隧道式微加速度计信号处理电路的研究
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摘要
论文对隧道式微加速度计的信号处理电路进行了系统详细的研究,对采用PID方法实现闭环反馈系统的控制进行了探索性分析。
考虑到敏感头结构对电路参数的影响,论文详细介绍了隧道加速度计敏感头及其接口电路的工作原理,重点分析了结构加工中隧尖高度、初始间距等关键结构参数对敏感头测试效果的影响;对加工成形的敏感头的结构参数和电学参数进行了测试;分析了敏感头在大气封装和真空封装下对电路设计的不同要求。
论文的关键内容之一是设计信号处理电路完成微弱隧道电流的采集和测试输出。该部分详细描述了整体电路工作原理,各电路模块完成的主要功能及设计方法;在Ⅰ-Ⅴ转换模块,分析了不同转换方法在稳定偏置电压和转换精度方面的差异;通过比较所选放大装置的各项性能参数为放大器件的选择提供了理论依据;在电路板的设计和工艺方面,简要讲述了为使整体电路性能提升而采取的噪声屏蔽、防止漏电流等措施。
对隧道加速度计在真空封装下的反馈控制系统进行了详细的建模和分析,为适应敏感元件采用真空封装的情形,针对隧道加速度计在低阻尼情况下的输出振荡问题,对采用PID控制原理为加速度计敏感头提供电学阻尼进行了探索性研究。
完成了传感器表头与接口电路的联机调试,在常规环境和低噪声环境下分别进行了隧道加速度计的静态标定和噪声测试。在低噪声环境下,用专用测试系统对隧道加速度计进行了灵敏度测试,取得了良好的测试效果。
The research of signal processing circuit of micromachined tunneling accelerometer is presented in this thesis, and the method of PID controller used to control the closed-loop feedback system is analyzed for exploration.
Considering the impact of the parameters of sensitive component on circuit design, this research also explains the operating principle of the tunnelling accelerometer sensor and its interface circuitry. It focuses on the impact of some key parameters such as tunnel-top height and initial gap on detecting performance, proposes different requirements of the circuit design according to both package forms in the air or vacuum, and tests the parameters of structural and electrical of the formed sensors.
One of the key points of the thesis is design signal processing circuit to collect weak tunnel current and output testing result, which will be expatiated in the third chapter. This part describes operating principle of the wholel circuit in detail. In I-V conversion module, it analyzes the differences between bias voltage stability and conversion accuracy due to two different I-V conversion methods, provides theoretical reference of choosing the amplifier by comparing available performance parameters, presents some measures such as noise shielded and current leakage prevent to improve the whole system performance.
According to the detailed modeling and analyzing of feedback control system in the vacuum package, in order to meet vacuum packaged requirement of the sensitive components, the closed-loop feedback control system with PID is researched in view of the signal output oscillation in the low damping circumstances.
After completing the online debugging of the sensor chip with its interface circuit, the acceleration static calibration and noise tests are carried out in a normal environment and low noise environment respectively. In the low-noise environment, the perfect result is presented with a special testing system for sensitivity test of tunneling accelerometer.
考虑到敏感头结构对电路参数的影响,论文详细介绍了隧道加速度计敏感头及其接口电路的工作原理,重点分析了结构加工中隧尖高度、初始间距等关键结构参数对敏感头测试效果的影响;对加工成形的敏感头的结构参数和电学参数进行了测试;分析了敏感头在大气封装和真空封装下对电路设计的不同要求。
论文的关键内容之一是设计信号处理电路完成微弱隧道电流的采集和测试输出。该部分详细描述了整体电路工作原理,各电路模块完成的主要功能及设计方法;在Ⅰ-Ⅴ转换模块,分析了不同转换方法在稳定偏置电压和转换精度方面的差异;通过比较所选放大装置的各项性能参数为放大器件的选择提供了理论依据;在电路板的设计和工艺方面,简要讲述了为使整体电路性能提升而采取的噪声屏蔽、防止漏电流等措施。
对隧道加速度计在真空封装下的反馈控制系统进行了详细的建模和分析,为适应敏感元件采用真空封装的情形,针对隧道加速度计在低阻尼情况下的输出振荡问题,对采用PID控制原理为加速度计敏感头提供电学阻尼进行了探索性研究。
完成了传感器表头与接口电路的联机调试,在常规环境和低噪声环境下分别进行了隧道加速度计的静态标定和噪声测试。在低噪声环境下,用专用测试系统对隧道加速度计进行了灵敏度测试,取得了良好的测试效果。
The research of signal processing circuit of micromachined tunneling accelerometer is presented in this thesis, and the method of PID controller used to control the closed-loop feedback system is analyzed for exploration.
