电容式微机械加工超声换能器的信号采集
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- 英文论文题名：The signal acquisition of capacitive micromachined ultrasonic transducer
- 论文作者：郭明 ; 何常德 ; 郑永秋 ; 张文栋
- 英文论文作者：GUO Ming ; HE Chang-de ; ZHENG Yong-qiu ; ZHANG Wen-dong ; Key Laboratory of Instrumentation Science & Dynamic Measurement ; Ministry of Education ; North University of China ; School of Instrument and Electronics ; North University of China
- 年：2016
- 作者机构：中北大学仪器科学与动态测试教育部重点实验室;中北大学仪器与电子学院;
- 论文关键词：电容式微机械加工超声换能器 ; 信号采集 ; 工作频率 ; 谐振频率 ; 采样频率
- 英文论文关键词：CMUT ; signal acquisition ; working frequency ; resonant frequency ; sampling frequency
- 会议召开时间：2016-10-28
- 会议录名称：2016年全国声学学术会议论文集
- 语种：中文
- 分类号：TB552
- 学会代码：OGSM
- 会议名称：2016年全国声学学术会议
- 会议地点：中国湖北武汉
- 主办单位：中国声学学会
- 学会名称：中国声学学会
- 页数：4
- 文件大小：459k
- 原文格式：D
- 会议级别：全国
摘要
电容式微机械加工超声换能器(CMUT)具有频带宽、灵敏度高等优点,而信号的采集是其国防、医疗、工业应用中必不可少的环节。本文以CMUT谐振频率、工作频率、采样频率为主线,对其简化模型做模态仿真,通过薄膜工作振型来确定其谐振频率,进而确定其工作频率为400k Hz,以此确定采样频率和指导采集电路设计。并在水箱中开展了水下测距实验,成功以6MHz采样频率采集到400k Hz超声回波信号。实验表明在换能器前方0.25m、0.5m、1m处检测到障碍物,最大测量误差为4.0%,为更多通道、更高频率的CMUT的信号采集提供了硬件参考。
Capacitive micromachined ultrasonic transducer has advantages such as wide frequency band and high sensitivity, and the signal acquisition is an essential part of the transducer application in defense, medical, industrial and other fields. Taking CMUT resonant frequency, the working frequency, the sampling frequency as the main line, this paper used a simplified model of the transducer to simulated ANSYS mode, determined the transducer resonant frequency through the film working mode, determined its 400 k Hz working frequency, guided the acquisition circuit design. We carried out underwater ranging experiment in a water tank, successfully acquired 400 k Hz ultrasonic signal at 6MHz sampling frequency.Data shows that we detected obstacles at 0.25 m, 0.5m, 1m in the front of the transducer, the maximum measurement error is 4.0%, and provides a hardware reference for the more channels, higher frequency application of CMUT.
Capacitive micromachined ultrasonic transducer has advantages such as wide frequency band and high sensitivity, and the signal acquisition is an essential part of the transducer application in defense, medical, industrial and other fields. Taking CMUT resonant frequency, the working frequency, the sampling frequency as the main line, this paper used a simplified model of the transducer to simulated ANSYS mode, determined the transducer resonant frequency through the film working mode, determined its 400 k Hz working frequency, guided the acquisition circuit design. We carried out underwater ranging experiment in a water tank, successfully acquired 400 k Hz ultrasonic signal at 6MHz sampling frequency.Data shows that we detected obstacles at 0.25 m, 0.5m, 1m in the front of the transducer, the maximum measurement error is 4.0%, and provides a hardware reference for the more channels, higher frequency application of CMUT.
