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纵弯复合振动模态球型超声电机的研究
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摘要
超声电机是近三十年发展起来的一种新型驱动器,其工作原理是利用压电陶瓷的逆压电效应和超声振动,将材料的微观变形通过共振放大和摩擦运动转化成转子的宏观运动。目前实际应用的超声电机大多只有直线或旋转一个自由度运动,但在全方位仿生运动的球形关节、机器人柔性关节和眼球以及月球登陆车等领域,都提出具有多自由度运动驱动器的需求,由于超声电机具有结构灵活,运动形式多样的特点,使其比较适合球形转子多自由度驱动的实现。目前国内外对多自由度球型超声电机的研究和应用尚属探索性阶段,现有的多自由度球型电机实现多自由度驱动大多借助几个单方向的独立驱动合成形式,振子之间的驱动作用存在相互阻碍和干扰,导致机械输出特性不够理想。因而对本课题的探索研究,一方面可以为多自由度球型超声电机的研究提供新的思路,奠定理论基础,另一方面也可以拓宽其应用领域,具有很强的现实意义。
     本文首先从夹心换能器驱动过程的工作原理出发,研究主动纵振和被动弯振耦合关系对换能器驱动性能的影响,以此为依据,采用有限元参数化建模的分析方法,选择对换能器纵、弯振动影响较为敏感的尺寸参数进行总体优化设计。通过有限元方法对优化结果进行分析,验证了优化方法的正确性与可行性。
     研制了一种基于四换能器协调驱动的球型超声电机,该电机具有结构简单、输出转矩大等优点。球型电机采用了四个相互正交排列的夹心换能器进行协调驱动,通过试验测试出电机的输出特性,最高转速可达到12r/min,最大输出转距为0.45 N·m。
     设计出十字正交边幅杆构型,为研制单振子多自由度驱动换能器奠定基础。对单振子纵弯换能器的结构参数进行了综合分析,得到各参数对换能器特征频率的影响趋势,为实现纵弯模态简并做准备。利用有效机电耦合系数确定压电陶瓷位置,并给出激励换能器驱动足质点产生三种正交椭圆轨迹的激励方法。采用有限元瞬态运动分析方法,对换能器驱动足质点椭圆轨迹进行了研究,建立了驱动质点运动轨迹的关键图谱。
     研制了一种基于单振子纵弯换能器驱动的多自由度球型超声电机,该电机具有绝对输出转矩大、驱动简单和控制性能好等优点。电机输出性能指标为:绕X、Y轴旋转时,输出转距为0.97 N·m,最高转速可达11r/min,绕Z轴旋转时,输出转距为0.27 N·m,最高转速可达66r/min。
Ultrasonic motor (USM) is a new kind actuator developed during recent three decades, which transform micro displacement into macro motion of rotators via resonant amplifying and frictional effect by using converse piezoelectric effect and ultrasonic vibration. Presently, almost all the practically used USM have only one degree of freedom (DOF), such as linear or rotary movement. However, special actuators realizing multi-degree of freedom motion (multi-DOF) are in great demand in the area of ball-shape bionic joints, flexible joints and eye balls of rotots and moon explorer vehicles. Due to the structure flexibility and multi motion way, USMs are suitable to realizing multi-DOF motion. The research on the structure and application on the multi-DOF USM in the world is in the investigating stage until now. The existing multi-DOF USMs realize multi-degree of freedom motion by superimposing several independent actuation, then impediment and interference occurs leading to an unsatisfactory mechanical output. The research on this topic can bring forward new thinking and build theoretical foundation for multi-DOF spherical USM. Meantime, the application area of multi-DOF USM can be broadened with significant practical meaning.
     Based on the Langevin transducer driving process and working principle, this dissertation carried out research on the coupling relation of active longitudinal and passive bending vibration on transducer driving performance. By adopting parametric finite element method (FEM), those dimension parameters, which were more sensitive to transducer longitudinal and bending vibration, were selected to perform optimization design. The optimization method was verified to be correct and feasible by analyzing the optimization results using FEM.
     A quadric transducer coordinately driving spherical USM was proposed and fabricated. This kind of USM has merits such as simple structure and high output torque. The spherical USM actuated through driving four orthogonally arranged Langevin transducer coordinately. The output mechanical properties were tested by experiment, and the maximum rotary speed is 12r/min, the maximum output torque is 0.45 N·m.
