光纤微振动传感器
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摘要
高功率大型激光装置系统器件多，光路排布复杂，一个环节处理不当就会增加打靶误差。要使高功率大型激光装置各部分系统的机械和光学元件具有很高的稳定性，以避免大的光束偏移。首先要能够很好的检测各元件工作状态，检测各光学元件的振动是监测高功率大型激光装置各部分工作情况的好方法。但这些振动常常很微弱，由于强磁场或强电场等影响致使传统监测手段难以胜任。光纤振动传感器的许多优点决定了它是测量大型机件振动的首要选择。
本文详细的论述了几种目前研究较为广泛的光纤振动传感器的结构，针对当今光纤振动传感器的发展方向，研究了一种基于Michelson干涉原理的双传感臂光纤振动传感器。与传统的迈克耳逊干涉仪不同，这种传感器采用双传感臂，有效地减小了因环境噪声和温度带来的信号噪声和失真。本文对这种迈克耳逊双传感比光纤振动传感器进行了力学模型和光学模型的理论分析。并设计了系统各部分的器件参数，制作了灵敏度很高的传感头，克服了光纤端面镀膜、硅橡胶弹性柱体选材及制作、臂长差控制等技术困难，最后分析了系统噪声完成了实验部分的研究和分析。
旋转叶片在线振动监测对航空发动机、电站发电机组及各种轴流式压气机的安全运行至关重要。传统接触式测量方法很难做到同时监测同级所有叶片的振动情况，因此国外一直在致力研究非接触叶端定时测量技术式旋转叶片振动测量技术以满足高精度、全面监测的要求。
监测涡轮机叶片振动情况的光纤振动传感器，是一种非接触式测量的新技术。它只需在涡轮机的机壳上打一个小孔，安装传感器探头。探头把激光发射出去打在叶片的端面上，并探测叶片的漫反射回光。根据回光的时间差来测量叶片的振动和扭曲情况。本文分析了这种光纤叶片振动传感器的原理，对比Y型光纤束结构(即一根光纤发射接收结构)，探讨了一根光纤输出，七根光纤收光结构的优点和可行性。详细阐述了光纤束设计、传感头设计和自聚焦透镜设计等难点和关键技术的步骤。最后进行了实验验证取得了预期效果。
There are a lot of system apparatus and complex light ways in the high power laser. One component missed will increase the target position error. To ensure the machine and the optics component of the high power laser system have high stability, avert large target position error.. We must detect the work state of every component first. A good way is detect the vibration of every optics component. However, these vibrations are often faintness. And the affect of strong magnetic field or electric field make it difficult to detect the vibration in traditional way. The advantage of fiber vibration sensor decided it is the first choice of big machine vibration detecting.
Some fiber vibrations which are studied broadly at present are introduced and discussed; an all fiber Michelson dual- arms micro-vibration sensor is being studied. The Michelson sensor is different from traditional Michelson interferometer, it uses dual-arms. This structure avails reduced the noise and distortion of signal brought by environment and temperature. The mechanics model and optics model are analyzed; the parameter of every department are designed; a high sensitivity sensor head is made; fiber side plating is conquered; materials are choired and a elastic columniation is made; optical path difference is controlled; and the noise of system and experiment analyzed at last.
The online vibration monitoring of rotating blades is important to the safe operation of aero-engine, electric generator and compressor. It is difficult to monitor each blade at the same time with traditional method; accordingly in recent decades non-contact tip-timing measurement technique has been researched to meet the requirements of high precision and integral monitoring.
The online vibration monitoring of rotating blades sensor is a new technology. Install the sensor head only need to dig a small hole on the crust of turbo. Laser beam send from the sensor head and reflect by the tip of the blade. The head receive the reflect light. The vibration and contort of blade can be detect by the difference of reflect light time. The theory of these fiber blade vibration sensor is analyzed; the Y model (one fiber eradiate and receive) use one fiber eradiate and seven fiber receive are constructed; the fiber bundle design, sensor head design and grin lens design are introduced in detail. Finally, the experiment result meet require.
