三维超声辐射力场合成及其微操纵应用实验平台的研究
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摘要
为满足微机电系统对微构件操纵技术的强烈需求，本文结合国家自然科学基金项目《基于三维可控超声辐射力场的微构件遥操纵的研究》(50375144)和国家高技术研究发展计划(863计划)《基于超声辐射力的微纳构件三维遥操纵关键技术研究》(2006AA04Z330)，在对平面活塞换能器所产生的超声辐射力及其合成场进行分析计算的基础上，发展了一种基于超声辐射力的微纳构件三维遥操纵技术，并以ARM为中心测控单元，FPGA为接口模块，结合机器微视觉及图像处理单元，开发了一套基于三维超声辐射力场合成及其微操纵实验平台，利用该实验平台验证了本文所提出技术的可行性和有效性。具体工作在于：
第一章，综合论述了开展微操纵应用研究的重要意义，对微操纵技术及其系统的发展现状与趋势进行了系统地概括，指明了基于超声辐射力微操纵应用的可行性和优越性，提出了本论文的研究内容及各章节的安排。
第二章，在简要介绍声学基础知识和详细分析单个平面活塞换能器声场分布及其声场和辐射力关系的基础上，利用声波合成原理，建立了按不同空间位置放置的两个及多个平面活塞换能器合成声场及辐射力势分布理论和技术基础，并通过MATLAB仿真分析了利用超声辐射力实现三维微操纵的可行性和有效性。
第三章，在提出基于三维超声辐射力场合成及微操纵应用实验平台总体方案的基础上，详细分析了各功能模块的具体实现过程，并结合机器微视觉及图像处理单元，开发了一套基于三维超声辐射力场合成及微操纵应用实验平台。
第四章，应用本文所开发的基于三维超声辐射力场合成及微操纵应用实验平台，开展微操纵实验研究，并对实验结果与理论研究结果进行对比分析，验证了超声微操纵的可行性和优越性。
第五章，对全文的工作进行全面总结，并展望了下一步的研究方向。
In order to satisfy the needs of the manipulation of the micro-component in Micro-Electro-Mechanical Systems (MEMS), combing with National Natural Science Fund "The technical research on remote manipulation of micro-components based on 3D controllable ultrasonic radiation force filed" (50375144) and National High-Tech R & D Program (863 Program) " The key technical research on 3D remote manipulation of micro-components based on ultrasonic radiation force" (2006AA04Z330) , based on analyzing the ultrasonic radiation force and its synthesized field of plane piston transducer, 3D remote manipulation of micro-components based on ultrasonic radiation force are proposed, then associating with machine micro-vision system, using central control unit by ARM and interface unit by FPGA, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed, finally by using this system micro-manipulation experiment is practiced and the superiority is validated. The contents of this dissertation are presented as below:
Chapter 1, a survey of important role of the research on micro-manipulation is given, the review of current status and future development trend of micro-manipulation technology is summarized, the feasibility and superiority of the micro-manipulation technology is based on ultrasonic radiation force is indicated clearly, and then the research content of this dissertation is presented and each chapter of this dissertation is arranged.
Chapter 2, based on fundamental theory of acoustics, the sound field distribution of a plane piston transducer and the relationship between the sound field and radiation force are studied. Using ultrasonic wave synthetic theory, the sound field and radiation force potential distribution of two or more plane piston transducer placed different situation are established, then the feasibility of micro-manipulation using ultrasonic radiation force field are analyzed by MATLAB.
Chapter 3, after the whole schedule design of the three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is proposed, each function modules are analyzed in detail ,then combing with machine micro-vision system, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed.
Chapter 4, using the developed application experimental system of three -dimensional ultrasonic radiation force field synthesize, micro-manipulation experiment is practiced, then the feasibility and superiority are validated by comparing the experimental results with the theory .
Chapters 5, the main conclusions of this dissertation are summarized and the prospect for the application of ultrasonic radiation force is put forward.
