微流体驱动与控制系统的研究进展
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摘要
随着微流控系统的应用越来越广泛,微米尺度和纳米尺度器件微通道内的流动逐渐成为了研究的热点。重点阐述了微流控系统的驱动元件——微泵、控制元件——微阀的研究现状,介绍了学者们研制的各种微泵、微阀的工作原理与结构特点,指出了微流体驱动控制系统泄漏、结构复杂、成本偏高等问题依然存在,并对微驱动控制的发展方向进行了展望。
With the application of microfluidic system becoming more and more extensive,the flow in microchannels of micrometer-scale and nano-scale devices has gradually become a research focus.This paper highlights the micropump and micorvalve research status in microfluidic system.Introduce the working principle and structure characteristic of various micropumps and microvalves developed by scholars.It is pointed out that the leakage,complex structure and high cost of the microfluidic drive control system still exist.The prospect of the drive control for the microfluidic system is proposed.
With the application of microfluidic system becoming more and more extensive,the flow in microchannels of micrometer-scale and nano-scale devices has gradually become a research focus.This paper highlights the micropump and micorvalve research status in microfluidic system.Introduce the working principle and structure characteristic of various micropumps and microvalves developed by scholars.It is pointed out that the leakage,complex structure and high cost of the microfluidic drive control system still exist.The prospect of the drive control for the microfluidic system is proposed.
引文
[1]林炳承,秦建华.微流控芯片实验室[M].北京:科学出版社,2006.
[2]林炳承,秦建华.图解微流控芯片实验室[M].北京:科学出版社,2008.
[3]李战华,吴健康,胡国庆,等.微流控芯片中的流体流动[M].北京:科学出版社,2012.
[4]Reyes D R,Iossifidis D,Auroux P A,et al.Micro total analysis systems[J].Analytical Chemistry,2002,74(12):2623-2636.
[5]Auroux P A,Iossifidis D,Reyes D R,et al.Micro total analysis systems2 analytical standard operations and applications[J].Analytical Chemistry,2002,74(12):2637-2652.
[6]孙江龙,吕续舰,郭磊,等.微尺度流动研究的简要综述[J].机械强度,2010,32(3):160-166.
[7]Beebe D J,Moore J S,Bauer J M,et al.Functional hydrogel structures for autonomous flow control inside microfluidic channels[J].Nature,2000,404(6778):588-590.
[8]Choban E R,Markoski L J,Wieckowski A,et al.Microfluidic fuel cell based on laminar flow[J].Journal of Power Sources,2004,128(1):54-60.
[9]Weibei D B,Whitesides G M.Applications of microfluidics in chemical biology[J].Current Opinion in Chemical Biology,2006,10(6):584-591.
[10]Seiler K,Harrison D J,Manz A.Planar glass chips for capillary electrophoresis:repetitive sample injection,quantitation,and separation efficiency[J].Analytical Chemistry,2002,65(10):1481-1488.
[11]殷学锋,沈宏,方肇伦.制造玻璃微流控芯片的简易加工技术[J].分析化学,2003,31(1):116-119.
[12]Becker H,Locascio L E.Polymer microfluidic devices[J].Talanta,2002,56(2):267-287.
[13]Attia U M,Marson S,Alcock J R.Micro-injection moulding of polymer microfluidic devices[J].Microfluidics&Nanofluidics,2009,7(1):1-28.
[14]刘赵淼,逄燕.不同压力差下微通道尺寸和表面粗糙度对摩擦系数的影响[J].工程力学,2012,29(5):200-205.
[15]Greene J P,Lister C J,Reiter P,et al.Preparation of thin plastic conductive foils for use in a position-sensitive micro-channel plate detector system[J].Nuclear Inst&Methods in Physics Research A,2001,459(1):334-338.
[16]刘媛媛,张付华,陈伟华,等.面向3D打印复合工艺的生物CAD/CAM系统及试验研究[J].机械工程学报,2014,50(15):147-154.
[17]赵静一,李侃.基于快速成型的组织工程中的微流体现象[J].液压与气动,2005(8):65-68.
[18]赵静一,禹娜娜,邓平平.骨组织工程支架内微管孔结构的研究现状[J].机床与液压,2011,39(6):113-116.
[19]赵士明,赵静一,李文雷,等.组织工程骨支架内部微流体流场研究进展[J].机床与液压,2017,45(15):161-165.
