摘要
本文首先采用磁控溅射工艺在FTO衬底上沉积Sb_2S_3薄膜,然后通过Se化处理工艺制备Sb_2(SSe)_3薄膜.利用X射线衍射、扫描电子显微镜及紫外-可见分光光度计对薄膜的结构及光学性能进行了分析.在此基础上,初步制备了上衬底结构的太阳电池器件并对其性能进行了测试.结果表明,随着Se化温度的提高,所制备的Sb_2(SSe)_3薄膜晶粒逐渐变大,同时光学带隙逐渐降低.这主要是由于在Se化过程中,Se原子替代Sb_2S_3中S原子的位置所造成的.所制备的太阳电池器件开路电压达到了469.3mV,二极管理想因子为2.6,反向饱和电流为3.389×10~(-8)A.
paper,the Sb_2S_3 thin films were selenized to obtain Sb_2(SSe)_3 films. The films were characterized by X-ray diffraction(XRD),with the selenization temperature increasing, the grain size of the Sb_2(SSe)_3 films was gradually enlarged, and the band-gap gradually decreased. This is mainly attributed to the fact that the S atoms were partial substituted by Se atoms during the selenization process. The solar cell device prepared based on the fabricated Sb_2(SSe)_3 films shows an open circuit voltage of 469.3 mV, ideal factor of 2.6 and reverse saturation current of 3.389×10~(-8)A.
引文
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