莫尔条纹细分理论及其在磨床测控系统中的应用研究
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摘要
莫尔条纹信号细分技术是光栅计量技术的核心,采用先进的莫尔条纹细分方法来获得不满一个栅距内的位移变化量是提高光栅测量系统分辨率的关键。目前常用的细分方法在实际应用中存在不足之处,因此,对光栅莫尔条纹信号细分方法进行研究,探寻最佳的细分方案具有十分重要的意义。本文主要研究新型莫尔条纹信号细分理论及其在光栅位移测量系统和磨床测控系统中的应用。
基于数字集成化设计思想,提出了新型锁相位移式光栅莫尔条纹信号细分理论,并用数学的方法论证了其细分及辨向的可行性与正确性。该方法将光栅传感器的输出信号进行相位调制,经带通滤波后再送入锁相倍频器细分。通过相位调制,把光栅传感器输出的空间位移信号转变为与之成正比的时间信号,使原来对空间位移量的测量转化为对时间信号相位角的测量,解决了原模拟细分中存在的、随细分数增加位移跟踪速度显著下降以及细分数受温度、电源、元器件参数变化影响严重等主要矛盾。通过采用引入一个恒频、引入一个相位量、引入一个细分基准信号等主要措施,解决了三个关键技术问题,使得该方法具有细分的同时即可完成辨向、可避免绝大多数细分方法所采用的大小数分别计数而产生的不协调、既适合完整周期测量又适合不完整周期测量、细分数高且调整方便、不仅能进行动态测量也能进行静态测量等优点。同时,还提出了利用乘法倍频技术对光栅原始信号进行修正,以降低对原始信号正交性、等幅性等方面要求,进一步增强该细分方法实用性的设计思想。
以新型锁相式莫尔条纹信号细分理论为基础,研制了光栅位移测量系统,改变原来利用分立数字逻辑电路进行系统设计的思路,提出集成化设计的思想。将细分模块及系统的数字逻辑电路集成在一片可编程逻辑器件中,大大提高了系统的集成度。通过实验验证了该系统具有分辨率高、跟踪速度快、可靠性及抗干扰能力强等特点。
对基于神经网络的莫尔条纹信号细分方法进行了研究,提出采用整周期硬件计数、辨向和周期内神经网络软件细分相结合的方法,并提出两种提高细分精度的措施。利用少量学习样本让神经网络学习后,对于任意输入值,经过神经网络的泛化,都可以产生高精度的输出。由于训练时采用光栅输出的正、余弦信号比作为网络的输入,消除了幅值波动对细分精度带来的影响。该细分方法硬件电路简单,分辨率、可靠性较高,具有一定的实用价值。
在研究分析磨床测控系统国内外现状及发展趋势的基础上,提出了采用专用微小型光栅传感器取代原来电感线圈,测量磨加工过程中工件尺寸变化的设计思想,改变了我国近30年来一直使用的电感测量的传统方法,有效克服了电感线圈的非线性误差和测控精度受周围环境温湿度变化影响严重的弊端。基于本文提出的新型数字化锁相细分理论,利用在系统可编程技术,对磨床测控系统进行了全数字集成化设计。采用微处理器与现场可编程门阵列相结合的并行处理方式,把FPGA作为单片机的一个嵌入式芯片,专门用于对光栅莫尔条纹信号的细分、辨向、计数处理及系统数字逻辑电路的集成化设计,提高了处理速度,保证了系统对被加工工件磨削量的实时测量与控制。
系统设计过程中提出了基于FPGA的部分串行结构FIR滤波器设计思想,与完全串行结构相比,成倍提高了运算速度,减少了运算延迟;与完全并行结构相比,减少了逻辑单元的消耗。此外,还提出一种基于FPGA的新型数字锁相倍频方法,利用整数分频组合实现了小数分频。通过仿真分析,证明了该方法具有细分精度高、锁相速度快等优点。
论述了智能磨床测控系统的软件设计思想及部分功能实现方法,增设了在线补偿、快速驱动、自校等功能,使系统具有更加优良的性能。通过磨削实验及测试,证实了该系统具有良好的重复性,满足国家标准要求,同时验证了系统具有测控精度高、功能齐全、操作方便、实用性强等特点,为实现我国磨床行业高端产品的国产化奠定了坚实的基础。
The Moire fringe signal subdivision technology is the core of the grating measurement technology. To obtain the displacement variation less than one grating distance with advaced Moire fringe signal subdivision method is a key in enhancing the resolution of grating measurement system. However, the commonly used subdivision methods exhibit some disadvantages in practical application. Obviously, it is of very important significance to perform the research on the Moire fringe signal subdivision method and to search the optimal subdivision scheme. In the present investigation, new Moire fringe signal subdivision theory and its application in both grating displacement measure system and grinder measure and control system have been discussed.
Based on the digital integrated design idea, new phase-locking displacement grating Moire fringe signal subdivision theory was proposed. And both feasibility and validity of the proposed theory in subdivision and direction seeking were demonstrated with the mathematical method. In the present method, the phase modulation for the output signal of the grating sensor is conducted, and then the modulated signal is subdivided in phase-locking frequency multiplier after band-pass filtrating. The spatial displacement signal outputted by grating sensor is transferred into the directly proportional time signal through phase modulation. Thus, the original measurement for the spatial displacement is transformed into the measurement for the phase angle of time signal. Farthermore, the significant decrease of displacement tracing velocity with subdivision number as well as the serious influence of the variation in temperature, power and component parameters on the subdivision number can be avoided. Through introducing a constant frequency, a phase mass and a subdivision reference signal, three key problems get solved. And thus, the proposed method can synchronously finish both subdivision and direction seeking, avoid the uncoordination from individual counting in most subdivision methods, and is available for both complete period measurement and incomplete period measurement. In addition, the proposed method has such advantages as high subdivision number and convenient adjustment, and can be used for conducting the static and dynamic measurement. At the same time, the design idea that the original grating signal is modified with the frequency multiplication technology in order to reduce the requirement in the orthogonality and equal-amplitude as well as enhance further the practicality of the present subdivision method has been proposed.
