域耦合分析的准确性。
3、运用多学科设计优化思想与MEMS系统优化相结合的设计方法,建立了梳齿式MEMS加速度计分解为子系统的优化模型；采用多学科变量耦合的优化策略与方法,构造耦合函数,建立了梳齿式MEMS加速度计的整体系统协调与优化模型。进行了结构、稳定性、静电力、最大量程、分辨率以及热学影响设计分析；运用模拟随机搜索算法、多目标遗传算法和差分进化算法分别进行优化设计,利用有限元进行了仿真,结果表明系统性能得到提高。
Along with the further development of Micro-Electro-Mechanical System (MEMS) technology, researches into the improvement of automobile application technology and cost performance of the sensors are carried out in aspects of material, structure, manufacturing process and working principle of parts. Consequently, both application and production of the automotive sensors based on MEMS are promoted effectively.
In order to realize the marketization and industrialization of MEMS, what shall be resolved urgently is to improve the design capacity of MEMS. It is essential for the study on design methods and theories, modeling optimization and simulation of MEMS to make designing more rapid and accurate, so that the development cycle of product is shortened, and the expensive cost of repetition tests reduced. The Multidisciplinary Design Optimization method of MEMS can help establish the Optimization model more quickly and accurately and increase the ease of design, thus improve the overall design and the comprehensive function of parts.
On the basis of a research on theories and design methods of MEMS, the paper makes a beneficial exploration on intelligent design and reliability of parts:by the example of comb-finger micro-resonator, it analyses the coupling between multi physics fields and Simulation of MEMS; with the example of the comb-finger micro-accelerometer, a typical kind of MEMS part, it researches into the Multidisciplinary Design Optimization and calculation of MEMS.
The three main innovative points of this paper are as following:
1. The paper studies reliability of the MEMS automotive sensor and puts forward the design method of it that is based on predominant reliability factors at different stages. Through the analysis of realization of reliability factors at different stages of the sensor development process, and the mutual influence among part structure, material characteristics and design parameter, the paper not only comes up with the design method based on stage predominant reliability factors, but also discusses expiration model and mechanism of automobiles in application environment, establishes integral analytical model and reliability factors valuation system, and studies how to quantitatively describe the model of life distribution of the MEMS automotive sensor.
2. Based on the characteristic of multi physics fields of the MEMS system, illustrated by the example of comb-finger micro-resonator, the paper carries out the analysis of multi physics fields coupling analyses in detail by means of numerical calculation and finite element method, etc.: firstly, it analyzes the static electricity field edge effect of a Flat panel electric capacity and static electricity comb structure under the micro measure, and deduces parameter expressions such as static electricity drive and move, and static electricity drive expressions with consideration of the edge effect; secondly, it analyzes dynamics model to solve vibration frequency problems, and studies the air damping that influences comb-finger structure dynamic characteristics.
3. The paper makes use of the design method of combining the MEMS system Optimization with the idea of Multidisciplinary Design Optimization and adopts the optimization tactics and means of Multidisciplinary variable coupling to analyze the structure, stability, static electricity power, the maximum, resolution, and the influence analysis of calorifics by the example of a comb-finger micro-accelerometer. In the paper, the system is broken down into 2 or 3 sub-systems, so as to build up optimization model respectively, to optimize with simulation random search algorithm, multi-objective genetic algorithm, and difference evolution algorithm, and to simulate with finite element method. Eventually, the paper constructs the coupling function, and builds up the whole system's coordinated optimization model of comb-finger MEMS accelerometer.
引文
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