Considering the impact of the parameters of sensitive component on circuit design, this research also explains the operating principle of the tunnelling accelerometer sensor and its interface circuitry. It focuses on the impact of some key parameters such as tunnel-top height and initial gap on detecting performance, proposes different requirements of the circuit design according to both package forms in the air or vacuum, and tests the parameters of structural and electrical of the formed sensors.
One of the key points of the thesis is design signal processing circuit to collect weak tunnel current and output testing result, which will be expatiated in the third chapter. This part describes operating principle of the wholel circuit in detail. In I-V conversion module, it analyzes the differences between bias voltage stability and conversion accuracy due to two different I-V conversion methods, provides theoretical reference of choosing the amplifier by comparing available performance parameters, presents some measures such as noise shielded and current leakage prevent to improve the whole system performance.
According to the detailed modeling and analyzing of feedback control system in the vacuum package, in order to meet vacuum packaged requirement of the sensitive components, the closed-loop feedback control system with PID is researched in view of the signal output oscillation in the low damping circumstances.
After completing the online debugging of the sensor chip with its interface circuit, the acceleration static calibration and noise tests are carried out in a normal environment and low noise environment respectively. In the low-noise environment, the perfect result is presented with a special testing system for sensitivity test of tunneling accelerometer.
引文
[1]刘俊,张斌珍.微弱信号检测技术.北京:电子工业出版社,2005:12-15
[2]G.Binnig,H.Rohrer.Scanning tunneling microscoy IBM J.Res.Develop.2001,10(4):355-369
[3]白春礼.扫描隧道显微技术及应用.上海:上海科学出版社,1991:20-25
[4]周世勋.量子力学教程.成都:电子科技大学,2002:17
[5]E.Stemme and G.Stemme.A Balanced Dual-Diaphragm Resonant Pressure Sensor in Silicon.IEEE Electrondevices.1990,V(37):648
[6]孟军,茅盘松.微硅加速度传感器的发展.电子器件.1999,22(4):296-297
[7]Waltman,S.B.,Kaiser,W.J.An electron tunneling sensor.Sensors and Actuators.1989,A21(19):201-210
[8]史建伟,陈德英.隧道加速度计的发展概况.电子器件.1999,22(3):188-192
[9]Liu C.H.,Kenny T.W.A high-precision,wide-bandwidth micromachined tunneling accelerometer.Journal of Microelectro mechanical Systems.2001,10(3):425-433.
[10]Chingwen Y.A low-voltage bulk-silicon tunneling-based silicon microaccelerometer[M].Technical Digest-International Electron Devices Meeting.1995:593-596.
[11]HARTWELL P G;BERTSCH F M,MILLER S A,et al.Single mask lateral tunneling accelerometer.Proceedings of the 1998 IEEE llth Annual International Workshop on Micro Electro-Mechanical Systems.1998:340-344.
[12]XUE Wei,WANG Jing,CUI Tian-hong.Highly sensitive micromachined tunneling sensors.光学精密工程.2004,12(5):491-503
[13]KUBENA R L,ATKINSON D M,ROBINSON W P,et al.A new miniaturized surface micromachined tunneling accelerometer[J].IEEE Electron Device Letters.1996,17(6):306-308.
[14]WANG J.Vertical polymer tunneling sensor platform by hot embossing technique.Ph.D.Dissertation,Louisiana Tech University:Institute for Micromanufacturing,2003.