On the basis of new phase-locking Moire fringe signal subdivision theory, the grating displacement measuring system was developed. The original system design scheme adopting the discrete digital logic circuit was replaced, and the integrated design idea was proposed. Because the subdivision module and digital logic circuit are integrated in one programmable logic device, the integration degree of the system is considerably enhanced. It has been experimentally proved that the present system has such characteristics as high resolution, rapid tracing ability, good reliability and strong disturbance resistance.
Through investigating the Moire fringe signal subdivision based on neural network, the method to combine the complete period hardware counting and direction seeking with the period inside neural network softeware subdivision was proposed. Two measures to enhance the subdivision precision were presented. With allowing neural network to learn a few learning samples and by the generalization of neural network for discretional input value, very precise output can be attained. Because the sine-cosine signal ratio of grating output is taken as the input of network during training, the influence of the amplitude fluctuation on the subdivision precision gets eliminated. The proposed subdivision method has such advantages as the simple hardware circuit as well as the higher resolution and reliability, and is of some practical application value.
By analyzing the present status and development tendence of grinder measure and control system, the design idea to replace inductance coil with special mini grating sensor and to measure the dimensional variation in grinding process was proposed. The traditional inductance measuring method used for 30 years in our country is changed, and the nonlinear error from inductance coil as well as the serious influence of environmental temperature and humidity on measure and control precision get effectively avoided. Based on the proposed digital phase-locking subdivision theory and with utilizing the programable technology, the full digital integrated design was carried out for grinder measure and control system. With the parallel processing mode combining micro processor and field programable gate array, the FPGA was taken as a embedded chip of microcontroller and specially applied in the subdivision, direction seeking and count processing of grating Moire fringe signal as well as the integrated design of digital logic circuit. Thus, the processing speed of the system gets increased, and the real-time measure and control of the system for the grinding quantity of processed parts can be ensured.
The partial serial FIR filter based on FPGA was adoped in the design of the system. Compared with the complete serial structure, the partial serial structure can considerably increase the operation velocity and reduce the operation delay. On the other hand, the partial serial structure can decrease the consumption of logic uint, compared with the complete parallel structure. In addition, a digital phase-locking frequency multiplication method based on FPGA was proposed, where the decimal frequency-division was realized using the integral frequency-division assemble. The simulation analysis proves that the proposed method has such advantages as high subdivision precision and large phase-locking velocity.
The software design idea of intelligent grinder measure and control system as well as the realization method of partial functions were introduced. Such functions as on-line compensation, rapid drive and self-check were added, which can ensure the excellent performance of the system. The grinding tests prove that the system exhibits good repeatability and can meet the requirement of national standard. In addition, it has been demonstrated that the system has such characteristics as high measure and control precision, integrated function, easy operation and obvious practicability, which settles good foundation for home manufacturing of top-end products in Chinese grinding machine industry.
基于数字集成化设计思想,提出了新型锁相位移式光栅莫尔条纹信号细分理论,并用数学的方法论证了其细分及辨向的可行性与正确性。该方法将光栅传感器的输出信号进行相位调制,经带通滤波后再送入锁相倍频器细分。通过相位调制,把光栅传感器输出的空间位移信号转变为与之成正比的时间信号,使原来对空间位移量的测量转化为对时间信号相位角的测量,解决了原模拟细分中存在的、随细分数增加位移跟踪速度显著下降以及细分数受温度、电源、元器件参数变化影响严重等主要矛盾。通过采用引入一个恒频、引入一个相位量、引入一个细分基准信号等主要措施,解决了三个关键技术问题,使得该方法具有细分的同时即可完成辨向、可避免绝大多数细分方法所采用的大小数分别计数而产生的不协调、既适合完整周期测量又适合不完整周期测量、细分数高且调整方便、不仅能进行动态测量也能进行静态测量等优点。同时,还提出了利用乘法倍频技术对光栅原始信号进行修正,以降低对原始信号正交性、等幅性等方面要求,进一步增强该细分方法实用性的设计思想。
以新型锁相式莫尔条纹信号细分理论为基础,研制了光栅位移测量系统,改变原来利用分立数字逻辑电路进行系统设计的思路,提出集成化设计的思想。将细分模块及系统的数字逻辑电路集成在一片可编程逻辑器件中,大大提高了系统的集成度。通过实验验证了该系统具有分辨率高、跟踪速度快、可靠性及抗干扰能力强等特点。
对基于神经网络的莫尔条纹信号细分方法进行了研究,提出采用整周期硬件计数、辨向和周期内神经网络软件细分相结合的方法,并提出两种提高细分精度的措施。利用少量学习样本让神经网络学习后,对于任意输入值,经过神经网络的泛化,都可以产生高精度的输出。由于训练时采用光栅输出的正、余弦信号比作为网络的输入,消除了幅值波动对细分精度带来的影响。该细分方法硬件电路简单,分辨率、可靠性较高,具有一定的实用价值。
在研究分析磨床测控系统国内外现状及发展趋势的基础上,提出了采用专用微小型光栅传感器取代原来电感线圈,测量磨加工过程中工件尺寸变化的设计思想,改变了我国近30年来一直使用的电感测量的传统方法,有效克服了电感线圈的非线性误差和测控精度受周围环境温湿度变化影响严重的弊端。基于本文提出的新型数字化锁相细分理论,利用在系统可编程技术,对磨床测控系统进行了全数字集成化设计。采用微处理器与现场可编程门阵列相结合的并行处理方式,把FPGA作为单片机的一个嵌入式芯片,专门用于对光栅莫尔条纹信号的细分、辨向、计数处理及系统数字逻辑电路的集成化设计,提高了处理速度,保证了系统对被加工工件磨削量的实时测量与控制。
系统设计过程中提出了基于FPGA的部分串行结构FIR滤波器设计思想,与完全串行结构相比,成倍提高了运算速度,减少了运算延迟;与完全并行结构相比,减少了逻辑单元的消耗。此外,还提出一种基于FPGA的新型数字锁相倍频方法,利用整数分频组合实现了小数分频。通过仿真分析,证明了该方法具有细分精度高、锁相速度快等优点。
论述了智能磨床测控系统的软件设计思想及部分功能实现方法,增设了在线补偿、快速驱动、自校等功能,使系统具有更加优良的性能。通过磨削实验及测试,证实了该系统具有良好的重复性,满足国家标准要求,同时验证了系统具有测控精度高、功能齐全、操作方便、实用性强等特点,为实现我国磨床行业高端产品的国产化奠定了坚实的基础。
The Moire fringe signal subdivision technology is the core of the grating measurement technology. To obtain the displacement variation less than one grating distance with advaced Moire fringe signal subdivision method is a key in enhancing the resolution of grating measurement system. However, the commonly used subdivision methods exhibit some disadvantages in practical application. Obviously, it is of very important significance to perform the research on the Moire fringe signal subdivision method and to search the optimal subdivision scheme. In the present investigation, new Moire fringe signal subdivision theory and its application in both grating displacement measure system and grinder measure and control system have been discussed.
