基于MEMS的微驱动器研制及其特性研究
摘要
本课题根据被动阀微泵的工作原理,提出了一种基于MEMS技术具
有V型微阀的新型微驱动器,对微驱动器结构中的PZT复合薄板、微阀
的制作、特性进行了工艺模拟,设计了相关制作工艺及版图尺寸,并实现
了微驱动器。通过理论分析给出方形PZT复合薄板的驱动电压与挠度、
复合薄板的厚度与挠度,复合薄板厚度与固有频率的关系,为方形硅杯结
构微系统器件的理论与实验的进一步比较分析提供了参考依据。在研制过
程中发现V型微阀设计制作的关键因素是硅各向异性腐蚀技术与设计尺
寸的关系,并给出了新型V阀微驱动器的流量、背压等测试方法。结果证
明采用MEMS技术研制的新型V阀微驱动器的工艺方案可行,工艺简单、
成本低、体积小,尤其适用于生物医学领域。
According to the principle of micropump with passive valve, this paper provides a new type of microactuator with V-microvalve, which is based on MEMS technology. Carrying out the technical simulation of the making and properties of microvalve, PZT composite thin plates which are the components of microactuator, designing the related fabrication process and scale of mask, then succeeding in operating this microactuator. With the theoretical analysis, it advances the relationship between the applied voltage and displace of square PZT composite thin plates, the relationship between thickness and displace of composite thin plates, also the relationship between thickness and inherent frequency of composite thin plates, Which providing reference for further comparing and analysing the theory and experiment of MEMS devices with square silicon cup. During the process, we find out that the crucial factor of designing and fabricating V-microvalve is the relationship between the technology of anisotropic etching of silicon and the structural measurements. This paper also provides the properties of this new type of microactuator with V-microvalve, such as flux, backward pressure and so on. The microactuator has the advantages of simple technology, low cost, small volume. especially on biomedical field.
有V型微阀的新型微驱动器,对微驱动器结构中的PZT复合薄板、微阀
的制作、特性进行了工艺模拟,设计了相关制作工艺及版图尺寸,并实现
了微驱动器。通过理论分析给出方形PZT复合薄板的驱动电压与挠度、
复合薄板的厚度与挠度,复合薄板厚度与固有频率的关系,为方形硅杯结
构微系统器件的理论与实验的进一步比较分析提供了参考依据。在研制过
程中发现V型微阀设计制作的关键因素是硅各向异性腐蚀技术与设计尺
寸的关系,并给出了新型V阀微驱动器的流量、背压等测试方法。结果证
明采用MEMS技术研制的新型V阀微驱动器的工艺方案可行,工艺简单、
成本低、体积小,尤其适用于生物医学领域。
According to the principle of micropump with passive valve, this paper provides a new type of microactuator with V-microvalve, which is based on MEMS technology. Carrying out the technical simulation of the making and properties of microvalve, PZT composite thin plates which are the components of microactuator, designing the related fabrication process and scale of mask, then succeeding in operating this microactuator. With the theoretical analysis, it advances the relationship between the applied voltage and displace of square PZT composite thin plates, the relationship between thickness and displace of composite thin plates, also the relationship between thickness and inherent frequency of composite thin plates, Which providing reference for further comparing and analysing the theory and experiment of MEMS devices with square silicon cup. During the process, we find out that the crucial factor of designing and fabricating V-microvalve is the relationship between the technology of anisotropic etching of silicon and the structural measurements. This paper also provides the properties of this new type of microactuator with V-microvalve, such as flux, backward pressure and so on. The microactuator has the advantages of simple technology, low cost, small volume. especially on biomedical field.
