主动静压气体润滑支承的研究进展
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摘要
主动静压气体润滑支承可提高其承载力、动刚度和抗扰动能力,成为近期流体润滑学术界的研究热点问题。综述真空预载、电磁预载和压电主动控制的静压气体润滑支承研究现状,分析压电主动控制的静压气体润滑支承的研究进展以及存在的问题,指出主动固有节流器、主动控制节流器或气膜形状可控节流器相结合的主动气体润滑支承,是静压气体润滑支承研究的重点和未来主要发展方向。
Active aerostatic lubrication technology is an important developing direction of motion bearings of precision/ultra-precision manufacturing equipment,and active aerostatic lubrication has become the hot focus of the academic community recently,which is expected to enhance the dynamic characteristics of aerostatic lubrication bearing such as high loading capacity,high dynamic stiffness and high anti-disturbance ability.The research status of active aerostatic lubrication bearings with vacuum preloading,electromagnetic preloading and piezoelectric active compensation was reviewed,the present academic research status of aerostatic lubrication bearings,as well as existing problems,were analyzed.A new development direction of active aerostatic lubrication was suggested,which is combined with active inherent restrictor,active controlled restrictor or gas film shape control.
Active aerostatic lubrication technology is an important developing direction of motion bearings of precision/ultra-precision manufacturing equipment,and active aerostatic lubrication has become the hot focus of the academic community recently,which is expected to enhance the dynamic characteristics of aerostatic lubrication bearing such as high loading capacity,high dynamic stiffness and high anti-disturbance ability.The research status of active aerostatic lubrication bearings with vacuum preloading,electromagnetic preloading and piezoelectric active compensation was reviewed,the present academic research status of aerostatic lubrication bearings,as well as existing problems,were analyzed.A new development direction of active aerostatic lubrication was suggested,which is combined with active inherent restrictor,active controlled restrictor or gas film shape control.
引文
[1]KASSAB S Z.Performance of an externally pressurized rectangular gas bearing under constant effective recess pressure[J].Tribology International,1994,27(3):159-167.
[2]KASSAB S Z,NOURELDEEN E M,SHAWKY M A.Effects of operating conditions and supply hole diameter on the performance of a rectangular aerostatic bearing[J].Tribology International,1997,30(7):533-545.
[3]CHEN M,LIN Y.Static behavior and dynamic stability analysis of grooved rectangular aerostatic thrust bearings by modified resistance network method[J].Tribology International,2002,35(5):329-338.
[4]BELFORTE G,COLOMBO F,RAPARELLI T,et al.Static behavior of air plane pads:comparison between different feeding solutions[J].Journal of Mechanical Engineering,2010,56(4):261-267.
[5]YU P L,JIANG W,WANG X L,et al.A newly developed R-Theta-Z motion stage for high-speed wafer inspection system[C]//Proceedings of the International Conference on Design,Manufacturing and Mechatronics(ICDMM2016).Wuhan:IEEE,2017:652-662.
[6]YU P L,JIANG W,WANG X L,et al.Frequency-dependent nonlinear dynamic stiffness of aerostatic bearings subjected to external perturbations[J].International Journal of Precision Engineering&Manufacturing,2015,16(8):1771-1777.
[7]CHEN X,HE X.The effect of the recess shape on performance analysis of the gas lubricated bearing in optical lithography[J].Tribology International,2006,39(11):1336-1341.
[8]ELESHAKY M E.CFD investigation of pressure depressions in aerostatic circular thrust bearings[J].Tribology International,2009,42(7):1108-1117.
[9]AOYAMA T,KAKINUMA Y,KOBAYASHI Y.Numerical and experimental analysis for the small vibration of aerostatic guideways[J].CIRP Annals-Manufacturing Technology,2006,55(1):419-422.
[10]CHEN X D,CHEN H,LUO X,et al.Air vortices and nano-vibration of aerostatic bearings[J].Tribology Letters,2011,42(2):179-183.
[11]孙昂,马文琦,王祖温.平面静压气浮轴承的超声速流场特性[J].机械工程学报,2010,46(9):113-119.SUN A,MA W Q,WANG Z W.Characteristics of subsonic velocity field of externally pressurized gas thrust bearings[J].Journal of Mechanical Engineering,2010,46(9):113-119.