[15]龙志峰,韩荔,李庆祥,白立芬.微硅隧道加速度变送器的优化设计.仪器仪表学报.2001, 22(3)):193-195
[16]韩荔,龙志峰,李庆祥.电子隧道加速度计输出信号的分析与处理.光学精密工程.2002,10(1):8-14
[17]陈德英,茅盘松,史建伟.微型隧道加速度传感器设计.固体电子学研究与进展.第2000,20(4):88-90
[18]张旭.一种力平衡式隧道加速度计传感器的特性研究.电子器件.2001,24(4):295-300
[19]陈德英,茅盘松,史建伟.扭摆式微硅隧道加速度传感器.电子器件.第24卷第4期2001,12:.285-294
[20]薛伟,王晶,崔天宏.基于MEMS微加工技术的高灵敏度隧道传感器的研究.光学精密工程.2004,12(5):92-98
[21]H.F.Dong,Y.B.Jia,Y.L.Hao,and S.M.Shen,A novel out-of-plane tunneling accelerometer.Sensors and Actuators,2005,1:360-364
[22]Cheng-Hsien Liu.Design microfabrication and control of high-performance micromachined tunneling accelerometer.Ph.D Dissertation.Stanford:Stanford University,1999
[23]董海峰.硅基MEMS隧道加速度计研究.博士学位论文.北京:北京大学,2005
[24]Haifeng Dong,Yubin Jia,Yilong Hao.System Analysis and Design of a Micromachined Tunneling accelerometer.5~(th)International Symposium on Test and Measurement.2003
[25]K.R.Howard,T.W.Kenny,J.K.Reynolds and W.J.Kaiser,A miniature hign-sensitity broad-band accelerometer based on electron tunneling transducer,Seneor and Actuators.1994,A(43):125-126
[26]Pusateri M A,Schiano J L,Vatannia S.A force rebalance accelerometer for an atmospheric weather probe.Proceedings of the American Control Conference.1997:816
[27]Zavracky P,Mclelland B,Warner K.Design and process considerations for a tunneling tip accelerometer.J Micromech Microeng,1996:352
[28]Scheeper P R,Reynold J K,Kenny T W.Development of a modal analysis accelerometer based on a tunneling displacement transducer.International Conference on Solid State Sensors and Actuators.Chicago:1997:867
[29]董海峰,贾玉斌,郝一龙.MEMS隧道加速度计的系统分析与设计.微纳电子技术.2003.7/8:295-297
[30]刘鸿文.材料力学.北京:高等教育出版社,1992:332
[31]Min Miao,Qifang Hu,Yilong Hao,Haifeng Dong,Ling Wang,Yunbo Shi,Sanmin Shen.Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability.International Conference and Exhibition on Integration and Commercialization of Micro and Nanosystems.Haina,China:2007:1551-1554
[32]郑碧华,熊正烨.偏压在隧道效应中的作用.大学物~.2005,24(7):17-18
[33]郑剑铭,王凌云,王明亮,孙道恒.微机械隧道陀螺仪中微弱信号的检测技术.厦门大学学报(自然科学版).2004,43(2):199
[34]胡启方.MEMS隧道加速度计的系统化及实用化研究.硕士学位论文.北京:北京大学,2007
[35]李岩,宋常青,侯跃新,李钢,马永和.提高微弱电流放大器性能的方法.核电子学与探测技术2007,27(5):978
[36]郑宏军,黎昕,曹银杰,王伯运.微弱电流信号检测原理与应用实例.电视技术.2002,9:94-95
[37]周红,夏勇,苏建破,朱果逸.电分析仪器中微电流的测量.分析仪器.2000,2:20-23
[38]王国荣.微弱电流的测量与IF变换电路的设计.核电子学与探测技术.2005,24(7):358-361
[39]胡诞康.微弱信号的测量.电子质量.2005,5:21-22
[40]OPA128 Data Sheet[S].Burr-Brown Corporation,2005
[41]AD620 Data Sheet[S].Analog Device Inc.,1999
[42]郑剑铭,王凌云,王明亮,孙道恒.微机械隧道陀螺仪中微弱信号的检测技术.厦门大学学报(自然科学版).2004,43(2):201-202
[43]Charles Kitchin,Lew counts.仪表放大器应用工程师指南.冯新强等译.美国模拟器件公司.2005
[44]仪表放大器AD620使用手册.美国模拟器件公司.2005
[45]李岩,宋常青,侯跃新,李钢,马永和.核电子学与探测技术.27(5):980
[46]薛伟,王晶.崔天宏高灵敏度隧道传感器的研究.光学精密工程.2004,12(5):491-493
[47]韩荔,龙志峰,李庆祥等.电子隧道加速度计输出信号的分析与处理.光学精密工程.2002,10(1):8-9
[48]戴逸松.电子系统噪声及低噪声设计方法,1984:125-131
[49]F.Rudolf,A.Jornod,J.Bergqvist.Precision Accelerometers with ugre solution.Sensors andActuators.1990,A21(23):297-302
[50]陈佳圭.微弱信号检测.北京:中央广播电视大学出版社,1987:89.
