Development of long-wavelength infrared detector and its space-based application requirements
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摘要
Infrared detection technology has greatly expanded the ability of mankind to study the earth and the universe. In recent years, the demand for long-wavelength infrared detectors is increasing for their advantages in exploring the earth and the universe. A variety of long-wavelength infrared detectors have been made based on thermal resistive effect, photoelectric effect, etc., in the past few decades. Remarkable achievements have been made in infrared materials, device fabrication,readout circuit, and device package. However, high performance long-wavelength infrared detectors, especially those for large format long-wavelength infrared detector focus plane array, are still unsatisfactory. Low noise, high detectivity, and large format long-wavelength infrared detector is necessary to satisfy space-based application requirements.
Infrared detection technology has greatly expanded the ability of mankind to study the earth and the universe. In recent years, the demand for long-wavelength infrared detectors is increasing for their advantages in exploring the earth and the universe. A variety of long-wavelength infrared detectors have been made based on thermal resistive effect, photoelectric effect, etc., in the past few decades. Remarkable achievements have been made in infrared materials, device fabrication,readout circuit, and device package. However, high performance long-wavelength infrared detectors, especially those for large format long-wavelength infrared detector focus plane array, are still unsatisfactory. Low noise, high detectivity, and large format long-wavelength infrared detector is necessary to satisfy space-based application requirements.
Infrared detection technology has greatly expanded the ability of mankind to study the earth and the universe. In recent years, the demand for long-wavelength infrared detectors is increasing for their advantages in exploring the earth and the universe. A variety of long-wavelength infrared detectors have been made based on thermal resistive effect, photoelectric effect, etc., in the past few decades. Remarkable achievements have been made in infrared materials, device fabrication,readout circuit, and device package. However, high performance long-wavelength infrared detectors, especially those for large format long-wavelength infrared detector focus plane array, are still unsatisfactory. Low noise, high detectivity, and large format long-wavelength infrared detector is necessary to satisfy space-based application requirements.
引文
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[2]Rogalski A 2012 Opto-Electron.Rev.20 279
[3]Hoffman A W,Love P J and Rosbeck J P 2004 Focal Plane Arrays for Space Telescopes(San Diego:SPIE Press)p.194
[4]Rogalski A 2005 Rep.Prog.Phys.68 2267
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[9]Kruse P W 2001 Uncooled Thermal Imaging Arrays,Systems and Applications(Bellingham:SPIE Press)