[12]陈学东,何学明,叶燚玺.超精密气浮定位工作台技术:气浮系统动力学与控制[M].武汉:华中科技大学出版社,2008.
[13]ZHU J C,CHEN H,CHEN X D.Large eddy simulation of vortex shedding and pressure fluctuation in aerostatic bearings[J].Journal of Fluids&Structures,2013,40(7):42-51.
[14]潘晋,徐丰仁,沈钊.自吸式气体支承静特性的研究[J].电子工业专用设备,1990(2):31-34.
[15]薛龙.真空吸浮式气体静压止推轴承的静态特征[J].光学精密工程,1992(2):34-40.
[16]张从鹏,刘强.直线电机气浮精密定位平台设计与控制[J].北京航空航天大学学报,2008,34(2):224-228.ZHANG C P,LIU Q.Design and control of air bearing precision positioning stage driven by linear motors[J].Journal of Beijing University of Aeronautics and Astronautics,2008,34(2):224-228.
[17]陈争,杜建军.真空预载荷静压气体轴承静态特性研究[J].润滑与密封,2013,38(4):7-11.CHEN Z,DU J J.Research on steady characteristic of vacuum pre-load aerostatic Bearing[J].Lubrication Engineering,2013,38(4):7-11.
[18]STADLER P A,DODDS S J,WILD H G.Observer based robust control of a linear motor actuated vacuum air bearing[C]//Proceedings of Advances in Computing and Technology,(AC&T)The School of Computing and Technology 2nd Annual Conference.London:AC&T,2007:212-221.
[19]刘珊珊.真空预紧气浮支承静承载特性仿真建模与实验分析[D].武汉:华中科技大学,2012.
[20]LIU S S,CHEN H,CHEN X D.Experimental investigation of static characteristics of a vacuum preloaded aerostatic bearing[J].Advanced Materials Research,2011,311/312/313:1012-1016.
[21]OH J S,KHIM G,OH J S,et al.Precision measurement of rail form error in a closed type hydrostatic guideway[J].International Journal of Precision Engineering&Manufacturing,2012,13(10):1853-1859.
[22]SLOCUM A,BASARAN M,CORTESI R,et al.Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor[J].Precision Engineering,2011,27(4):382-394.
[23]WANG S C,HUANG K Y.Magnetic-aerostatic hybrid bearing for mini-type high-speed air turbine cartridge[C]//Proceedings of ASME 2011 Turbo Expo:Turbine Technical Conference and Exposition.VANCOUVER:ASME,2011:953-960.
[24]TING G C,HUANG K Y,CHANG K N.Development and experimental performance verification of a magneto-aerostatic bearing for cartridge of dental handpieces[C]//Proceedings of ASME Turbo Expo 2012:Turbine Technical Conference and Exposition.Copenhagen:ASME,2012:589-597.
[25]HUANG K Y,CHANG K N.Magneto-aerostatic bearing for miniature air,turbine[J].Mechanics&Industry,2014,16(1):105.1-9.
[26]张俊,熊晓燕,姚爱英.可调节式三轴标定台和解耦的设计与研究[J].机床与液压,2017,45(3):159-162.ZHANG J,XIONG X Y,YAO A Y.Design and research on an adjustable three axis calibration and decoupling[J].Machine Tool&Hydraulics,2017,45(3):159-162.
[27]RO S K,KIM S H,KWAK Y,et al.Development of magnetically preloaded air bearings for a linear slide:active compensation of three degrees of freedom motion errors[J].Review of Scientific Instruments,2008,79:036104.
[28]RO S K,KIM S H,KWAK Y K,et al.Measurement and active compensation for 3-DOF motion errors of an air bearing stage with magnetic preloads[J].Journal of the Korean Society for Precision Engineering,2009,26(2):109-117.
[29]RO S K,KIM S H,KWAK Y K,et al.Study on the air bearings with actively controllable magnetic preloads for an ultra-precision linear stage[J].Mechanics&Industry,2008,25(6):134-142.
[30]RO S K,KIM S H,KWAK Y K,et al.A linear air bearing stage with active magnetic preloads for ultraprecise straight motion[J].Precision Engineering,2010,34:186-194.
[31]MORIMOTO Y,SHINSHI T,NAKAI T,et al.Magnetic/aerostatic hybrid lens drive actuator for off-axis laser beam cutting machine[J].Transactions of the Japan Society of Mechanical Engineers,Part C,2012,78(794):3569-3582.
