摘要
随着空间光学系统的发展,光学检测设备的精度要求也更高.介绍了一套口径525 mm、大视场离轴平行光管光学系统的高精度计算机辅助装调方法.该大型平行光管要求全视场波像差优于1/20波长,给装调策略带来了挑战.该方法基于多视场点灵敏度矩阵模型,利用5个不同视场点干涉测得的像差数据,采用阻尼最小二乘法求解系统失调量.通过多次迭代装调,快速成功完成装调,在波长λ=632.8 nm时,该平行光管系统取得了中心视场点波像差均方根粗糙度(rms)值0.036λ、全像面波像差rms平均值0.045λ的装调精度.
Requirements in imaging quality of space astronomical optic systems are increasing. Higher performance on their ground optical detection equipment are required. The alignment strategy and meteorology method are introduced for an off-axis collimator with a diameter of 525 mm dedicated to the measurement of imaging performance of the diffraction gratings in space application. The collimator has a high sensitivity to environment and adjustment, and tuning parameters are coupled with each other. By sampling and fitting wave aberrations of appropriate five field positions, and damping least square method, the misalignments are reduced more efficiently.Finally, the wavefront error of center field is better than 0.036λ(wavelength λ is 632.8 nm), and the wavefront error over full field of view is better than 0.045λ.
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