本文详细的论述了几种目前研究较为广泛的光纤振动传感器的结构，针对当今光纤振动传感器的发展方向，研究了一种基于Michelson干涉原理的双传感臂光纤振动传感器。与传统的迈克耳逊干涉仪不同，这种传感器采用双传感臂，有效地减小了因环境噪声和温度带来的信号噪声和失真。本文对这种迈克耳逊双传感比光纤振动传感器进行了力学模型和光学模型的理论分析。并设计了系统各部分的器件参数，制作了灵敏度很高的传感头，克服了光纤端面镀膜、硅橡胶弹性柱体选材及制作、臂长差控制等技术困难，最后分析了系统噪声完成了实验部分的研究和分析。
旋转叶片在线振动监测对航空发动机、电站发电机组及各种轴流式压气机的安全运行至关重要。传统接触式测量方法很难做到同时监测同级所有叶片的振动情况，因此国外一直在致力研究非接触叶端定时测量技术式旋转叶片振动测量技术以满足高精度、全面监测的要求。
监测涡轮机叶片振动情况的光纤振动传感器，是一种非接触式测量的新技术。它只需在涡轮机的机壳上打一个小孔，安装传感器探头。探头把激光发射出去打在叶片的端面上，并探测叶片的漫反射回光。根据回光的时间差来测量叶片的振动和扭曲情况。本文分析了这种光纤叶片振动传感器的原理，对比Y型光纤束结构(即一根光纤发射接收结构)，探讨了一根光纤输出，七根光纤收光结构的优点和可行性。详细阐述了光纤束设计、传感头设计和自聚焦透镜设计等难点和关键技术的步骤。最后进行了实验验证取得了预期效果。
There are a lot of system apparatus and complex light ways in the high power laser. One component missed will increase the target position error. To ensure the machine and the optics component of the high power laser system have high stability, avert large target position error.. We must detect the work state of every component first. A good way is detect the vibration of every optics component. However, these vibrations are often faintness. And the affect of strong magnetic field or electric field make it difficult to detect the vibration in traditional way. The advantage of fiber vibration sensor decided it is the first choice of big machine vibration detecting.
Some fiber vibrations which are studied broadly at present are introduced and discussed; an all fiber Michelson dual- arms micro-vibration sensor is being studied. The Michelson sensor is different from traditional Michelson interferometer, it uses dual-arms. This structure avails reduced the noise and distortion of signal brought by environment and temperature. The mechanics model and optics model are analyzed; the parameter of every department are designed; a high sensitivity sensor head is made; fiber side plating is conquered; materials are choired and a elastic columniation is made; optical path difference is controlled; and the noise of system and experiment analyzed at last.
The online vibration monitoring of rotating blades is important to the safe operation of aero-engine, electric generator and compressor. It is difficult to monitor each blade at the same time with traditional method; accordingly in recent decades non-contact tip-timing measurement technique has been researched to meet the requirements of high precision and integral monitoring.
The online vibration monitoring of rotating blades sensor is a new technology. Install the sensor head only need to dig a small hole on the crust of turbo. Laser beam send from the sensor head and reflect by the tip of the blade. The head receive the reflect light. The vibration and contort of blade can be detect by the difference of reflect light time. The theory of these fiber blade vibration sensor is analyzed; the Y model (one fiber eradiate and receive) use one fiber eradiate and seven fiber receive are constructed; the fiber bundle design, sensor head design and grin lens design are introduced in detail. Finally, the experiment result meet require.
引文
[1] 乔战峰，赵东峰，戴亚平，等．“神光Ⅱ”第九路终端光学系统稳定性分析．强激光与粒子束，2006，18(3)419～422
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[3] Ng D S, Karpenko V P, Wavrik P.Target area structural support systems design to achieve the micron-level stability requirement of the NIF [R].UCRL2JC2115586, 1994.
