闭环电容式微加速度计接口ASIC研究
|
摘要
本论文在深入分析闭环加速度计基本原理的基础上,结合本MEMS中心设计加速度计的经验,利用华润上华CSMC 0.5μm DPDM工艺模型参数设计完成了闭环加速度计信号处理电路。
闭环加速度计信号处理电路主要包含两部分:模拟部分与数字部分。模拟部分包含控制开关电路、驱动电路、前级运算放大器、采样保持电路、相位调节电路、单位增益缓冲器、基准电流源、电容补偿阵列、开关电压转换电路。电容阵列的采用,可以在一定程度上弥补由于工艺偏差造成的差分电容容值偏差。电容补偿阵列在没有加速度敏感部分的条件下,也能够验证整体电路的功能。数字部分包含环形振荡器、分频器、组合逻辑门、非交叠时钟产生电路。通过数字部分产生了8组不同相位的时序控制信号,各时序信号之间未发生时钟交叠。通过数字电路控制开关的导通与关断,加速度系统处于不同状态。数字电路的时钟是2MHz,一个完整的工作周期由32个状态组成。每个周期是由三个相位组成:检测相位,采样相位,力反馈相位。每个周期始于力反馈相位结束处与检测相位的开始处。整体电路性能如下:电路的满量程范围为-3g～+3g,系统灵敏度为0.78V/g,可检测最小加速度信号为30μg。
本课题还完成了本电路版图的绘制,通过LPE参数提取进一步验证了本电路的功能的实现。
Based on analyzing the principle of the closed-loop accelerometer and combining the experience of the open-loop accelerometer designed by HIT MEMS center, the interface circuits of the closed-loop accelerometer is designed by using the process parameter of CSMC 0.5μm DPDM.
The circuits composed of two parts. They are analog part and digital part. The analog part includes the switch controlling circuits, driving circuits, operation amplifier, sample/hold circuits, phase modulating circuits, unity gain buffer, current reference source, compensation capacity array, voltage conversion circuit. Compensation capacity array in the absence of acceleration-sensitive condition also verify the whole circuits function. The digital part includes closed loop oscillator, frequency divider, combinational logic circuit, non-overlapping clock generation circuit. By using the digital part, the entire circuit get 8 different phase sequence controlling signal. Each signal don’t occur the overlapping clock. The accelerometer system is placed in several states by digital circuits which control the opening and closing of various switches. The digital circuits operate at a clock frequency of 2MHz. A repetitive cycle includes 32 states. Each cycle includes three phases: Sensing phase, sample phase, and forcing phase. Each cycle starts with the end of the forcing period and beginning of sensing phase. The circuits performance as follow: the full measurement range can be achieved from -3g to +3g, the sensitivity of the system is 0.78V/g, the minimum acceleration detected can be achieved 30μg.And the compensation capacity array could to a certain extent prevent capacity deviation.
The thesis has completed the layout of the whole circuit, by LPE extracting parameter to verify the function of the circuits.
闭环加速度计信号处理电路主要包含两部分:模拟部分与数字部分。模拟部分包含控制开关电路、驱动电路、前级运算放大器、采样保持电路、相位调节电路、单位增益缓冲器、基准电流源、电容补偿阵列、开关电压转换电路。电容阵列的采用,可以在一定程度上弥补由于工艺偏差造成的差分电容容值偏差。电容补偿阵列在没有加速度敏感部分的条件下,也能够验证整体电路的功能。数字部分包含环形振荡器、分频器、组合逻辑门、非交叠时钟产生电路。通过数字部分产生了8组不同相位的时序控制信号,各时序信号之间未发生时钟交叠。通过数字电路控制开关的导通与关断,加速度系统处于不同状态。数字电路的时钟是2MHz,一个完整的工作周期由32个状态组成。每个周期是由三个相位组成:检测相位,采样相位,力反馈相位。每个周期始于力反馈相位结束处与检测相位的开始处。整体电路性能如下:电路的满量程范围为-3g～+3g,系统灵敏度为0.78V/g,可检测最小加速度信号为30μg。
本课题还完成了本电路版图的绘制,通过LPE参数提取进一步验证了本电路的功能的实现。
Based on analyzing the principle of the closed-loop accelerometer and combining the experience of the open-loop accelerometer designed by HIT MEMS center, the interface circuits of the closed-loop accelerometer is designed by using the process parameter of CSMC 0.5μm DPDM.