引文
2 赵亚溥.微型飞行器中的关键力学和智能材料问题.中国科学基金.2000,14(1):11-14
3 赵亚溥.智能微系统力学中的几个问题.石家庄铁道学院学报.1999,12 (2):13-18
4 蒋庄德等.微型自行走机构的研究.仪器仪表学报. 1996.170:284-286
5 Jiang Zhuangde, Wang Xiaobin. Micro mechanic Sensor. Proceedings JSMEJMIPE, Tokyo, 1996: 779-782
6 蒋庄德,卢德江等.微构件的机械性能测量.微米/纳米科学与技术. 1997.3(1):25-28
7 Jiang Zhuangde.Lu Dejiang.Functional Units in MEMS and the Pertinent
Research.Proceedings of lCM]”99.Xi’an.1 999:88—9】
8 M.Madou.Fundamentals of Microfabrication,CRC Press,Boca Raton,1 997
9 钱劲.一种新型微流量计的设计、制备及力学分析.2003:1
10 莫锦秋,梁庆华,汪国宝等.微机电系统设计与制造.化学工业出版社.2004:81
11 Xuan-Qi Wang, Qiao Lin, Yu-Chong Tai, A Parylene Micro Check Valve. 1999IEEE
12 王晓浩.周兆英.张文栋等.聚酰亚胺微型阀及其加工工艺.中国机械工程.1999.10(2):137-138
13 尹执中,庞江涛,胡桅林等.悬臂梁式微型阀.仪表技术与传感器.2000,3:38—41
14 K. Fred.Foster, L. Ronald. Bardell, A. Martin, et al. Afronmowitz. Design,
Fabrication and Testing of Fixed-valve Micropumps. Proceeding of ASME Fluids Engineering Division, 1995,234:39-44
15 L. Ronald. Bardell, R. Nigel. Sharma, K. Fred. Foster, et al. Designing High-performance Micropumps Based on No-moving-parts Valves. Microelectronmechanical Systems(MEMS)ASMA1997, 47-53
16 L. Ronald. Bardell, K. Fred. Foster. Impedences for Design of Microfluidic Systems. Proceedings of the Micro-TAS 98 Workshop, Banff, Canada, 1998,10:13-16
17 Ling-Sheng Jang, J. Christopher. Morris, R. Nigel. Sharma, et al. Transport of Particle-laden Fluids Through Fixed-naive Micropumps. ASME IMECE 1999, 10:14-19
18 Ling-Sheng Jang, R. Nigel. Sharma, K. Fred. Foster. The Effect of Particles on Performance of Fixed-valve Micropumps
19 J. G.. Smits. Piezoelectric Micropump with three valves working peristaltically. Sensors and Actuators. 1989, 20:203-206
20 Michael Koch et al. A novel micromachined pump based on thick-film piezoelectric actuation. Sensors and Actuators, 1998, A70:98-103
21 Van Lintel HTG, Van De Pol FCM, Bouwstra S. A piezoelectric micropump based on micromaching of silicon. Sensors and Actuators, 1988,15:153-167
22 Park Jung-Ho, Yoshida Kazuhiro, Yokota Shinichi.Resonantly driven piezoelectrtic micropump :Fab-rication of a micropump having high power density. Mechatronics, 1999, 9:687-702
23 M. Esashi, S. Shoji. Nakano A. Normally closed microvalve and micropump fabricated on a silicon wafer. Sensors and Actuators. 1989, 20:163-169
24 R. Zengerle, J. Ulrich, S.Kluge. A bi-directional silicon micropump. Sensors and Actuators, 1995, A50:81-86
25 R. Zengerle, W. Geigel, A. Richter. Application of microdiaphragm pumps in microfluid systems. 1994
26 杨岳,周兆英.叶雄英,等.双金属热致动微型泵.仪器仪表学报(增刊),1996.17(1):341-345
27 崔天宏. 周兆英,王晓浩等.硅微热致动泵设计及其加工工艺的研究.仪表技术与传感器,1998,8:10-13
28 尹执中,庞江涛,刘理天等.热驱动微泵薄膜式微型泵.清华大学学报(自然科学版),2000,40(6):36—38
29 罗玉元.张国贤.微泵驱动方式比较分析.液压与气动.2003,7:43—48
30 徐东,蔡炳初,丁桂甫等.新型的形状记忆合金/硅薄膜微驱动器.微细加工技术,1999,4:51-55
31 Eiji Makino, Takayuki Shibata, Kazuhiro Kato. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation. Sensors and Actuators, 1999, 75:156~161
32 F. C. M VandePol, D. G. J. Wonnink, M. Elwenspock, et al. A thermo pneumatic actuation principle for a microminiature pump and other micro-mechanical devices. Sensors and Actuators. 1989, 17:139
33 Ok Chan Jeong, Sang Sik Yang. Fabrication and test of ather mopneumatic micropump with a corrugated p+ diaphragm. Sensors and Actuators, 2000, 83:249-255
34 R.Rapp. et al. LIGA micropump for gases and liquids,Sensors and Actuators, 1994, A40:57-61
35 Anders Olsson, Goran Stemme, Erik Stemme. A valve-less planar fluid pump with two pump chambers.Sensors and Actuators A. 1995, 46-47:549-556
36 Anders Olsson. Goran Stemme, Erik Stemme. Diffuser-element design investigation for valve-less pumps. Sensors and Actuators A.1996,57:137-143.