     A cross orthogonal horn was proposed to build foundation for study single vibrator multi-DOF transducer. Comprehensive analysis was carried out on structure parameters of the single vibrator longitudinal-bending transducer, thereby the parameters’influence tendency towards the eigenfrequencies was got to realize longitudinal-bending modal degeneration. Positions of piezoelectric ceramics were determined by using effective electromechanical coupling factor. The exciting way of getting three type orthogonal elliptical trajectories on the particle of the driving foot was proposed. The investigation of elliptical trajectories of the driving foot particle was performed through transient analysis of FEM.
     A multi-DOF spherical USM based on single longitudinal-bending transducer vibrator was proposed and studied. This kind of USM has merits such as high output torque, simple driving and easy controllability. The output mechanical properties were as follows: when revolving around X and Y axis, the output torque was 0.97 N·m and the maximum rotary speed was 11r/min; when revolving around Z axis, the output torque was 0.27 N·m and the maximum rotary speed was 66r/min.
引文
1 赵淳生. 21 世纪超声电机技术展望. 振动.测试与诊断. 2000, 20(1): 7~11
    2 石新军. 超声马达发展与应用. 现代物理知识. 2005, 17(4): 18~20
    3 上羽贞行,富川义郎(扬志刚译). 超声马达理论与应用. 上海科学技术出版社. 1998.
    4 陈明, 陈新业, 姜开利, 周铁英. 超声马达的应用. 应用声学. 2000, 19(4): 38~42
    5 V. Lavrinenko. Piezoelectric Motor. 1964 Soviet Patent :217509.
    6 V. Vishnewski. Ultrasonic Motor. 1975 US Patent: 4019073.
    7 Barth. H. V. Ultrasonic Driven Motor IBM Technical Disclosure Bulletin. 1973, 16(7): 2263~2269
    8 黄茹楠,陈在礼. 超声电机在国外的发展. 振动、测试与诊断. 2002, 22(4): 270~276
    9 Hemsel Tobias,Jorg Wallaschek. State of the Art and Development Trends of Ultrasonic Linear Motors. IEEE Transaction on Ultrasonics Symposium. 2000(4): 663~666
    10 Mojallali Hamed, Rouzbeh Amini, Roozbeh Izadi-Zamanabadi, Jan Helbot, Ali A. Jalali, Javad Poshtan. Free stator modeling of a traveling wave ultrasonic motor, Limassol, Cyprus, 2005, 2005: 1074-1079
    11 Nakajima Daichi, Tomoyuki Ozawa, Takeshi Maeda, Michio Tsukui, Kohro Takatsuka, Masatsugu Yoshizawa. Fundamental study on contact behavior of ultrasonic motor, Long Beach, CA, United States, 2005, 6 A: 423-431
    12 Kaajakari Ville, Steve Rodgers, Amit Lal. Ultrasonically driven surface micromachined motor. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2000: 40-45
    13 J Salonobu, N Torii, K Nakamura. Construction of megatoque hybrid transducer type ultrasonicmotor. Jpn.J.Appl.Phys. 1996(135): 5038~5041
    14 赵淳生,李朝东. 日本超声电机的产业化、应用和发展. 振动.测试与诊断. 1999, 19(1): 1~7
    15 Fukaya Naoki, Shigeki Toyama, Tamin Asfour, Riidiger Dillmann. Design of the TUAT/Karlsruhe Humanoid Hand. Proceedings of the 2000 IEEE/RSJ International Conference on Intelligent Robot and Systems, Atlanta,USA, 2000: 1754~1759
    16 褚祥诚, 陈维山, 陈在礼. 超声马达在美国的发展. 压电与声光. 1999, 21(1): 37~40
    17 Paul G. Ackes, Bar-Cohen Yoseph, Joffe Benjamin. The Multifunction Automated Crawling System(MACS). Proceedings of the 1997 IEEE International Conference on Robotics and Automation Albuerque, New Mexico, 1997: 335~340