[4] 曾光宇，张志伟，张存林等．光电探测技术．清华大学出版社 2005，198～200
[5] 王惠文，江先进，赵长明，等，光纤传感技术与应用，北京，国防工业出版社，2001．4：24～25，65～78，143～150．
[6] 彭吉虎，吴伯瑜，光纤技术及应用，北京，北京理工大学出版社，1995．6：226～227．
[7] 何勇，王生泽，光电传感器及其应用，北京，化学工业出版社，2004．6：204～206．
[8] 江毅，光纤振动传感器探头的设计，光学技术，2002．28(2)：148～149
[9] Patrick, J M urphy, Thomas P. Fiber optic displacement Sensor employing a graded index lens. Appl Opt, Vol29, No.4, 1990, pp544-574
[10] R. D. Pechstedt, D. A. Jackson. Design of acompliant-cylinder-type fiber-optic accelerometer: theory and experiment [J]. Appl. Opt., 1995, 34(16): 3009～3017
[11] Rivera H L, Garcia-Souto J A, and Sanz J. Measurements of mechanical vibrations at magnetic cores of power transformers with fiber-optic interferometric intrinsic sensor. IEEE Journal of Selected Topics in Quantum Electronics. 2000, 6(5): 788-797
[12] Garcia-Souto, J A, and Rivera H L. Multichannel fiber-optic interferometric sensor formeasurements of temperature and vibrations in composite materials. IEEE Journal on Selected Topics in Quantum Electronics. 2000, 6(5): 780-787
[13] Pannell C N, Jones JDC, and Jackson DA. The effect of environmental acoustic noise on optical fibre based velocity and vibration sensor systems. Measurement Science &Technology.1994, 5(4): 412-417
[14] 黄国挺．双桑克干涉式光纤水中听音器之设计与解调：[硕士学位论文]，高雄：国立 中山大学,2004
[15] Tomic M C, Djinovic Z V. Low coherence interferometric method for vibration measurement using 3×3 fiber optic coupler. Proceedings of SPIE - The International Society for Optical Engineering. 2000,4074: 419-426
[16] Davis P, and Bush J. Non-contact fiber optic vibrometer. Proceedings of SPIE - The International Society for Optical Engineering. 1999 390-400.
[17] Shi C Z, Zeng N, and Ho H L, etc. Cantilever optical vibrometer by use of fiber Bragggrating. Optical Engineering. 2003, 42(11): 3179-3181
[18] Jin W, Zhou Y, and Chan PKC, etc. A fibre-optic grating sensor for the study of flow-induced vibrations. Sensors and Actuators A-Physical. 2000, 79 (1): 36-45
[ 19] Todd M D, Johnson GA, and Althouse B A, etc. Flexural beam-based fiber Bragg gratingaccelerometers. IEEE Photonics technology letters. 1998. 10(11): 1605-1607
[20] Berkoff T A, Kersey A D. Experimental demonstration of a fiber Bragg grating accelerometer. IEEE Photonics Technology Letters. 1996, 8(12): 1677-1679
[21] Storgaard-Larsen T, Bouwstra S, and Leistiko O. Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. Sensors and Actuators A-Physical. 1996, 52:25-32
[22] Zeng N, Shi C Z, and Zhang M, etc. A 3-component fiber-optic accelerometer for well logging. Optics Communications. 2004,234(1-6): 153-162
[23] Su W, Gilbert J A, and Morrissey M D, etc. General-purpose photoelastic fiber optic accelerometer. Optical Engineering. 1997, 36(1): 22-28
[24] Tai S, Kyuma K, and Nunoshita M. Fiber-optic acceleration sensor based on the photoelastic effect. Applied Optics. 1983, 22(11): 1771-1774
[25] Spillman W B Jr. Multimode fiber-optic accelerometer based on the photoelastic effect.Applied Optics. 1982, 21(15): 2653-2655.
[26] Leng J S, Asundi A. NDE of smart structures using multimode fiber optic vibration sensor.NDT&E International. 2002, 35: 45-51
[27] Leng J S, Asundi A K, Fiber optic vibration sensor-based smart civil structures. Proceedings of SPIE - The International Society for Optical Engineering. 1999, 3897:505-510
[28] Yu Francis T S, Zhang J, and Pan K, etc. Fiber vibration sensor that uses the specklecontrast ratio. Optical engineering. 1995, 34(1): 236-239.
[29] Huston D, Spillman Jr. and W B, etc. Measuring micro floor vibrations with distributed fiber optic sensors. Proceedings of SPIE-The International Society for Optical Engineering. 2001, 4357: 141-147.