[10]Migdall A,Polyakov S,Fan J and Bienfang J 2013 Single-Photon Generation and Detection:Experimental Methods in the Physical Sciences(Amsterdam:Elsevier)
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[12]Loose M,Beletic J,Garnett J and Xu M 2007 Focal Plane Arrays for Space Telescopes III(San Diego:SPIE Press,CA)p.66900C
[13]Gunapala S D,Bandara S V,Liu J K,Hill C J,Rafol S B,Mumolo J M,Trinh J T,Tidrow M Z and LeVan P D 2005 Semicond.Sci.Technol.20473
[14]Manurkar P,Ramezani-Darvish S,Nguyen B M,Razeghi M and Hubbs J 2010 Appl.Phys.Lett.97 193505
[15]Li C,Han C J,Skidmore G D and Hess C 2010 D Infrared Technology and Applications XXXVI(San Diego:SPIE Press)p.76600V
[16]Richards P L and McCreight C R 2005 Phys.Today 58 41
[17]Rieke G H 2007 Ann.Rev.Astron.Astr.45 77
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[19]Ninomiya Y and Fu B 2018 Ore Geol.Rev.in press
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[23]Lawson W D,Nielsen S,Putley E H and Young A S 1959 J.Phys.Chem.Solids 9 325
[24]Schmit J L and Wood R A 1982 J.Crystal Growth 56 485
[25]Carmody M,Pasko J G,Edwall D,Piquette E,Kangas M,Freeman S,Arias J,Jacobs R,Mason W,Stoltz A,Chen Y and Dhar N K 2008 J.Electron.Mater.37 1184
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[27]He L,Chen L,Wu Y,Fu X L,Wang Y Z,Wu J,Yu M F,Yang J R,Ding R J,Hu X N,Li Y J and Zhang Q Y 2007 J.Crystal Growth 301-302268
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[30]Lin Y,Donetsky D,Wang D,Westerfeld D,Kipshidze G,Shterengas L,Sarney W L,Svensson S P and Belenky G 2015 J.Electron.Mater.44 3360
[31]Gao Y Z,Gong X Y,Kan H,Aoyama M and Yamaguchi T 1999 Jpn.J.Appl.Phys.38 1939
[32]Kim J D,Kim S,Wu D,Wojkowski J,Xu J,Piotrowski J,Bigan E and Razeghi M 1995 Appl.Phys.Lett.67 2645
[33]Gao Y,Gong X,Wu G,Feng Y,Makino T,Kan H,Koyama T and Hayakawa Y 2013 Int.J.Miner.Metall.Mater.20 393
[34]Sai-Halasz G A,Tsu R and Esaki L 1977 Appl.Phys.Lett.30 651
[35]Smith D L and Mailhiot C 1987 J.Appl.Phys.62 2545
[36]Wei Y,Gin A,Razeghi M and Brown G J 2002 Appl.Phys.Lett.813675
[37]Gunapala S D,Ting D Z,Hill C J,Nguyen J,Soibel A,Rafol S B,Keo S A,Mumolo J M,Lee M C,Liu J K and Liao A 2010 23rd Annual Meeting of the IEEE Photonics Society,7-11 November,2010,Denver,USA,p.637
[38]Delaunay P Y,Nosho B Z,Gurga A R,Terterian S and Rajavel RD 2017 Infrared Technology and Applications XLIII(Anaheim:SPIEPress)p.101770T
[39]Jiang D,Guo F,Xiang W,Hao Y,Wang G,Xu Y,Yu Q,Niu Z and Zhao L 2014 International Symposium on Optoelectronic Technology and Application 2014:Infrared Technology and Applications(Beijing:SPIE Press)p.93001L
[40]Sun L,Wang L,Lu J L,Liu J,Fang J,Xie L L,Hao Z B,Jia H Q,Wang W X and Chen H 2018 Chin.Phys.B 27 047209
[41]Jiang D W,Xiang W,Guo F Y,Hao H Y,Han X,Li X C,Wang G W,Xu Y Q,Yu Q J and Niu Z C 2016 Chin.Phys.Lett.33 48502
[42]Zhou Y,Chen J,Xu Z and He L 2016 Semicond.Sci.Technol.31085005
[43]LLeotin J 1986 Far-Infrared Science and Technology,Vol.0666(Quebec:SPIE Press)p.81
[44]Kimata M IRFPA Development in Japan
[45]Onnes H 1911 Commun.Phys.Lab.Univ.Leiden 12 120
