大范围微结构表面形貌测试中若干关键技术的研究
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摘要
微结构几何量特征参数与其构成的器件的性能是密切相关的?随着科学技术的发展,越来越多的微器件是由微结构阵列来实现相应的功能的,阵列中每个功能单元的尺寸一般在亚毫米量级,但是由成千上万个功能单元构成的微器件的整体尺寸在毫米或厘米量级?因此这类微器件表面形貌的测量既要求平面测量范围在毫米量级以上,又要求测量的平面空间分辨力为微米级甚至亚微米级?本文按照大范围微结构表面形貌的测量需求,对图像拼接法应用于光学显微干涉表面形貌测量中的若干关键技术开展了研究,具体完成的工作有:
1.对图像拼接的方法进行了分析,结合微结构表面形貌测量的特点,提出了大范围微结构表面形貌测量中图像拼接的实现方法;
2.对图像拼接实现方法中的关键技术进行了研究,主要包括干涉图像的自动对焦方法?相位展开算法的选择?子区域表面形貌图像的三维空间位置的对准方法和子区域拼接路径的分析和选择等方面;
3.建立了测量样品可进行三维精确定位的Linnik光学显微干涉测量实验系统,编写了自动化测量和控制软件,提高了系统的测量效率;
4.围绕所提出的关键技术开展了实验研究,其中包括:自动对焦方法的实验验证?利用纳米台阶高度标准进行表面形貌拼接测量可靠度的评价?微镜阵列表面形貌的测量与几何量参数的评价?MEMS器件的表面形貌拼接测量等,对所提出的测量方法和系统的可行性进行了综合验证?
Geometrical characteristics parameters and the composition device performance of the microstructure are closely related. With the development of science and technology, more and more functions of the micro device are achieved by micro-structure array. The size of each functional unit is usually in the sub-millimeter level. However the overall size of the micro-structure made up of thousands of the functional unit is in the millimeter or centimeter level. Therefore, not only the range of micro device surface topography measurement is required to be above the millimeter level, but also the spatial resolution of the measurement is required to be micron level, or even sub-micron level.
In this paper, we mainly focused on the research of the key technology of image mosaic. The major works in this paper are following:
1. We have analyzed the image mosaic method. Based on the characteristics of the surface topography measurement, we have proposed a implementation of image mosaic in the wide range measurement of the surface topography of micro-structure.
2. We have studied on the key technology of image mosaic, which includes auto-focusing method of interference images, phase unwrapping algorithm selection, the alignment method of there-dimensional position of sub-regional surface topography and the analysis and selection of sub-regional mosaic path, etc. We have carefully studied the theory of Fast Auto-Focus and determined the focus evaluation function and focus search strategy.
3. We have established the Linnik interferometer optical microscopy experimental system. We have wrote automated measurement and control software which improves the efficiency of the system of measurement.
4. Focusing on the key technology we have carried out the proposed experiment research, including: experiment verification of the auto-focus method, reliability evaluation of surface topography measurement using step-height standard, the measurement of micro mirror array surface topography and evaluation of the geometry parameters, the measurement of MEMS devices surface topography and comprehensive verification of the proposed measurement method and system feasibility.
1.对图像拼接的方法进行了分析,结合微结构表面形貌测量的特点,提出了大范围微结构表面形貌测量中图像拼接的实现方法;
2.对图像拼接实现方法中的关键技术进行了研究,主要包括干涉图像的自动对焦方法?相位展开算法的选择?子区域表面形貌图像的三维空间位置的对准方法和子区域拼接路径的分析和选择等方面;
3.建立了测量样品可进行三维精确定位的Linnik光学显微干涉测量实验系统,编写了自动化测量和控制软件,提高了系统的测量效率;
4.围绕所提出的关键技术开展了实验研究,其中包括:自动对焦方法的实验验证?利用纳米台阶高度标准进行表面形貌拼接测量可靠度的评价?微镜阵列表面形貌的测量与几何量参数的评价?MEMS器件的表面形貌拼接测量等,对所提出的测量方法和系统的可行性进行了综合验证?
Geometrical characteristics parameters and the composition device performance of the microstructure are closely related. With the development of science and technology, more and more functions of the micro device are achieved by micro-structure array. The size of each functional unit is usually in the sub-millimeter level. However the overall size of the micro-structure made up of thousands of the functional unit is in the millimeter or centimeter level. Therefore, not only the range of micro device surface topography measurement is required to be above the millimeter level, but also the spatial resolution of the measurement is required to be micron level, or even sub-micron level.
