光发射谱对CrTiAlN涂层性能的影响
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摘要
在不同光发射谱(OEM)条件下,采用闭合场非平衡磁控溅射技术(CFUBMSIP)在SDC99冷作模具钢表面沉积CrTiAlN涂层,采用X射线衍射仪(XRD)、显微硬度仪、原位纳米力学测试系统和销盘摩擦磨损试验机(POD)测试分析涂层的相结构、表面硬度以及耐磨损性能。结果表明:各条件下制备的CrTiAlN涂层均为FCC结构,且在(200)晶面择优取向;光发射谱值为65时,制备的CrTiAlN涂层具有较高的表面承载能力以及膜基结合力,纳米硬度和弹性模量分别为22.7 GPa和276.4 GPa;OEM65制备的CrTiAlN涂层较OEM70、OEM80制备的CrTiAlN涂层具有更低的摩擦因数和磨损率,表现出更佳的摩擦磨损性能。
Under different conditions of optical emission monitor(OEM),the CrTiAlN coatings were deposited on cold-work die steel SDC99 by closed-field unbalanced magnetron sputtering ion plating(CFUBMSIP) technique.The microstructural,mechanical and tribological properties of coatings were characterized by means of X-ray diffractometry(XRD),microhardness tester,nano indenter test system and pin-on-disc(POD) tribometer.The experimental results show that all of CrTiAlN coatings exhibit FCC crystal structure with(200) preferred orientation.Compared to the coatings deposited under OEM values of 65 and 80,CrTiAlN coatings prepare under OEM value of 65,which shows higher bearing capacity and adhesive force between the coating and the substrate,and the nanohardness and elastic modulus are 22.7 GPa and 276.4 GPa,respectively,as well as a lower friction coefficient and wear rate.
Under different conditions of optical emission monitor(OEM),the CrTiAlN coatings were deposited on cold-work die steel SDC99 by closed-field unbalanced magnetron sputtering ion plating(CFUBMSIP) technique.The microstructural,mechanical and tribological properties of coatings were characterized by means of X-ray diffractometry(XRD),microhardness tester,nano indenter test system and pin-on-disc(POD) tribometer.The experimental results show that all of CrTiAlN coatings exhibit FCC crystal structure with(200) preferred orientation.Compared to the coatings deposited under OEM values of 65 and 80,CrTiAlN coatings prepare under OEM value of 65,which shows higher bearing capacity and adhesive force between the coating and the substrate,and the nanohardness and elastic modulus are 22.7 GPa and 276.4 GPa,respectively,as well as a lower friction coefficient and wear rate.
引文
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[18]LIN Jian-liang,ZHANG Xu-hai,OU Yi-xiang,WEI Rong-hua.The structure,oxidation resistance,mechanical and tribological properties of Cr Ti Al N coatings[J].Surface&Coatings Technology,2015,277:58-66.
[19]HSU Cheng-hsun,LEE Chun-ying,LIN Zhao-hong,HO Wei-yu,LIN Chung-kwei.Bias effects on microstructure,mechanical properties and corrosion resistance of arc evaporated Cr Ti Al N nanocomposite films on AISI 304 stainless steel[J].Thin Solid Films,2011,519:4928-4932.
[20]SHI Yong-jing,LONG Si-yuan,FANG Liang,PAN Fu-sheng,LIAO Hui-min.Effects of N2 content and thickness on Cr Nxcoatings on Mg alloy by the planar DC reactive magnetron sputtering[J].Applied Surface Science,2009,255(S13/14):6515-6524.
[21]曲敬信,汪泓宏.表面工程手册[M].北京:化学工业出版社,1998.QU Jing-xin,WANG Hong-hong.Surface engineering manual[M].Beijing:Chemical Industry Press,1998.
[2]郑海彤.金属材料在汽车轻量化中的应用与发展研究[J].工业技术,2014(10):56-57.ZHENG Hai-tong.The research of the application and development of metal materials in automobile lightweight[J].Industrial Technology,2014(10):56-57.
[3]ZHANG Wei-hua,SUN Da-qian,HAN Lin-jun,LIU Dong-yang.Interfacial microstructure and mechanical property of resistance spot welded joint of high strength steel and aluminium alloy with4047 Al Si12 interlayer[J].Materials and Design,2014,57:186-194.
[4]INSPERKTOR A,SALVADOR P A.Architecture of PVD coatings for metal cutting applications[J].Surface&Coatings Technology,2014,257:138-153.
[5]张而耕,孔令超.模具PVD涂层值得关注的几个问题[J].表面技术,2010,39(4):110-112.ZHANG Er-geng,KONG Ling-chao.Several concerned issues on mould PVD coatings[J].Surface Technology,2010,39(4):110-112.