37 A. Richter. H. Sandmaier.Electrohydrodynamic pumping and flow measurement. Proc. IEEE-MEMS Workshop: 99-104
38 G. Fuhr, R. Hagedom, T. Muller et al. Pumping of water solution in microfabricated electrohydrodynamic systems. Proc. IEEE- MEMS Workshop: 25-29
39 李志信,王沫然,谭立彦.相变型热驱动微泵泵送特性的实验.科学通报,2001,46(22):1927-1930
40 M. Sen, D. Wajerski, Gad-el-Hak. A novel pump for MEMS applications. J of Fluids Engineering ASME, 1996, 118: 624- 627
41 S. Bonhm, W. Olthuis, P. Bergveld. An integrated micromachined electrochemical pump and dosing. Journal of Biomedical Microdevices. 1999, 2:121-130
42 周兆英,王晓浩,等.微型机电系统.中国机械工程,2000,(1-2):163—168.
43 程光明,曾平,等.新结构压电泵实验研究.中国机电工程,1998,(8):18-20.
44 刘凯.压电驱动式主动阀压电泵理论与试验研究.吉林大学硕士学位论文.2004:9
45 阚军武,杨志刚,华顺明,等.有阀压电薄膜泵性能研究.农业机械学报.2003,34(5):84—87
46 江小宁,周兆英,李勇,等.微流量系统及其在微流体运动研究中的应用.仪器仪表学报.1995,16(1):346-351
47 程秀兰,蔡炳初,徐东,等.基于硅结构的微流体控制系统.2002,2:65
48 罗玉元,张国贤.微泵驱动方式比较研究.液压与气动.2003,7:46
49 温殿忠.力学量敏感器件原理与应用.黑龙江科学技术出版社1994:28-63
50 殷景华.王雅珍,鞠刚.功能材料概论.哈尔滨工业大学出版社.2002:169
51 姚林泉,胡银燕,俞焕然.具有压电材料弹性环形板的屈曲.力学学报.1998,30(2):233—237
52 范勇.压电致动式微泵的驱动装置结构分析与设计.西安电子科技大学.2001:25-29
53 张炎,林鸿溢.带质量块硅悬臂梁加速度传感器的特殊工艺传感器技术.1994,1:29—32
54 J. R. Gilert. G. K. Ananthasuresh. S. D. Senturia. 3D Modeling of Contact Problems and Hysteresis in Coupled ElectroMechanics. 9th Annual International Workshop on Micro Electro Mechanical Systems MEMS'96. San Diego, 1996:127-132
55 徐泰然.MEMS和微系统设计与制造.王晓浩.机械工业出版社,2004:346
56 刘晓为.车伟.王蔚等.微泵膜片在静电驱动下的计算机模拟.哈尔滨工业大学学报.1998.30(6):16-19
57 孙慧明,于泉等.半导体敏感元器件工艺原理.东北林业大学出版社.2000.68-145
58 厦门大学半导体物理教研室编.半导体器件工艺原理.人民教育出版版社.1997:20-294
59 武世香.一种新型接触式双面对版曝光机.电子工业专用设备 1994.23(2):48—51
60 温殿忠.力学量传感器原理及其应用.黑龙江科技出版社.1994:236—264
61 温殿忠,方华军.利用MEMS研制微型气流传感器的特性研究.传感器技术学.1998,51-55
62 温殿忠,庄玉光.邱成军.硅在KOH溶液中各向异性腐蚀机理的研究.黑龙江大学自然科学学报.1996:55-58
63 高晓童.热激励氮化硅谐振梁压力传感器的设计与制作.中国科学研究生院硕士学位论文:34-36
64 庞江涛.硅基MEMS微流量控制器件及其系统的研究.清华大学博士论文.1999:34
65 郝永芹. 光纤定位硅V型槽的设计与制作,长春理工大学硕士学位论文2002:44
3 赵亚溥.智能微系统力学中的几个问题.石家庄铁道学院学报.1999,12 (2):13-18
4 蒋庄德等.微型自行走机构的研究.仪器仪表学报. 1996.170:284-286
5 Jiang Zhuangde, Wang Xiaobin. Micro mechanic Sensor. Proceedings JSMEJMIPE, Tokyo, 1996: 779-782
6 蒋庄德,卢德江等.微构件的机械性能测量.微米/纳米科学与技术. 1997.3(1):25-28
7 Jiang Zhuangde.Lu Dejiang.Functional Units in MEMS and the Pertinent
Research.Proceedings of lCM]”99.Xi’an.1 999:88—9】
8 M.Madou.Fundamentals of Microfabrication,CRC Press,Boca Raton,1 997
9 钱劲.一种新型微流量计的设计、制备及力学分析.2003:1
10 莫锦秋,梁庆华,汪国宝等.微机电系统设计与制造.化学工业出版社.2004:81
11 Xuan-Qi Wang, Qiao Lin, Yu-Chong Tai, A Parylene Micro Check Valve. 1999IEEE
12 王晓浩.周兆英.张文栋等.聚酰亚胺微型阀及其加工工艺.中国机械工程.1999.10(2):137-138
13 尹执中,庞江涛,胡桅林等.悬臂梁式微型阀.仪表技术与传感器.2000,3:38—41
14 K. Fred.Foster, L. Ronald. Bardell, A. Martin, et al. Afronmowitz. Design,
Fabrication and Testing of Fixed-valve Micropumps. Proceeding of ASME Fluids Engineering Division, 1995,234:39-44
15 L. Ronald. Bardell, R. Nigel. Sharma, K. Fred. Foster, et al. Designing High-performance Micropumps Based on No-moving-parts Valves. Microelectronmechanical Systems(MEMS)ASMA1997, 47-53
16 L. Ronald. Bardell, K. Fred. Foster. Impedences for Design of Microfluidic Systems. Proceedings of the Micro-TAS 98 Workshop, Banff, Canada, 1998,10:13-16
17 Ling-Sheng Jang, J. Christopher. Morris, R. Nigel. Sharma, et al. Transport of Particle-laden Fluids Through Fixed-naive Micropumps. ASME IMECE 1999, 10:14-19
18 Ling-Sheng Jang, R. Nigel. Sharma, K. Fred. Foster. The Effect of Particles on Performance of Fixed-valve Micropumps
19 J. G.. Smits. Piezoelectric Micropump with three valves working peristaltically. Sensors and Actuators. 1989, 20:203-206
20 Michael Koch et al. A novel micromachined pump based on thick-film piezoelectric actuation. Sensors and Actuators, 1998, A70:98-103
21 Van Lintel HTG, Van De Pol FCM, Bouwstra S. A piezoelectric micropump based on micromaching of silicon. Sensors and Actuators, 1988,15:153-167
22 Park Jung-Ho, Yoshida Kazuhiro, Yokota Shinichi.Resonantly driven piezoelectrtic micropump :Fab-rication of a micropump having high power density. Mechatronics, 1999, 9:687-702
23 M. Esashi, S. Shoji. Nakano A. Normally closed microvalve and micropump fabricated on a silicon wafer. Sensors and Actuators. 1989, 20:163-169
24 R. Zengerle, J. Ulrich, S.Kluge. A bi-directional silicon micropump. Sensors and Actuators, 1995, A50:81-86
25 R. Zengerle, W. Geigel, A. Richter. Application of microdiaphragm pumps in microfluid systems. 1994
26 杨岳,周兆英.叶雄英,等.双金属热致动微型泵.仪器仪表学报(增刊),1996.17(1):341-345
27 崔天宏. 周兆英,王晓浩等.硅微热致动泵设计及其加工工艺的研究.仪表技术与传感器,1998,8:10-13
28 尹执中,庞江涛,刘理天等.热驱动微泵薄膜式微型泵.清华大学学报(自然科学版),2000,40(6):36—38
29 罗玉元.张国贤.微泵驱动方式比较分析.液压与气动.2003,7:43—48
30 徐东,蔡炳初,丁桂甫等.新型的形状记忆合金/硅薄膜微驱动器.微细加工技术,1999,4:51-55
31 Eiji Makino, Takayuki Shibata, Kazuhiro Kato. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation. Sensors and Actuators, 1999, 75:156~161
32 F. C. M VandePol, D. G. J. Wonnink, M. Elwenspock, et al. A thermo pneumatic actuation principle for a microminiature pump and other micro-mechanical devices. Sensors and Actuators. 1989, 17:139
33 Ok Chan Jeong, Sang Sik Yang. Fabrication and test of ather mopneumatic micropump with a corrugated p+ diaphragm. Sensors and Actuators, 2000, 83:249-255
34 R.Rapp. et al. LIGA micropump for gases and liquids,Sensors and Actuators, 1994, A40:57-61
35 Anders Olsson, Goran Stemme, Erik Stemme. A valve-less planar fluid pump with two pump chambers.Sensors and Actuators A. 1995, 46-47:549-556
36 Anders Olsson. Goran Stemme, Erik Stemme. Diffuser-element design investigation for valve-less pumps. Sensors and Actuators A.1996,57:137-143.
37 A. Richter. H. Sandmaier.Electrohydrodynamic pumping and flow measurement. Proc. IEEE-MEMS Workshop: 99-104
38 G. Fuhr, R. Hagedom, T. Muller et al. Pumping of water solution in microfabricated electrohydrodynamic systems. Proc. IEEE- MEMS Workshop: 25-29
39 李志信,王沫然,谭立彦.相变型热驱动微泵泵送特性的实验.科学通报,2001,46(22):1927-1930
40 M. Sen, D. Wajerski, Gad-el-Hak. A novel pump for MEMS applications. J of Fluids Engineering ASME, 1996, 118: 624- 627
41 S. Bonhm, W. Olthuis, P. Bergveld. An integrated micromachined electrochemical pump and dosing. Journal of Biomedical Microdevices. 1999, 2:121-130
42 周兆英,王晓浩,等.微型机电系统.中国机械工程,2000,(1-2):163—168.
43 程光明,曾平,等.新结构压电泵实验研究.中国机电工程,1998,(8):18-20.
44 刘凯.压电驱动式主动阀压电泵理论与试验研究.吉林大学硕士学位论文.2004:9
45 阚军武,杨志刚,华顺明,等.有阀压电薄膜泵性能研究.农业机械学报.2003,34(5):84—87
46 江小宁,周兆英,李勇,等.微流量系统及其在微流体运动研究中的应用.仪器仪表学报.1995,16(1):346-351
47 程秀兰,蔡炳初,徐东,等.基于硅结构的微流体控制系统.2002,2:65
48 罗玉元,张国贤.微泵驱动方式比较研究.液压与气动.2003,7:46
49 温殿忠.力学量敏感器件原理与应用.黑龙江科学技术出版社1994:28-63
50 殷景华.王雅珍,鞠刚.功能材料概论.哈尔滨工业大学出版社.2002:169
51 姚林泉,胡银燕,俞焕然.具有压电材料弹性环形板的屈曲.力学学报.1998,30(2):233—237
52 范勇.压电致动式微泵的驱动装置结构分析与设计.西安电子科技大学.2001:25-29
53 张炎,林鸿溢.带质量块硅悬臂梁加速度传感器的特殊工艺传感器技术.1994,1:29—32
54 J. R. Gilert. G. K. Ananthasuresh. S. D. Senturia. 3D Modeling of Contact Problems and Hysteresis in Coupled ElectroMechanics. 9th Annual International Workshop on Micro Electro Mechanical Systems MEMS'96. San Diego, 1996:127-132
55 徐泰然.MEMS和微系统设计与制造.王晓浩.机械工业出版社,2004:346
56 刘晓为.车伟.王蔚等.微泵膜片在静电驱动下的计算机模拟.哈尔滨工业大学学报.1998.30(6):16-19
57 孙慧明,于泉等.半导体敏感元器件工艺原理.东北林业大学出版社.2000.68-145
58 厦门大学半导体物理教研室编.半导体器件工艺原理.人民教育出版版社.1997:20-294
59 武世香.一种新型接触式双面对版曝光机.电子工业专用设备 1994.23(2):48—51
60 温殿忠.力学量传感器原理及其应用.黑龙江科技出版社.1994:236—264
61 温殿忠,方华军.利用MEMS研制微型气流传感器的特性研究.传感器技术学.1998,51-55
62 温殿忠,庄玉光.邱成军.硅在KOH溶液中各向异性腐蚀机理的研究.黑龙江大学自然科学学报.1996:55-58
63 高晓童.热激励氮化硅谐振梁压力传感器的设计与制作.中国科学研究生院硕士学位论文:34-36
64 庞江涛.硅基MEMS微流量控制器件及其系统的研究.清华大学博士论文.1999:34
65 郝永芹. 光纤定位硅V型槽的设计与制作,长春理工大学硕士学位论文2002:44
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