微系统粗糙表面的多峰黏着弹性接触分析
|
摘要
在微系统中,粗糙表面间的黏着力是影响微尺度对象能否成功装配的主要因素。为研究微尺度对象粗糙表面的接触机理,将Maugius理论和分子作用的Kim物理接触理论相结合,建立了微尺度对象的多峰黏着弹性接触模型,应用三维分形几何进行黏着力的求解,并对Kim物理接触黏附半径做近似计算,且将新建模型与不考虑分子作用力的Morrow模型进行比较。分析结果表明:微凸体两粗糙表面的物理接触距离越小,对黏着影响越大;分形维数增加,微凸体物理接触的黏着作用显著增加;随着分形粗糙度减小,Kim物理接触的微凸体数目明显增多,黏着力显著增加。
The adhesion force that exists in Micro Electro Mechanical Systems(MEMS)is a major failure mode for microscale objections during manipulation. The multiasperity elastic adhesion contact model is presented by combing Maugius' theory with Kim physical contact theory. In order to compute adhesion force of the model by fractal geometry,the adhesion contact radius of Kim theory is approximated. It is compared the adhesion force of new model with that of Morrow model. The result indicates that,rough surfaces of two asperities is the smaller physical contact distance and the greater adhesion force;when fractal dimension is increased,adhesion force of physical contact for asperity is obviously increased;when fractal roughness is decreased,in the number of asperities of Kim physical contact and adhesion force are greatly increased.
The adhesion force that exists in Micro Electro Mechanical Systems(MEMS)is a major failure mode for microscale objections during manipulation. The multiasperity elastic adhesion contact model is presented by combing Maugius' theory with Kim physical contact theory. In order to compute adhesion force of the model by fractal geometry,the adhesion contact radius of Kim theory is approximated. It is compared the adhesion force of new model with that of Morrow model. The result indicates that,rough surfaces of two asperities is the smaller physical contact distance and the greater adhesion force;when fractal dimension is increased,adhesion force of physical contact for asperity is obviously increased;when fractal roughness is decreased,in the number of asperities of Kim physical contact and adhesion force are greatly increased.
引文
[1]周超,高诚辉.工程零件粗糙表面建模方法研究[J].现代制造工程,2009(12):5-8.
[2]丁建宁,张建.范德华力作用下粗糙表面静态黏附的研究[J].传感技术学报,2006,19(5):1663-1666.
[3]ROBERT Jones,HUBERT M Pollock.Adhesion Forces between Glass and Silicon Surfaces in Air Studied by AFM:Effects of Relative Humidity,Particle Size,Roughness,and Surface Treatment[J].Langmuir,2002(18):8045-8055.
[4]FULLER K N G,TABOR D.The effect of surface roughness on adhesion of elastic solids[J].Proc Roy Soc Lond,1975(A345):327-342.
[5]KIM K S.Adhesion,slip,cohesive zones and energy fluxes for elastic spheres in contact[J].Journal of Mechanic Physic So1ids,1998,l46(2):243-266.
[6]WANG S,KOMVOPOULOS K.A fractal theory o f the interfacial temperature distribution in slow sliding regime:Part I elastic contact and heat transfer[J].Tribol of ASME,1994(116):812-823.
[7]WANG S,KOMVOPOULOS K.A fractal theory of the interfacial temperature distribution in slow sliding regime:Part II multiple domains,elastic plastic contacts and application[J].Tribol of ASME,1994(116):824-832.
[8]MORROW C A,LOVELL M R.A solution for lightly loaded adhesive rough surfaces with application to MEMS[J].Tribol of ASME,2005(127):206-212.
[9]YAN W,KOMVOPOULOS K.Contact analysis of elasticplastic fractal surfaces[J].Journal of Applied Physics,1998(84):3617-3627.
[10]MAUGIS D.Adhesion of sphere:The JKR-DMT transition using a dugdale model[J].Journal of colloid and interface science,1992(150):243-269.
[11]WU Ling.Influence of adhesive rough surface contact on microswitches[J].Journal of Applied Physics,2009(106).
[12]PENG Y F,GUO Y B.An adhesion model for elastic plastic fractal surfaces[J].Journal of Applied Physics,2007(102).
[2]丁建宁,张建.范德华力作用下粗糙表面静态黏附的研究[J].传感技术学报,2006,19(5):1663-1666.
[3]ROBERT Jones,HUBERT M Pollock.Adhesion Forces between Glass and Silicon Surfaces in Air Studied by AFM:Effects of Relative Humidity,Particle Size,Roughness,and Surface Treatment[J].Langmuir,2002(18):8045-8055.
[4]FULLER K N G,TABOR D.The effect of surface roughness on adhesion of elastic solids[J].Proc Roy Soc Lond,1975(A345):327-342.
[5]KIM K S.Adhesion,slip,cohesive zones and energy fluxes for elastic spheres in contact[J].Journal of Mechanic Physic So1ids,1998,l46(2):243-266.
[6]WANG S,KOMVOPOULOS K.A fractal theory o f the interfacial temperature distribution in slow sliding regime:Part I elastic contact and heat transfer[J].Tribol of ASME,1994(116):812-823.
[7]WANG S,KOMVOPOULOS K.A fractal theory of the interfacial temperature distribution in slow sliding regime:Part II multiple domains,elastic plastic contacts and application[J].Tribol of ASME,1994(116):824-832.
[8]MORROW C A,LOVELL M R.A solution for lightly loaded adhesive rough surfaces with application to MEMS[J].Tribol of ASME,2005(127):206-212.
[9]YAN W,KOMVOPOULOS K.Contact analysis of elasticplastic fractal surfaces[J].Journal of Applied Physics,1998(84):3617-3627.
[10]MAUGIS D.Adhesion of sphere:The JKR-DMT transition using a dugdale model[J].Journal of colloid and interface science,1992(150):243-269.
[11]WU Ling.Influence of adhesive rough surface contact on microswitches[J].Journal of Applied Physics,2009(106).
[12]PENG Y F,GUO Y B.An adhesion model for elastic plastic fractal surfaces[J].Journal of Applied Physics,2007(102).