In this paper, we mainly focused on the research of the key technology of image mosaic. The major works in this paper are following:
1. We have analyzed the image mosaic method. Based on the characteristics of the surface topography measurement, we have proposed a implementation of image mosaic in the wide range measurement of the surface topography of micro-structure.
2. We have studied on the key technology of image mosaic, which includes auto-focusing method of interference images, phase unwrapping algorithm selection, the alignment method of there-dimensional position of sub-regional surface topography and the analysis and selection of sub-regional mosaic path, etc. We have carefully studied the theory of Fast Auto-Focus and determined the focus evaluation function and focus search strategy.
3. We have established the Linnik interferometer optical microscopy experimental system. We have wrote automated measurement and control software which improves the efficiency of the system of measurement.
4. Focusing on the key technology we have carried out the proposed experiment research, including: experiment verification of the auto-focus method, reliability evaluation of surface topography measurement using step-height standard, the measurement of micro mirror array surface topography and evaluation of the geometry parameters, the measurement of MEMS devices surface topography and comprehensive verification of the proposed measurement method and system feasibility.
引文
[1]郝一龙,张立宪等,硅基MEMS技术,机械强度,2001,23(4):523~526
[2]陈迪,蔡炳初,LIGA技术?准LIGA微加工技术及其应用,2003,中国机械工程学会年会
[3]张兰娣,马轶群,超精密加工技术发展,河北建筑工程学院学报,2006
[4]林树忠,孙会来,激光加工技术的应用及发展,河北工业大学学报,2004
[5]王伯雄,陈非凡,微纳米测量技术,清华大学出版社,2006,107~129
[6]叶朝阳,大视场图像拼接:原理和应用:[硕士学位论文],杭州;浙江大学,2004
[7] Wen-Chin Tai, Ming Chang, Noncontact Profilometric Measurement of Large-form Parts, Opt. Eng.35(9),1996: 2730~2735
[8] J. R. Miller, O. Amidi, M. Delouis, Arctic test flights of the CMU autonomous helicopter, Proc. of the Association for Unmanned Vehicle Systems, 26th Annual Symposium, July 1999
[9] M. Wheeler, Automatic modeling and localization for object recognition, Ph. D. Thesis, Carnegie Mellon University, Pittsburgh, PA, Oct.1996
[10] S. F. El-Hakim, P. Boulanger, F. Blais, et al, A system for indoor 3-D mapping and virtual environments, Proc. of Videometrics V (SPIE Vol.3174), July 1997: 21~35
[11] F. Lu, E. Milios, Globally consistent range scan alignment for environment mapping, Autonomous Robots, Oct.1997, 4(4): 333~349
[12] V. Sequeira, Kia Ng, E. Wolfart, etc., Automated 3D reconstruction of interiors with multiple scan-views, Proc. of Videometrics VI (SPIE Vol.3641), Jan.1999: 106~117
[13]陈明仪,吴德柱,程维明,用条纹图形拼接法测量三维大物体面形,光学学报,1998,18(1):74~79
[14]邾继贵,王仲,周富强,吴斌,叶声华,IVECO车身视觉检测系统现场溯源研究,计量学报,2000,21(1): 28~33
[15]沙吉乐,曲兴华,叶声华,白车身视觉检测系统空间坐标系的建立,计量技术,2001, (1): 5~8
[16]吴斌,大型物体三维形貌数字化测量关键技术研究:[博士学位论文],天津:天津大学,2002
[17] P. Neugebauer, Geometrical cloning of 3D objects via simultaneous registration of multiple range images, In Proc. Int. Conf. on Shape Modeling and Application, Mar.1997: 130~139