第一章，综合论述了开展微操纵应用研究的重要意义，对微操纵技术及其系统的发展现状与趋势进行了系统地概括，指明了基于超声辐射力微操纵应用的可行性和优越性，提出了本论文的研究内容及各章节的安排。
第二章，在简要介绍声学基础知识和详细分析单个平面活塞换能器声场分布及其声场和辐射力关系的基础上，利用声波合成原理，建立了按不同空间位置放置的两个及多个平面活塞换能器合成声场及辐射力势分布理论和技术基础，并通过MATLAB仿真分析了利用超声辐射力实现三维微操纵的可行性和有效性。
第三章，在提出基于三维超声辐射力场合成及微操纵应用实验平台总体方案的基础上，详细分析了各功能模块的具体实现过程，并结合机器微视觉及图像处理单元，开发了一套基于三维超声辐射力场合成及微操纵应用实验平台。
第四章，应用本文所开发的基于三维超声辐射力场合成及微操纵应用实验平台，开展微操纵实验研究，并对实验结果与理论研究结果进行对比分析，验证了超声微操纵的可行性和优越性。
第五章，对全文的工作进行全面总结，并展望了下一步的研究方向。
In order to satisfy the needs of the manipulation of the micro-component in Micro-Electro-Mechanical Systems (MEMS), combing with National Natural Science Fund "The technical research on remote manipulation of micro-components based on 3D controllable ultrasonic radiation force filed" (50375144) and National High-Tech R & D Program (863 Program) " The key technical research on 3D remote manipulation of micro-components based on ultrasonic radiation force" (2006AA04Z330) , based on analyzing the ultrasonic radiation force and its synthesized field of plane piston transducer, 3D remote manipulation of micro-components based on ultrasonic radiation force are proposed, then associating with machine micro-vision system, using central control unit by ARM and interface unit by FPGA, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed, finally by using this system micro-manipulation experiment is practiced and the superiority is validated. The contents of this dissertation are presented as below:
Chapter 1, a survey of important role of the research on micro-manipulation is given, the review of current status and future development trend of micro-manipulation technology is summarized, the feasibility and superiority of the micro-manipulation technology is based on ultrasonic radiation force is indicated clearly, and then the research content of this dissertation is presented and each chapter of this dissertation is arranged.
Chapter 2, based on fundamental theory of acoustics, the sound field distribution of a plane piston transducer and the relationship between the sound field and radiation force are studied. Using ultrasonic wave synthetic theory, the sound field and radiation force potential distribution of two or more plane piston transducer placed different situation are established, then the feasibility of micro-manipulation using ultrasonic radiation force field are analyzed by MATLAB.
Chapter 3, after the whole schedule design of the three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is proposed, each function modules are analyzed in detail ,then combing with machine micro-vision system, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed.
Chapter 4, using the developed application experimental system of three -dimensional ultrasonic radiation force field synthesize, micro-manipulation experiment is practiced, then the feasibility and superiority are validated by comparing the experimental results with the theory .
Chapters 5, the main conclusions of this dissertation are summarized and the prospect for the application of ultrasonic radiation force is put forward.
引文
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[3] 席文明，姚斌等．微装配与微操作．北京：国防工业出版社，2005．
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[5] 孙立宁，孙绍云，荣伟彬．微操作机器人的发展现状．机器人，2002，24(2)：184-187．
[6] J. Hesselbach, S.Buttgenbach, J.Wrege, et. Centering electrostatic microgripper and magazine for microassembly tasks Proceedings of SPIE, Microrobotics and Micromanipulation, 2001, 4568: 270-277.
[7] Y.Zhou, B.J.Nelson. Adhesion force modeling and measurement for micromanipulation. Proceedings of SPIE, Microrobotics and Micromanipulation, 1998: 169-180.
[8] M.Takeuchi, R.Muragama, K.Kobayashi, T.Kojima. Laser ultrasonics micromanipulator. IEEE ULTRAONCS SYMPOSIUM, 2000: 681-686.
