电流变抛光液性能及其抛光技术研究
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摘要
随着光电技术的发展，越来越多形貌复杂的光学元件被应用于医疗、航空、国防等领域。人们对于光学元件加工质量也提出了更高的要求，如较高的表面质量、较好的面型精度和较低的表面粗糙度等。利用场效应进行抛光的加工方式日益受到人们的关注，本文在教育部新世纪优秀人才资助计划和吉林省杰出青年基金项目的支持下，开展电流变抛光相关研究工作，并在研发的五轴联动电流变抛光机床上利用针状电极工具和环形集成电极工具对建立的理论模型进行了实验验证。
在电流变抛光工艺中，将硬度较高、介电性能良好的磨料颗粒加入到电流变液体中作为抛光媒介。施加外电场以后，电流变抛光液的微观结构和流变性能发生改变，其表观粘度和剪切屈服应力明显增强。本文通过电流变效应微观显示系统观察了电流变抛光液的微观结构。根据建立的粒子运动方程对电流变抛光液的微观结构进行仿真，并结合粒子间的作用力、磨料颗粒粒度和体积分数等影响因素对抛光液的微观结构进行分析。根据磨料颗粒粒度的不同，建立了四种不同形式的粒子结合模型。在此基础上，研究了电流变抛光液的流变性能，包括其粘度、剪切应力和在外加电场作用下的剪切屈服特性。从电流变抛光液中粒子结合模型和相互作用研究入手，通过分析粒子间作用力和剪切应力的关系，建立电流变抛光液的剪切屈服应力模型。利用自制的圆筒式旋转流变仪和静态剪切屈服应力实验装置进行了电流变抛光液流变性能实验，获得了磨料颗粒种类、体积分数和粒度对电流变抛光液流变性能的影响规律。
根据电流变抛光液中粒子的结合模型和相互作用力分析，建立了电流变抛光表面粗糙度预测模型和材料去除模型。利用电流变抛光装置进行了电流变抛光导体材料实验，获得工艺参数对工件表面粗糙度的影响和抛光区域内材料去除量的变化规律。理论计算和实验规律比较，结果表明，理论模型可以较好地预测电流变抛光导体材料时工件表面粗糙度和揭示抛光区域内材料去除的真实情况。
设计和改进了集成电极工具系统。利用环形集成电极工具进行了微晶玻璃抛光实验，获得抛光时间、电压、间隙、电极转速、磨料种类和粒度对表面粗糙度的影响规律。根据流体动力润滑理论建立了电流变抛光过程中流体动压力的理论模型，分析了电流变抛光液在固态核心形成后工件表面抛光区域内的法向压力。通过测力仪测量了抛光过程中工件表面的法向压力，对理论模型进行了验证，获得电压、电极转速和工作间隙对抛光法向压力的影响。根据Preston方程分析了抛光法向压力对工件表面粗糙度的影响。
论文的研究工作对于提升电流变抛光液性能，获得较低的抛光表面粗糙度和材料去除控制具有指导意义。
With the development of the photoelectron communications technology，largenumbers of micro-aspherical lenses with low surface roughness are applied into theoptical system of the medical, aerospace, defense and other fields. Highermanufacturing quality of optical lenses has been required, such as higher surfacequality, better surface accuracy, and lower surface roughness and so on. A newmethod utilizing field-assisted polishing has been widely applied in polishing process.Under financial support of the project named Program for Ministry of Education of PR China and Scientific Research Program for Excellent Youth of Jilin Province, P RChina, this thesis investigated the Electrorheological(ER) fluid-assisted polishingtechnique, and confirmed the validity of the presented model by polishingexperiments conducted on five-axis the ER fluid-assisted polishing machine withneedle-like tool electrode and circular-type integrated tool electrode system.