Based on the digital integrated design idea, new phase-locking displacement grating Moire fringe signal subdivision theory was proposed. And both feasibility and validity of the proposed theory in subdivision and direction seeking were demonstrated with the mathematical method. In the present method, the phase modulation for the output signal of the grating sensor is conducted, and then the modulated signal is subdivided in phase-locking frequency multiplier after band-pass filtrating. The spatial displacement signal outputted by grating sensor is transferred into the directly proportional time signal through phase modulation. Thus, the original measurement for the spatial displacement is transformed into the measurement for the phase angle of time signal. Farthermore, the significant decrease of displacement tracing velocity with subdivision number as well as the serious influence of the variation in temperature, power and component parameters on the subdivision number can be avoided. Through introducing a constant frequency, a phase mass and a subdivision reference signal, three key problems get solved. And thus, the proposed method can synchronously finish both subdivision and direction seeking, avoid the uncoordination from individual counting in most subdivision methods, and is available for both complete period measurement and incomplete period measurement. In addition, the proposed method has such advantages as high subdivision number and convenient adjustment, and can be used for conducting the static and dynamic measurement. At the same time, the design idea that the original grating signal is modified with the frequency multiplication technology in order to reduce the requirement in the orthogonality and equal-amplitude as well as enhance further the practicality of the present subdivision method has been proposed.
On the basis of new phase-locking Moire fringe signal subdivision theory, the grating displacement measuring system was developed. The original system design scheme adopting the discrete digital logic circuit was replaced, and the integrated design idea was proposed. Because the subdivision module and digital logic circuit are integrated in one programmable logic device, the integration degree of the system is considerably enhanced. It has been experimentally proved that the present system has such characteristics as high resolution, rapid tracing ability, good reliability and strong disturbance resistance.
Through investigating the Moire fringe signal subdivision based on neural network, the method to combine the complete period hardware counting and direction seeking with the period inside neural network softeware subdivision was proposed. Two measures to enhance the subdivision precision were presented. With allowing neural network to learn a few learning samples and by the generalization of neural network for discretional input value, very precise output can be attained. Because the sine-cosine signal ratio of grating output is taken as the input of network during training, the influence of the amplitude fluctuation on the subdivision precision gets eliminated. The proposed subdivision method has such advantages as the simple hardware circuit as well as the higher resolution and reliability, and is of some practical application value.
By analyzing the present status and development tendence of grinder measure and control system, the design idea to replace inductance coil with special mini grating sensor and to measure the dimensional variation in grinding process was proposed. The traditional inductance measuring method used for 30 years in our country is changed, and the nonlinear error from inductance coil as well as the serious influence of environmental temperature and humidity on measure and control precision get effectively avoided. Based on the proposed digital phase-locking subdivision theory and with utilizing the programable technology, the full digital integrated design was carried out for grinder measure and control system. With the parallel processing mode combining micro processor and field programable gate array, the FPGA was taken as a embedded chip of microcontroller and specially applied in the subdivision, direction seeking and count processing of grating Moire fringe signal as well as the integrated design of digital logic circuit. Thus, the processing speed of the system gets increased, and the real-time measure and control of the system for the grinding quantity of processed parts can be ensured.
The partial serial FIR filter based on FPGA was adoped in the design of the system. Compared with the complete serial structure, the partial serial structure can considerably increase the operation velocity and reduce the operation delay. On the other hand, the partial serial structure can decrease the consumption of logic uint, compared with the complete parallel structure. In addition, a digital phase-locking frequency multiplication method based on FPGA was proposed, where the decimal frequency-division was realized using the integral frequency-division assemble. The simulation analysis proves that the proposed method has such advantages as high subdivision precision and large phase-locking velocity.
The software design idea of intelligent grinder measure and control system as well as the realization method of partial functions were introduced. Such functions as on-line compensation, rapid drive and self-check were added, which can ensure the excellent performance of the system. The grinding tests prove that the system exhibits good repeatability and can meet the requirement of national standard. In addition, it has been demonstrated that the system has such characteristics as high measure and control precision, integrated function, easy operation and obvious practicability, which settles good foundation for home manufacturing of top-end products in Chinese grinding machine industry.
引文
[1]谭为民.差线栅位移传感器原理与参数设计准则及其实验研究[博士学位论文].重庆:重庆大学,2004.
[2]卢国纲.直线位移传感器发展的回顾和当今产品.功能部件,2005(1):78.
[3]卢国纲.从CIMT2005看世界位移测量技术及其产业的发展.功能部件,2005(4):48-50.
[4]约翰内斯.海德汉的新型测量产品.航空制造技术,2008(6):102-103.
