飞秒激光作用下金膜的微观特性变化
|
摘要
用磁控溅射的方法在石英基底上制备了金(Au)膜,研究了Au膜在近激光损伤阈值(LIDT)飞秒脉冲激光辐照下的物相结构和表面形貌。结果表明:所制备的Au膜为(111)面取向生长的薄膜;近LIDT的激光辐照使辐照区的Au膜形成大晶粒,并由(111)单一取向变为多晶结构;Au膜晶粒尺寸的增大会导致表面粗糙度增加。实验结果为明确Au膜在飞秒激光作用下的损伤过程及后期应用提供了依据。
Au films are deposited on fused silica substrates using the magnetron sputtering technique. The phase structure and surface morphology of the Au film after femtosecond pulse laser irradiation near laser induced damage threshold(LIDT) are investigated. The results show that the Au film prepared by magnetron sputtering is(111) oriented growth film. Laser irradiation energy near LIDT causes Au film to form large grains in the irradiated area and become polycrystalline structure from(111) single orientation. The increase of grain size leads to the increase of surface roughness. The experimental results provide a certain basis for exploring the damage process and later application of Au film under femtosecond laser.
Au films are deposited on fused silica substrates using the magnetron sputtering technique. The phase structure and surface morphology of the Au film after femtosecond pulse laser irradiation near laser induced damage threshold(LIDT) are investigated. The results show that the Au film prepared by magnetron sputtering is(111) oriented growth film. Laser irradiation energy near LIDT causes Au film to form large grains in the irradiated area and become polycrystalline structure from(111) single orientation. The increase of grain size leads to the increase of surface roughness. The experimental results provide a certain basis for exploring the damage process and later application of Au film under femtosecond laser.
引文
[1] Danson C, Hillier D, Hopps N, et al. Petawatt class lasers worldwide[J]. High Power Laser Science and Engineering, 2015, 3: e3.
[2] Yu T J, Lee S K, Sung J H, et al. Generation of high-contrast, 30 fs, 15 PW laser pulses from chirped-pulse amplification Ti\:sapphire laser[J]. Optics Express, 2012, 20(10): 10807-10815.
[3] Wang Z H, Liu C, Shen Z W, et al. High-contrast 1.16 PW Ti\:sapphire laser system combined with a doubled chirped-pulse amplification scheme and a femtosecond optical-parametric amplifier[J]. Optics Letters, 2011, 36(16): 3194-3196.
[4] Bonod N, Neauport J. Diffraction gratings: from principles to applications in high-intensity lasers[J]. Advances in Optics and Photonics, 2016, 8(1): 156-199.
[5] Qiu T Q, Tien C L. Heat transfer mechanisms during short-pulse laser heating of metals[J]. Journal of Heat Transfer, 1993, 115(4): 835-841.
[6] Chen J K, Beraun J E, Grimes L E, et al. Modeling of femtosecond laser-induced non-equilibrium deformation in metal films[J]. International Journal of Solids and Structures, 2002, 39(12): 3199-3216.
[7] Xu P, Hao Q L, Qi W Z. Microcosmic theory of heat exchange study on gold films irradiated by femtosecond laser[J]. Laser & Infrared, 2007, 37(11): 1149-1152. 徐攀, 郝秋龙, 齐文宗. 飞秒激光辐照纳米金膜的导热机制研究[J]. 激光与红外, 2007, 37(11): 1149-1152.
[8] Zhao S Q, Li L. Numerical investigation of phase change during thermal ablation of gold films induced by femtosecond laser[J]. Acta Optica Sinica, 2015, 35(12): 1214001. 赵士强, 李凌. 飞秒脉冲激光烧蚀金膜的相变传热研究[J]. 光学学报, 2015, 35(12): 1214001.
[9] Wang L L, Kong F Y, Xia Z L, et al. Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation[J]. Applied Optics, 2017, 56(11): 3087-3095.
[10] Huang H P, Kong F Y, Xia Z L, et al. Ultrashort pulses-driven dynamics of blisters in Au-coated gratings[J]. Optical Materials, 2017, 72: 130-135.
