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液体静压导轨的模态分析及实验验证
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摘要
超精密加工技术是适应现代高新技术需要而发展起来的先进制造技术,是尖端产品研制和开发中不可或缺的关键技术。而液体静压导轨是实现精密进给的运动部件,对于超精密加工设备的整体性能有着重要影响.尤其是导轨系统的动态性能。本文基于模态分析理论,建立了液体静压导轨的有限元模型,并通过定义材料属性、网格划分、油膜压力模拟和螺栓预紧力模拟等过程完成了液体静压导轨系统的模态分析,得到了其前4阶固有频率和模态振型。最后,本文应用锤击法对导轨的模态分析结果进行了实验验证,实验结果与仿真分析结果的吻合程度较好,表明了本文所采用的仿真分析方法的有效性。
As one of the advanced manufacturing technologies which develop along with the modern high and new technologies,the ultra precision machining technology is the key technology of the development of those highly advanced products.However,as the moving part in the realization of precision feed,the hydrostatic slide has an important influence on the whole performance of the ultra precision machining equipment,especially its dynamic property.Based on the modal analysis theory,the finite element model of the hydrostatic slide is established in the paper and its modal analysis is executed through the procedures of defining material property,mesh generation,oil film pressure simulation and bolt pretightening force simulation etc.In the finite element analysis,the former fourth order natural frequencies and mode shapes are derived.At last,experimental verification of the modal analysis results is executed by the hammering method.The experimental results and the simulation results fit together well,which manifests the effectiveness of the method proposed in the paper.
引文
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