    18 V.Snitka, V.Mizariene, D.Zukauskas. The Status of Ultrasonic Motors in the Former Soviet Union. Ultrasonics. 1996(34): 247~250
    19 George T. MEMS/NEMS Development for Space Applications at NASA/JPL Proceedings of SPIE. 2002, 4755(2002): 556~567
    20 George Thomas. Overview of MEMS/NEMS Technology Development for Space Applications at NASA/JPL. Proceedings of SPIE. 2003, 5116: 138~145
    21 Spanner Karl. Trends in Nanopositioning. Actuator2002, Messe Bremen GMBH, Bremen Germany, 2002: Annex
    22 Purwanto E.,S. Toyama. Development of an Ultrasonic Motor as a Fine-Orienting Stage. IEEE Transactions on Robotics and Automation. 2001, 17(4): 464~471
    23 赵淳生,熊振华. 国内压电超声马达研究的现状和发展. 振动.测试与诊断. 1997, 17(2): 1~7
    24 Zhao Chunsheng. Research on ultrasonic motors in Nanjing University of aeronautics and astronautics. Zhendong Ceshi Yu Zhenduan/Journal of Vibration, Measurement and Diagnosis. 2005, 25(3): 167-173
    25 Zhao Chunsheng,Jiakui Zu. Research on resonance and antiresonance states of free stator of traveling wave ultrasonic motors. Shengxue Xuebao/Acta Acustica. 2005, 30(1): 1-8
    26 周铁英, 张凯, 陈宇, 王欢, 吴继刚, 姜开利, 薛平. 1mm 圆柱式超声电机的研制及在 OCT 内窥镜中的应用. 科学通报. 2005, 50(7): 713~716
    27 尹真. 清华研制成直径最小的超声马达. 中国青年科技. 2002, 93(3): 17
    28 于洋. 双面齿行波超声马达研究. 哈尔滨工业大学硕士论文. 2004: 47~52
    29 Zhang Donghua, Zaili Chen, Youguang Li. Structure study and theoretical analysis on new type traveling wave piezoelectric motor. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering. 2006, 42(SUPPL): 139-142
    30 陈维山, 张帆, 刘军考. 新型超声换能器式直线驻波马达的研究. 压电与声光. 2004, 26(1): 24~30
    31 He Siyuan, Weishan Chen, Zaili Chen. New-type ultrasonic motor depending on the three-dimensional motion of projections. Yadian Yu Shengguang/Piezoelectrics and Acoustooptics. 1997, 19(6): 394-397
    32 Helin Philippe, Veronique Sadaune, Christian Druon, Jean-Bernard Tritsch. Linear ultrasonic motors using surface acoustic waves mechanical model for energy transfer, Chicago, IL, USA, 1997, 2: 1047-1050
    33 Chu Xiangcheng, Zaili Chen, Weishan Chen, Bolin Long. Motion modeling of projection-teeth of traveling wave ultrasonic motors. Shengxue Xuebao/Acta Acustica. 2000, 25(1): 78-83
    34 曲建俊, 张凯, 周铁英, 张志谦. 摩擦材料的各向异性对超声马达特性的影响. 压电与声光. 2002, 24(1): 75~77
    35 赵淳生. 对发展我国超声电机技术的若干建议. 微电机. 2006, 39(2): 64~67
    36 Wu Xinkai, Zaohong He, Junda Hu. Research on model of the traveling wave-type ultrasonic motor. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering. 2005, 41(2): 57-60
    37 Kurosawa Minoru, Kentaro Nakamure, Sadayuki Ueha. Numerical Analysis of the Property of a Hybrid Transducer Type Ultrasonic Motor. IEEE Transactions on Ultrasonics Symposium. 1990(3): 1187~1190
    38 Richter Ales, Martin Pustka, Pavel Rydlo, Milan Kolar. Ultrasonic piezoceramic motor: The computation of traveling-wave velocity on the stator surface and excitation by PWM modulation with higher harmonic suppression, Singapore, Singapore, 2004, 30: 1857-1861
    39 石斌, 胡敏强, 钱俞寿. 行波型超声电动机的样机制造技术. 微特电机. 1998, 31(2): 40~43
    40 H Mukaishima. Applications of piezoelectric ceramics. Gakken-sha Co. Ltd, Tokyo. 1989: 139~145
