MEMS微结构平面运动测量方法的研究
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摘要
微机电系统(MEMS)由微电子和机械元件组成,其运动特性测试是MEMS设计、仿真、制造及产品质量控制和性能评价的关键环节,平面运动测试是MEMS微结构运动特性测试的重要组成部分。提高平面运动测试的精度是MEMS三维运动特性精确表征的前提,对于材料特性和机械力学参数的精确测量具有重要意义。论文基于计算机视觉技术对提高MEMS平面运动测量分辨力的方法展开研究。研究内容主要包括:
1.在系统分析国内外MEMS平面运动特性测试技术的研究现状、应用领域和发展趋势的基础上,提出MEMS刚性平移、旋转角度和区域变形的测量方法,实现运动幅度、旋转角度测量以及区域变形信息的提取。
2.提出一种综合了模糊集图像增强技术、分形插值和小波变换的边缘检测方法。在连续光照明条件下,实现MEMS平面运动幅值的亚像素分辨力测量。通过分形插值技术重建运动模糊图像的边缘细节,应用小波变换的边缘检测方法测量MEMS微结构运动幅值,提高测量重复性。
3.将块匹配最优根值法和相位相关拟合法应用于MEMS平面刚性位移测量,对MEMS平面运动的时域和频域测量方法的实现进行了分析。利用灰度补偿减少块匹配算法对由于灰度变化所引起的误差,通过误差补偿减小相关拟合算法的测量误差。
4.依据刚体运动质心不变的原理,提出一种采用图像孤立特征结构的质心连线旋转角度来表征图像旋转角度的方法,并将此方法应用到MEMS的旋转角度测试中,提高旋转角度测量分辨力。
5.在相关拟合方法的基础上,结合Newton-Raphson迭代法的算法,实现区域变形信息的提取。通过对Newton-Raphson迭代初始值的改进,提高算法的收敛速度和精度,实现对MEMS区域变形信息提取。
6.提出一种基于显微相移干涉图像序列解析的亮场图像重建方法,该方法利用多项式拟合消除灰度误差,通过图像叠加实现干涉条件下MEMS平面运动的测量。
Micro-Electro Mechanical System (MEMS) is composed of electric and machine components. Testing technique becomes the important procession of MEMS design, simulation, production, quality control and performance estimation. In-plane motion test is the most important port of MEMS motion test. High resolving power of in-plane motion test is the foundation of MEMS three-dimensional motion measurement, and is significant to material characteristic and mechenics parameter measurement. This dissertation researches on in-plane micro-motion measurement with nanometer resolution for MEMS based on compute vision technology. The research’s main work is as following:
1. Domestic/foreign in-plane dynamic testing techniques of MEMS are systematically investigated and analyzed in the application field, current status and development trends of Micro- electro mechanical system. MEMS in-plane dynamic testing method is set up which combined rigid displacement test, local deformation measurement and rotation meterage technique.
2. MEMS motion edge detection algorithm is brought forward, combined with blur image enhance, fractal interpolation and wavelet expectation sub-pixel location technique. Extracting MEMS max motion scope accurately is realized through it. In the condition of continue lighting, MEMS in-plane motion range are obtained using the algorithm based on blur image. With fractal interpolation method, the edge of blur image is reconstructed. The accurate edge is detected by wavelet transformation technology. The measurement repetition is improved.
3. MEMS two-dimension rigid motion estimation algorithm is brought forward based on two algorithms of block matching Ultimate-root and phase correlation surface fitting sub-pixel resolving power technique. Estimating MEMS in-plane motion quickly and accurately is realized through time space and frequency space measurement algorithms analysis. The error caused by variant illumination is reduced.
4. According to the theory of invariability of center of mass of a fixed region, an improved rotation measurement method is demonstrated with better calculation precision. Given the insulation structures of MEMS which are left behind fabrication, we get several regions which have unattached object and smooth background. The rotate angel can be obtained with high resolution by observing the changes about center of mass of given regions.
5. On the base of the surface fitting sub-pixel location technique and the Newton-Raphson iterative method, extraction of the MEMS deformation information is proposed. Take deep research on the initial-value problem in correlation calculation. The displacement calculated from phase correlation and digital differential coefficients are combined as the initial value of Newton-Raphson iterative method. The convergence speed and the precision are improved greatly.