[30] 方丹，傅雨田，等．大惯量转动体在稳定位置附近微振动的检测．振动与冲击．2006，25(5)：168-200．
[31] 李方泽，刘馥清，王正．工程振动测试与分析．高等教育出版社，北京，1992
[32] 曾楠．光纤加速度传感器若干关键技术研究：[博士学位论文]，北京：清华大学，2005
[33] 波恩，沃耳夫，光学原理，北京，电子工业出版社，2005．8：278～282．
[34] 王学伟，王琳，相位调制式传感器，电测与仪表，1996，41～46
[35] 雷肇棣编著，《光纤通信基础》，西安：电子科技大学出版社，1997
[36] 戴金，[英]B．Culshaw，J Dakin，光纤传感器，华中理工大学出版社，1997．7．
[37] 倪星元，张志华，传感器敏感功能材料及应用，北京，化学工业出版社，2005．4：147
[38] 熊水东，罗洪，胡永明，等，干涉型保偏光纤微振动矢量传感器研究，中国激光，2004，31(7)：843～847
[39] 傅深泳，丁桂兰，陈才和，等，干涉型全光纤加速度地震检波器光电工程，光电工程，2003，30(6)：39～42
[40] Pechstedt R D, and Jackson D A. Performance analysis of a fiber optic accelerometer based on a compliant cylinder design. Review of Scientific Instruments. 1995, 66(1): 207-214
[41] 邓勇，盛鑫志，薛秀生．光纤叶片振幅监测系统应用试验研究，航空动力学报．．1992，7(2)：156～158
[42] 钟志才，冯心海，敬发宪．叶尖定时测量数据计算机仿真方法研究，燃气涡轮实验与研究．2003，16(4)：45～48
[43] 孙宇扬，段发阶，方志强，等．一种新型叶尖定时信号高精度处理技术，传感技术学报．2003，12(4)：415～418
[44] Heath S and Imregun M. A Survey of Blade Tip-timing Measurement Techniques for turbomachinery Vibration[J].Transactions of the ASME, 1998, 120:784-971.
[45] Zielinski M, Ziller G. Non-contact vibration measurements on compressor rotor blades[J]. Measurement Science and Technology, 2000, 7(11):847-856.
[46] Dhanajay V Gadre[美]．韩永彬，袁潮译．2000．并行端口编程[M]．北京：中国电 力出版社，2000．
[47]安连锁，徐永日，葛永庆．汽轮机叶片振动的叶端定时测量法．电力科学与工程．2005，3：35～37
[48]方志强．叶尖定时传感器及叶片振动信号处理技术的研究：[博士学位论文]．天津：天津大学，2004
[49]Scaizo,A. J., Allen, J.M., and Antos, R.J., Analysis and Solution of a Non-synchronous Vibration Problem in the Last Row Turbine Blade of a Large Industrial Turbine, ASME Journal of Engineering for Gas Turbine and Power, 1986,108:591～598
[50]Simmons, Harold R.,el, Measuring rotor and blade dynamics using an optical blade tip sensor, American Society of Mechanical Engineers,1990,GT91 6p
[2] Trummer D J, Foley R J, Shaw G S. Stability of optical element in NIF target area building [R].UCRL-JC-129682, 1998.
[3] Ng D S, Karpenko V P, Wavrik P.Target area structural support systems design to achieve the micron-level stability requirement of the NIF [R].UCRL2JC2115586, 1994.
[4] 曾光宇，张志伟，张存林等．光电探测技术．清华大学出版社 2005，198～200
[5] 王惠文，江先进，赵长明，等，光纤传感技术与应用，北京，国防工业出版社，2001．4：24～25，65～78，143～150．
[6] 彭吉虎，吴伯瑜，光纤技术及应用，北京，北京理工大学出版社，1995．6：226～227．
[7] 何勇，王生泽，光电传感器及其应用，北京，化学工业出版社，2004．6：204～206．
[8] 江毅，光纤振动传感器探头的设计，光学技术，2002．28(2)：148～149
[9] Patrick, J M urphy, Thomas P. Fiber optic displacement Sensor employing a graded index lens. Appl Opt, Vol29, No.4, 1990, pp544-574
[10] R. D. Pechstedt, D. A. Jackson. Design of acompliant-cylinder-type fiber-optic accelerometer: theory and experiment [J]. Appl. Opt., 1995, 34(16): 3009～3017
[11] Rivera H L, Garcia-Souto J A, and Sanz J. Measurements of mechanical vibrations at magnetic cores of power transformers with fiber-optic interferometric intrinsic sensor. IEEE Journal of Selected Topics in Quantum Electronics. 2000, 6(5): 788-797
[12] Garcia-Souto, J A, and Rivera H L. Multichannel fiber-optic interferometric sensor formeasurements of temperature and vibrations in composite materials. IEEE Journal on Selected Topics in Quantum Electronics. 2000, 6(5): 780-787
[13] Pannell C N, Jones JDC, and Jackson DA. The effect of environmental acoustic noise on optical fibre based velocity and vibration sensor systems. Measurement Science &Technology.1994, 5(4): 412-417
[14] 黄国挺．双桑克干涉式光纤水中听音器之设计与解调：[硕士学位论文]，高雄：国立 中山大学,2004
[15] Tomic M C, Djinovic Z V. Low coherence interferometric method for vibration measurement using 3×3 fiber optic coupler. Proceedings of SPIE - The International Society for Optical Engineering. 2000,4074: 419-426
[16] Davis P, and Bush J. Non-contact fiber optic vibrometer. Proceedings of SPIE - The International Society for Optical Engineering. 1999 390-400.