    41 Kumada. A piezoelectric Ultrasonic Motor. Jpn. J. Appl. Phys. 1985, 24(2): 739~741
    42 Nakamure Kentaro, Jun Satonobu, Dongkyon Lee, Sadayuki Ueha. AnOptimum Design for the Hybrid Transducer Type Ultrasonic Motor in Symmetrical Structure. IEEE Transactions on Ultrasonics Symposium. 1998(1): 703-706
    43 郭吉丰,伍建国. 航天用大转矩高精度超声电机研究. 宇航学报. 2004, 25(1): 70~76
    44 Guo Jifeng, Shujuan Gong, Haixun Guo, Xiao Liu, Kehui Ji. Force Transfer Model and Characteristics of Hybrid Transducer Type Ultrasonic Motors. IEEE Transactions on Ultrasonics,Ferroelectrics, and Frequency Control. 2004, 51(4): 387~395
    45 郭海训, 郭吉丰, 魏燕定, 陈永校. 大转矩纵扭复合型超声电机的理论及实验研究. 电工技术学报. 2002, 17(2): 7~12
    46 郭海训, 魏燕定, 郭吉丰, 陈永校. 超声电机原理性样机大转矩的实现. 微电机. 2001, 34(5): 6~9
    47 Salonbu J, Torii N, k Nakamura. Construction of mega torque hybrid transduer type ultrasonic motor. Jpn. J. Appl. Phys. 1996, 135: 5038~5041
    48 孙合明, 赵淳生, 朱晓东, 高亹. 纵扭型压电超声电机的研究进展. 振动、测试与诊断. 2002, 22(1): 9~14
    49 褚祥诚,李龙土. 压电超声微马达的研究. 压电与声光. 2001, 23(4): 207~282
    50 张凯,周铁英. 1mm 压电柱式超声微电机的研制. 声学学报(中文版). 2004, 29(3): 258~260
    51 J.Hu K.Nakamura. Characteristics of a Noncontact Ultrasonic Motor Using Acoustic Levitation. Proceedings of the IEEE Ultrasonics Symposium. 1996(1): 373-376
    52 J.Hu, G.Li, H.L.W.Chan, Chung Loong Choyr. A Standing Wave-Type Noncontact Linear Ultrasonic Moto. IEEE Transactions on Ultrasonics,Ferroelectrics, and Frequency Control. 2001, 48(3): 699~708
    53 A.E.Glazounov, S.Wang, Q.M.Zhang, C.Kim. Piezoelectric stepper motor with direct coupling mechanism to achieve high efficiency and precise control of motion. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 2000, 47(4): 1059~1067
    54 刘景全, 杨志刚, 吴博达. 圆筒型行波非接触超声马达的激励原理研究. 声学学报(中文版). 2003, 28(1): 91~95
    55 刘景全, 吴博达, 杨志刚, 程光明, 鲁勇. 一种新型的圆筒非接触超声马达. 声学学报(中文版). 2001, 26(2): 113~116
    56 Krome J. W., J. Maas, J. Wallaschek. Models for the electro-mechanical interaction of the stator of a piezoelectric ultrasonic motor and its power supply. Zeitschrift fuer Angewandte Mathematik und Mechanik, ZAMM, Applied Mathematics and Mechanics. 1996, 76(Suppl 4): 357
    57 雷伏容, 程昱, 钟宜生, 徐文立. 超声马达数学建模研究现状与展望. 压电与声光. 2003, 25(1): 64~67
    58 Lei Fu-Rong, Yi-Sheng Zhong, Wen-Li Xu. Modeling of traveling-wave ultrasonic motors. Yadian Yu Shengguang/Piezoelectrics and Acoustooptics. 2003, 25(4): 328
    59 魏守水, 冯传胜, 黄青华, 张翠香, 张玉林, 赵淳生. 超声马达振子等效模型的仿真与实验研究. 中国电机工程学报. 2003, 23(10): 125~129
    60 F Lu, Lee H P, Lim S P. Contact modeling of viscoelastic friction layer of traveling wave ultrasonic motor. Smart Mater Struct. 2001(10): 314~320
    61 Liu Jinbo,Xing Ai. Analytical model of stator vibration for travelling-wave ultrasonic motor and its driver design. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering. 2004, 40(10): 129-133
    62 黄茹楠. 行波超声电机理论模型与速度控制的研究. 哈尔滨工业大学博士学位论文. 2003: 93~100
    63 Jones I. A.,Flugge Shell. Theory and Solution for Orthotropic Cylinrical Shells under Pinching Loads. Composite Structure. 1998, 42: 53~72
    64 许海,赵淳生. 直线型驻波超声电机的定、动子间接触及摩擦分析. 南京航空航天大学学报. 2005, 37(2): 114~149