[6]朱志勇,施雯,苑峻峰,李潇,万紫.非平衡磁控溅射制备Cr Ti Al N/GLC复合涂层的表面性能及摩擦磨损性能研究[J].上海金属,2013,35(1):21-25.ZHU Zhi-yong,SHI Wen,YUAN Jun-feng,LI Xiao,WAN Zi.Surface properties and tribological behavior of Cr Ti Al N/GLC duplex coatings deposited by an unbalanced magnetron sputtering system[J].Shanghai Metals,2013,35(1):21-25.
[7]COOKE K E,YANG S,SELCUK C,KENNEDY A,TEER D G,BEALE D.Development of duplex nitrided and closed field unbalanced magnetron sputter ion plated Cr Ti Al N-based coatings for H13 aluminum extrusion dies[J].Surface and Coatings Technology,2004,188/189:697-702.
[8]SHI Yong-jing,LONG Si-yuan,YANG Shi-cai,PAN Fu-sheng.Structural and tribological properties of Cr Ti Al N coatings on Mg alloy by closed-field unbalanced magnetron sputtering ion plating[J].Applied Surface Science,2008,254:7342-7350.
[9]YANG Q,MCKELLAR R.Nanolayered Cr Al Ti N and multilayered Cr Al Ti N-Al Ti N coatings for solid particle erosion protection[J].Tribology International,2015,83:12-20.
[10]BAI Li-jing,ZHU Xiao-dong,Xiao Ji-ming,He Jia-wen.Study on thermal stability of Cr Ti Al N coating for dry drilling[J].Surface and Coatings Technology,2007,201:5257-5260.
[11]田明波,刘德令.薄膜科学与技术手册(上)[M].北京:机械出版社,1991.TIAN Ming-bo,LIU De-ling.Membrane science and technical manuals[M].Beijing:China Mechanic Press,1991.
[12]TAM P L,ZHOU Z F,SHUM P W,LI K Y.Structural,mechanical and tribological studies of Cr-Ti-Al-N coating with different chemical compositions[J].Thin Solid Films,2008,516:5725-5731.
[13]LEE S Y,KIM G S,HAHN J H.Effect of the Cr content on the mechanical properties of nanostructured Ti N/Cr N coatings[J].Surface and Coatings Technology,2004,177/178:426-433.
[14]YANG Q,ZHAO L R,CAI F,YANG S,TEER D G.Wear,erosion and corrosion resistance of Cr Ti Al N coating deposited by magnetron sputtering[J].Surface&Coatings Technology,2008,202:3886-3892.
[15]LU Li,WANG Qi-min,CHEN Bing-zhou,AO Yong-cui,YU Dong-hai,WANG Cheng-yong,WU Shang-hua,KIM K H.Microstructure and cutting performance of Cr Ti Al N coating for high-speed dry milling[J].Transactions of Nonferrous Metals Society of China,2014,24(6):1800-1806.
[16]李晨辉,吴晓春,谢尘,汪宏斌.新型冷作模具钢SDC99性能[J].材料热处理学报,2013,34(4):80-84.LI Chen-hui,WU Xiao-chun,XIE Chen,WANG Hong-bin.Research on properties of a new developed cold work die steel SDC99[J].Transactions of Materials and Heat Treatment,2013,34(4):80-84.
[17]刘二强.基于等离子体光发射谱的磁控溅射薄膜成分控制及性能研究[D].太原:太原理工大学,2009.LIU Er-qiang.Study on compositions controlling and properities of magnetron sputtering films based on plasma optical emission spectroscopy[D].Taiyuan:Taiyuan University of Technology,2009.
[18]LIN Jian-liang,ZHANG Xu-hai,OU Yi-xiang,WEI Rong-hua.The structure,oxidation resistance,mechanical and tribological properties of Cr Ti Al N coatings[J].Surface&Coatings Technology,2015,277:58-66.
[19]HSU Cheng-hsun,LEE Chun-ying,LIN Zhao-hong,HO Wei-yu,LIN Chung-kwei.Bias effects on microstructure,mechanical properties and corrosion resistance of arc evaporated Cr Ti Al N nanocomposite films on AISI 304 stainless steel[J].Thin Solid Films,2011,519:4928-4932.
[20]SHI Yong-jing,LONG Si-yuan,FANG Liang,PAN Fu-sheng,LIAO Hui-min.Effects of N2 content and thickness on Cr Nxcoatings on Mg alloy by the planar DC reactive magnetron sputtering[J].Applied Surface Science,2009,255(S13/14):6515-6524.
[21]曲敬信,汪泓宏.表面工程手册[M].北京:化学工业出版社,1998.QU Jing-xin,WANG Hong-hong.Surface engineering manual[M].Beijing:Chemical Industry Press,1998.