基于飞秒激光加工的无膜光纤气体压力传感器
|
摘要
设计了一种基于飞秒激光加工的无膜式光纤气体压力传感器。通过熔接形成了单模光纤-空心光纤-无芯光纤(NCF)结构,熔接结构中的两个熔接面作为反射面,构成一个低精细度的外腔式法布里-珀罗干涉仪(EFPI)。利用飞秒激光加工结构中的空心光纤部分,烧蚀出一个与外界环境连通的小孔。外界气体压力的变化引起EFPI腔中气体折射率发生变化,通过测量法布里-珀罗腔的光学腔长,得到对应的外界气体压力。实验结果表明,传感器在0～5MPa压力范围内的腔长-压力灵敏度为1.02μm/MPa,传感器的压力分辨率为2.4kPa。该压力传感器具有量程大、灵敏度高、分辨率高和线性度高等优点。
A non-diaphragm fiber gas pressure sensor fabricated using a femtosecond laser is proposed and experimentally demonstrated.This sensor is a type of low-precision extrinsic Fabry-Perot interferometer(EFPI)formed by sandwiching a hollow fiber(HF)between a single mode fiber and a no-core fiber.A femtosecond laser is used to drill a micro-channel on the side wall of the HF to allow the gas to enter and exit the HF.When the external gas pressure changes,the refractive index of the gas in the EFPI cavity changes.The gas pressure can be detected by determining the optical cavity length of the EFPI.The experimental results show that the pressure sensitivity in the cavity is 1.02μm/MPa in the pressure range of0-5 MPa,and the pressure resolution of the sensor is 2.4 kPa.This pressure sensor has the advantages such as wide measuring range,high sensitivity,high resolution,and high linearity.
A non-diaphragm fiber gas pressure sensor fabricated using a femtosecond laser is proposed and experimentally demonstrated.This sensor is a type of low-precision extrinsic Fabry-Perot interferometer(EFPI)formed by sandwiching a hollow fiber(HF)between a single mode fiber and a no-core fiber.A femtosecond laser is used to drill a micro-channel on the side wall of the HF to allow the gas to enter and exit the HF.When the external gas pressure changes,the refractive index of the gas in the EFPI cavity changes.The gas pressure can be detected by determining the optical cavity length of the EFPI.The experimental results show that the pressure sensitivity in the cavity is 1.02μm/MPa in the pressure range of0-5 MPa,and the pressure resolution of the sensor is 2.4 kPa.This pressure sensor has the advantages such as wide measuring range,high sensitivity,high resolution,and high linearity.
引文
[1] Chen W M,Lei X H,Zhang W,et al.Recent progress of optical fiber Fabry-Perot sensors[J].Acta Optica Sinica,2018,38(3):0328010.陈伟民,雷小华,张伟,等.光纤法布里-珀罗传感器研究进展[J].光学学报,2018,38(3):0328010.
[2] Jiang Y,Ma W Y,Chen S F,et al.A micro fiber optic high-temperature pressure sensor[J].Optical Technique,2017,43(1):12-15.江毅,马维一,陈淑芬,等.微纳光纤高温压力传感器[J].光学技术,2017,43(1):12-15.
[3] Yang C D,Wang M,Ge Y X,et al.A miniature extrinsic fiber Fabry-Pérot pressure sensor[J].Acta Optica Sinica,2010,30(5):1358.杨春弟,王鸣,葛益娴,等.微型非本征光纤法布里-珀罗压力传感器[J].光学学报,2010,30(5):1358.
[4] Wang J J,Xie J.Research of a kind of quartz optical fiber Fabry-Perot cavity wide-range pressure sensor[J].Journal of Wuhan University of Technology,2016,38(3):104-107.王俊杰,谢俊.一种全石英光纤法布里-珀罗大量程压力传感器的研制[J].武汉理工大学学报,2016,38(3):104-107.
[5] Liao C R,Liu S,Xu L,et al.Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement[J].Optics Letters,2014,39(10):2827.
[6] Wang G J,Liu X L,Gui Z G,et al.A high-sensitive pressure sensor using a single-mode fiber embedded microbubble with thin film characteristics[J].Sensors,2017,17(6):1192.
[7] Pevec S,Donlagic D.Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature[J].Applied Optics,2012,51(19):4536.
[8] Zhang W H,Jiang J F,Wang S,et al.Fiber-optic Fabry-Perothigh-pressuresensorformarine applications[J].Acta Optica Sinica,2017,37(2):0206001.张伟航,江俊峰,王双,等.面向海洋应用的光纤法布里-珀罗高压传感器[J].光学学报,2017,37(2):0206001.
[9] Wu Z H,Liu T G,Jiang J F,et al.Effect of thermal stress and residual gas pressure on the thermal response of optical fiber Fabry-Perot pressure sensor[J]. Acta Optica Sinica,2015,35(3):0328005.吴振海,刘铁根,江俊峰,等.热应力和残余气压对光纤法布里-珀罗压力传感器温度性能的影响[J].光学学报,2015,35(3):0328005.
[10] Zhang J,Jing Z G,Li A,et al.All-silica fiber EFPI high static pressure sensor in fusion with simple structure[J].Chinese Journal of Lasers,2016,43(10):1010004.张杰,荆振国,李昂,等.结构简单的熔接式全石英光纤EFPI高静压传感器[J].中国激光,2016,43(10):1010004.