The circuits composed of two parts. They are analog part and digital part. The analog part includes the switch controlling circuits, driving circuits, operation amplifier, sample/hold circuits, phase modulating circuits, unity gain buffer, current reference source, compensation capacity array, voltage conversion circuit. Compensation capacity array in the absence of acceleration-sensitive condition also verify the whole circuits function. The digital part includes closed loop oscillator, frequency divider, combinational logic circuit, non-overlapping clock generation circuit. By using the digital part, the entire circuit get 8 different phase sequence controlling signal. Each signal don’t occur the overlapping clock. The accelerometer system is placed in several states by digital circuits which control the opening and closing of various switches. The digital circuits operate at a clock frequency of 2MHz. A repetitive cycle includes 32 states. Each cycle includes three phases: Sensing phase, sample phase, and forcing phase. Each cycle starts with the end of the forcing period and beginning of sensing phase. The circuits performance as follow: the full measurement range can be achieved from -3g to +3g, the sensitivity of the system is 0.78V/g, the minimum acceleration detected can be achieved 30μg.And the compensation capacity array could to a certain extent prevent capacity deviation.
The thesis has completed the layout of the whole circuit, by LPE extracting parameter to verify the function of the circuits.
引文
1 H.J Luinge, P.H.Veltink, C.T.M.Baten. Estimation of orientation with gyroscope and accelerometer. IEEE Proceedings of the first joint BMES/EMBS conference serving humanity 1999:844
2李栓庆.下世纪微电子机械系统的发展.半导体情报. 2003,34(2):11-12
3刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程. 2003,11(5):425-431
4 Per Ohlckers, Reidar Holm, Henrik Jakobsen. An Integrated Resonant Accelerometer Microsystem for Automotive Applications. Sensors and Actuators. 1998, A66:99-104
5于凌宇.国内外传感器技术市场和发展情况.传感器世界. 2000,6(7):1-3
6刘广玉.传感器的现状和未来.测控技术. 1999,18(3):1-4
7张兴,郝一龙,李志宏,王阳元.跨世纪的新技术-微机电系统(MEMS).电子科技导报. 1999, (4):2-6
8 Bernhard E. Boser and Roger T. Howe. Surface Micromachined Accelerometers IEEE Journal of solid-state circuits. 1996,31(3):366-375
9徐德炳. ADXL50和ADXL05型加速度计的原理及应用.北京航空航天大学测控技术研究所, 2000: 60-64
10 Navid Yazdi, Khalil Najifi. An interface IC for a capacitive siliconμg accelerometer. IEEE International Solid-state circuits conference 1999:132-134
11 W. Yun and R. T. Howe. Silicon microfabricated accelerometers: A Perspective On recentdevelopment,”SensorsExpo’91, Chicago. 1991:1-8
12 Cheng Hisen Liu, Aaron M. Barzilai, Josegh Kurth Reynold, Aaron partridge. Characterization of a high sensitivity micromachined tunneling accelerometer with micro-g resolution. IEEE Journal of microelectromechanical system.1998, 7(2):235-244