[46]Gol’tsman G N,Okunev O,Chulkova G,Lipatov A,Semenov A,Smirnov K,Voronov B,Dzardanov A,Williams C and Sobolewski R2001 Appl.Phys.Lett.79 705
[47]Andrews D H,Jr W F B,Ziegler W T and Blanchard E R 2004 Rev.Sci.Instrum.13 281
[48]Josephson B D 1962 Phys.Lett.1 251
[49]Day P K,LeDuc H G,Mazin B A,Vayonakis A and Zmuidzinas J 2003Nature 425 817
[50]Mazin B A 2009 AIP Conf.Proc.1185 135
[51]Dauler E A,Kerman A J,Rosenberg D,Pan S,Grein M E,Molnar RJ,Correa R E,Bawendi M G,Berggren K K,Moores J D and Boroson D M 2011 IEEE Photonic Society 24th Annual Meeting,9-13 October,2011,Arlington,USA,p.350
[52]Marsili F,Verma V B,Stern J A,Harrington S,Lita A E,Gerrits T,Vayshenker I,Baek B,Shaw M D,Mirin R P and Nam S W 2013 Nat.Photon.7 210
[53]Zhang W,You L,Li H,Huang J,Lv C,Zhang L,Liu X,Wu J,Wang Zand Xie X 2017 Sci.China.Phys.Mech.Astron.60 120314
[54]Irwin K D and Hilton G C 2005 Cryogenic Particle Detection(Berlin:Springer-Verlag)pp.63-150
[55]Cecil T,Miceli A,Gades L,Datesman A,Quaranta O,Yefremenko V,Novosad V and Mazin B 2012 Phys.Procedia 37 697
[56]Coiffard G,Mazin B A,Daal M,Zobrist N and Szypryt P 2018 High Energy,Optical,and Infrared Detectors for Astronomy VIII(Austin:SPIE Press)p.107091M
[57]Austermann J,Beall J,Becker D,Hilton G C,Hubmayr J,Irwin K D,Li D,Mauskopf P,Pappas D P,Vale L,Lanen J V,Vissers M R and Wang Y 2015 26th International Symposium on Space Terahertz Technology,16-18 March,2015,Cambridge,USA
[58]Fyhrie A,Glenn J,Wheeler J,Day P,Eom B H,Leduc H and Skrutskie M 2016 J.Low Temp.Phys.184 712
[59]Young E T 2013 Planets,Stars and Stellar Systems(Dordrecht:Springer Netherlands)p.565
[60]Schuller J A,Barnard E S,Cai W,Jun Y C,White J S and Brongersma M L 2010 Nat.Mater.9 193
[61]Ishi T,Fujikata J,Makita K,Baba T and Ohashi K 2005 Jpn.J.Appl.Phys.44 L364
[62]Tang L,Kocabas S E,Latif S,Okyay A K,Ly-Gagnon D S,Saraswat K C and Miller D A B 2008 Nat.Photon.2 226
[63]Boltasseva A and Atwater H A 2011 Science 331 290
[64]Obradov M,Jakˇsi′c Z and Vasiljevi′c-Radovi′c D 2014 J.Opt.16 125011
[65]Wu W,Bonakdar A and Mohseni H 2010 Appl.Phys.Lett.96 161107
[66]Katayama H,Sakai M,Kato E,Nakajima Y,Nakau K and Kimura T 2015 Infrared Technology and Applications XLI(Baltimore:SPIEPress)p.94511D
[67]Greenhouse M A 2013 UV/Optical/IR Space Telescopes and Instruments:Innovative Technologies and Concepts VI(San Diego:SPIEPress)p.886004
[2]Rogalski A 2012 Opto-Electron.Rev.20 279
[3]Hoffman A W,Love P J and Rosbeck J P 2004 Focal Plane Arrays for Space Telescopes(San Diego:SPIE Press)p.194
[4]Rogalski A 2005 Rep.Prog.Phys.68 2267
[5]Rogalski A,Martyniuk P and Kopytko M 2017 Appl.Phys.Rev.4031304
[6]Gunapala S D,Rhiger D R and Jagadish C 2011 Advances in Infrared Photodetectors(Amsterdam:Academic Press)
[7]Schneider H and Liu H C 2007 Quantum Well Infrared Photodetectors:Physics and Applications(Berlin:Springer)
[8]Stapelbroek M G,Seib D H,Huffman J E and Florence R A 1995 Infrared Detectors and Instrumentation for Astronomy(Orlando:SPIEPress)p.41
[9]Kruse P W 2001 Uncooled Thermal Imaging Arrays,Systems and Applications(Bellingham:SPIE Press)