[5]MA Xiu-shuia,FEI Ye-taia,CHEN Xiao-huaia.New measuring scale of CMMs.3rd International Symposium on Instrumentation Science and Technology,Aug.2004,Xi'an,China.1-0906-1-0910.
[6]Zhang Zhaozong,Zhang Haifeng.Nanometer grating technology and its research direction.Proceedings of 2nd International Symposium on Science and Technology,Harbin Institute of Technology Press,2002:100-104.
[7]Zhang Guoxiong.The development tendency of coordinate measuring machines.China Mechanical Engineering,2000,11(1/2):222-226.
[8]金喜平,李书平,刘永胜.高速高精度光栅数显装置的研究与设计.沈阳工业大学学报,1994,16(2):18-25.
[9]苏绍璟.大量程纳米级光栅位移测量理论及关键技术研究[博士学位论文].长沙:国防科学技术大学,2001.
[10]楚兴春.纳米光栅干涉位移测量关键技术的研究[博士学位论文].长沙:国防科学技术大学,2005.
[11]刘逊.机床用光栅测量技术的最新发展.天津:海德汉光学电子有限公司,2004.
[12]Heidenhain.封闭式光栅尺.天津:海德汉光学电子有限公司,2004:58-58.
[13]Heidenhain.单场扫描封闭式光栅.天津:海德汉光学电子有限公司,2004.
[14]Loewen E G,Popov E.Diffraction gratings and application.New York:Marcil Dekker,1997.
[15]Richardson.Richards on grating laboratory.Diffraction Grating Handbook.4~(th) Edition,2002.
[16]夏豪杰.高精度二维平面光栅测量系统及关键技术研究[博士学位论文].合肥:合肥工业大学,2006.
[17]吴柏林.中国机床工具行业 机遇前所未有挑战更加严峻.机械工程师,2008(1):5-8.
[18]单东日,张青.我国高速、高精、复合数控机床研发目标及关键技术.制造技术与机床,2009(6):38-42.
[19]Liu Dejun,Che Rensheng,Ye Dong,et al.Error modeling and simulation of 3.DOF parallel link coordinate measuring machine.China Mechanical Engineering,2001,12(7):752-755.
[20]Richardson Grating Laboratory.Diffraction Grating Handbook,2002.
[21]张善钟.计量光栅技术.北京:机械工业出版社,1985.
[22]Popov E K,Loewen E G,Nevicre M.Transmission grating for beam sampling and beam splitting.Applied Optics,1996(35):3072-3075.
[23]Zhang Z Z,Zhang H F.Nanometer grating technology and its research direction.Proceedings of 2~(nd) International Symposium on Instrument Science and Technology.Harbin Institute of Technology Press,2002,2:100-104.
[24]李谋.位置检测与数显技术.北京:机械工业出版社,1992.
[25]李怀琼,陈钱,王钰.新型光栅信号数字细分技术及其误差分析.计量学报,2001,22(4):281-283.
[26]谌延政,吕海宝.CCD细分技术方法研究及应用.光学学报,2002,22(11):1396-1399.
[27]Fouzar Y,Sawan M,Savaria Y.Very short locking time PLL based on controlled gain technique.Eleetronies,Cireuits and Systems,ICECS 2000.
[28]Olsson T,Nilsson P.An all-digital PLL clock multiplier.ASIC Proeeedings.2002 IEEE Asia-Paeifie Conference.
[29]GARDNER F M.Charge-pump phase-locked loops.IEEE Trans and Com,2006,COM-28:1849-1859.
[30]Olsson T,Nilsson P.A digitally controlled PLL for SoC applieations,solid-state cireuits.IEEE,2004.
[31]Jin S C,Kuang Y C.The design of an All-digital phase-locked loop with small Dco hardware and fast phase lock[J].IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1999,46(7):945-950.
[32]郭雨梅,崔晋玲,刘雪艳,等.锁相式莫尔条纹信号细分方法的研究.哈尔滨工业大学学报,2007,39(9):1496-1498.
[33]郭雨梅,崔晋玲.乘法倍频对锁相式莫尔条纹信号细分方法的改进.上海交通大学学报,2009,43(5):837-840.
[34]赵立民,于海雁,胡庆.可编程逻辑器件与数字系统设计.北京:机械工业出版社,2003.
[35]万敏,王厚军.在系统可编程逻辑器件的研究与应用.仪器仪表用户,2005,12(6):80-81.
[36]李景华,杜玉远.可编程逻辑器件与EDA技术.沈阳:东北大学出版社,2000.
[37]金喜平,杨孟华,郭雨梅.ISP技术在光栅检测装置中的应用.沈阳工业大学学报,2002,24(1):36-38.
[38]郭雨梅,刘启林.ISP技术在磨床测控系统中的应用.仪表技术与传感器,2007(3):71-72.
[39]郭雨梅,王楠,常丽.数字集成化光栅数显装置的研究与设计.仪表技术与传感器,2005(5):58-59.
[40]Lattice Semiconductor Corporation.Lattice Semiconductor Data Book,1996.
[41]Su S Y,Lu H B,Zhou W H.A software solution to counting and subdivision of moire fringes with wide dynamic range.Proceedings of SPIE,2000,4222:308-312.
[42]刘绍汉,林灶生,刘新民.VHDL芯片设计.北京:清华大学出版社,2004.
[43]Navabi Z.VHDL analysis and modeling of digital system.McGraw-Hill,1993.
[44]尹佳喜,康勇,牛国彬,等.基于ispLSI1032E的数字式移相信号发生器.电子工程师,2005,31(2):49-51.
[45]程琼,黄圣超,王淑青,等.基于ISP技术的单片机与CPLD实验系统设计.实验科学与技术,2009,7(1):71-75.
[46]王小兵,金锋.一种改进的全数字化锁相环在光栅位置检测中的应用.仪器仪表学报,2004,25(4):641-643.
[47]Donald G.Troha.Digital phase-locked loop design using SN54/74LS297.Texas Instruments,1997(3):1-15.
[48]Huang L,Wu J C.Fast response phase detector for a phase-locked loop.Int J Electronics,1995,78(3):557-568.