[20]何秀华,张习同,杨嵩,等.一种合成射流压电微泵关键结构参数确定方法[J].哈尔滨工业大学学报,2016,48(1):184-188.
[21]耿照新,邢冰冰,丁仁伟.基于MEMS技术的三明治结构被动阀微泵研制[J].纳米技术与精密工程,2012,10(2):113-119.
[22]Ma H K,Hou B R,Wu H Y,et al.Development and application of a diaphragm micro-pump with piezoelectric device[J].Microsystem Technologies,2008,14(7):1001-1007.
[23]Cazorla P H,Fuchs O,Cochet M,et al.A low voltage silicon micropump based on piezoelectric thin films[J].Sensors&Actuators A Physical,2016,250:35-39.
[24]Astle A A,Kim H S,Bernal L P,et al.Theoretical and experimental performance of a high frequency gas micropump[J].Sensors Actuators A,2007,134(1):245-256.
[25]董金新,林谢,昭应济,等.静电微泵的3D流固耦合动态特性分析[J].中国机械工程,2012,23(5):299-303.
[26]张彧,王文,赵小林,等.静电驱动振模微泵的理论分析[J].传感器与微系统,2013,32(1):25-28.
[27]Yamahata C,Lacharme F,Burri Y,et al.A ball valve micropump in glass fabricated by powder blasting[J].Sensors&Actuators B Chemical,2005,110(1):1-7.
[28]Ha S M,Cho W,Ahn Y.Disposable thermo-pneumatic micropump for bio lab-on-a-chip application[J].Microelectronic Engineering,2009,86(4):1337-1339.
[29]许忠斌,杨世鹏,刘国林,等.微泵的研究现状与进展[J].液压与气动,2013(6):7-12.
[30]Guo S,Sun X,Ishii K,et al.SMA Actuator-based novel type of peristaltic micropump[C].International Conference on Information and Automation.IEEE,2008:1620-1625.
[31]Bae B,Kee H,Kim S,et al.In vitro experiment of the pressure regulating valve for aglaucoma implant[J].Journal of Micromechanics&Microengineering,2003,13(5):613-619.
[32]Choi J W,Oh K W,Han A,et al.Development andcharacterization of microfluidic devices and systems for magnetic bead-Based biochemical detection[J].Biomedical Microdevices,2001,3(3):191-200.
[33]李松晶,刘旭玲,贾伟亮.气动电磁微阀的仿真研究[J].液压与气动,2013(7):6-8.
[34]吴睿婷,蒋稼欢,吴云鹏.微阀的研究进展[J].医用生物力学,2007,22(3):314-319.
[35]肖丽君,陈翔,汪鹏,等.微流体系统中微阀的研究现状[J].微纳电子技术,2009,46(2):91-98.
[36]Wu X,Kim S H,Ji C H,et al.A solid hydraulically amplified piezoelectric microvalve[J].Journal of Micromechanics&Microengineering,2011,21(21):95003-95011.
[37]张蕊华,陈海初,张建辉,等.压电微流量阀驱动电源的研究[J].压电与声光,2011,33(6):935-938.
[38]Takao H,Miyamura K,Ebi H,et al.A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon[J].Sensors&Actuators A Physical,2005,119(2):468-475.
[39]Potkay J A,Wise K D.Ahybrid thermopneumatic and electrostatic microvalve with integrated position sensing[J].Micromachines,2012,3(2):379-395.
[40]Jerman H,Sensors IC.Milpitas CA,et al.Electrically activated normally closed diaphragm valves[J].Micromech Microeng,1994,4(4):210-216.
[41]Piccini M E,Towe B C.A shapememory alloy microvalve with flow sensing[J].Sensors&Actuators A Physical,2006,128(2):344-349.
[42]杜敏,叶雄英,刘力涛,等.形状记忆合金驱动的常闭型主动阀[J].纳米技术与精密工程,2011,9(6):551-554.
[43]B9hm S,Burger G J,Korthorst M T,et al.A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator[J].Sensors&Actuators A Physical,2000,80(1):77-83.
[44]杨博淙,王伯雄,秦垚,等.热气致动双稳态微型阀响应时间的仿真及实验[J].清华大学学报:自然科学版,2011(6):840-845.
[45]Hamberg M W,Neagu C,Gardeniers J G E,et al.An electrochemical microactuator[C].Micro Electro Mechanical Systems,1995,MEMS'95,Proceedings.IEEE.IEEE Xplore,1995:106-110.