[10]Migdall A,Polyakov S,Fan J and Bienfang J 2013 Single-Photon Generation and Detection:Experimental Methods in the Physical Sciences(Amsterdam:Elsevier)
[11]Nazemi J,Battaglia J,Brubaker R,Delamere M and Martin C 2012 Infrared Technology and Applications XXXVIII(Baltimore:SPIE Press)p.83530B
[12]Loose M,Beletic J,Garnett J and Xu M 2007 Focal Plane Arrays for Space Telescopes III(San Diego:SPIE Press,CA)p.66900C
[13]Gunapala S D,Bandara S V,Liu J K,Hill C J,Rafol S B,Mumolo J M,Trinh J T,Tidrow M Z and LeVan P D 2005 Semicond.Sci.Technol.20473
[14]Manurkar P,Ramezani-Darvish S,Nguyen B M,Razeghi M and Hubbs J 2010 Appl.Phys.Lett.97 193505
[15]Li C,Han C J,Skidmore G D and Hess C 2010 D Infrared Technology and Applications XXXVI(San Diego:SPIE Press)p.76600V
[16]Richards P L and McCreight C R 2005 Phys.Today 58 41
[17]Rieke G H 2007 Ann.Rev.Astron.Astr.45 77
[18]D’Souza A I,Dawson L C,Anderson E J,Markum A D,Tennant WE,Bubulac L O,Zandian M,Pasko J G,McLevige W V,Edwall D E,Derr J W and Jandik J E 1997 Sensors,Systems,and Next-Generation Satellites(London:SPIE Press)p.372
[19]Ninomiya Y and Fu B 2018 Ore Geol.Rev.in press
[20]Love P J,Hoffman A W,Lum N A,Ando K J,Rosbeck J,Ritchie W D,Therrien N J,Holcombe R S and Corrales E 2005 Focal Plane Arrays for Space Telescopes II(San Diego:SPIE Press)p.590209
[21]Norton P R 1999 Infrared Technology and Applications XXV(Orlando:SPIE Press)p.652
[22]Chenette E R 1967 Adv.Electron.Electron.Phys.23 303
[23]Lawson W D,Nielsen S,Putley E H and Young A S 1959 J.Phys.Chem.Solids 9 325
[24]Schmit J L and Wood R A 1982 J.Crystal Growth 56 485
[25]Carmody M,Pasko J G,Edwall D,Piquette E,Kangas M,Freeman S,Arias J,Jacobs R,Mason W,Stoltz A,Chen Y and Dhar N K 2008 J.Electron.Mater.37 1184
[26]Vilela M F,Lofgreen D D,Smith E P G,Newton M D,Venzor G M,Peterson J M,Franklin J J,Reddy M,Thai Y,Patten E A,Johnson S Mand Tidrow M Z 2008 J.Electron.Mater.37 1465
[27]He L,Chen L,Wu Y,Fu X L,Wang Y Z,Wu J,Yu M F,Yang J R,Ding R J,Hu X N,Li Y J and Zhang Q Y 2007 J.Crystal Growth 301-302268
[28]Rogalski A 1989 Prog.Quantum Electron.13 191
[29]Rogalski A 2017 Electro-Optical and Infrared Systems:Technology and Applications XIV(Warsaw:SPIE Press)p.104330U
[30]Lin Y,Donetsky D,Wang D,Westerfeld D,Kipshidze G,Shterengas L,Sarney W L,Svensson S P and Belenky G 2015 J.Electron.Mater.44 3360
[31]Gao Y Z,Gong X Y,Kan H,Aoyama M and Yamaguchi T 1999 Jpn.J.Appl.Phys.38 1939
[32]Kim J D,Kim S,Wu D,Wojkowski J,Xu J,Piotrowski J,Bigan E and Razeghi M 1995 Appl.Phys.Lett.67 2645
[33]Gao Y,Gong X,Wu G,Feng Y,Makino T,Kan H,Koyama T and Hayakawa Y 2013 Int.J.Miner.Metall.Mater.20 393
[34]Sai-Halasz G A,Tsu R and Esaki L 1977 Appl.Phys.Lett.30 651
[35]Smith D L and Mailhiot C 1987 J.Appl.Phys.62 2545
[36]Wei Y,Gin A,Razeghi M and Brown G J 2002 Appl.Phys.Lett.813675
[37]Gunapala S D,Ting D Z,Hill C J,Nguyen J,Soibel A,Rafol S B,Keo S A,Mumolo J M,Lee M C,Liu J K and Liao A 2010 23rd Annual Meeting of the IEEE Photonics Society,7-11 November,2010,Denver,USA,p.637
[38]Delaunay P Y,Nosho B Z,Gurga A R,Terterian S and Rajavel RD 2017 Infrared Technology and Applications XLIII(Anaheim:SPIEPress)p.101770T