13 H. seidel, U. Fritsch, R. Gottinger and J. Schalk. A piezoresistive silicon accelerometer with monolithically integrated cmos-circuitry. The 8th international conference on solid-state sensors and actuation, and Eurosensors IX, Stockholm, Sweden. 1995: 597-600
14于梅芳.与硅微电子技术相兼容的传感器和执行器微细加工技术.传感器技术学报.1995,(1):45-48
15杨振川,李志宏,李婷,武过英.一种高线性度的电容式加速度计.第四届全国微米/纳米技术学术会议专刊.上海,2000:252-254
16曹新平,张大成,王阳元.一种新的三轴差分电容式加速度计.压电与声光. 2001(增刊):291-293
17 Weijie Yun, Howe R.T., Gray P.R..Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry. Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest, IEEE.1992:126-131
18温淑慧.一种电容式加速度传感器设计的研究.传感器技术学报.2005,18(2):329-332
19李万玉,阮爱武,罗晋生,冯培德.微硅加速度计的接口检测电路的研究.仪器仪表学报. 2000,21(2):170-173
20朱武,张佳民,车录锋.差分电容监测技术的研究.测控技术学报.2004, 18(3):203-207
21刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程.2003, 11(5):425-431
22马欣龙,王永梁.梳齿式微机械力平衡加速度计.中国惯性技术学报.2002, 10(3): 55-60
23王文涛,耿增建.单轴硅微加速度传感器的原理与电路设计.传感器技术.2005,14:92-94
24吴天准,董景新,刘云峰.电容式微机械加速度计闭环系统的零偏.清华大学学报. 2005, 45(2):201-204
25 Martin kollar, Linus michaeli. Consideration for a new micromachined accelerometer capacity interface based on switched flip-flop circuit. IMTC 2006:513-518
26李彩华.力平衡速度传感器设计分析.传感器技术. 2005, 4(8):46-48
27吴天准,董景新,刘云峰,赵长德.梳齿式微加速度计闭环系统性能的分析与优化.仪器仪表学报. 2006, 27(3):285-289
28陈渝,郁发新,王慧泉,金仲和.电容式力平衡加速度计的设计.传感器技术学报. 2006, 19(2):411-414
29郭琳,陈明,赵博辉.声表面波加速度计静电力式反馈闭环方案研究.测控技术. 2003,22(9):6-10
30刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程. 2003, 11(5): 425-431
31 Crist lu,Mark Lemkin,and Bernhard E.boser. Accelerometer with Digital Output. IEEE journal of solid-state circuits. 1995, 30(12): 1367-1373
32 C. Condemine, N, delorme, J. Durupt.A 0.8ma 50Hz 15b SNDR△∑closed-loop 10g acclerometer using an 8th-order Digital compensator. IEEE ISSCC. 2005:248-249
33 Weijie Yun, Roger T.Howe, and Paul R.Gray. Surface micromachined, digitally force-ballanced accelerometer with integrated cmos detection circuitry, IEEE Journal of solid-state circuit.1992:126-131
34 T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon,and M, Degrauwe.15b Electro-mechanical Sigma-delta Converter for Acceleration Measurements. Digest of Technical Papers IEEE International Solid State Circuits Conference. 1994:160-161
35 W.Henrion. Wide Dynamic Range Direct Digital Output Accelerometer. Presented at Hilton Head 1990 Solid State Sensors and Actuators WorkshopHilton Head Island, SC. 1990:153-157
36 L.D.Edmonds, G.M.Swift, and C.I.Lee. Radiation Response of a MEMS Accelerometer: An Electrostatic Force. IEEE transactions on nuclear science, 1998, 45(6): 2779-2788
37 Jiangfeng Wu, Gary K.Fedder, and L.Richard Carley. A low-noise low-offset capacitive sensing amplifier for a 50-μg/ Hz Monolithic CMOS MEMS Accelerometer. IEEE journal of solid-state circuit. 2004, 39: 722-730
38 Jiangfeng Wu. Low-mass Low-capacitance MEMS Accelerometers. UMI Carnegie Mellon University. 1997:19-45
