基于超声辐射力场的微构件非接触操纵关键技术的研究
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摘要
微机电系统作为人们在微观领域认识和改造客观世界的一种高新技术,面对其研究对象尺度的微型化、制造技术追求高深宽比的三维化以及制造工艺和材料的多样化等所带来的挑战,在近三十年的发展历程中,对微米至纳米级尺度的微构件实现有效操纵一直以来具有强烈的需求。特别是随着微机电系统领域从原先注重单元零部件的生产向混合复杂系统的集成方向快速发展,微操纵技术更加体现出其重要性和迫切性。因此,探索新理论、新机理并发展相应的新技术,已成为目前微机电系统这个新兴技术领域内一个最基础的、关键的热点研究课题。基于微机电系统所具有的特点,一种微构件无损、非接触遥操纵技术是当前研究和发展的主体,而基于超声辐射力场的超声操纵技术由于其无损和非接触的特点,预示着非接触微操纵的发展方向。目前该技术的理论基础研究仍停留于平衡位置振动微小球体的超声辐射力计算上,应用主要根据生物组织、细胞的俘获、悬浮和分拣等功能展开,至于针对微构件操纵和微机电系统集成装配为背景的理论和应用研究还少有涉足。为此,本学位论文结合国家自然科学基金项目“基于三维可控超声辐射力场的微构件遥操纵技术的研究(No.50375144)”、国家高技术研究发展计划项目“基于超声辐射力的微纳构件三维遥操纵关键技术研究(No.2006AA042329)”和浙江省自然科学基金重点项目“基于声操纵的三维自动微装配理论与实践研究(No.Z1110393)”,提出开展基于超声辐射力场的微构件非接触操纵关键技术的研究,通过对复杂形状微构件受力和力矩、超声辐射力产生机理和影响因素的理论分析与实验研究,采用声波合成的方式,形成一种力和力矩大小、方向可控的超声辐射力场合成理论和技术,实现超声辐射力场的精确控制,发展一套适合于微机电系统应用的基于超声辐射力场的微操纵理论新体系,以应用于微构件的操纵和微机电系统的集成装配中,为微机电系统研究和制造提供一种具有自主知识产权的共性技术手段。具体的研究内容和创新点体现在：第一章,分析微操纵技术在微机电系统、高新产业及国民经济发展中的作用和地位,说明开展微操纵技术研究的重要意义,并在阐述微操纵技术国内外研究现状及其发展趋势的基础上,对目前最具发展潜力的微操纵方法——基于超声辐射力场的微操纵技术的研究现状进行系统概括,对其存在的问题进行评述,为论文研究指明方向。第二章,开展散射声场计算理论研究,突破传统声波Rayleigh散射理论关于入射声场相对于散射体轴对称的限制,建立适用于任意入射声场中非规则Rayleigh散射体散射声场计算理论。同时,应用T矩阵法将相关研究延伸到共振散射区,进一步完善散射场计算理论的系统性。解决超声辐射力和力矩计算中的一个关键基础性问题,为实现任意声场中非规则散射体的超声辐射力和力矩计算奠定必要的理论基础。第三章,应用传声介质与散射体的整体动量和角动量守恒原理,建立超声辐射力和辐射力矩计算的通用理论框架,突破传统理论仅限于计算理想形式入射声场中无限长圆柱、球体等几种规则形状散射体超声辐射力以及平面波入射声场中盘状散射体超声辐射力矩的限制,创建任意入射声场中非规则形状Rayleigh散射体与共振区散射体的超声辐射力和力矩分析理论,为超声操纵力源的有效控制提供理论支撑。第四章,针对传统声场合成方法中声源必须置于合成区域边界上或只能逐点控制的不足,提出一种基于模式匹配与逆滤波的空间声场合成技术,并利用Bessel函数衰减特性与逆边界元法,实现局部微小区域声场的精确合成。同时,为获得前向传播算子以计算合成声场的声源阵列输入向量,考虑到实际应用中非自由声场空间障碍物的不利影响,提出一种新的声场分离算法。该部分工作为实现可控、精确和柔性的微构件非接触操纵提供关键的共性技术保障。第五章,针对微操纵的各种应用,分别设计具有相应操纵能力的合成声场。采用多束平面波合成声场俘获微构件,进而通过相位调整驱动微构件平移；在分析拉盖尔-高斯波对微构件的超声辐射力和力矩作用基础上,提出将其与反向平面行波干涉叠加合成,分析表明合成的声场具有同时俘获与旋转操纵的能力；为解决固体壁面上微构件的拾取与平移操纵问题,提出将两束对称布置平面波叠加,其超声辐射力场能够将微构件拾取到距壁面确定高度,并可通过相位调整驱动微构件水平运动。第六章,在完成多通道超声信号发生器、超声换能器环形阵列、超声场测量系统、显微成像与处理系统等模块设计开发基础上,集成开发了一套超声辐射力场合成与应用实验平台,以满足空间声场合成和微操纵应用的需求。在此基础上,开展基于超声辐射力场的微构件非接触操纵实验研究,实验结果证实本文超声操纵技术的可行性和有效性,体现出应用对象范围广、精度高以及适合微尺度构件操纵等特点。第七章,总结论文研究取得的成果和创新之处,并对以后的工作进行展望。
The Micro Electro-Mechanical System (MEMS), as a kind of high technology which helps people to understand and change the microscopic world, always possesses intensive demand to effectively manipulate micro-components with micro to nano meters in its development history of 30 years, because of the challenges due to the dimension miniaturization of research objectives, the three-dimensional manufacture with high depth-to-width ratio and the diversity of manufacture process & material. Especially, as the quick development of MEMS from the manufacturing of elemental parts to the integrated systems, the micromanipulation technology becomes even more important and urgent. Hence, exploring new theories and mechanisms to develop this technology is now the most basic and key topic in MEMS area.Considering the characteristics of MEMS, a kind of nondestructive, noncontact and remote manipulation technology should be the main trend in the current research and development. Hence, the manipulation technology based on ultrasonic radiation force field represents the direction of development. However, the theoretic research of this technology is still limited to the calculation of the radiation force on vibrating micro sphere at balance position, and its application is mainly on seizing, suspending and picking of biological tissue and cells. The research on theories and applications oriented to the characteristics of manipulation of micro-components and assembly of MEMS is seldom carried out.Therefore, the key technologies of noncontact manipulation for micro-components based on ultrasonic radiation force field were studied in this dissertation, which is supported by National Natural Science Foundation Program "Research on remote manipulation technology for micro-components based on controllable 3D ultrasonic radiation force field (No.50375144)", National High Technology Research and Development Program " Research