微/纳米尺度对象灵巧操控方法的研究
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摘要
在人类探索微观世界的进程中,对微观目标物实现操作和控制的需求同宏观尺度一样无处不在。研制精确可靠、成本低廉的微型控制器件,已成为研究者们共同关注的前沿方向之一。本文基于这一重要需求,将微型控制技术分为微型固体操控技术与微型液体控制技术,从全新的角度和原理出发,提出并实现了多种灵巧高效的微型控制方法:
针对崭新的微纳米固体操作器件——冰镊,首先利用数值模拟的方法对其典型执行机制进行了深入研究,在此基础上扩展出几类实现冰镊操作器的新型工作原理。通过系统的理论和试验证实,借助于微对流冷却效应可以实现具有良好工作性能及适应能力的冰镊操作器。进而,论文将此种原理的冰镊操作器推进到纳米尺度,并引入自由分子流区的传热模型对其可行性进行了理论评估。此外,还提出热辐射型微纳米冰镊操作器并从理论上进行了评估。
在液体操控器件方面,论文对三种微器件提出了新的工作原理。针对依靠流体自身相变来实现流道开启或关闭的微型冰阀,深入研究了其典型执行机制,发展出借助单个冰阀控制微流道阵列的方法,并建立了可对冰阀阵列工作过程实施非接触式监测的红外热成像手段;在微流体驱动方面,论文提出了借助干燥多孔材料与液体之间的主动润湿效应来实现流体驱动的新型润湿驱动泵的工作原理,系统揭示了其工作性能及各种外界影响因素;基于两相流理论,论文对泰勒扩散型微混合器的工作过程进行了理论刻画,进而展示了有效提高混合效率的方案,并引入红外热成像法实现了对微型混合器工作过程的实时监测。
本文建立的系列灵巧性微/纳米操控方法,可望在诸多微系统与纳米技术领域中发挥重要作用。
During the exploration of the microcosms, the heavy demand for the diversification of micro manipulation remains the same as its counterpart macro-scale tasks. As a result, developing micro/nano scale manipulation device which is low in cost, high in reliability and precision has become one of the major targets within the MEMS area. Aiming to tackle such tough issues, the present thesis attributed the micro manipulation into two types: the micro manipulation on the object at solid state and that at liquid phase. Several new flexible methods for manipulating micro/nano scale objects were proposed:
Aiming to the micro object at solid state, this thesis is dedicated to investigate a new kind of manipulation tool named as freeze tweezer. Numerical simulation is performed to understand its typical implementation mechanisms and several new working principles are proposed to improve its performances. Through the systematical analysis and experiments, it is demonstrated that the convective cooling enabled freeze tweezer could take on a quite excellent performance and adaptability. As a significant extension, the feasibility of the freeze tweezer with such principle in nano scale is illuminated via the theoretical heat transfer evaluation in free molecular flow. In addition, numerical simulation has also been carried out to demonstrate the radiative cooling enabled freeze nano tweezer.
For the manipulation devices of the micro object at liquid state, this thesis proposed new working principles respectively for three micro devices. Aiming at the ice valve which was developed to close or open the micro/nano channel by freeze/thawing the working fluid inside, its typical implementation behaviors are numerically simulated; an alternative strategy for the controlling of the micro channel array via only a single ice valve is developed and a non-contact monitoring way for monitoring the ice valve array based on the far-infrared thermal imaging system is established. For the micro flow driving, this thesis presented a low cost micro pump for lab on chip through flexibly utilizing the wetting mechanism between the dry porous material and liquid. The working performance and several factors on the running state of the wetting pump have been proposed and evaluated. Further, based on the two-phase flow theory, this thesis established theoretical hydrodynamics model to characterize the micromixing pattern enabled by the time-interleaved segmentation feeding of micro fluid and put forward effective program to further improve the mixing efficiency. And the far-infrared thermal imaging system was also adopted to detect and map the surface temperature distribution of a micro mixture.
In summary, the series of flexible manipulation methods for micro/nano scale objects as established in this thesis are expected to play an important role in micro/nano technology.
针对崭新的微纳米固体操作器件——冰镊,首先利用数值模拟的方法对其典型执行机制进行了深入研究,在此基础上扩展出几类实现冰镊操作器的新型工作原理。通过系统的理论和试验证实,借助于微对流冷却效应可以实现具有良好工作性能及适应能力的冰镊操作器。进而,论文将此种原理的冰镊操作器推进到纳米尺度,并引入自由分子流区的传热模型对其可行性进行了理论评估。此外,还提出热辐射型微纳米冰镊操作器并从理论上进行了评估。
在液体操控器件方面,论文对三种微器件提出了新的工作原理。针对依靠流体自身相变来实现流道开启或关闭的微型冰阀,深入研究了其典型执行机制,发展出借助单个冰阀控制微流道阵列的方法,并建立了可对冰阀阵列工作过程实施非接触式监测的红外热成像手段;在微流体驱动方面,论文提出了借助干燥多孔材料与液体之间的主动润湿效应来实现流体驱动的新型润湿驱动泵的工作原理,系统揭示了其工作性能及各种外界影响因素;基于两相流理论,论文对泰勒扩散型微混合器的工作过程进行了理论刻画,进而展示了有效提高混合效率的方案,并引入红外热成像法实现了对微型混合器工作过程的实时监测。
本文建立的系列灵巧性微/纳米操控方法,可望在诸多微系统与纳米技术领域中发挥重要作用。
During the exploration of the microcosms, the heavy demand for the diversification of micro manipulation remains the same as its counterpart macro-scale tasks. As a result, developing micro/nano scale manipulation device which is low in cost, high in reliability and precision has become one of the major targets within the MEMS area. Aiming to tackle such tough issues, the present thesis attributed the micro manipulation into two types: the micro manipulation on the object at solid state and that at liquid phase. Several new flexible methods for manipulating micro/nano scale objects were proposed:
Aiming to the micro object at solid state, this thesis is dedicated to investigate a new kind of manipulation tool named as freeze tweezer. Numerical simulation is performed to understand its typical implementation mechanisms and several new working principles are proposed to improve its performances. Through the systematical analysis and experiments, it is demonstrated that the convective cooling enabled freeze tweezer could take on a quite excellent performance and adaptability. As a significant extension, the feasibility of the freeze tweezer with such principle in nano scale is illuminated via the theoretical heat transfer evaluation in free molecular flow. In addition, numerical simulation has also been carried out to demonstrate the radiative cooling enabled freeze nano tweezer.
For the manipulation devices of the micro object at liquid state, this thesis proposed new working principles respectively for three micro devices. Aiming at the ice valve which was developed to close or open the micro/nano channel by freeze/thawing the working fluid inside, its typical implementation behaviors are numerically simulated; an alternative strategy for the controlling of the micro channel array via only a single ice valve is developed and a non-contact monitoring way for monitoring the ice valve array based on the far-infrared thermal imaging system is established. For the micro flow driving, this thesis presented a low cost micro pump for lab on chip through flexibly utilizing the wetting mechanism between the dry porous material and liquid. The working performance and several factors on the running state of the wetting pump have been proposed and evaluated. Further, based on the two-phase flow theory, this thesis established theoretical hydrodynamics model to characterize the micromixing pattern enabled by the time-interleaved segmentation feeding of micro fluid and put forward effective program to further improve the mixing efficiency. And the far-infrared thermal imaging system was also adopted to detect and map the surface temperature distribution of a micro mixture.
In summary, the series of flexible manipulation methods for micro/nano scale objects as established in this thesis are expected to play an important role in micro/nano technology.
引文
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