[11] Hu Y H,Jiang C,Sun S M,et al.High sensitivity capillary structure optical fiber gas pressure sensor[J].Journal of Optoelectronics·Laser,2018,29(1):39-43.胡义慧,江超,孙四梅,等.毛细石英管构成的高灵敏度光纤气压传感器[J].光电子·激光,2018,29(1):39-43.
[12] Silva S,Coelho L,Frazo O.An all-fiber FabryPérot interferometer for pressure sensing in different gaseous environments[J].Measurement,2014,47:418-421.
[13] Xu B,Wang C,Wang D N,et al.Fiber-tip gas pressure sensor based on dual capillaries[J].Optics Express,2015,23(18):23484-23492.
[14] Xu B,Liu Y M,Wang D N,et al.Optical fiber Fabry-Pérot interferometer based on an air cavity for gas pressure sensing[J].IEEE Photonics Journal,2017,9(2):7102309.
[15] Deng D S,Qin X,Huang G J,et al.Design and application of copper deposited tungsten disulfide film coated thin-core optical fiber gas sensor[J].Acta Optica Sinica,2017,37(11):1106002.邓大申,秦祥,黄国家,等.铜沉积二硫化钨膜包覆薄芯光纤气体传感器的设计与应用[J].光学学报,2017,37(11):1106002.
[16] Xia B,Jiang L,Wang S M,et al.Femtosecond laser drilling of micro-holes[J].Chinese Journal of Lasers,2013,40(2):0201001.夏博,姜澜,王素梅,等.飞秒激光微孔加工[J].中国激光,2013,40(2):0201001.
[2] Jiang Y,Ma W Y,Chen S F,et al.A micro fiber optic high-temperature pressure sensor[J].Optical Technique,2017,43(1):12-15.江毅,马维一,陈淑芬,等.微纳光纤高温压力传感器[J].光学技术,2017,43(1):12-15.
[3] Yang C D,Wang M,Ge Y X,et al.A miniature extrinsic fiber Fabry-Pérot pressure sensor[J].Acta Optica Sinica,2010,30(5):1358.杨春弟,王鸣,葛益娴,等.微型非本征光纤法布里-珀罗压力传感器[J].光学学报,2010,30(5):1358.
[4] Wang J J,Xie J.Research of a kind of quartz optical fiber Fabry-Perot cavity wide-range pressure sensor[J].Journal of Wuhan University of Technology,2016,38(3):104-107.王俊杰,谢俊.一种全石英光纤法布里-珀罗大量程压力传感器的研制[J].武汉理工大学学报,2016,38(3):104-107.
[5] Liao C R,Liu S,Xu L,et al.Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement[J].Optics Letters,2014,39(10):2827.
[6] Wang G J,Liu X L,Gui Z G,et al.A high-sensitive pressure sensor using a single-mode fiber embedded microbubble with thin film characteristics[J].Sensors,2017,17(6):1192.
[7] Pevec S,Donlagic D.Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature[J].Applied Optics,2012,51(19):4536.
[8] Zhang W H,Jiang J F,Wang S,et al.Fiber-optic Fabry-Perothigh-pressuresensorformarine applications[J].Acta Optica Sinica,2017,37(2):0206001.张伟航,江俊峰,王双,等.面向海洋应用的光纤法布里-珀罗高压传感器[J].光学学报,2017,37(2):0206001.
[9] Wu Z H,Liu T G,Jiang J F,et al.Effect of thermal stress and residual gas pressure on the thermal response of optical fiber Fabry-Perot pressure sensor[J]. Acta Optica Sinica,2015,35(3):0328005.吴振海,刘铁根,江俊峰,等.热应力和残余气压对光纤法布里-珀罗压力传感器温度性能的影响[J].光学学报,2015,35(3):0328005.
[10] Zhang J,Jing Z G,Li A,et al.All-silica fiber EFPI high static pressure sensor in fusion with simple structure[J].Chinese Journal of Lasers,2016,43(10):1010004.张杰,荆振国,李昂,等.结构简单的熔接式全石英光纤EFPI高静压传感器[J].中国激光,2016,43(10):1010004.
[11] Hu Y H,Jiang C,Sun S M,et al.High sensitivity capillary structure optical fiber gas pressure sensor[J].Journal of Optoelectronics·Laser,2018,29(1):39-43.胡义慧,江超,孙四梅,等.毛细石英管构成的高灵敏度光纤气压传感器[J].光电子·激光,2018,29(1):39-43.
[12] Silva S,Coelho L,Frazo O.An all-fiber FabryPérot interferometer for pressure sensing in different gaseous environments[J].Measurement,2014,47:418-421.
[13] Xu B,Wang C,Wang D N,et al.Fiber-tip gas pressure sensor based on dual capillaries[J].Optics Express,2015,23(18):23484-23492.
[14] Xu B,Liu Y M,Wang D N,et al.Optical fiber Fabry-Pérot interferometer based on an air cavity for gas pressure sensing[J].IEEE Photonics Journal,2017,9(2):7102309.
[15] Deng D S,Qin X,Huang G J,et al.Design and application of copper deposited tungsten disulfide film coated thin-core optical fiber gas sensor[J].Acta Optica Sinica,2017,37(11):1106002.邓大申,秦祥,黄国家,等.铜沉积二硫化钨膜包覆薄芯光纤气体传感器的设计与应用[J].光学学报,2017,37(11):1106002.
[16] Xia B,Jiang L,Wang S M,et al.Femtosecond laser drilling of micro-holes[J].Chinese Journal of Lasers,2013,40(2):0201001.夏博,姜澜,王素梅,等.飞秒激光微孔加工[J].中国激光,2013,40(2):0201001.