on Key technologies of 3D tele-manipulation for micro and nano components based on ultrasonic radiation force (No. 2006AA04Z329)" and Key Project of Natural Science Foundation of Zhejiang Province "Research on theory and application of automatic 3D micro-assembly technology based on acoustic manipulation (No. Z1110393)". According to the characteristics of MEMS, by theoretical analysis and experimental study on the ultrasonic radiation force and torque of free-moving micro-components with complicated shape, the technology of spatial ultrasonic radiation force field synthesis was established to realize the precise control of ultrasonic radiation force and torque. This new technology can be applied in manipulation of micro-components and integrative assembly of MEMS, and can provide a general solution with self-owned intellectual property rights for the researches and productions of MEMS. The detailed contents and innovative points of this dissertation as below:In chapter one, by discussing the role and status of micromanipulation technology in MEMS, high-tech industries and the development of national economy, the significance to conduct the research on micromanipulation technology was described. The research status of the micromanipulation technology based on ultrasonic radiation force field was systematically summarized, its problems were observed and the research direction was pointed out.In chapter two, a universal scattering theory suitable for irregular Rayleigh scatterers in arbitrary sound fields was established to break out the limitation of the traditional theory that the incident sound field must be axisymmetric with respect to the scatterer. Besides, the theory was extended to the resonance scattering area by applying the T matrix method. The key basic problem in calculating ultrasonic radiation force and torque was solved.In chapter three, by applying the conservation law of entire momentum and angular momentum of sound intermediate and scatterer, a general framework for ultrasonic radiation force and torque was established. Then, the calculation of ultrasonic radiation force and torque on Rayleigh and resonant scatterers with irregular shape in arbitrary sound fields was realized to provide the theoretic foundation for the effective control of acoustic manipulation power source.In chapter four, in order to overcome the disadvantages of traditional ultrasonic field synthesizing methods that the sound source must be placed on the control boundary or the acoustic pressure can only be controlled point by point, a technology to synthesize ultrasonic field based on mode matching and inverse filtering was proposed, and the precise synthesis of ultrasonic fields in local area was also achieved by utilizing the attenuation property of Bessel function and inverse boundary element method. Meanwhile, in order to get the forward propagation operator, a new algorithm for sound field separation was raised by taking into consideration of the obstacle's disturbance in none-free space. This part of research provides the key technological guarantee for the controllable, precise and flexible manipulation of micro-components.In chapter five, according to different manipulation demands, the research on the synthesis and the adjustment of ultrasonic fields were carried out. Firstly, by adjusting the relative phase of plane waves, the positions of the acoustic potential wells were controlled to drive the micro-components to move along the desired route in wide range. Secondly, by utilizing the orbit angle moment of Laguerre-Gauss wave, the ultrasonic field is synthesized to endow the manipulation ability to trap and rotate the micro-components simultaneously through the interference of a Laguerre-Gauss wave with a plane wave of the same frequency but an opposite direction. Lastly, a strategy to pick up micro-components on a solid wall was raised, by synthesizing acoustic field using two symenetrically arranged