[49]Ahmedael A.An efficient software-controlled PLL for low-frequency applications.IEEE Transactions on Industrial Electronics,1998,35(2):341-344.
[50]Takashi Emura,LeiWang.A high-precision positioning servo controller based on phase/frequency detecting technique of two-phase-type PLL.IEEE Transactions on Industrial Electronics,2000,47(6):1298-1306.
[51]PADMANBHAN M,MARTIN K.A second-order hyperstable adaptive filter for frequency estimation.IEEE Trans Cir Syst,2003,40:398-403.
[52]WERTER M J.FSK demodulation with an adaptive direct form filter.Proc IEEE Int Conf Acoustics,Speech,Signal Processing'93.2005:328-331.
[53]魏海坤.神经网络结构设计的理论与方法.北京:国防工业出版社,2005.2.
[54]朱庆保.用神经网络技术实现的高精度光栅测量装置.计量学报,2002,23(4):266-270.
[55]朱庆保.用改进的小脑模型神经网络实现光栅信号连续细分.计量学报,2005,26(1):16-19.
[56]刘清.用遗传神经网络对光栅传感器信号高精度细分研究.仪器仪表学报,2004,25(5):652-655.
[57]倪飞舟,李桂权.基于LM算法的现场测量系统的传感器非线性误差校正方法.测控技术,2004,23(6):70-72.
[58]飞思科技研发中心.神经网络理论与MATLAB7实现.北京:电子工业出版社,2005.
[59]Mc Culloch W S and Pitts W.A logical calculus od ideas immanent in nervous activity.Bulletion of Mathematical Biophysics,1943(5):115-133.
[60]Cybenko G.Approximation by superposition of a sigmoidal function.Mathematics of Control,Signals,Systems,1989,2(4):303-314.
[61]Hornik K,Stinchcombe M and White H.Multilayer feed forward networks are universal approximators.Neural Networks,1989(2):359-366.
[62]Cotter N E.The Stone-Weierstrass theorem and its application to neural networks,IEEE Trans.Neural Networks,1991(4):385-394.
[63]Ito Y.Representation of functions by superposition of a step or sigmoidal function and their application to neural networks theory.Neural Networks,1992.
[64]Ito Y.Approximation of continuous function on R~d by linear combination of shifted rotations of a sigrnoidal function with and without scaling.Neural Networks,1992(5):105-115.
[65]韩力群.人工神经网络理论、设计及应用.北京:化学工业出版社,2001.
[66]Su S Y,Lu H B,Zhou W H.A software solution to counting and subdivision of moire fringes with wide dynamic range.Proceedings of SPIE,2000,4222:308-312.
[67]李宏胜.机床数控技术及应用.北京:高等教育出版社,2001.
[68]骆贵兵,李崇祥.LM算法的回热系统故障诊断人工神经网络模型.热力发电,2004(10):15-18.
[69]赵辉,王秀峰.LM算法在传感器数据融合中的应用.传感器技术,2005,24(5):77-79.
[70]周志雄,邓朝晖,陈根余.磨削技术的发展及关键技术.中国机械工程,2000,11(1/2):186-189.
[71]冯薇.精密与超精密磨削的发展现状.精密制造与自动化,2009(2):7-9.
[72]MARPOSS.Eleetronie System for Machine Tool of MARPOSS[EB].http://www.marposs.com,2006.
[73]MARPOSS.The New Measurement Solutions on Machine Tool(1)[EB].http://wvvmarposs.com,2006.
[74]无锡新锡量量刃具有限公司.MCK-1自动测量控制仪、ZND-1内磨自动检测规使用说明书,2007.
[75]王鸿伟.磨加工过程中的主动测量仪.轴承,2004(4):32-34.
[76]谢守振,王世锋,段富宣.3MZ204CNC轴承内圆磨床的模块化设计.制造技术与机床,2005(8):64-67.
[77]董明晓,姚斌,郑康平.内孔磨削在线主动测量原理及应用.金刚石与磨料磨具工程,2003(5):55-57.
[78]张善钟,浦昭邦.光栅信号质量谐波分析测定法.仪器仪表学报,1981,2(3):65-71.
[79]张善钟,浦昭邦.光栅信号质量的评价与光栅系统参数的确定.宇航计测技术,1983(6):1-6.
[80]吕孟军,郭琪.莫尔条纹噪声控制及细分精度分析.微细加工技术,2008(2):52-56.
[81]Emura T,Wang L.A High-Precision positioning servo controller based on phase/frequency detecting technique of Two-Phase-Type PLL.IEEE Trans on Industrial Electronics,2000,47(6):1298-1306.
[82]Huang J Q,Hou L S,Ji P.Design and experimental study methods for dynamic Compensated digital filter and its applications.Process of IEEE Instrumentation and Measurement Technology Conference,1992,5:12-14.
[83]李晖,刘庭欣.光栅莫尔条纹的辨向和细分电路研究.辽宁大学学报:自然科学版,2003,30(2):127-128.
[84]Tan K K,Zhou Huixing,Lee Tongheng.New interpolation method for quadrature encoder signals.IEEE Transactions on Instrumentation and Measurement,2002,51(5):1073-1079.
[85]Chu Xingchun,L(u|¨) Haibao,Cao Juliang.Research on direction recognizing and subdividing method for moire(interference) fringes.Chin Opt Lett,2003,1(12):692-694.
[86]Su Shaojing,Liu Hui,Wang Yueke et al.A novel virtual instrument for displacement measure by processing moiresignals.2nd International Symposium on Instrumentation Science and Technology,2002,1:436-440.
[87]National Semiconductor.LM2596 Data sheet.National Semiconductor,2009.
[88]Maxim.MAX811T data sheet.Maxim,2007.
[89]Inter.JS28F640 data sheet.Inter,2008.
[90]HYNIX.HY57V1620 data sheet.HYNIX,2007.
[91]Maxim.MAX3232 data sheet.Maxim,2007.