    65 Duan Z.Y.,Q.K. Wang. Development of a Novel High PrecisionPiezoelectric Linear Stepper Actuator. Sensors and Actuators A: Physical. 2005, 118(2): 285~291
    66 Snitka Valentinas,Vida Mizariene. State-of-the-art Ultrasonic Micromotors and its Future Applications. Proceedings of SPIE 2001, 4236(2001): 330~338
    67 杨永生, 吴昌林, 裴新. 超声电动机的原理与发展动态. 微特电机. 2003(6): 35~38
    68 曲建俊, 周铁英, 齐毓霖, 张志谦. 超声马达转子摩擦材料厚度对驱动性能的影响研究. 摩擦学学报. 2002, 22(2): 134~137
    69 孙合明, 赵淳生, 朱晓东, 高亹. 纵扭型压电超声电机的摩擦特性仿真研究. 东南大学学报(自然科学版). 2002, 32(4): 624~626
    70 赵向东, 陈波, 赵淳生. 旋转行波超声电机非线性摩擦界面模型. 南京航空航天大学学报. 2003, 35(6): 629~633
    71 Kato K. Friction Between a Rotor and Stator. 25th Symp, Tohoku University, 1989, III~5: 101~106
    72 Storck H., W. Littmann, J. Wallaschek, M. Mracek. The Effect of Friction Reduction in Presence of Ultrasonic Vibrations and its Relevance to Traveling Wave Ultrasonic Motors. Ultrasonics. 2002, 40(1): 379~383
    73 曲建俊, 周铁英, 姜开利, 袁世明. 行波超声马达定子和转子接触状态实验研究. 声学学报(中文版). 2003, 28(3): 217~222
    74 Benkaci N.,G. A. Maugin. Numerical Computation of the J Integral for Piezo-Ceramic Materials. Mechanics Research Communications. 2001, 28(1): 41~48
    75 Ichinose N.,N. Miyamoto. Ultrasonic Transducers with Functionally Graded Piezoelectric Ceramics. Journal of the European Ceramic Society. 2004, 24(6): 681~1685
    76 王树昕, 董蜀湘, 桂治轮, 李龙土. 压电陶瓷材料对超声马达性能的影响. 压电与声光. 2000, 22(1): 23~26
    77 龚文, 褚祥诚, 李龙土. 行波超声马达摩擦材料的研究. 压电与声光. 2003, 25(4): 305~307.
    78 张武,袁镇. 探讨超声电机用压电陶瓷. 现代电子技术. 2004(14): 69~70
    79 严继康, 甘国友, 孙加林, 陈敬超. 压电马达用压电陶瓷的研究. 压电与声光. 2002, 24(4): 289~291
    80 栗大超, 靳世久, 曾周末, 赵伯雷. 微型超声电机接触界面的摩擦学模型与摩擦材料. 微特电机. 2002(1): 9~11
    81 Qu Jianjun, Yunxia Luo, Baoyu Song, Yulin Qi. Study on wear properties of stator of a traveling wave ultrasonic motor. Zhongguo Jixie Gongcheng/China Mechanical Engineering. 2003, 14(19): 1704
    82 Kunioka T., Y. Takeda, T. Matsuda, N. Shimazu, Y. Nakayama. XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1999, 17: 2917-2920
    83 孙立宁, 张明辉, 杜志江, 董为. 压电马达模糊自校正 PID 控制方法研究. 电机与控制学报. 2005, 9(6): 521~524
    84 李华峰, 赵淳生, 辜承林. 使用模糊控制的超声电机精密位置控制. 华中科技大学学报(自然科学版). 2004, 25(5): 155~158
    85 Kawano Hiroshi, Hideyuki Ando, Tatsuya Hirahara. Fast three-DOF control for multi-DOF ultrasonic servo motor by online adaptation, New Orleans, LA, United States, 2004, 2004: 3087-3092
    86 Yoshida Tomohiro, Tomonobu Senjyu, Mitsuru Nakamura, Naomitsu Urasaki, Hideomi Sekine, Toshihisa Funabashi. Position control of ultrasonic motors using dead-zone compensation with fuzzy neural network. Electric Power Components and Systems. 2006, 34(11): 1253-1266
    87 Yen C. Y., F. L. Wen, S. J. Chiang. Positioning control of a novel thin-disc ultrasonic motor using fuzzy sliding-mode control. Hangkong Taikong ji Minhang Xuekan/Journal of Aeronautics, Astronautics and Aviation. 2006, 38 A(1): 69-76
    88 Liang Yanchun, Jie Zhang, Xu Xu, Xiaowei Yang, Zhifeng Hao. A dynamic time delay neural network for ultrasonic motor identification and control, Chengdu, China, 2006, 3972 NCS: 1084-1089
    89 Jin Long, Guo-Wei Chu, Min-Qiang Hu, Xin-Jian Wang, Zhi-Ke Xu, Ju-Ping Gu. Speed and position control system of ultrasonic motor. Zhongguo Dianji Gongcheng Xuebao/Proceedings of the Chinese Society of Electrical Engineering. 2005, 25(1): 131-136