[51]陈光锋,唐富荣,薛大同.静电悬浮加速度计控制器设计分析.航天控制.2005,23(4):38-40
[2]G.Binnig,H.Rohrer.Scanning tunneling microscoy IBM J.Res.Develop.2001,10(4):355-369
[3]白春礼.扫描隧道显微技术及应用.上海:上海科学出版社,1991:20-25
[4]周世勋.量子力学教程.成都:电子科技大学,2002:17
[5]E.Stemme and G.Stemme.A Balanced Dual-Diaphragm Resonant Pressure Sensor in Silicon.IEEE Electrondevices.1990,V(37):648
[6]孟军,茅盘松.微硅加速度传感器的发展.电子器件.1999,22(4):296-297
[7]Waltman,S.B.,Kaiser,W.J.An electron tunneling sensor.Sensors and Actuators.1989,A21(19):201-210
[8]史建伟,陈德英.隧道加速度计的发展概况.电子器件.1999,22(3):188-192
[9]Liu C.H.,Kenny T.W.A high-precision,wide-bandwidth micromachined tunneling accelerometer.Journal of Microelectro mechanical Systems.2001,10(3):425-433.
[10]Chingwen Y.A low-voltage bulk-silicon tunneling-based silicon microaccelerometer[M].Technical Digest-International Electron Devices Meeting.1995:593-596.
[11]HARTWELL P G;BERTSCH F M,MILLER S A,et al.Single mask lateral tunneling accelerometer.Proceedings of the 1998 IEEE llth Annual International Workshop on Micro Electro-Mechanical Systems.1998:340-344.
[12]XUE Wei,WANG Jing,CUI Tian-hong.Highly sensitive micromachined tunneling sensors.光学精密工程.2004,12(5):491-503
[13]KUBENA R L,ATKINSON D M,ROBINSON W P,et al.A new miniaturized surface micromachined tunneling accelerometer[J].IEEE Electron Device Letters.1996,17(6):306-308.
[14]WANG J.Vertical polymer tunneling sensor platform by hot embossing technique.Ph.D.Dissertation,Louisiana Tech University:Institute for Micromanufacturing,2003.