[18]张舜德,卢秉恒,丁玉成,光学三维形面分区域测量数据的拼接研究,中国激光,2001,28(6): 533~536
[19]刘德连,张建奇,基于3点匹配的图像拼接算法,计算机工程,2006,32(13): 203~205
[20]沈海平,达飞鹏,雷家勇,基于最小二乘法的点云数据拼接研究,中国图象图形学报, 2005,10(9): 1112~1116
[21] http://www.gom.com/
[22]陈刚,大目标三维曲面视觉测量技术研究:[博士学位论文],哈尔滨:哈尔滨工业大学,2005
[23] O.D.Faugeras and M.Hebert, The Presentation, recognition and locating of 3D objects, Int. Journal. Robotics Research, 1986,5(3): 27~52
[24] J.T.Schwartz and M.Sharir, Identification of Partially obscure dobjects in two and three dimensions by matching noisy characteristic curves, Int. Journal. Robotics Research, 1987, 6(2): 29~44
[25] K.S.Arun, T.S. Huang and S.D. Bostein, Least-squares fitting of two 3D Point sets, IEEE Trans. on Pattern Analysis and Machine Intelligence, Sept.1987, 698~700
[26] S.Umeyama, Least-squares estimation of transform motion Parameters between two point patterns, IEEE Trans. on Pattern Analysis and Machine Intelligence, Apr.1991, 13(4): 376~380
[27] Y. Chen, G. Medioni, Object modeling by registration of multiple range views, Proceedings of the1991 IEEE International Conference on Robotics and Automation, Sacramento, Calif, 1991, 2724~2729
[28] B.K.P. Horn and J.G.harris, Rigid Body motion from range images sequences, CVGIP: Image Understanding, 53,1991,1~13
[29] H. Delingette, M. Herbert and K.Ikeuchi, Shape Representation and Image Segmentation using Deformable Surfaces, Image and Vision Computing, 1992
[30] Luca Lucchese, Gianfranco Doretto and Guido Maria Cortelazzo, A Frequency Domain Technique for Range Data Registration, IEEE Trans. On Pattern Analysis and Machine Intelligence, 2002, 24(11): 1468~1484
[31] P.J. Besl and N.D. McKay, A Method for Registration of 3D Shapes, IEEE Trans. Pattern Analysis and Machine Intelligence, Feb. 1992,14 (2): 239~259
[32]胡春光,利用相移显微干涉术和频闪成像技术研究MEMS离面运动,[硕士学位论文],天津;天津大学,2004
[33]李秋柱,刘毅等,基于白光干涉测量技术的微器件三位形貌重构,测试技术学报,2009
[34]田爱玲,王春慧等,扫描白光干涉测量技术的算法比较,光学技术,2008
[35]黄玉波,栗大超,胡小唐等,微/纳结构表面3-D轮廓测量中倾斜误差的补偿方法,天津大学学报,2006,39(10):1237~1240
[36]吴禄慎,任丹等,一种新的区域增长去包裹算法,机械工程学报,2002
[37]苗立刚,轩波等,显微镜的快速自动对焦算法,光电子激光,2007
[38]周志远,适用于激光微加工的自动对焦系统的研究,[硕士学位论文],天津:天津大学,2009
[39]吴振峰,左洪福等,光学显微镜自动聚焦的技术研究,光学仪器,2000
[40]刘义鹏,裴锡宇等,一种基于DFD的自动对焦算法,光学仪器,2005
[41]原育凯,光学系统的自动对焦方法,红外,2004
[42] LYNX user’s manual,2007
[43] http://www.ni.com/pdf/products/us/ni_1428.pdf
[2]陈迪,蔡炳初,LIGA技术?准LIGA微加工技术及其应用,2003,中国机械工程学会年会
[3]张兰娣,马轶群,超精密加工技术发展,河北建筑工程学院学报,2006
[4]林树忠,孙会来,激光加工技术的应用及发展,河北工业大学学报,2004
[5]王伯雄,陈非凡,微纳米测量技术,清华大学出版社,2006,107~129
[6]叶朝阳,大视场图像拼接:原理和应用:[硕士学位论文],杭州;浙江大学,2004
[7] Wen-Chin Tai, Ming Chang, Noncontact Profilometric Measurement of Large-form Parts, Opt. Eng.35(9),1996: 2730~2735
[8] J. R. Miller, O. Amidi, M. Delouis, Arctic test flights of the CMU autonomous helicopter, Proc. of the Association for Unmanned Vehicle Systems, 26th Annual Symposium, July 1999
[9] M. Wheeler, Automatic modeling and localization for object recognition, Ph. D. Thesis, Carnegie Mellon University, Pittsburgh, PA, Oct.1996
[10] S. F. El-Hakim, P. Boulanger, F. Blais, et al, A system for indoor 3-D mapping and virtual environments, Proc. of Videometrics V (SPIE Vol.3174), July 1997: 21~35