incident plane waves.In chapter six, on the basis of completing the development of the multi-channel ultrasonic signal generator, ultrasonic annular array, ultrasonic field testing and microscopic imaging modular, an experiment platform for the synthesis and application of ultrasonic radiation force field was developed to satisfy the requirement of controllable synthesis of spatial acoustic fields and the application of micromanipulation. The noncontact manipulation experiments based on ultrasonic radiation force field were conducted by using above experiment platform. The results demonstrated the feasibility and effectiveness of the ultrasonic manipulation technology proposed in this dissertation and revealed its advantages including wide application range, high manipulation accuracy and suitability for manipulating micro-components.In chapter seven, the research results and the innovative points of this dissertation were summarized, and the future research works were also forecast.
The Micro Electro-Mechanical System (MEMS), as a kind of high technology which helps people to understand and change the microscopic world, always possesses intensive demand to effectively manipulate micro-components with micro to nano meters in its development history of 30 years, because of the challenges due to the dimension miniaturization of research objectives, the three-dimensional manufacture with high depth-to-width ratio and the diversity of manufacture process & material. Especially, as the quick development of MEMS from the manufacturing of elemental parts to the integrated systems, the micromanipulation technology becomes even more important and urgent. Hence, exploring new theories and mechanisms to develop this technology is now the most basic and key topic in MEMS area.Considering the characteristics of MEMS, a kind of nondestructive, noncontact and remote manipulation technology should be the main trend in the current research and development. Hence, the manipulation technology based on ultrasonic radiation force field represents the direction of development. However, the theoretic research of this technology is still limited to the calculation of the radiation force on vibrating micro sphere at balance position, and its application is mainly on seizing, suspending and picking of biological tissue and cells. The research on theories and applications oriented to the characteristics of manipulation of micro-components and assembly of MEMS is seldom carried out.Therefore, the key technologies of noncontact manipulation for micro-components based on ultrasonic radiation force field were studied in this dissertation, which is supported by National Natural Science Foundation Program "Research on remote manipulation technology for micro-components based on controllable 3D ultrasonic radiation force field (No.50375144)", National High Technology Research and Development Program " Research on Key technologies of 3D tele-manipulation for micro and nano components based on ultrasonic radiation force (No. 2006AA04Z329)" and Key Project of Natural Science Foundation of Zhejiang Province "Research on theory and application of automatic 3D micro-assembly technology based on acoustic manipulation (No. Z1110393)". According to the characteristics of MEMS, by theoretical analysis and experimental study on the ultrasonic radiation force and torque of free-moving micro-components with complicated shape, the technology of spatial ultrasonic radiation force field synthesis was established to realize the precise control of ultrasonic radiation force and torque. This new technology can be applied in manipulation of micro-components and integrative assembly of MEMS, and can provide a general solution with self-owned intellectual property rights for the researches and productions of MEMS. The detailed contents and innovative points of this dissertation as below:In chapter one, by discussing the role and status of micromanipulation