[39]Jiang D,Guo F,Xiang W,Hao Y,Wang G,Xu Y,Yu Q,Niu Z and Zhao L 2014 International Symposium on Optoelectronic Technology and Application 2014:Infrared Technology and Applications(Beijing:SPIE Press)p.93001L
[40]Sun L,Wang L,Lu J L,Liu J,Fang J,Xie L L,Hao Z B,Jia H Q,Wang W X and Chen H 2018 Chin.Phys.B 27 047209
[41]Jiang D W,Xiang W,Guo F Y,Hao H Y,Han X,Li X C,Wang G W,Xu Y Q,Yu Q J and Niu Z C 2016 Chin.Phys.Lett.33 48502
[42]Zhou Y,Chen J,Xu Z and He L 2016 Semicond.Sci.Technol.31085005
[43]LLeotin J 1986 Far-Infrared Science and Technology,Vol.0666(Quebec:SPIE Press)p.81
[44]Kimata M IRFPA Development in Japan
[45]Onnes H 1911 Commun.Phys.Lab.Univ.Leiden 12 120
[46]Gol’tsman G N,Okunev O,Chulkova G,Lipatov A,Semenov A,Smirnov K,Voronov B,Dzardanov A,Williams C and Sobolewski R2001 Appl.Phys.Lett.79 705
[47]Andrews D H,Jr W F B,Ziegler W T and Blanchard E R 2004 Rev.Sci.Instrum.13 281
[48]Josephson B D 1962 Phys.Lett.1 251
[49]Day P K,LeDuc H G,Mazin B A,Vayonakis A and Zmuidzinas J 2003Nature 425 817
[50]Mazin B A 2009 AIP Conf.Proc.1185 135
[51]Dauler E A,Kerman A J,Rosenberg D,Pan S,Grein M E,Molnar RJ,Correa R E,Bawendi M G,Berggren K K,Moores J D and Boroson D M 2011 IEEE Photonic Society 24th Annual Meeting,9-13 October,2011,Arlington,USA,p.350
[52]Marsili F,Verma V B,Stern J A,Harrington S,Lita A E,Gerrits T,Vayshenker I,Baek B,Shaw M D,Mirin R P and Nam S W 2013 Nat.Photon.7 210
[53]Zhang W,You L,Li H,Huang J,Lv C,Zhang L,Liu X,Wu J,Wang Zand Xie X 2017 Sci.China.Phys.Mech.Astron.60 120314
[54]Irwin K D and Hilton G C 2005 Cryogenic Particle Detection(Berlin:Springer-Verlag)pp.63-150
[55]Cecil T,Miceli A,Gades L,Datesman A,Quaranta O,Yefremenko V,Novosad V and Mazin B 2012 Phys.Procedia 37 697
[56]Coiffard G,Mazin B A,Daal M,Zobrist N and Szypryt P 2018 High Energy,Optical,and Infrared Detectors for Astronomy VIII(Austin:SPIE Press)p.107091M
[57]Austermann J,Beall J,Becker D,Hilton G C,Hubmayr J,Irwin K D,Li D,Mauskopf P,Pappas D P,Vale L,Lanen J V,Vissers M R and Wang Y 2015 26th International Symposium on Space Terahertz Technology,16-18 March,2015,Cambridge,USA
[58]Fyhrie A,Glenn J,Wheeler J,Day P,Eom B H,Leduc H and Skrutskie M 2016 J.Low Temp.Phys.184 712
[59]Young E T 2013 Planets,Stars and Stellar Systems(Dordrecht:Springer Netherlands)p.565
[60]Schuller J A,Barnard E S,Cai W,Jun Y C,White J S and Brongersma M L 2010 Nat.Mater.9 193
[61]Ishi T,Fujikata J,Makita K,Baba T and Ohashi K 2005 Jpn.J.Appl.Phys.44 L364
[62]Tang L,Kocabas S E,Latif S,Okyay A K,Ly-Gagnon D S,Saraswat K C and Miller D A B 2008 Nat.Photon.2 226
[63]Boltasseva A and Atwater H A 2011 Science 331 290
[64]Obradov M,Jakˇsi′c Z and Vasiljevi′c-Radovi′c D 2014 J.Opt.16 125011
[65]Wu W,Bonakdar A and Mohseni H 2010 Appl.Phys.Lett.96 161107
[66]Katayama H,Sakai M,Kato E,Nakajima Y,Nakau K and Kimura T 2015 Infrared Technology and Applications XLI(Baltimore:SPIEPress)p.94511D
[67]Greenhouse M A 2013 UV/Optical/IR Space Telescopes and Instruments:Innovative Technologies and Concepts VI(San Diego:SPIEPress)p.886004