[92]Altera.Cyclone Ⅲ device handbook[EB/OL].U.S:Altera.[2009-5-3].http://www.altera.com.cn/literature/lit-cyc3.jsp.
[93]Altera Corporation.Mereury programmable logic deviee family data sheet,http://www.altera.Com.
[94]Baese U M.数字信号处理的FPGA实现.北京:清华大学出版社,2006.
[95]王学梅,吴敏.基于FPGA的分布式算法FIR滤波器的设计实现.世界电子元器件,2004(10):65-67.
[96]刘在爽,卢莹莹.高阶FIR滤波器面向FPGA的多种实现方法.中国有线电视,2008(2):164-168.
[97]曹斌芳,何怡刚,胡惟文,等.一种改进型的FIR数字滤波器设计.现代电子技术,2006(4):3-8.
[98]Kollig P,Al-Hashimi B M,Abbott K M.FPGA implementation of high performance FIR filters.IEEE Internaional Symposium on Circuits and Systems,1997(4):2240-2243
[99]赖联有,吴伟力,许伟坚.基于FPGA的FIR滤波器设计.集美大学学报:自然科学版,2006,11(4):347-350.
[100]商佳宜,江道灼.基于FPGA的智能数字锁相环实现.继电器,2005,33(3):72-74.
[101]孙文胜,俞辉煌,刘玮.一种基于FPGA的任意锁相倍频算法.电讯技术,2007,47(6):148-151.
[102]王永安,宋志安,李佳.基于Matlab的数字FIR滤波器设计.山东科技大学学报:自然科学版),2004,23(4):62-64.
[103]Mathworks,Filter design HDL coder user's guide.U.S:Mathworks,2008[2009-5-3].http://www.mathworks.cn/access/helpdesk/help/toolbox/hdlfilter/index.html?/access/helpdesk/help/toolbox/hdlfilter.
[104]徐柏德,周蕾.小数N分频锁相频率合成器技术.移动通信,2000(3):77-80
[105]牛涛,吴斌,焦风川,等.基于FPGA的UART电路的设计.电子测量技术,2006(3):24-26.
[106]郭树涛,靖永志.基于FPGA的串口通讯设计.北京电子科技学院学报,2006(4):59-62.
[107]庞浩,俎云霄,王赞基.一种新型的全数字锁相环.中国电机工程学报,2003,23(2):37-41.
[108]单长虹,孟宪元.基于FPGA的全数字锁相环路的设计.电子技术应用,2001,9:58-60.
[109]张宪起,鲁争焱,张浩然.基于FPGA/CPLD控制系统的设计方法.集成电路通讯,2007,25(1):1-6.
[110]鄢华浩,王枚,赵利.一种新型频率合成器的实现.现代电子技术,2004,5:10-12.
[2]卢国纲.直线位移传感器发展的回顾和当今产品.功能部件,2005(1):78.
[3]卢国纲.从CIMT2005看世界位移测量技术及其产业的发展.功能部件,2005(4):48-50.
[4]约翰内斯.海德汉的新型测量产品.航空制造技术,2008(6):102-103.
[5]MA Xiu-shuia,FEI Ye-taia,CHEN Xiao-huaia.New measuring scale of CMMs.3rd International Symposium on Instrumentation Science and Technology,Aug.2004,Xi'an,China.1-0906-1-0910.
[6]Zhang Zhaozong,Zhang Haifeng.Nanometer grating technology and its research direction.Proceedings of 2nd International Symposium on Science and Technology,Harbin Institute of Technology Press,2002:100-104.
[7]Zhang Guoxiong.The development tendency of coordinate measuring machines.China Mechanical Engineering,2000,11(1/2):222-226.
[8]金喜平,李书平,刘永胜.高速高精度光栅数显装置的研究与设计.沈阳工业大学学报,1994,16(2):18-25.
[9]苏绍璟.大量程纳米级光栅位移测量理论及关键技术研究[博士学位论文].长沙:国防科学技术大学,2001.
[10]楚兴春.纳米光栅干涉位移测量关键技术的研究[博士学位论文].长沙:国防科学技术大学,2005.
[11]刘逊.机床用光栅测量技术的最新发展.天津:海德汉光学电子有限公司,2004.
[12]Heidenhain.封闭式光栅尺.天津:海德汉光学电子有限公司,2004:58-58.
[13]Heidenhain.单场扫描封闭式光栅.天津:海德汉光学电子有限公司,2004.
[14]Loewen E G,Popov E.Diffraction gratings and application.New York:Marcil Dekker,1997.
[15]Richardson.Richards on grating laboratory.Diffraction Grating Handbook.4~(th) Edition,2002.
[16]夏豪杰.高精度二维平面光栅测量系统及关键技术研究[博士学位论文].合肥:合肥工业大学,2006.
[17]吴柏林.中国机床工具行业 机遇前所未有挑战更加严峻.机械工程师,2008(1):5-8.
[18]单东日,张青.我国高速、高精、复合数控机床研发目标及关键技术.制造技术与机床,2009(6):38-42.
[19]Liu Dejun,Che Rensheng,Ye Dong,et al.Error modeling and simulation of 3.DOF parallel link coordinate measuring machine.China Mechanical Engineering,2001,12(7):752-755.
[20]Richardson Grating Laboratory.Diffraction Grating Handbook,2002.
[21]张善钟.计量光栅技术.北京:机械工业出版社,1985.
[22]Popov E K,Loewen E G,Nevicre M.Transmission grating for beam sampling and beam splitting.Applied Optics,1996(35):3072-3075.
[23]Zhang Z Z,Zhang H F.Nanometer grating technology and its research direction.Proceedings of 2~(nd) International Symposium on Instrument Science and Technology.Harbin Institute of Technology Press,2002,2:100-104.
[24]李谋.位置检测与数显技术.北京:机械工业出版社,1992.
[25]李怀琼,陈钱,王钰.新型光栅信号数字细分技术及其误差分析.计量学报,2001,22(4):281-283.