[46]Suzuki H,Yoneyama R.Integrated microfluidic system with electrochemically actuated on-chip pumps andvalves[J].Sensors&Actuators B Chemical,2003,96(1):38-45.
[47]Oh K W.A review of microvalves[J].Journal of Micromechanics&Microengineering,2006,16(5):13-39.
[48]Liu R H,Bonanno J,Yang J,et al.Single-use,thermally actuated paraffin valves for microfluidic applications[J].Sensors&Actuators B Chemical,2004,98(2):328-336.
[49]English A E,Edelman E R,Tanaka T.Chapter 6-polymer hydrogel phase transitions[J].Experimental Methods in Polymer Science,2000:547-589.
[50]Wang J,Chen Z,Mauk M,et al.Self-actuated,thermo-responsive hydrogel valves for lab on a chip[J].Biomedical Microdevices,2005,7(4):313-322.
[51]Liu Y,Rauch C B,Stevens R L,et al.DNA amplification and hybridization assays in integrated plastic monolithic devices[J].Analytical Chemistry,2002,74(13):3063-3070.
[52]Yoon D S,Cho Y K,Oh K W,et al.A microfluidic gel valve device using reversible sol-gel transition of methyl cellulose for biomedicalapplication[J].Microsystem Technologies,2006,12(3):238-246.
[53]Feng G H,Sok Kim E.Micropump based on PZT unimorph and oneway parylene valves[J].Journal of Micromechanics&Microengineering,2004,14(4):429-435.
[54]Nguyen N,Truong T,Wong K,et al.Micro check valves for integration into polymericmicrofluidic devices[J].Journal of Micromechanics&Microengineering,2004,14(1):69-75.
[55]Wego A,Pagel L.A self-filling micropump based on PCB technology[J].Sensors&Actuators A Physical,2001,88(3):220-226.
[56]Santra S,Holloway P,Batich C D.Fabrication and testing of a magnetically actuated micropump[J].Sensors&Actuators B Chemical,2002,87(2):358-364.
[57]Hu M,Du H,Ling S F,et al.A silicon-on-insulator based micro checkvalve[J].Journal of Micromechanics&Microengineering,2003,14(3):382-387.
[58]B9hm S,Olthuis W,Bergveld P.A plastic micropump constructed with conventional techniques andmaterials[J].Sensors&Actuators A Physical,1999,77(3):223-228.
[59]Li B,Chen Q.Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel[J].Sensors&Actuators A Physical,2006,126(1):187-193.
[60]阚君武,吴一辉,杨志刚,等.悬臂梁微型阀特性研究[J].哈尔滨工业大学学报,2005,37(2):190-193.
[61]Ahn C H,Choi J W,Beaucage G,et al.Disposable smart lab on a chip for point-of-care clinical diagnostics[J].Proceedings of the IEEE,2004,92(1):154-173.
[62]杜新,张平,刘永顺,等.用于毛细驱动流的通孔形毛细管被动阀的研制[J].化工学报,2010,61(10):2529-2534.
[2]林炳承,秦建华.图解微流控芯片实验室[M].北京:科学出版社,2008.
[3]李战华,吴健康,胡国庆,等.微流控芯片中的流体流动[M].北京:科学出版社,2012.
[4]Reyes D R,Iossifidis D,Auroux P A,et al.Micro total analysis systems[J].Analytical Chemistry,2002,74(12):2623-2636.
[5]Auroux P A,Iossifidis D,Reyes D R,et al.Micro total analysis systems2 analytical standard operations and applications[J].Analytical Chemistry,2002,74(12):2637-2652.
[6]孙江龙,吕续舰,郭磊,等.微尺度流动研究的简要综述[J].机械强度,2010,32(3):160-166.
[7]Beebe D J,Moore J S,Bauer J M,et al.Functional hydrogel structures for autonomous flow control inside microfluidic channels[J].Nature,2000,404(6778):588-590.
[8]Choban E R,Markoski L J,Wieckowski A,et al.Microfluidic fuel cell based on laminar flow[J].Journal of Power Sources,2004,128(1):54-60.
[9]Weibei D B,Whitesides G M.Applications of microfluidics in chemical biology[J].Current Opinion in Chemical Biology,2006,10(6):584-591.
[10]Seiler K,Harrison D J,Manz A.Planar glass chips for capillary electrophoresis:repetitive sample injection,quantitation,and separation efficiency[J].Analytical Chemistry,2002,65(10):1481-1488.