[17] Shi C Z, Zeng N, and Ho H L, etc. Cantilever optical vibrometer by use of fiber Bragggrating. Optical Engineering. 2003, 42(11): 3179-3181
[18] Jin W, Zhou Y, and Chan PKC, etc. A fibre-optic grating sensor for the study of flow-induced vibrations. Sensors and Actuators A-Physical. 2000, 79 (1): 36-45
[ 19] Todd M D, Johnson GA, and Althouse B A, etc. Flexural beam-based fiber Bragg gratingaccelerometers. IEEE Photonics technology letters. 1998. 10(11): 1605-1607
[20] Berkoff T A, Kersey A D. Experimental demonstration of a fiber Bragg grating accelerometer. IEEE Photonics Technology Letters. 1996, 8(12): 1677-1679
[21] Storgaard-Larsen T, Bouwstra S, and Leistiko O. Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. Sensors and Actuators A-Physical. 1996, 52:25-32
[22] Zeng N, Shi C Z, and Zhang M, etc. A 3-component fiber-optic accelerometer for well logging. Optics Communications. 2004,234(1-6): 153-162
[23] Su W, Gilbert J A, and Morrissey M D, etc. General-purpose photoelastic fiber optic accelerometer. Optical Engineering. 1997, 36(1): 22-28
[24] Tai S, Kyuma K, and Nunoshita M. Fiber-optic acceleration sensor based on the photoelastic effect. Applied Optics. 1983, 22(11): 1771-1774
[25] Spillman W B Jr. Multimode fiber-optic accelerometer based on the photoelastic effect.Applied Optics. 1982, 21(15): 2653-2655.
[26] Leng J S, Asundi A. NDE of smart structures using multimode fiber optic vibration sensor.NDT&E International. 2002, 35: 45-51
[27] Leng J S, Asundi A K, Fiber optic vibration sensor-based smart civil structures. Proceedings of SPIE - The International Society for Optical Engineering. 1999, 3897:505-510
[28] Yu Francis T S, Zhang J, and Pan K, etc. Fiber vibration sensor that uses the specklecontrast ratio. Optical engineering. 1995, 34(1): 236-239.
[29] Huston D, Spillman Jr. and W B, etc. Measuring micro floor vibrations with distributed fiber optic sensors. Proceedings of SPIE-The International Society for Optical Engineering. 2001, 4357: 141-147.
[30] 方丹，傅雨田，等．大惯量转动体在稳定位置附近微振动的检测．振动与冲击．2006，25(5)：168-200．
[31] 李方泽，刘馥清，王正．工程振动测试与分析．高等教育出版社，北京，1992
[32] 曾楠．光纤加速度传感器若干关键技术研究：[博士学位论文]，北京：清华大学，2005
[33] 波恩，沃耳夫，光学原理，北京，电子工业出版社，2005．8：278～282．
[34] 王学伟，王琳，相位调制式传感器，电测与仪表，1996，41～46
[35] 雷肇棣编著，《光纤通信基础》，西安：电子科技大学出版社，1997
[36] 戴金，[英]B．Culshaw，J Dakin，光纤传感器，华中理工大学出版社，1997．7．
[37] 倪星元，张志华，传感器敏感功能材料及应用，北京，化学工业出版社，2005．4：147
[38] 熊水东，罗洪，胡永明，等，干涉型保偏光纤微振动矢量传感器研究，中国激光，2004，31(7)：843～847
[39] 傅深泳，丁桂兰，陈才和，等，干涉型全光纤加速度地震检波器光电工程，光电工程，2003，30(6)：39～42
[40] Pechstedt R D, and Jackson D A. Performance analysis of a fiber optic accelerometer based on a compliant cylinder design. Review of Scientific Instruments. 1995, 66(1): 207-214
[41] 邓勇，盛鑫志，薛秀生．光纤叶片振幅监测系统应用试验研究，航空动力学报．．1992，7(2)：156～158
[42] 钟志才，冯心海，敬发宪．叶尖定时测量数据计算机仿真方法研究，燃气涡轮实验与研究．2003，16(4)：45～48
[43] 孙宇扬，段发阶，方志强，等．一种新型叶尖定时信号高精度处理技术，传感技术学报．2003，12(4)：415～418
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