technology in MEMS, high-tech industries and the development of national economy, the significance to conduct the research on micromanipulation technology was described. The research status of the micromanipulation technology based on ultrasonic radiation force field was systematically summarized, its problems were observed and the research direction was pointed out.In chapter two, a universal scattering theory suitable for irregular Rayleigh scatterers in arbitrary sound fields was established to break out the limitation of the traditional theory that the incident sound field must be axisymmetric with respect to the scatterer. Besides, the theory was extended to the resonance scattering area by applying the T matrix method. The key basic problem in calculating ultrasonic radiation force and torque was solved.In chapter three, by applying the conservation law of entire momentum and angular momentum of sound intermediate and scatterer, a general framework for ultrasonic radiation force and torque was established. Then, the calculation of ultrasonic radiation force and torque on Rayleigh and resonant scatterers with irregular shape in arbitrary sound fields was realized to provide the theoretic foundation for the effective control of acoustic manipulation power source.In chapter four, in order to overcome the disadvantages of traditional ultrasonic field synthesizing methods that the sound source must be placed on the control boundary or the acoustic pressure can only be controlled point by point, a technology to synthesize ultrasonic field based on mode matching and inverse filtering was proposed, and the precise synthesis of ultrasonic fields in local area was also achieved by utilizing the attenuation property of Bessel function and inverse boundary element method. Meanwhile, in order to get the forward propagation operator, a new algorithm for sound field separation was raised by taking into consideration of the obstacle's disturbance in none-free space. This part of research provides the key technological guarantee for the controllable, precise and flexible manipulation of micro-components.In chapter five, according to different manipulation demands, the research on the synthesis and the adjustment of ultrasonic fields were carried out. Firstly, by adjusting the relative phase of plane waves, the positions of the acoustic potential wells were controlled to drive the micro-components to move along the desired route in wide range. Secondly, by utilizing the orbit angle moment of Laguerre-Gauss wave, the ultrasonic field is synthesized to endow the manipulation ability to trap and rotate the micro-components simultaneously through the interference of a Laguerre-Gauss wave with a plane wave of the same frequency but an opposite direction. Lastly, a strategy to pick up micro-components on a solid wall was raised, by synthesizing acoustic field using two symenetrically arranged incident plane waves.In chapter six, on the basis of completing the development of the multi-channel ultrasonic signal generator, ultrasonic annular array, ultrasonic field testing and microscopic imaging modular, an experiment platform for the synthesis and application of ultrasonic radiation force field was developed to satisfy the requirement of controllable synthesis of spatial acoustic fields and the application of micromanipulation. The noncontact manipulation experiments based on ultrasonic radiation force field were conducted by using above experiment platform. The results demonstrated the feasibility and effectiveness of the ultrasonic manipulation technology proposed in this dissertation and revealed its advantages including wide application range, high manipulation accuracy and suitability for manipulating micro-components.In chapter seven, the research results and the innovative points of this dissertation were summarized, and the future research works were also forecast.
引文
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