6. A new method is proposed to extract complex micro-structure three-dimensional information from sequence interferogram based on phase-shifting microscopic interferometry and growth algorithm to measure of. It can extract the bright image from a sequence of interference image. With the block match and phase correlation algorithum, in-plane motion character can be acquired.
1.在系统分析国内外MEMS平面运动特性测试技术的研究现状、应用领域和发展趋势的基础上,提出MEMS刚性平移、旋转角度和区域变形的测量方法,实现运动幅度、旋转角度测量以及区域变形信息的提取。
2.提出一种综合了模糊集图像增强技术、分形插值和小波变换的边缘检测方法。在连续光照明条件下,实现MEMS平面运动幅值的亚像素分辨力测量。通过分形插值技术重建运动模糊图像的边缘细节,应用小波变换的边缘检测方法测量MEMS微结构运动幅值,提高测量重复性。
3.将块匹配最优根值法和相位相关拟合法应用于MEMS平面刚性位移测量,对MEMS平面运动的时域和频域测量方法的实现进行了分析。利用灰度补偿减少块匹配算法对由于灰度变化所引起的误差,通过误差补偿减小相关拟合算法的测量误差。
4.依据刚体运动质心不变的原理,提出一种采用图像孤立特征结构的质心连线旋转角度来表征图像旋转角度的方法,并将此方法应用到MEMS的旋转角度测试中,提高旋转角度测量分辨力。
5.在相关拟合方法的基础上,结合Newton-Raphson迭代法的算法,实现区域变形信息的提取。通过对Newton-Raphson迭代初始值的改进,提高算法的收敛速度和精度,实现对MEMS区域变形信息提取。
6.提出一种基于显微相移干涉图像序列解析的亮场图像重建方法,该方法利用多项式拟合消除灰度误差,通过图像叠加实现干涉条件下MEMS平面运动的测量。
Micro-Electro Mechanical System (MEMS) is composed of electric and machine components. Testing technique becomes the important procession of MEMS design, simulation, production, quality control and performance estimation. In-plane motion test is the most important port of MEMS motion test. High resolving power of in-plane motion test is the foundation of MEMS three-dimensional motion measurement, and is significant to material characteristic and mechenics parameter measurement. This dissertation researches on in-plane micro-motion measurement with nanometer resolution for MEMS based on compute vision technology. The research’s main work is as following:
1. Domestic/foreign in-plane dynamic testing techniques of MEMS are systematically investigated and analyzed in the application field, current status and development trends of Micro- electro mechanical system. MEMS in-plane dynamic testing method is set up which combined rigid displacement test, local deformation measurement and rotation meterage technique.
2. MEMS motion edge detection algorithm is brought forward, combined with blur image enhance, fractal interpolation and wavelet expectation sub-pixel location technique. Extracting MEMS max motion scope accurately is realized through it. In the condition of continue lighting, MEMS in-plane motion range are obtained using the algorithm based on blur image. With fractal interpolation method, the edge of blur image is reconstructed. The accurate edge is detected by wavelet transformation technology. The measurement repetition is improved.
3. MEMS two-dimension rigid motion estimation algorithm is brought forward based on two algorithms of block matching Ultimate-root and phase correlation surface fitting sub-pixel resolving power technique. Estimating MEMS in-plane motion quickly and accurately is realized through time space and frequency space measurement algorithms analysis. The error caused by variant illumination is reduced.
4. According to the theory of invariability of center of mass of a fixed region, an improved rotation measurement method is demonstrated with better calculation precision. Given the insulation structures of MEMS which are left behind fabrication, we get several regions which have unattached object and smooth background. The rotate angel can be obtained with high resolution by observing the changes about center of mass of given regions.
5. On the base of the surface fitting sub-pixel location technique and the Newton-Raphson iterative method, extraction of the MEMS deformation information is proposed. Take deep research on the initial-value problem in correlation calculation. The displacement calculated from phase correlation and digital differential coefficients are combined as the initial value of Newton-Raphson iterative method. The convergence speed and the precision are improved greatly.
6. A new method is proposed to extract complex micro-structure three-dimensional information from sequence interferogram based on phase-shifting microscopic interferometry and growth algorithm to measure of. It can extract the bright image from a sequence of interference image. With the block match and phase correlation algorithum, in-plane motion character can be acquired.
引文
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