[11] F. Lu, E. Milios, Globally consistent range scan alignment for environment mapping, Autonomous Robots, Oct.1997, 4(4): 333~349
[12] V. Sequeira, Kia Ng, E. Wolfart, etc., Automated 3D reconstruction of interiors with multiple scan-views, Proc. of Videometrics VI (SPIE Vol.3641), Jan.1999: 106~117
[13]陈明仪,吴德柱,程维明,用条纹图形拼接法测量三维大物体面形,光学学报,1998,18(1):74~79
[14]邾继贵,王仲,周富强,吴斌,叶声华,IVECO车身视觉检测系统现场溯源研究,计量学报,2000,21(1): 28~33
[15]沙吉乐,曲兴华,叶声华,白车身视觉检测系统空间坐标系的建立,计量技术,2001, (1): 5~8
[16]吴斌,大型物体三维形貌数字化测量关键技术研究:[博士学位论文],天津:天津大学,2002
[17] P. Neugebauer, Geometrical cloning of 3D objects via simultaneous registration of multiple range images, In Proc. Int. Conf. on Shape Modeling and Application, Mar.1997: 130~139
[18]张舜德,卢秉恒,丁玉成,光学三维形面分区域测量数据的拼接研究,中国激光,2001,28(6): 533~536
[19]刘德连,张建奇,基于3点匹配的图像拼接算法,计算机工程,2006,32(13): 203~205
[20]沈海平,达飞鹏,雷家勇,基于最小二乘法的点云数据拼接研究,中国图象图形学报, 2005,10(9): 1112~1116
[21] http://www.gom.com/
[22]陈刚,大目标三维曲面视觉测量技术研究:[博士学位论文],哈尔滨:哈尔滨工业大学,2005
[23] O.D.Faugeras and M.Hebert, The Presentation, recognition and locating of 3D objects, Int. Journal. Robotics Research, 1986,5(3): 27~52
[24] J.T.Schwartz and M.Sharir, Identification of Partially obscure dobjects in two and three dimensions by matching noisy characteristic curves, Int. Journal. Robotics Research, 1987, 6(2): 29~44
[25] K.S.Arun, T.S. Huang and S.D. Bostein, Least-squares fitting of two 3D Point sets, IEEE Trans. on Pattern Analysis and Machine Intelligence, Sept.1987, 698~700
[26] S.Umeyama, Least-squares estimation of transform motion Parameters between two point patterns, IEEE Trans. on Pattern Analysis and Machine Intelligence, Apr.1991, 13(4): 376~380
[27] Y. Chen, G. Medioni, Object modeling by registration of multiple range views, Proceedings of the1991 IEEE International Conference on Robotics and Automation, Sacramento, Calif, 1991, 2724~2729
[28] B.K.P. Horn and J.G.harris, Rigid Body motion from range images sequences, CVGIP: Image Understanding, 53,1991,1~13
[29] H. Delingette, M. Herbert and K.Ikeuchi, Shape Representation and Image Segmentation using Deformable Surfaces, Image and Vision Computing, 1992
[30] Luca Lucchese, Gianfranco Doretto and Guido Maria Cortelazzo, A Frequency Domain Technique for Range Data Registration, IEEE Trans. On Pattern Analysis and Machine Intelligence, 2002, 24(11): 1468~1484
[31] P.J. Besl and N.D. McKay, A Method for Registration of 3D Shapes, IEEE Trans. Pattern Analysis and Machine Intelligence, Feb. 1992,14 (2): 239~259
[32]胡春光,利用相移显微干涉术和频闪成像技术研究MEMS离面运动,[硕士学位论文],天津;天津大学,2004
[33]李秋柱,刘毅等,基于白光干涉测量技术的微器件三位形貌重构,测试技术学报,2009
[34]田爱玲,王春慧等,扫描白光干涉测量技术的算法比较,光学技术,2008
[35]黄玉波,栗大超,胡小唐等,微/纳结构表面3-D轮廓测量中倾斜误差的补偿方法,天津大学学报,2006,39(10):1237~1240
[36]吴禄慎,任丹等,一种新的区域增长去包裹算法,机械工程学报,2002
[37]苗立刚,轩波等,显微镜的快速自动对焦算法,光电子激光,2007
[38]周志远,适用于激光微加工的自动对焦系统的研究,[硕士学位论文],天津:天津大学,2009
[39]吴振峰,左洪福等,光学显微镜自动聚焦的技术研究,光学仪器,2000
[40]刘义鹏,裴锡宇等,一种基于DFD的自动对焦算法,光学仪器,2005
[41]原育凯,光学系统的自动对焦方法,红外,2004
[42] LYNX user’s manual,2007
[43] http://www.ni.com/pdf/products/us/ni_1428.pdf