[11] Huang H P, Wang L L, Kong F Y, et al. Effects of substrate on the femtosecond laser-induced damage properties of gold films[J]. Optical Materials, 2018, 81: 115-121.
[12] Xi Y X, Fan H Q, Liu W G. The effect of annealing treatment on microstructure and properties of TiN films prepared by unbalanced magnetron sputtering[J]. Journal of Alloys and Compounds, 2010, 496(1/2): 695-698.
[13] Xu J Q, Fan H Q, Liu W G, et al. Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings[J]. Diamond and Related Materials, 2008, 17(2): 194-198.
[14] Yi T M, Xing P F, Zheng F C, et al. Preparation of continuous gold nano-films by magnetron sputtering[J]. Atomic Energy Science and Technology, 2010, 44(4): 479-483. 易泰民, 邢丕峰, 郑凤成, 等. 磁控溅射制备纳米厚度连续金膜[J]. 原子能科学技术, 2010, 44(4): 479-483.
[2] Yu T J, Lee S K, Sung J H, et al. Generation of high-contrast, 30 fs, 15 PW laser pulses from chirped-pulse amplification Ti\:sapphire laser[J]. Optics Express, 2012, 20(10): 10807-10815.
[3] Wang Z H, Liu C, Shen Z W, et al. High-contrast 1.16 PW Ti\:sapphire laser system combined with a doubled chirped-pulse amplification scheme and a femtosecond optical-parametric amplifier[J]. Optics Letters, 2011, 36(16): 3194-3196.
[4] Bonod N, Neauport J. Diffraction gratings: from principles to applications in high-intensity lasers[J]. Advances in Optics and Photonics, 2016, 8(1): 156-199.
[5] Qiu T Q, Tien C L. Heat transfer mechanisms during short-pulse laser heating of metals[J]. Journal of Heat Transfer, 1993, 115(4): 835-841.
[6] Chen J K, Beraun J E, Grimes L E, et al. Modeling of femtosecond laser-induced non-equilibrium deformation in metal films[J]. International Journal of Solids and Structures, 2002, 39(12): 3199-3216.
[7] Xu P, Hao Q L, Qi W Z. Microcosmic theory of heat exchange study on gold films irradiated by femtosecond laser[J]. Laser & Infrared, 2007, 37(11): 1149-1152. 徐攀, 郝秋龙, 齐文宗. 飞秒激光辐照纳米金膜的导热机制研究[J]. 激光与红外, 2007, 37(11): 1149-1152.
[8] Zhao S Q, Li L. Numerical investigation of phase change during thermal ablation of gold films induced by femtosecond laser[J]. Acta Optica Sinica, 2015, 35(12): 1214001. 赵士强, 李凌. 飞秒脉冲激光烧蚀金膜的相变传热研究[J]. 光学学报, 2015, 35(12): 1214001.
[9] Wang L L, Kong F Y, Xia Z L, et al. Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation[J]. Applied Optics, 2017, 56(11): 3087-3095.
[10] Huang H P, Kong F Y, Xia Z L, et al. Ultrashort pulses-driven dynamics of blisters in Au-coated gratings[J]. Optical Materials, 2017, 72: 130-135.
[11] Huang H P, Wang L L, Kong F Y, et al. Effects of substrate on the femtosecond laser-induced damage properties of gold films[J]. Optical Materials, 2018, 81: 115-121.
[12] Xi Y X, Fan H Q, Liu W G. The effect of annealing treatment on microstructure and properties of TiN films prepared by unbalanced magnetron sputtering[J]. Journal of Alloys and Compounds, 2010, 496(1/2): 695-698.
[13] Xu J Q, Fan H Q, Liu W G, et al. Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings[J]. Diamond and Related Materials, 2008, 17(2): 194-198.
[14] Yi T M, Xing P F, Zheng F C, et al. Preparation of continuous gold nano-films by magnetron sputtering[J]. Atomic Energy Science and Technology, 2010, 44(4): 479-483. 易泰民, 邢丕峰, 郑凤成, 等. 磁控溅射制备纳米厚度连续金膜[J]. 原子能科学技术, 2010, 44(4): 479-483.
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |