可见—近红外微型空间调制光谱仪关键技术研究
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摘要
近年来,随着市场需求的导向和微细加工技术的发展,光谱仪呈现出微型化趋势。本论文研究了一种工作于可见-近红外波段的新型空间调制微型傅里叶变换光谱仪,其分光干涉系统采用基本的迈克尔逊干涉仪结构,但将两臂的平面反射镜用两个多级微反射镜代替。两个多级微反射镜的不同反射面间存在不同的光程差,此结构免除了动镜扫描系统,使光谱仪的调制方式由时间调制改为空间调制。该光谱仪中无可动部件,使系统具备结构紧凑、稳定性好、实时性高等优点。
本论文在原结构设计的基础上,采用ASAP、Matlab等专业模拟软件进行了工作过程模拟,并据此优化了系统结构。模拟分析了衍射效应对复原光谱的影响,并据此优化了分束器的尺寸和系统的装调结构。采用Matlab等模拟软件模拟分析了多级微反射镜反射面粗糙度对复原光谱的影响,据此确定了多级微反射镜表面粗糙度的最大容忍值,为多级微反射镜的研究制作提供了参考数据。研究了多级微反射镜的衍射效应对干涉图光强分布的影响,分析了多级微反射镜边界突变引起的噪声,提出了消除边界突变噪声的方法并通过模拟证明了该方法的可靠性。根据结构设计提出了两种多级微反射镜的制作方法：硅的各向异性腐蚀方法和定位生长多层膜方法,针对各种方法设计了实验方案并进行了试验,分别选用硅的各向异性腐蚀方法和定位生长多层膜方法制作出多级微反射镜。
The spectrometer present a trend of microminiaturization in recent years along with the improve of the demand of the market and the development of microfabrication technology. In this paper, a new micro-Fourier transform spectrometer(FTS) working in the visible-near-infrared band is studied, which is based on space modulation. A conventional Michelson-interferometer with the reflect mirrors replaced by micro-multi-step mirrors is used as beam splitting and interference system. Different optical path differences (OPD) are produced by different mirror facets, which eliminates the moving mirror scanning system and changes the modulation mode from time modulation to space modulation. Without moving parts,this spectrometer has advantages such as compact structure, good stability and high real-time.
On the foundation work of design of the structure of the micro FTS, we simulated the work of the micro FTS with ASAP and Matlab software, and optimazed the structure of the micro FTS after the analysis of the simulation. We modulated the effect of difraction and adjusted the size of beam splitter. We modulated and analysed the effect of the surface roughness of the micro-multi-step mirrors, and hereby decided the biggest roughness that can be tolerated by the system,which provided the standard surface roughness of the micro-multi-step mirrors. We study the effect of the of the diffraction on the intensity distribution in the interferogram, and analysed noise introduced by the interrupt of the continuum of the differection effect on the edge of the interferogram. We advanced the method to eliminate the noise and modulated some examples to prove it. Three methods to fabricate the micro-multi-step mirrors are put forward based on the design of the structure:anisotropic wet-etching of silicon and the deposition of multilayers in fixed areas. Expriments of each methods are designed and carried out and results are analysed. The method of anisotropic
wet-etching of silicon and deposition of multilayers in fixed areas are chosen after thoughtful considerations. Many experiments are carried out to determine the condition of the experiment, and micro-multi-step mirrors is at last fabricated.
本论文在原结构设计的基础上,采用ASAP、Matlab等专业模拟软件进行了工作过程模拟,并据此优化了系统结构。模拟分析了衍射效应对复原光谱的影响,并据此优化了分束器的尺寸和系统的装调结构。采用Matlab等模拟软件模拟分析了多级微反射镜反射面粗糙度对复原光谱的影响,据此确定了多级微反射镜表面粗糙度的最大容忍值,为多级微反射镜的研究制作提供了参考数据。研究了多级微反射镜的衍射效应对干涉图光强分布的影响,分析了多级微反射镜边界突变引起的噪声,提出了消除边界突变噪声的方法并通过模拟证明了该方法的可靠性。根据结构设计提出了两种多级微反射镜的制作方法：硅的各向异性腐蚀方法和定位生长多层膜方法,针对各种方法设计了实验方案并进行了试验,分别选用硅的各向异性腐蚀方法和定位生长多层膜方法制作出多级微反射镜。
The spectrometer present a trend of microminiaturization in recent years along with the improve of the demand of the market and the development of microfabrication technology. In this paper, a new micro-Fourier transform spectrometer(FTS) working in the visible-near-infrared band is studied, which is based on space modulation. A conventional Michelson-interferometer with the reflect mirrors replaced by micro-multi-step mirrors is used as beam splitting and interference system. Different optical path differences (OPD) are produced by different mirror facets, which eliminates the moving mirror scanning system and changes the modulation mode from time modulation to space modulation. Without moving parts,this spectrometer has advantages such as compact structure, good stability and high real-time.
On the foundation work of design of the structure of the micro FTS, we simulated the work of the micro FTS with ASAP and Matlab software, and optimazed the structure of the micro FTS after the analysis of the simulation. We modulated the effect of difraction and adjusted the size of beam splitter. We modulated and analysed the effect of the surface roughness of the micro-multi-step mirrors, and hereby decided the biggest roughness that can be tolerated by the system,which provided the standard surface roughness of the micro-multi-step mirrors. We study the effect of the of the diffraction on the intensity distribution in the interferogram, and analysed noise introduced by the interrupt of the continuum of the differection effect on the edge of the interferogram. We advanced the method to eliminate the noise and modulated some examples to prove it. Three methods to fabricate the micro-multi-step mirrors are put forward based on the design of the structure:anisotropic wet-etching of silicon and the deposition of multilayers in fixed areas. Expriments of each methods are designed and carried out and results are analysed. The method of anisotropic
wet-etching of silicon and deposition of multilayers in fixed areas are chosen after thoughtful considerations. Many experiments are carried out to determine the condition of the experiment, and micro-multi-step mirrors is at last fabricated.
引文
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[3]陆婉珍.近红外光谱仪[J].石油仪器,2001,15(4)：30-32.
[4]吴航行,华建文,王模昌.新型红外空间遥感用傅里叶变换光谱仪[J].红外与激光工程,2004,33(4)：397-401.
[5]刘宏欣,张军,梁静秋,卢锷,陈星旦,微型近红外傅里叶光谱仪[J].光谱学与光谱分析,2006,26(3)：299-300.
[6]鞠挥,吴一辉,微型光谱仪的发展现状[J].光学精密工程,2001,9(4)：371-375.
[7]史俊锋,惠梅,王东生,毛文炜,光谱仪的微型化及其应用[J].光学技术,2003,29(3)：13-16.
[8]Correia J H, Bartek M, High selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum[J]. IEEE,2000,47(6):3-10.
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