[32]JANG H D,KIM J,HAN D C,et al.Improvement of highspeed stability of an aerostatic bearing-rotor system using an active magnetic bearing[J].International Journal of Precision Engineering&Manufacturing,2014,15(12):2565-2572.
[33]MIZUMOTO H,MATSUBARA T,HATA N,et al.An aerostatically-controlled restrictor for an infinite stiffness aerostatic thrust bearing[J].Journal of the Japan Society for Precision Engineering,1989,55(1):135-140.
[34]MIZUMOTO H,MATSUBARA T,YABUYA M.Dynamic characteristic of an infinite-stiffness aerostatic thrust bearing with an active restrictor[J].Journal of the Japan Society for Precision Engineering,1989,55(9):1694-1699.
[35]MIZUMOTO H,MATSUBARA T,HATA N,et al.Zero-compliance aerostatic bearing for an ultra-precision machine[J].Precision Engineering,1990,12(2):75-80.
[36]MIZUMOTO H,MATSUBARA T,USUKI M,et al.An infinitestiffness aerostatic thrust bearing[J].Journal of the Japan Society for Precision Engineering,1990,56(8):1431-1436.
[37]PARK C H,OH Y J,HWANG J H,et al.Motion error compensation method for hydrostatic tables using actively controlled capillaries[J].Journal of Mechanical Science&Technology,2006,20(1):51-58.
[38]PARK C H,OH Y J,SHAMOTO E,et al.Compensation for five DOF motion errors of hydrostatic feed table by utilizing actively controlled capillaries[J].Precision Engineering,2006,30,299-305.
[39]MOROSI S,SANTOS I F.Active lubrication applied to radial gas journal bearings.Part 1:modeling[J].Tribology International,2011,44(12):1949-1958.
[40]PIERART F G,SANTOS I F.Active lubrication applied to radial gas journal bearings.Part 2:modelling improvement and experimental validation[J].Tribology International,2016,96:237-246.
[41]MIZUMOTO H,MATSUBARA T,YAMAMOTO H,et al.An infinite-stiffness aerostatic bearing with an exhaust-control restrictor[J].Journal of the Japan Society for Precision Engineering,1991,57(11):2054-2059.
[42]MIZUMOTO H,SHIMIZU T.An infinite-stiffness aerostatic spindle with active restrictors[J].Journal of the Japan Society for Precision Engineering,1993,59(4):607-612.
[43]MIZUMOTO H,TANAKA Y,YABUTA Y,et al.A high-speed air spindle employing an active aerodynamic bearing[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2008:95-96.
[44]MIZUMOTO H,YABUTA Y,ARII S,et al.An active aerodynamic bearing for a high-speed precision air-bearing spindle[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2009:77-78.
[45]MIZUMOTO H,ARII S,YABUTA Y,et al.Vibration control of a high-speed air-bearing spindle using an active aerodynamic bearing[C]//Proceedings of International Conference on Control Automation and Systems.Gyeonggi-do:IEEE,2010:2261-2264.
[46]MIZUMOTO H,ARII S,YABUTA Y,et al.A high-speed precision air-bearing spindle controlled by active aerodynamic bearing:some improvements in its mechanism[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2011:425-441.
[47]MIZUMOTO H,YABUTA Y,ARII S,et al.Positioning of highspeed air-bearing spindle using active aerodynamic bearing incorporated[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2011:693-694.
[48]MIZUMOTO H,SUNAHARA T,YABUTA Y,et al.Novel diaphragm-control restrictor for precision hydrostatic-bearing spindle[J].Key Engineering Materials,2012,516:463-468.
[49]MIZUMOTO H,KAMI Y,ARII S.An active inherent restrictor for an infinite-stiffness aerostatic bearing[J].Journal of the Japan Society for Precision Engineering,1994,60(9):1325-1329.
[50]MIZUMOTO H,ARII S,KAMI Y,et al.Active inherent restrictor for air bearing spindles[J].Precision Engineering,1996,19(2/3):141-147.
[51]MIZUMOTO H,ARII S,YABUTA Y,et al.Active aerostatic bearings for ultraprecision applications[C]//Proceedings of the 35th International MATADOR Conference.London:Springer,2007:289-292.