[15]龙志峰,韩荔,李庆祥,白立芬.微硅隧道加速度变送器的优化设计.仪器仪表学报.2001, 22(3)):193-195
[16]韩荔,龙志峰,李庆祥.电子隧道加速度计输出信号的分析与处理.光学精密工程.2002,10(1):8-14
[17]陈德英,茅盘松,史建伟.微型隧道加速度传感器设计.固体电子学研究与进展.第2000,20(4):88-90
[18]张旭.一种力平衡式隧道加速度计传感器的特性研究.电子器件.2001,24(4):295-300
[19]陈德英,茅盘松,史建伟.扭摆式微硅隧道加速度传感器.电子器件.第24卷第4期2001,12:.285-294
[20]薛伟,王晶,崔天宏.基于MEMS微加工技术的高灵敏度隧道传感器的研究.光学精密工程.2004,12(5):92-98
[21]H.F.Dong,Y.B.Jia,Y.L.Hao,and S.M.Shen,A novel out-of-plane tunneling accelerometer.Sensors and Actuators,2005,1:360-364
[22]Cheng-Hsien Liu.Design microfabrication and control of high-performance micromachined tunneling accelerometer.Ph.D Dissertation.Stanford:Stanford University,1999
[23]董海峰.硅基MEMS隧道加速度计研究.博士学位论文.北京:北京大学,2005
[24]Haifeng Dong,Yubin Jia,Yilong Hao.System Analysis and Design of a Micromachined Tunneling accelerometer.5~(th)International Symposium on Test and Measurement.2003
[25]K.R.Howard,T.W.Kenny,J.K.Reynolds and W.J.Kaiser,A miniature hign-sensitity broad-band accelerometer based on electron tunneling transducer,Seneor and Actuators.1994,A(43):125-126
[26]Pusateri M A,Schiano J L,Vatannia S.A force rebalance accelerometer for an atmospheric weather probe.Proceedings of the American Control Conference.1997:816
[27]Zavracky P,Mclelland B,Warner K.Design and process considerations for a tunneling tip accelerometer.J Micromech Microeng,1996:352
[28]Scheeper P R,Reynold J K,Kenny T W.Development of a modal analysis accelerometer based on a tunneling displacement transducer.International Conference on Solid State Sensors and Actuators.Chicago:1997:867
[29]董海峰,贾玉斌,郝一龙.MEMS隧道加速度计的系统分析与设计.微纳电子技术.2003.7/8:295-297
[30]刘鸿文.材料力学.北京:高等教育出版社,1992:332
[31]Min Miao,Qifang Hu,Yilong Hao,Haifeng Dong,Ling Wang,Yunbo Shi,Sanmin Shen.Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability.International Conference and Exhibition on Integration and Commercialization of Micro and Nanosystems.Haina,China:2007:1551-1554
[32]郑碧华,熊正烨.偏压在隧道效应中的作用.大学物~.2005,24(7):17-18
[33]郑剑铭,王凌云,王明亮,孙道恒.微机械隧道陀螺仪中微弱信号的检测技术.厦门大学学报(自然科学版).2004,43(2):199
[34]胡启方.MEMS隧道加速度计的系统化及实用化研究.硕士学位论文.北京:北京大学,2007
[35]李岩,宋常青,侯跃新,李钢,马永和.提高微弱电流放大器性能的方法.核电子学与探测技术2007,27(5):978
[36]郑宏军,黎昕,曹银杰,王伯运.微弱电流信号检测原理与应用实例.电视技术.2002,9:94-95
[37]周红,夏勇,苏建破,朱果逸.电分析仪器中微电流的测量.分析仪器.2000,2:20-23
[38]王国荣.微弱电流的测量与IF变换电路的设计.核电子学与探测技术.2005,24(7):358-361
[39]胡诞康.微弱信号的测量.电子质量.2005,5:21-22
[40]OPA128 Data Sheet[S].Burr-Brown Corporation,2005
[41]AD620 Data Sheet[S].Analog Device Inc.,1999
[42]郑剑铭,王凌云,王明亮,孙道恒.微机械隧道陀螺仪中微弱信号的检测技术.厦门大学学报(自然科学版).2004,43(2):201-202
[43]Charles Kitchin,Lew counts.仪表放大器应用工程师指南.冯新强等译.美国模拟器件公司.2005
[44]仪表放大器AD620使用手册.美国模拟器件公司.2005
[45]李岩,宋常青,侯跃新,李钢,马永和.核电子学与探测技术.27(5):980
[46]薛伟,王晶.崔天宏高灵敏度隧道传感器的研究.光学精密工程.2004,12(5):491-493
[47]韩荔,龙志峰,李庆祥等.电子隧道加速度计输出信号的分析与处理.光学精密工程.2002,10(1):8-9
[48]戴逸松.电子系统噪声及低噪声设计方法,1984:125-131
[49]F.Rudolf,A.Jornod,J.Bergqvist.Precision Accelerometers with ugre solution.Sensors andActuators.1990,A21(23):297-302
[50]陈佳圭.微弱信号检测.北京:中央广播电视大学出版社,1987:89.
[51]陈光锋,唐富荣,薛大同.静电悬浮加速度计控制器设计分析.航天控制.2005,23(4):38-40