引文
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[2]于佳琪,何常德,张永平,等.MEMS电容式超声传感器设计[J].压电与声光,2013,35(05):706-710YU Jiaqi,HE Changde,ZHANG Yongping,et al.Design of MEMS capacitive ultrasonic transducer based on anodic bonding technology[J].Piezoelectrics&Acoustooptics,2013;35(05):706-710
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[7]李玉平.面向水下成像应用的电容式微机械加工超声波换能器线阵设计与测试[D].太原:中北大学,2015:36-41LI Yuping.Design and Test of Capacitive Micromachined Ultrasonic Transducer Linear Array for Underwater Imaging Applications[D].Tai Yuan:North University of China,2015:36-41
[8]邵星灵,杨卫,王正言,等.一种并行AD采集系统的通道匹配误差研究[J].压电与声光,2011,02:332-335.SHAO Xingling,YANG Wei,WANG Zhengyan,et al.Research of Channel Dismatch Errors in Parallel AD Acquisition System[J].Piezoelectrics&Acoustooptics,2011,02:332-335
[9]王荣扬,殷勇辉.多通道超声测距高速数据采集处理系统设计[J].仪表技术与传感器,2013,08:74-75WANG Rongyang,YIN Yonghui.Design of High-speed Data Acquisition and Processing Technique System for Multi-channel Ultrasonic Distance Measurement[J].Instrument Technique and Sensor,,2013,08:74-75
[10]Analog Device.AD9222 datasheet[EB/OL].http://www.alldatasheet.com/datasheet-pdf/pdf/161261/AD/AD9222.html,2006
[2]于佳琪,何常德,张永平,等.MEMS电容式超声传感器设计[J].压电与声光,2013,35(05):706-710YU Jiaqi,HE Changde,ZHANG Yongping,et al.Design of MEMS capacitive ultrasonic transducer based on anodic bonding technology[J].Piezoelectrics&Acoustooptics,2013;35(05):706-710
[3]崔娟,王红亮,何常德,等.基于FPGA的超声相控阵发射系统设计[J].仪表技术与传感器,2015,(2015)07:54-56CUI Juan,WANG Hongliang,HE Changde,et al.Design of Ultrasonic Phased Array Transmission System Based on FPGA[J].Instrument Technique and Sensor,2015,(2015)07:54-56
[4]栾桂冬.电容MEMS超声换能器研究进展.应用声学,2012;31(4):241-248LUAN Guidong.Progress in capacitive MEMS ultrasonic transducer[J].Applied Acoustics,2012;31(4):241-248
[5]王炳辉,陈敬军.声纳换能器的新进展[J].声学技术,2004,(23)01:67-71.WANG Binghui,CHEN Jingjun.Recent developments of sonar transducers[J].Technical Acoustics,2004,(23)01:67-71.
[6]张海娜.相控阵技术在水下超声成像中的应用初探[J].中国科技信息,2006,1(4):28-29ZHANG Haina.Phased Array Technology Applications of underwater ultrasound imaging[J].China Science and Technology Information,2006,1(4):28-29
[7]李玉平.面向水下成像应用的电容式微机械加工超声波换能器线阵设计与测试[D].太原:中北大学,2015:36-41LI Yuping.Design and Test of Capacitive Micromachined Ultrasonic Transducer Linear Array for Underwater Imaging Applications[D].Tai Yuan:North University of China,2015:36-41
[8]邵星灵,杨卫,王正言,等.一种并行AD采集系统的通道匹配误差研究[J].压电与声光,2011,02:332-335.SHAO Xingling,YANG Wei,WANG Zhengyan,et al.Research of Channel Dismatch Errors in Parallel AD Acquisition System[J].Piezoelectrics&Acoustooptics,2011,02:332-335
[9]王荣扬,殷勇辉.多通道超声测距高速数据采集处理系统设计[J].仪表技术与传感器,2013,08:74-75WANG Rongyang,YIN Yonghui.Design of High-speed Data Acquisition and Processing Technique System for Multi-channel Ultrasonic Distance Measurement[J].Instrument Technique and Sensor,,2013,08:74-75
[10]Analog Device.AD9222 datasheet[EB/OL].http://www.alldatasheet.com/datasheet-pdf/pdf/161261/AD/AD9222.html,2006