    90 Li Huafeng, Chunsheng Zhao, Chenglin Gu. Precise position control ofultrasonic motor by fuzzy control. Huazhong Keji Daxue Xuebao (Ziran Kexue Ban)/Journal of Huazhong University of Science and Technology (Natural Science Edition). 2004, 32(5): 22-24
    91 贺红林, 朱华, 赵淳生. 基于模糊与自校正技术的超声电机伺服控制. 传感器技术. 2005, 24(8): 18~21
    92 M.Hu, H.Du, S.-F.Ling. A piezoelectric spherical motor with two degree-of-freedom. Sensors and Actuators. J.-K.Teo., A: Physical. 2001, 94(1-2): 113~116
    93 郭吉丰,傅平. 多自由度球形超声电机的研究进展. 电工电能新技术. 2005, 24(2): 65~68
    94 Takemura K.,Y. Ohno. Design of a Plate Type Multi-DOF Ultrasonic Motor and Its Self-Oscillation Driving Circuit. T. Maeno. IEEE/ASME Transactions on Mechatronics. 2004, 9(3): 474~480
    95 Purwanto E, S Toyama, [A].[C].2003.132, 1326. Control method of aspheric of a spherical ultrasonic motor. Proc.2003 IEEE/PASME Internation Conf.AnvancedI ntelligent Mechatronics. 2003: 1321~1326
    96 Eko Purwanto,Shigeki Toyama. Development of an ultrasonic motor as a fine-orienting stage. IEEE Tans-actions on Robotics and Automation. 2001, 17(4): 464~471
    97 Kawai Motoyoshi. Research of a spherical motor with 3 DOF driven by ultrasonic linear actuators. 精密工学会志(JSPE). 1993, 38(3): 405~410
    98 Saaue Keisuke. Development of a small actuator with 3 DOF. 精密工学会志(JSPE). 1996, 62(4): 599~603
    99 Andersen Brian. Method for modelling of piezomotors analysis of resonator, contact and experimental investgations. Department of Control Engineering Aalborg University, Aalborg, Denmark, 2002: 496~507
    100 Aoyagi, Manaba, Steve P.Beeby. Anovei,multi-degree-of-freedom thick-filmul trasonic motor. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 2002, 49(2): 151~158
    101 吴献威, 程光明, 杨志刚, 吴博达, 陈西平. 圆环驻波型多自由度压电马达的研究. 压电与声光. 2000, 22(2): 95~97
    102 曾平, 程光明, 杨志刚, 吴博达, 吴献威, 陈西平. 单振子多自由度压电马达研究. 压电与声光. 2000, 22(5): 306~308
    103 K. Takemura Y. Ohno. Design of a plate type multi-DOF ultrasonic motor and its self-oscillation driving circuit. IEEE Transactions on Mechatronics. 2004, 9(3): 474~480
    104 Takemura Kenjiro, Dai Harada, Takashi Maeno. A master-slave system using a multi-DOF ultrasonic motor and its controller designed considering measured and simulated driving characteristics, Maui, HI, 2001, 4: 1977-1982
    105 李志荣, 赵淳生, 黄卫清. 圆柱形多自由度超声电机特性的实验研究. 中国机械工程. 2005, 16(17): 1567~1569
    106 李志荣, 黄卫清, 赵淳生. 圆柱-球体三自由度超声电机的研究. 压电与声光. 2005, 27(5): 486~489
    107 金龙, 胡敏强, 顾菊平, 莫岳平, 徐志科, 王心坚. 一种新型圆柱定子3 自由度球形压电超声电机. 东南大学学报(自然科学版). 2002, 32(4): 620~623
    108 Dong Baonian Zhai, Siak-Piang Lim, Kwok-Hong Lee, Shuxiang. Pin Lu. Modified Ultrasonic Linear Motor. Sensors and Actuators. A: Physical. 2000, 86(3): 154~158
    109 Ballato Jan . G . Smits , Arthur. Dynamic Admittance Matrix of Piezoelectric Cantilever Bimorphs. J. of Microelectromechanical Systems. 1994, 5(23): 105~111
    110 曹白杨. 功率超声换能器应用与设计. 华北航天工业学院学报. 2000, 5(21): 24~27
    111 魏守水, 赵淳生, 孙合明, 田力军. 超声电机阻抗匹配变压器的设计. 电机与控制学报. 2000, 4(1)(01): 13~16

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