[26]谌延政,吕海宝.CCD细分技术方法研究及应用.光学学报,2002,22(11):1396-1399.
[27]Fouzar Y,Sawan M,Savaria Y.Very short locking time PLL based on controlled gain technique.Eleetronies,Cireuits and Systems,ICECS 2000.
[28]Olsson T,Nilsson P.An all-digital PLL clock multiplier.ASIC Proeeedings.2002 IEEE Asia-Paeifie Conference.
[29]GARDNER F M.Charge-pump phase-locked loops.IEEE Trans and Com,2006,COM-28:1849-1859.
[30]Olsson T,Nilsson P.A digitally controlled PLL for SoC applieations,solid-state cireuits.IEEE,2004.
[31]Jin S C,Kuang Y C.The design of an All-digital phase-locked loop with small Dco hardware and fast phase lock[J].IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1999,46(7):945-950.
[32]郭雨梅,崔晋玲,刘雪艳,等.锁相式莫尔条纹信号细分方法的研究.哈尔滨工业大学学报,2007,39(9):1496-1498.
[33]郭雨梅,崔晋玲.乘法倍频对锁相式莫尔条纹信号细分方法的改进.上海交通大学学报,2009,43(5):837-840.
[34]赵立民,于海雁,胡庆.可编程逻辑器件与数字系统设计.北京:机械工业出版社,2003.
[35]万敏,王厚军.在系统可编程逻辑器件的研究与应用.仪器仪表用户,2005,12(6):80-81.
[36]李景华,杜玉远.可编程逻辑器件与EDA技术.沈阳:东北大学出版社,2000.
[37]金喜平,杨孟华,郭雨梅.ISP技术在光栅检测装置中的应用.沈阳工业大学学报,2002,24(1):36-38.
[38]郭雨梅,刘启林.ISP技术在磨床测控系统中的应用.仪表技术与传感器,2007(3):71-72.
[39]郭雨梅,王楠,常丽.数字集成化光栅数显装置的研究与设计.仪表技术与传感器,2005(5):58-59.
[40]Lattice Semiconductor Corporation.Lattice Semiconductor Data Book,1996.
[41]Su S Y,Lu H B,Zhou W H.A software solution to counting and subdivision of moire fringes with wide dynamic range.Proceedings of SPIE,2000,4222:308-312.
[42]刘绍汉,林灶生,刘新民.VHDL芯片设计.北京:清华大学出版社,2004.
[43]Navabi Z.VHDL analysis and modeling of digital system.McGraw-Hill,1993.
[44]尹佳喜,康勇,牛国彬,等.基于ispLSI1032E的数字式移相信号发生器.电子工程师,2005,31(2):49-51.
[45]程琼,黄圣超,王淑青,等.基于ISP技术的单片机与CPLD实验系统设计.实验科学与技术,2009,7(1):71-75.
[46]王小兵,金锋.一种改进的全数字化锁相环在光栅位置检测中的应用.仪器仪表学报,2004,25(4):641-643.
[47]Donald G.Troha.Digital phase-locked loop design using SN54/74LS297.Texas Instruments,1997(3):1-15.
[48]Huang L,Wu J C.Fast response phase detector for a phase-locked loop.Int J Electronics,1995,78(3):557-568.
[49]Ahmedael A.An efficient software-controlled PLL for low-frequency applications.IEEE Transactions on Industrial Electronics,1998,35(2):341-344.
[50]Takashi Emura,LeiWang.A high-precision positioning servo controller based on phase/frequency detecting technique of two-phase-type PLL.IEEE Transactions on Industrial Electronics,2000,47(6):1298-1306.
[51]PADMANBHAN M,MARTIN K.A second-order hyperstable adaptive filter for frequency estimation.IEEE Trans Cir Syst,2003,40:398-403.
[52]WERTER M J.FSK demodulation with an adaptive direct form filter.Proc IEEE Int Conf Acoustics,Speech,Signal Processing'93.2005:328-331.
[53]魏海坤.神经网络结构设计的理论与方法.北京:国防工业出版社,2005.2.
[54]朱庆保.用神经网络技术实现的高精度光栅测量装置.计量学报,2002,23(4):266-270.
[55]朱庆保.用改进的小脑模型神经网络实现光栅信号连续细分.计量学报,2005,26(1):16-19.
[56]刘清.用遗传神经网络对光栅传感器信号高精度细分研究.仪器仪表学报,2004,25(5):652-655.
[57]倪飞舟,李桂权.基于LM算法的现场测量系统的传感器非线性误差校正方法.测控技术,2004,23(6):70-72.
[58]飞思科技研发中心.神经网络理论与MATLAB7实现.北京:电子工业出版社,2005.
[59]Mc Culloch W S and Pitts W.A logical calculus od ideas immanent in nervous activity.Bulletion of Mathematical Biophysics,1943(5):115-133.
[60]Cybenko G.Approximation by superposition of a sigmoidal function.Mathematics of Control,Signals,Systems,1989,2(4):303-314.
[61]Hornik K,Stinchcombe M and White H.Multilayer feed forward networks are universal approximators.Neural Networks,1989(2):359-366.
[62]Cotter N E.The Stone-Weierstrass theorem and its application to neural networks,IEEE Trans.Neural Networks,1991(4):385-394.
[63]Ito Y.Representation of functions by superposition of a step or sigmoidal function and their application to neural networks theory.Neural Networks,1992.
[64]Ito Y.Approximation of continuous function on R~d by linear combination of shifted rotations of a sigrnoidal function with and without scaling.Neural Networks,1992(5):105-115.
[65]韩力群.人工神经网络理论、设计及应用.北京:化学工业出版社,2001.
[66]Su S Y,Lu H B,Zhou W H.A software solution to counting and subdivision of moire fringes with wide dynamic range.Proceedings of SPIE,2000,4222:308-312.
[67]李宏胜.机床数控技术及应用.北京:高等教育出版社,2001.