39 B.P.van Drieenhuizen, N.I.Maluf, I.E Opris and G.T.A.Kovacs. Force-Balanced Accelerometer with mg Resolution, Fabricated using Silicon Fusion Bonding and Deep Reactive Ion Etching.1997 International conference on solid-state sensors and actuators Chicago, June. 1997:16-19
40陈宇晓,刘昌孝.电容式微机械静电伺服加速度模型建立.探测与控制学报. 2003, 25(1):29-33
41 Bhupendra K.Ahuja. An improved frequency compensation technique for CMOS Operational Amplifiers. IEEE journal of solid-state circuits, VOL.SC-18. 1983:629-633
42 William C. Black, JR. DAVID. Allstot, Rey A.Reed. A High performance Low power CMOS Channel Filter. IEEE journal of solid-state circuits.1980, 15(6):929-938
43 Paul R. Gray, Robert G. MEYER. MOS operational amplifier design-A tutorial overview IEEE journal of solid-state circuits. 1982,SC-17:969-982
44陈欣,陈婷婷. CMOS结构中的闩锁效应.微电子技术. 2003, 31(6):19-21
2李栓庆.下世纪微电子机械系统的发展.半导体情报. 2003,34(2):11-12
3刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程. 2003,11(5):425-431
4 Per Ohlckers, Reidar Holm, Henrik Jakobsen. An Integrated Resonant Accelerometer Microsystem for Automotive Applications. Sensors and Actuators. 1998, A66:99-104
5于凌宇.国内外传感器技术市场和发展情况.传感器世界. 2000,6(7):1-3
6刘广玉.传感器的现状和未来.测控技术. 1999,18(3):1-4
7张兴,郝一龙,李志宏,王阳元.跨世纪的新技术-微机电系统(MEMS).电子科技导报. 1999, (4):2-6
8 Bernhard E. Boser and Roger T. Howe. Surface Micromachined Accelerometers IEEE Journal of solid-state circuits. 1996,31(3):366-375
9徐德炳. ADXL50和ADXL05型加速度计的原理及应用.北京航空航天大学测控技术研究所, 2000: 60-64
10 Navid Yazdi, Khalil Najifi. An interface IC for a capacitive siliconμg accelerometer. IEEE International Solid-state circuits conference 1999:132-134
11 W. Yun and R. T. Howe. Silicon microfabricated accelerometers: A Perspective On recentdevelopment,”SensorsExpo’91, Chicago. 1991:1-8
12 Cheng Hisen Liu, Aaron M. Barzilai, Josegh Kurth Reynold, Aaron partridge. Characterization of a high sensitivity micromachined tunneling accelerometer with micro-g resolution. IEEE Journal of microelectromechanical system.1998, 7(2):235-244
13 H. seidel, U. Fritsch, R. Gottinger and J. Schalk. A piezoresistive silicon accelerometer with monolithically integrated cmos-circuitry. The 8th international conference on solid-state sensors and actuation, and Eurosensors IX, Stockholm, Sweden. 1995: 597-600
14于梅芳.与硅微电子技术相兼容的传感器和执行器微细加工技术.传感器技术学报.1995,(1):45-48
15杨振川,李志宏,李婷,武过英.一种高线性度的电容式加速度计.第四届全国微米/纳米技术学术会议专刊.上海,2000:252-254
16曹新平,张大成,王阳元.一种新的三轴差分电容式加速度计.压电与声光. 2001(增刊):291-293
17 Weijie Yun, Howe R.T., Gray P.R..Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry. Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest, IEEE.1992:126-131
18温淑慧.一种电容式加速度传感器设计的研究.传感器技术学报.2005,18(2):329-332
19李万玉,阮爱武,罗晋生,冯培德.微硅加速度计的接口检测电路的研究.仪器仪表学报. 2000,21(2):170-173
20朱武,张佳民,车录锋.差分电容监测技术的研究.测控技术学报.2004, 18(3):203-207
21刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程.2003, 11(5):425-431