[52]AL-BENDER F.On the modelling of the dynamic characteristics of aerostatic bearing films:From stability analysis to active compensation[J].Precision Engineering,2009,33:117-126.
[53]AGUIRRE G,AL-BENDER F,VAN BRUSSEL H.A multiphysics model for optimizing the design of active aerostatic thrust bearings[J].Precision Engineering,2010,34:507-515.
[54]TUMA J,IMEK J,KUTA J,et al.Active vibration control of hydrodynamic journal bearings[J].Springer Proceedings in Physics,2011,139(3):425-431.
[55]TUMA J,IMEK L,KUTA J,et al.Active vibrations control of journal bearings with the use of piezoactuators[J].Mechanical Systems and Signal Processing,2013,36:618-629.
[56]TUMA J,IMEK J,MAHDAL M,et al.Effects of active vibration control of journal bearings[J].Transactions of the VB:Technical University of Ostrava,Mechanical Series 2016,62(1):67-74.
[2]KASSAB S Z,NOURELDEEN E M,SHAWKY M A.Effects of operating conditions and supply hole diameter on the performance of a rectangular aerostatic bearing[J].Tribology International,1997,30(7):533-545.
[3]CHEN M,LIN Y.Static behavior and dynamic stability analysis of grooved rectangular aerostatic thrust bearings by modified resistance network method[J].Tribology International,2002,35(5):329-338.
[4]BELFORTE G,COLOMBO F,RAPARELLI T,et al.Static behavior of air plane pads:comparison between different feeding solutions[J].Journal of Mechanical Engineering,2010,56(4):261-267.
[5]YU P L,JIANG W,WANG X L,et al.A newly developed R-Theta-Z motion stage for high-speed wafer inspection system[C]//Proceedings of the International Conference on Design,Manufacturing and Mechatronics(ICDMM2016).Wuhan:IEEE,2017:652-662.
[6]YU P L,JIANG W,WANG X L,et al.Frequency-dependent nonlinear dynamic stiffness of aerostatic bearings subjected to external perturbations[J].International Journal of Precision Engineering&Manufacturing,2015,16(8):1771-1777.
[7]CHEN X,HE X.The effect of the recess shape on performance analysis of the gas lubricated bearing in optical lithography[J].Tribology International,2006,39(11):1336-1341.
[8]ELESHAKY M E.CFD investigation of pressure depressions in aerostatic circular thrust bearings[J].Tribology International,2009,42(7):1108-1117.
[9]AOYAMA T,KAKINUMA Y,KOBAYASHI Y.Numerical and experimental analysis for the small vibration of aerostatic guideways[J].CIRP Annals-Manufacturing Technology,2006,55(1):419-422.
[10]CHEN X D,CHEN H,LUO X,et al.Air vortices and nano-vibration of aerostatic bearings[J].Tribology Letters,2011,42(2):179-183.
[11]孙昂,马文琦,王祖温.平面静压气浮轴承的超声速流场特性[J].机械工程学报,2010,46(9):113-119.SUN A,MA W Q,WANG Z W.Characteristics of subsonic velocity field of externally pressurized gas thrust bearings[J].Journal of Mechanical Engineering,2010,46(9):113-119.
[12]陈学东,何学明,叶燚玺.超精密气浮定位工作台技术:气浮系统动力学与控制[M].武汉:华中科技大学出版社,2008.
[13]ZHU J C,CHEN H,CHEN X D.Large eddy simulation of vortex shedding and pressure fluctuation in aerostatic bearings[J].Journal of Fluids&Structures,2013,40(7):42-51.
[14]潘晋,徐丰仁,沈钊.自吸式气体支承静特性的研究[J].电子工业专用设备,1990(2):31-34.
[15]薛龙.真空吸浮式气体静压止推轴承的静态特征[J].光学精密工程,1992(2):34-40.
[16]张从鹏,刘强.直线电机气浮精密定位平台设计与控制[J].北京航空航天大学学报,2008,34(2):224-228.ZHANG C P,LIU Q.Design and control of air bearing precision positioning stage driven by linear motors[J].Journal of Beijing University of Aeronautics and Astronautics,2008,34(2):224-228.