In ER fluid-assisted polishing process, the ultra-fine abrasive particle is thepolishing media with high hardness and good dielectric properties. When the electricfield is applied, the microstructure and rheological properties of ER polishing fluidwill change, with its apparent viscosity and shear yield stress improve significantly.The microstructure formed by polarized particles perpendicular to the electrodes isobserved by CCD camera. In this thesis, simulation on microstructure of ER polishingfluid is completed by the motion equation of particles. The microstructure of ERpolishing fluid has been analyzed with the influencing factors such as abrasiveparticle size and volume fraction and so on. The combination structure of ER particleswith abrasive particles has four different types changing with the sizes of abrasiveparticles. On this basis, the rheological properties of ER polishing fluid is analyzed byintroducing the microstructure of ER polishing fluid, including the viscosity, shearstress and the shear yield stress of the ER polishing fluid under the external electricfield. In this thesis, the theoretical model of the static shear yield stress of the ERpolishing fluid is developed based on the combination structure of ER particles withabrasive particles and the attraction forces between particles in ER polishing fluid. Aseries of experiments are conducted to study the properties of ER polishing fluid onthe self-made cylinder rotational rheometer and the key factors of influence theproperties of ER polishing fluid are analyzed. The yield stress testing device isdeveloped to investigate the influential regularities of the species, sizes and volume fraction of abrasive particles on the shear yield stress of ER polishing fluid.
In this thesis, the combination structure of ER particles with abrasive particlesand the forces exerted on the abrasive particles for material removal is discussed whenthe electric field is applied, a model for the prediction of surface roughness in ERfluid-assisted polishing of conductive materials is established. Polishing experimentswith different abrasive particles for different conductive materials are conducted andthe regularity for the key process parameters to the surface roughness and materialremoval in polishing region is acquired. The experimental results have goodagreement to theoretical model which confirm the validity of the presented model.
This thesis designed and promoted integrated tool electrode system. A series ofexperiments are also conducted to polish glass-ceramic by a circular-type integratedtool electrode in the ER fluid-assisted polishing process and the influential regularitiesof polishing process parameters on the surface roughness are acquired. Based on thetheory of hydrodynamic lubrication, the formation of solid core in polishing process isinvestigated and a mathematical model taking into account the normal pressure isderived. The normal pressure of ER fluid-assisted polishing fluid in polishing area ismeasured by the dynamometer, which confirms the validity of the presented model.The influence of key process parameters such as voltage, rotational speed of electrodetool and gap on the normal pressure is investigated. The relationship between surfaceroughness and the normal pressure is analyzed by Preston’s equation.
The research work has guiding significance for the promotion to the properties ofER polishing fluid, lower roughness surface and material removal.
在电流变抛光工艺中，将硬度较高、介电性能良好的磨料颗粒加入到电流变液体中作为抛光媒介。施加外电场以后，电流变抛光液的微观结构和流变性能发生改变，其表观粘度和剪切屈服应力明显增强。本文通过电流变效应微观显示系统观察了电流变抛光液的微观结构。根据建立的粒子运动方程对电流变抛光液的微观结构进行仿真，并结合粒子间的作用力、磨料颗粒粒度和体积分数等影响因素对抛光液的微观结构进行分析。根据磨料颗粒粒度的不同，建立了四种不同形式的粒子结合模型。在此基础上，研究了电流变抛光液的流变性能，包括其粘度、剪切应力和在外加电场作用下的剪切屈服特性。从电流变抛光液中粒子结合模型和相互作用研究入手，通过分析粒子间作用力和剪切应力的关系，建立电流变抛光液的剪切屈服应力模型。利用自制的圆筒式旋转流变仪和静态剪切屈服应力实验装置进行了电流变抛光液流变性能实验，获得了磨料颗粒种类、体积分数和粒度对电流变抛光液流变性能的影响规律。
根据电流变抛光液中粒子的结合模型和相互作用力分析，建立了电流变抛光表面粗糙度预测模型和材料去除模型。利用电流变抛光装置进行了电流变抛光导体材料实验，获得工艺参数对工件表面粗糙度的影响和抛光区域内材料去除量的变化规律。理论计算和实验规律比较，结果表明，理论模型可以较好地预测电流变抛光导体材料时工件表面粗糙度和揭示抛光区域内材料去除的真实情况。
设计和改进了集成电极工具系统。利用环形集成电极工具进行了微晶玻璃抛光实验，获得抛光时间、电压、间隙、电极转速、磨料种类和粒度对表面粗糙度的影响规律。根据流体动力润滑理论建立了电流变抛光过程中流体动压力的理论模型，分析了电流变抛光液在固态核心形成后工件表面抛光区域内的法向压力。通过测力仪测量了抛光过程中工件表面的法向压力，对理论模型进行了验证，获得电压、电极转速和工作间隙对抛光法向压力的影响。根据Preston方程分析了抛光法向压力对工件表面粗糙度的影响。
论文的研究工作对于提升电流变抛光液性能，获得较低的抛光表面粗糙度和材料去除控制具有指导意义。