22马欣龙,王永梁.梳齿式微机械力平衡加速度计.中国惯性技术学报.2002, 10(3): 55-60
23王文涛,耿增建.单轴硅微加速度传感器的原理与电路设计.传感器技术.2005,14:92-94
24吴天准,董景新,刘云峰.电容式微机械加速度计闭环系统的零偏.清华大学学报. 2005, 45(2):201-204
25 Martin kollar, Linus michaeli. Consideration for a new micromachined accelerometer capacity interface based on switched flip-flop circuit. IMTC 2006:513-518
26李彩华.力平衡速度传感器设计分析.传感器技术. 2005, 4(8):46-48
27吴天准,董景新,刘云峰,赵长德.梳齿式微加速度计闭环系统性能的分析与优化.仪器仪表学报. 2006, 27(3):285-289
28陈渝,郁发新,王慧泉,金仲和.电容式力平衡加速度计的设计.传感器技术学报. 2006, 19(2):411-414
29郭琳,陈明,赵博辉.声表面波加速度计静电力式反馈闭环方案研究.测控技术. 2003,22(9):6-10
30刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望.光学精密工程. 2003, 11(5): 425-431
31 Crist lu,Mark Lemkin,and Bernhard E.boser. Accelerometer with Digital Output. IEEE journal of solid-state circuits. 1995, 30(12): 1367-1373
32 C. Condemine, N, delorme, J. Durupt.A 0.8ma 50Hz 15b SNDR△∑closed-loop 10g acclerometer using an 8th-order Digital compensator. IEEE ISSCC. 2005:248-249
33 Weijie Yun, Roger T.Howe, and Paul R.Gray. Surface micromachined, digitally force-ballanced accelerometer with integrated cmos detection circuitry, IEEE Journal of solid-state circuit.1992:126-131
34 T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon,and M, Degrauwe.15b Electro-mechanical Sigma-delta Converter for Acceleration Measurements. Digest of Technical Papers IEEE International Solid State Circuits Conference. 1994:160-161
35 W.Henrion. Wide Dynamic Range Direct Digital Output Accelerometer. Presented at Hilton Head 1990 Solid State Sensors and Actuators WorkshopHilton Head Island, SC. 1990:153-157
36 L.D.Edmonds, G.M.Swift, and C.I.Lee. Radiation Response of a MEMS Accelerometer: An Electrostatic Force. IEEE transactions on nuclear science, 1998, 45(6): 2779-2788
37 Jiangfeng Wu, Gary K.Fedder, and L.Richard Carley. A low-noise low-offset capacitive sensing amplifier for a 50-μg/ Hz Monolithic CMOS MEMS Accelerometer. IEEE journal of solid-state circuit. 2004, 39: 722-730
38 Jiangfeng Wu. Low-mass Low-capacitance MEMS Accelerometers. UMI Carnegie Mellon University. 1997:19-45
39 B.P.van Drieenhuizen, N.I.Maluf, I.E Opris and G.T.A.Kovacs. Force-Balanced Accelerometer with mg Resolution, Fabricated using Silicon Fusion Bonding and Deep Reactive Ion Etching.1997 International conference on solid-state sensors and actuators Chicago, June. 1997:16-19
40陈宇晓,刘昌孝.电容式微机械静电伺服加速度模型建立.探测与控制学报. 2003, 25(1):29-33
41 Bhupendra K.Ahuja. An improved frequency compensation technique for CMOS Operational Amplifiers. IEEE journal of solid-state circuits, VOL.SC-18. 1983:629-633
42 William C. Black, JR. DAVID. Allstot, Rey A.Reed. A High performance Low power CMOS Channel Filter. IEEE journal of solid-state circuits.1980, 15(6):929-938
43 Paul R. Gray, Robert G. MEYER. MOS operational amplifier design-A tutorial overview IEEE journal of solid-state circuits. 1982,SC-17:969-982
44陈欣,陈婷婷. CMOS结构中的闩锁效应.微电子技术. 2003, 31(6):19-21