[9] K.Taguchi, K.Atsuta, T. Nakata and M.Ikeda. Experimental and theoretical study of single-beam optical fiber trap. SPIE, 1999, 3891: 238-245.
[10] A..Ashkin. Acceleration.and.trapping.of particals by radiation pressure. Phys.Rev. 970, 24: 156-159.
[11] K.Yasuda, S.S.Haupt, S.Umemura, et.al. Using acoustic radiation force as concentration method for erythrocytes. Acoust.Soc.Am. 1997, 102(1): 642-645.
[12] K.Philip, M.Charles, LI Q. Synthesis of gallium nitride nanorods through a carbon nanotube-confined reaction. Science, 1997, 277(5330): 1287.
[13] L.Jin, Z.Yixin, Y.Tianhua. Freeze tweezer to manipulate mini/micro objects. Journal of micromechanics and microengineering. 2004, 14: 269-276
[14] M.Sitti, H.Hashimoto. Controlled pushing of nanopaticles. IEEE Trans on mechantronics, 2000, 5 (2): 199—211.
[15] D.S.Haliyo, Y.Rollot, S.Regnier. Manipulation of micro-objects using adhesion forces and dynamical effects. Proc 2002 IEEE Publisher, 2002, 1949-1954.
[16] H.Lee, A.M.Purdon, R.M.Westerwelt. Micromanipulation of biological systems with micro-electromagnets. IEEE Transactions on Magnetics., 2004, 40(4): 2991-2993.
[17] H.Van-Brussel, J.Perirs, D.Reynaerts. Assembly of Microsystems. Annals of the CIRP. 2000, 49(2): 451-7472.
[18] K.Morishima., T.Fukuda, K.Yoshikawa. Manipulation of DNA molecule utilizing the conformational transition in the higher order structure of DNA. Proc ICRA, 1997, 3891, 1454-1459.
[19] R.Eriksen, V.Daria, J.Glockstsd. Fully dynamic multiple-beam optical tweezer. Optics Express, 2002, 10(14): 579-602.
[20] K.Sun, Y.Huang, P.Chen. Cell manipulation by use of diamond microparticles as handles of optical tweezer. J Opt Soc B, 2001, 18(10): 1483-1489.
[21] Chaumer P C, Rahmani A, Nieto Vesperinas M. Optical trapping and manipulation of nano-objects with an apermreless probe. Physical Review Letters. 2002, 88(12): 1-4.
[22] Albrecht H, Adrian N, Gerald R, et al. Positioning, displacement, and localization of cells using ultra-sonic forces. Biotechnology and Bioengineering, 2005, 92(1): 8-14.
[23] 解文军．声悬浮优化设计理论及其应用研究．西安：西北工业大学，2002．
[24] Jeremy J H, Joseph J C, David A, et al. Ultrasonic manipulation of particles in microgravity. J. Phys. D Appl. Phys, 1998, 31: 1673-1680.
[25] Hu J H, Li G R, Choy C L. A standing wave-type non-contact linear ultrasonic motor. IEEE Trans on UFFC, 2001, 48(3): 699-707.D
[26] Takeuchi M, Muragama R, Kobayashi K, et al. Laser ultrasonic micromanipulator. IEEE Ultrasonics Symposium, 2000: 681-686.
[27] Taguchi K, Atsuta K, Nakata T, et al. Experimental and theoretical study of single-beam optical fiber trap [J]. SPIE, 1999, 3891: 238-245.
[28] M.Takeuchi. Ultrasonic micromanipulator using visual feedbsck. IEEE Ultrasonics Symposium, 1997: 463-466.
[29] M.Takeuchi, R.Muragama, K.Kobayashi, T.Kojima. Laser ultrasonics micromanipulator. IEEE Ultrasonic symposium, 2000: 681-686.
[30] Teruyuki KOZUKA, Toru TUZIUTI. Three-dimensional acoustic micromanipulation using four ultrasonic transducers. 2000 international symposium on micromechatronics and human science, 2000: 201-206.
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