[11]殷学锋,沈宏,方肇伦.制造玻璃微流控芯片的简易加工技术[J].分析化学,2003,31(1):116-119.
[12]Becker H,Locascio L E.Polymer microfluidic devices[J].Talanta,2002,56(2):267-287.
[13]Attia U M,Marson S,Alcock J R.Micro-injection moulding of polymer microfluidic devices[J].Microfluidics&Nanofluidics,2009,7(1):1-28.
[14]刘赵淼,逄燕.不同压力差下微通道尺寸和表面粗糙度对摩擦系数的影响[J].工程力学,2012,29(5):200-205.
[15]Greene J P,Lister C J,Reiter P,et al.Preparation of thin plastic conductive foils for use in a position-sensitive micro-channel plate detector system[J].Nuclear Inst&Methods in Physics Research A,2001,459(1):334-338.
[16]刘媛媛,张付华,陈伟华,等.面向3D打印复合工艺的生物CAD/CAM系统及试验研究[J].机械工程学报,2014,50(15):147-154.
[17]赵静一,李侃.基于快速成型的组织工程中的微流体现象[J].液压与气动,2005(8):65-68.
[18]赵静一,禹娜娜,邓平平.骨组织工程支架内微管孔结构的研究现状[J].机床与液压,2011,39(6):113-116.
[19]赵士明,赵静一,李文雷,等.组织工程骨支架内部微流体流场研究进展[J].机床与液压,2017,45(15):161-165.
[20]何秀华,张习同,杨嵩,等.一种合成射流压电微泵关键结构参数确定方法[J].哈尔滨工业大学学报,2016,48(1):184-188.
[21]耿照新,邢冰冰,丁仁伟.基于MEMS技术的三明治结构被动阀微泵研制[J].纳米技术与精密工程,2012,10(2):113-119.
[22]Ma H K,Hou B R,Wu H Y,et al.Development and application of a diaphragm micro-pump with piezoelectric device[J].Microsystem Technologies,2008,14(7):1001-1007.
[23]Cazorla P H,Fuchs O,Cochet M,et al.A low voltage silicon micropump based on piezoelectric thin films[J].Sensors&Actuators A Physical,2016,250:35-39.
[24]Astle A A,Kim H S,Bernal L P,et al.Theoretical and experimental performance of a high frequency gas micropump[J].Sensors Actuators A,2007,134(1):245-256.
[25]董金新,林谢,昭应济,等.静电微泵的3D流固耦合动态特性分析[J].中国机械工程,2012,23(5):299-303.
[26]张彧,王文,赵小林,等.静电驱动振模微泵的理论分析[J].传感器与微系统,2013,32(1):25-28.
[27]Yamahata C,Lacharme F,Burri Y,et al.A ball valve micropump in glass fabricated by powder blasting[J].Sensors&Actuators B Chemical,2005,110(1):1-7.
[28]Ha S M,Cho W,Ahn Y.Disposable thermo-pneumatic micropump for bio lab-on-a-chip application[J].Microelectronic Engineering,2009,86(4):1337-1339.
[29]许忠斌,杨世鹏,刘国林,等.微泵的研究现状与进展[J].液压与气动,2013(6):7-12.
[30]Guo S,Sun X,Ishii K,et al.SMA Actuator-based novel type of peristaltic micropump[C].International Conference on Information and Automation.IEEE,2008:1620-1625.
[31]Bae B,Kee H,Kim S,et al.In vitro experiment of the pressure regulating valve for aglaucoma implant[J].Journal of Micromechanics&Microengineering,2003,13(5):613-619.
[32]Choi J W,Oh K W,Han A,et al.Development andcharacterization of microfluidic devices and systems for magnetic bead-Based biochemical detection[J].Biomedical Microdevices,2001,3(3):191-200.
[33]李松晶,刘旭玲,贾伟亮.气动电磁微阀的仿真研究[J].液压与气动,2013(7):6-8.
[34]吴睿婷,蒋稼欢,吴云鹏.微阀的研究进展[J].医用生物力学,2007,22(3):314-319.
[35]肖丽君,陈翔,汪鹏,等.微流体系统中微阀的研究现状[J].微纳电子技术,2009,46(2):91-98.
[36]Wu X,Kim S H,Ji C H,et al.A solid hydraulically amplified piezoelectric microvalve[J].Journal of Micromechanics&Microengineering,2011,21(21):95003-95011.
