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磁控溅射制备钴酸锂和钛酸锂薄膜及电化学性能表征
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摘要
目前,钴酸锂薄膜和钛酸锂薄膜的制备方法主要有溶胶凝胶法和脉冲激光沉积法,衬底通常为金属片或镀有金属膜层的硅片,如Pt、Si/Pt等。本文采用磁控溅射法在FTO上成功制备了结晶良好的钴酸锂薄膜和钛酸锂薄膜,采用X射线衍射、扫描电子显微镜和拉曼光谱对上述薄膜进行了结构形貌测试,并采用循环伏安法和充放电测试法评价了所制备薄膜电极的电化学性能。测试结果显示:基底温度为450℃时钴酸锂薄膜结晶质量最好,其(003)晶面衍射峰最强(Fig.1),首次充放电电容分别为171.20 mAh/g和121.11 mAh/g,20次充放电循环之后,放电电量113.55mAh/g,为首次放电量的93.7%,展示了良好的充放电循环稳定性能(Fig.2)。溅射功率为100W时钛酸锂薄膜结晶质量最好,钛酸锂(111)晶面衍射峰最强(Fig.3),首次充放电电容分别为116.4mAh/g和117mAh/g,首次充放电效率可达99.4%,20次充放电循环后,放电电量109mAh/g,为首次放电量的93.2%,展示了良好的充放电循环稳定性能(Fig.4)。
In this paper,we reported preparation of LiCoO_2 and Li_4Ti_5O_(12) thin films on fluorine doped tin oxide by magnetron sputtering.X-ray diffraction,scanning electron microscopy and Raman spectroscopy were carried out to characterize the structural and morphological properties of these films.Cyclic voltammetry and charge-discharge test were also performed to evaluate the electrochemical performance of these thin film electrodes.The results show that the best LiCoO_2 film prepared at 450℃ is highly oriented(Fig.1).The first charging/discharging capacities are 171.20 mAh/g and 121.11 mAh/g,respectively,and it retains 93.7%discharge capacity after 20 charge and discharge cycles(Fig.2).The best Li_4Ti_5O_(12) thin film with(111) orientation was prepared at sputtering power of 100 W(Fig.3).The first charging/discharging capacities are 116.4 mAh/g and 117mAh/g,respectively,and it retains 93.2%discharge capacity after 20 charge and discharge cycles(Fig.4).
引文

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