[17]陈争,杜建军.真空预载荷静压气体轴承静态特性研究[J].润滑与密封,2013,38(4):7-11.CHEN Z,DU J J.Research on steady characteristic of vacuum pre-load aerostatic Bearing[J].Lubrication Engineering,2013,38(4):7-11.
[18]STADLER P A,DODDS S J,WILD H G.Observer based robust control of a linear motor actuated vacuum air bearing[C]//Proceedings of Advances in Computing and Technology,(AC&T)The School of Computing and Technology 2nd Annual Conference.London:AC&T,2007:212-221.
[19]刘珊珊.真空预紧气浮支承静承载特性仿真建模与实验分析[D].武汉:华中科技大学,2012.
[20]LIU S S,CHEN H,CHEN X D.Experimental investigation of static characteristics of a vacuum preloaded aerostatic bearing[J].Advanced Materials Research,2011,311/312/313:1012-1016.
[21]OH J S,KHIM G,OH J S,et al.Precision measurement of rail form error in a closed type hydrostatic guideway[J].International Journal of Precision Engineering&Manufacturing,2012,13(10):1853-1859.
[22]SLOCUM A,BASARAN M,CORTESI R,et al.Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor[J].Precision Engineering,2011,27(4):382-394.
[23]WANG S C,HUANG K Y.Magnetic-aerostatic hybrid bearing for mini-type high-speed air turbine cartridge[C]//Proceedings of ASME 2011 Turbo Expo:Turbine Technical Conference and Exposition.VANCOUVER:ASME,2011:953-960.
[24]TING G C,HUANG K Y,CHANG K N.Development and experimental performance verification of a magneto-aerostatic bearing for cartridge of dental handpieces[C]//Proceedings of ASME Turbo Expo 2012:Turbine Technical Conference and Exposition.Copenhagen:ASME,2012:589-597.
[25]HUANG K Y,CHANG K N.Magneto-aerostatic bearing for miniature air,turbine[J].Mechanics&Industry,2014,16(1):105.1-9.
[26]张俊,熊晓燕,姚爱英.可调节式三轴标定台和解耦的设计与研究[J].机床与液压,2017,45(3):159-162.ZHANG J,XIONG X Y,YAO A Y.Design and research on an adjustable three axis calibration and decoupling[J].Machine Tool&Hydraulics,2017,45(3):159-162.
[27]RO S K,KIM S H,KWAK Y,et al.Development of magnetically preloaded air bearings for a linear slide:active compensation of three degrees of freedom motion errors[J].Review of Scientific Instruments,2008,79:036104.
[28]RO S K,KIM S H,KWAK Y K,et al.Measurement and active compensation for 3-DOF motion errors of an air bearing stage with magnetic preloads[J].Journal of the Korean Society for Precision Engineering,2009,26(2):109-117.
[29]RO S K,KIM S H,KWAK Y K,et al.Study on the air bearings with actively controllable magnetic preloads for an ultra-precision linear stage[J].Mechanics&Industry,2008,25(6):134-142.
[30]RO S K,KIM S H,KWAK Y K,et al.A linear air bearing stage with active magnetic preloads for ultraprecise straight motion[J].Precision Engineering,2010,34:186-194.
[31]MORIMOTO Y,SHINSHI T,NAKAI T,et al.Magnetic/aerostatic hybrid lens drive actuator for off-axis laser beam cutting machine[J].Transactions of the Japan Society of Mechanical Engineers,Part C,2012,78(794):3569-3582.
[32]JANG H D,KIM J,HAN D C,et al.Improvement of highspeed stability of an aerostatic bearing-rotor system using an active magnetic bearing[J].International Journal of Precision Engineering&Manufacturing,2014,15(12):2565-2572.
[33]MIZUMOTO H,MATSUBARA T,HATA N,et al.An aerostatically-controlled restrictor for an infinite stiffness aerostatic thrust bearing[J].Journal of the Japan Society for Precision Engineering,1989,55(1):135-140.
[34]MIZUMOTO H,MATSUBARA T,YABUYA M.Dynamic characteristic of an infinite-stiffness aerostatic thrust bearing with an active restrictor[J].Journal of the Japan Society for Precision Engineering,1989,55(9):1694-1699.
[35]MIZUMOTO H,MATSUBARA T,HATA N,et al.Zero-compliance aerostatic bearing for an ultra-precision machine[J].Precision Engineering,1990,12(2):75-80.