[68]骆贵兵,李崇祥.LM算法的回热系统故障诊断人工神经网络模型.热力发电,2004(10):15-18.
[69]赵辉,王秀峰.LM算法在传感器数据融合中的应用.传感器技术,2005,24(5):77-79.
[70]周志雄,邓朝晖,陈根余.磨削技术的发展及关键技术.中国机械工程,2000,11(1/2):186-189.
[71]冯薇.精密与超精密磨削的发展现状.精密制造与自动化,2009(2):7-9.
[72]MARPOSS.Eleetronie System for Machine Tool of MARPOSS[EB].http://www.marposs.com,2006.
[73]MARPOSS.The New Measurement Solutions on Machine Tool(1)[EB].http://wvvmarposs.com,2006.
[74]无锡新锡量量刃具有限公司.MCK-1自动测量控制仪、ZND-1内磨自动检测规使用说明书,2007.
[75]王鸿伟.磨加工过程中的主动测量仪.轴承,2004(4):32-34.
[76]谢守振,王世锋,段富宣.3MZ204CNC轴承内圆磨床的模块化设计.制造技术与机床,2005(8):64-67.
[77]董明晓,姚斌,郑康平.内孔磨削在线主动测量原理及应用.金刚石与磨料磨具工程,2003(5):55-57.
[78]张善钟,浦昭邦.光栅信号质量谐波分析测定法.仪器仪表学报,1981,2(3):65-71.
[79]张善钟,浦昭邦.光栅信号质量的评价与光栅系统参数的确定.宇航计测技术,1983(6):1-6.
[80]吕孟军,郭琪.莫尔条纹噪声控制及细分精度分析.微细加工技术,2008(2):52-56.
[81]Emura T,Wang L.A High-Precision positioning servo controller based on phase/frequency detecting technique of Two-Phase-Type PLL.IEEE Trans on Industrial Electronics,2000,47(6):1298-1306.
[82]Huang J Q,Hou L S,Ji P.Design and experimental study methods for dynamic Compensated digital filter and its applications.Process of IEEE Instrumentation and Measurement Technology Conference,1992,5:12-14.
[83]李晖,刘庭欣.光栅莫尔条纹的辨向和细分电路研究.辽宁大学学报:自然科学版,2003,30(2):127-128.
[84]Tan K K,Zhou Huixing,Lee Tongheng.New interpolation method for quadrature encoder signals.IEEE Transactions on Instrumentation and Measurement,2002,51(5):1073-1079.
[85]Chu Xingchun,L(u|¨) Haibao,Cao Juliang.Research on direction recognizing and subdividing method for moire(interference) fringes.Chin Opt Lett,2003,1(12):692-694.
[86]Su Shaojing,Liu Hui,Wang Yueke et al.A novel virtual instrument for displacement measure by processing moiresignals.2nd International Symposium on Instrumentation Science and Technology,2002,1:436-440.
[87]National Semiconductor.LM2596 Data sheet.National Semiconductor,2009.
[88]Maxim.MAX811T data sheet.Maxim,2007.
[89]Inter.JS28F640 data sheet.Inter,2008.
[90]HYNIX.HY57V1620 data sheet.HYNIX,2007.
[91]Maxim.MAX3232 data sheet.Maxim,2007.
[92]Altera.Cyclone Ⅲ device handbook[EB/OL].U.S:Altera.[2009-5-3].http://www.altera.com.cn/literature/lit-cyc3.jsp.
[93]Altera Corporation.Mereury programmable logic deviee family data sheet,http://www.altera.Com.
[94]Baese U M.数字信号处理的FPGA实现.北京:清华大学出版社,2006.
[95]王学梅,吴敏.基于FPGA的分布式算法FIR滤波器的设计实现.世界电子元器件,2004(10):65-67.
[96]刘在爽,卢莹莹.高阶FIR滤波器面向FPGA的多种实现方法.中国有线电视,2008(2):164-168.
[97]曹斌芳,何怡刚,胡惟文,等.一种改进型的FIR数字滤波器设计.现代电子技术,2006(4):3-8.
[98]Kollig P,Al-Hashimi B M,Abbott K M.FPGA implementation of high performance FIR filters.IEEE Internaional Symposium on Circuits and Systems,1997(4):2240-2243
[99]赖联有,吴伟力,许伟坚.基于FPGA的FIR滤波器设计.集美大学学报:自然科学版,2006,11(4):347-350.
[100]商佳宜,江道灼.基于FPGA的智能数字锁相环实现.继电器,2005,33(3):72-74.
[101]孙文胜,俞辉煌,刘玮.一种基于FPGA的任意锁相倍频算法.电讯技术,2007,47(6):148-151.
[102]王永安,宋志安,李佳.基于Matlab的数字FIR滤波器设计.山东科技大学学报:自然科学版),2004,23(4):62-64.
[103]Mathworks,Filter design HDL coder user's guide.U.S:Mathworks,2008[2009-5-3].http://www.mathworks.cn/access/helpdesk/help/toolbox/hdlfilter/index.html?/access/helpdesk/help/toolbox/hdlfilter.
[104]徐柏德,周蕾.小数N分频锁相频率合成器技术.移动通信,2000(3):77-80
[105]牛涛,吴斌,焦风川,等.基于FPGA的UART电路的设计.电子测量技术,2006(3):24-26.
[106]郭树涛,靖永志.基于FPGA的串口通讯设计.北京电子科技学院学报,2006(4):59-62.
[107]庞浩,俎云霄,王赞基.一种新型的全数字锁相环.中国电机工程学报,2003,23(2):37-41.
[108]单长虹,孟宪元.基于FPGA的全数字锁相环路的设计.电子技术应用,2001,9:58-60.
[109]张宪起,鲁争焱,张浩然.基于FPGA/CPLD控制系统的设计方法.集成电路通讯,2007,25(1):1-6.
[110]鄢华浩,王枚,赵利.一种新型频率合成器的实现.现代电子技术,2004,5:10-12.
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