With the development of the photoelectron communications technology，largenumbers of micro-aspherical lenses with low surface roughness are applied into theoptical system of the medical, aerospace, defense and other fields. Highermanufacturing quality of optical lenses has been required, such as higher surfacequality, better surface accuracy, and lower surface roughness and so on. A newmethod utilizing field-assisted polishing has been widely applied in polishing process.Under financial support of the project named Program for Ministry of Education of PR China and Scientific Research Program for Excellent Youth of Jilin Province, P RChina, this thesis investigated the Electrorheological(ER) fluid-assisted polishingtechnique, and confirmed the validity of the presented model by polishingexperiments conducted on five-axis the ER fluid-assisted polishing machine withneedle-like tool electrode and circular-type integrated tool electrode system.
In ER fluid-assisted polishing process, the ultra-fine abrasive particle is thepolishing media with high hardness and good dielectric properties. When the electricfield is applied, the microstructure and rheological properties of ER polishing fluidwill change, with its apparent viscosity and shear yield stress improve significantly.The microstructure formed by polarized particles perpendicular to the electrodes isobserved by CCD camera. In this thesis, simulation on microstructure of ER polishingfluid is completed by the motion equation of particles. The microstructure of ERpolishing fluid has been analyzed with the influencing factors such as abrasiveparticle size and volume fraction and so on. The combination structure of ER particleswith abrasive particles has four different types changing with the sizes of abrasiveparticles. On this basis, the rheological properties of ER polishing fluid is analyzed byintroducing the microstructure of ER polishing fluid, including the viscosity, shearstress and the shear yield stress of the ER polishing fluid under the external electricfield. In this thesis, the theoretical model of the static shear yield stress of the ERpolishing fluid is developed based on the combination structure of ER particles withabrasive particles and the attraction forces between particles in ER polishing fluid. Aseries of experiments are conducted to study the properties of ER polishing fluid onthe self-made cylinder rotational rheometer and the key factors of influence theproperties of ER polishing fluid are analyzed. The yield stress testing device isdeveloped to investigate the influential regularities of the species, sizes and volume fraction of abrasive particles on the shear yield stress of ER polishing fluid.
In this thesis, the combination structure of ER particles with abrasive particlesand the forces exerted on the abrasive particles for material removal is discussed whenthe electric field is applied, a model for the prediction of surface roughness in ERfluid-assisted polishing of conductive materials is established. Polishing experimentswith different abrasive particles for different conductive materials are conducted andthe regularity for the key process parameters to the surface roughness and materialremoval in polishing region is acquired. The experimental results have goodagreement to theoretical model which confirm the validity of the presented model.
This thesis designed and promoted integrated tool electrode system. A series ofexperiments are also conducted to polish glass-ceramic by a circular-type integratedtool electrode in the ER fluid-assisted polishing process and the influential regularitiesof polishing process parameters on the surface roughness are acquired. Based on thetheory of hydrodynamic lubrication, the formation of solid core in polishing process isinvestigated and a mathematical model taking into account the normal pressure isderived. The normal pressure of ER fluid-assisted polishing fluid in polishing area ismeasured by the dynamometer, which confirms the validity of the presented model.The influence of key process parameters such as voltage, rotational speed of electrodetool and gap on the normal pressure is investigated. The relationship between surfaceroughness and the normal pressure is analyzed by Preston’s equation.
The research work has guiding significance for the promotion to the properties ofER polishing fluid, lower roughness surface and material removal.
引文
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