[36]MIZUMOTO H,MATSUBARA T,USUKI M,et al.An infinitestiffness aerostatic thrust bearing[J].Journal of the Japan Society for Precision Engineering,1990,56(8):1431-1436.
[37]PARK C H,OH Y J,HWANG J H,et al.Motion error compensation method for hydrostatic tables using actively controlled capillaries[J].Journal of Mechanical Science&Technology,2006,20(1):51-58.
[38]PARK C H,OH Y J,SHAMOTO E,et al.Compensation for five DOF motion errors of hydrostatic feed table by utilizing actively controlled capillaries[J].Precision Engineering,2006,30,299-305.
[39]MOROSI S,SANTOS I F.Active lubrication applied to radial gas journal bearings.Part 1:modeling[J].Tribology International,2011,44(12):1949-1958.
[40]PIERART F G,SANTOS I F.Active lubrication applied to radial gas journal bearings.Part 2:modelling improvement and experimental validation[J].Tribology International,2016,96:237-246.
[41]MIZUMOTO H,MATSUBARA T,YAMAMOTO H,et al.An infinite-stiffness aerostatic bearing with an exhaust-control restrictor[J].Journal of the Japan Society for Precision Engineering,1991,57(11):2054-2059.
[42]MIZUMOTO H,SHIMIZU T.An infinite-stiffness aerostatic spindle with active restrictors[J].Journal of the Japan Society for Precision Engineering,1993,59(4):607-612.
[43]MIZUMOTO H,TANAKA Y,YABUTA Y,et al.A high-speed air spindle employing an active aerodynamic bearing[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2008:95-96.
[44]MIZUMOTO H,YABUTA Y,ARII S,et al.An active aerodynamic bearing for a high-speed precision air-bearing spindle[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2009:77-78.
[45]MIZUMOTO H,ARII S,YABUTA Y,et al.Vibration control of a high-speed air-bearing spindle using an active aerodynamic bearing[C]//Proceedings of International Conference on Control Automation and Systems.Gyeonggi-do:IEEE,2010:2261-2264.
[46]MIZUMOTO H,ARII S,YABUTA Y,et al.A high-speed precision air-bearing spindle controlled by active aerodynamic bearing:some improvements in its mechanism[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2011:425-441.
[47]MIZUMOTO H,YABUTA Y,ARII S,et al.Positioning of highspeed air-bearing spindle using active aerodynamic bearing incorporated[C]//Proceedings of JSPE Semestrial Meeting.Toyo:The Japan Society for Precision Engineering,2011:693-694.
[48]MIZUMOTO H,SUNAHARA T,YABUTA Y,et al.Novel diaphragm-control restrictor for precision hydrostatic-bearing spindle[J].Key Engineering Materials,2012,516:463-468.
[49]MIZUMOTO H,KAMI Y,ARII S.An active inherent restrictor for an infinite-stiffness aerostatic bearing[J].Journal of the Japan Society for Precision Engineering,1994,60(9):1325-1329.
[50]MIZUMOTO H,ARII S,KAMI Y,et al.Active inherent restrictor for air bearing spindles[J].Precision Engineering,1996,19(2/3):141-147.
[51]MIZUMOTO H,ARII S,YABUTA Y,et al.Active aerostatic bearings for ultraprecision applications[C]//Proceedings of the 35th International MATADOR Conference.London:Springer,2007:289-292.
[52]AL-BENDER F.On the modelling of the dynamic characteristics of aerostatic bearing films:From stability analysis to active compensation[J].Precision Engineering,2009,33:117-126.
[53]AGUIRRE G,AL-BENDER F,VAN BRUSSEL H.A multiphysics model for optimizing the design of active aerostatic thrust bearings[J].Precision Engineering,2010,34:507-515.
[54]TUMA J,IMEK J,KUTA J,et al.Active vibration control of hydrodynamic journal bearings[J].Springer Proceedings in Physics,2011,139(3):425-431.
[55]TUMA J,IMEK L,KUTA J,et al.Active vibrations control of journal bearings with the use of piezoactuators[J].Mechanical Systems and Signal Processing,2013,36:618-629.
[56]TUMA J,IMEK J,MAHDAL M,et al.Effects of active vibration control of journal bearings[J].Transactions of the VB:Technical University of Ostrava,Mechanical Series 2016,62(1):67-74.