[37]张蕊华,陈海初,张建辉,等.压电微流量阀驱动电源的研究[J].压电与声光,2011,33(6):935-938.
[38]Takao H,Miyamura K,Ebi H,et al.A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon[J].Sensors&Actuators A Physical,2005,119(2):468-475.
[39]Potkay J A,Wise K D.Ahybrid thermopneumatic and electrostatic microvalve with integrated position sensing[J].Micromachines,2012,3(2):379-395.
[40]Jerman H,Sensors IC.Milpitas CA,et al.Electrically activated normally closed diaphragm valves[J].Micromech Microeng,1994,4(4):210-216.
[41]Piccini M E,Towe B C.A shapememory alloy microvalve with flow sensing[J].Sensors&Actuators A Physical,2006,128(2):344-349.
[42]杜敏,叶雄英,刘力涛,等.形状记忆合金驱动的常闭型主动阀[J].纳米技术与精密工程,2011,9(6):551-554.
[43]B9hm S,Burger G J,Korthorst M T,et al.A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator[J].Sensors&Actuators A Physical,2000,80(1):77-83.
[44]杨博淙,王伯雄,秦垚,等.热气致动双稳态微型阀响应时间的仿真及实验[J].清华大学学报:自然科学版,2011(6):840-845.
[45]Hamberg M W,Neagu C,Gardeniers J G E,et al.An electrochemical microactuator[C].Micro Electro Mechanical Systems,1995,MEMS'95,Proceedings.IEEE.IEEE Xplore,1995:106-110.
[46]Suzuki H,Yoneyama R.Integrated microfluidic system with electrochemically actuated on-chip pumps andvalves[J].Sensors&Actuators B Chemical,2003,96(1):38-45.
[47]Oh K W.A review of microvalves[J].Journal of Micromechanics&Microengineering,2006,16(5):13-39.
[48]Liu R H,Bonanno J,Yang J,et al.Single-use,thermally actuated paraffin valves for microfluidic applications[J].Sensors&Actuators B Chemical,2004,98(2):328-336.
[49]English A E,Edelman E R,Tanaka T.Chapter 6-polymer hydrogel phase transitions[J].Experimental Methods in Polymer Science,2000:547-589.
[50]Wang J,Chen Z,Mauk M,et al.Self-actuated,thermo-responsive hydrogel valves for lab on a chip[J].Biomedical Microdevices,2005,7(4):313-322.
[51]Liu Y,Rauch C B,Stevens R L,et al.DNA amplification and hybridization assays in integrated plastic monolithic devices[J].Analytical Chemistry,2002,74(13):3063-3070.
[52]Yoon D S,Cho Y K,Oh K W,et al.A microfluidic gel valve device using reversible sol-gel transition of methyl cellulose for biomedicalapplication[J].Microsystem Technologies,2006,12(3):238-246.
[53]Feng G H,Sok Kim E.Micropump based on PZT unimorph and oneway parylene valves[J].Journal of Micromechanics&Microengineering,2004,14(4):429-435.
[54]Nguyen N,Truong T,Wong K,et al.Micro check valves for integration into polymericmicrofluidic devices[J].Journal of Micromechanics&Microengineering,2004,14(1):69-75.
[55]Wego A,Pagel L.A self-filling micropump based on PCB technology[J].Sensors&Actuators A Physical,2001,88(3):220-226.
[56]Santra S,Holloway P,Batich C D.Fabrication and testing of a magnetically actuated micropump[J].Sensors&Actuators B Chemical,2002,87(2):358-364.
[57]Hu M,Du H,Ling S F,et al.A silicon-on-insulator based micro checkvalve[J].Journal of Micromechanics&Microengineering,2003,14(3):382-387.
[58]B9hm S,Olthuis W,Bergveld P.A plastic micropump constructed with conventional techniques andmaterials[J].Sensors&Actuators A Physical,1999,77(3):223-228.
[59]Li B,Chen Q.Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel[J].Sensors&Actuators A Physical,2006,126(1):187-193.
[60]阚君武,吴一辉,杨志刚,等.悬臂梁微型阀特性研究[J].哈尔滨工业大学学报,2005,37(2):190-193.
[61]Ahn C H,Choi J W,Beaucage G,et al.Disposable smart lab on a chip for point-of-care clinical diagnostics[J].Proceedings of the IEEE,2004,92(1):154-173.
[62]杜新,张平,刘永顺,等.用于毛细驱动流的通孔形毛细管被动阀的研制[J].化工学报,2010,61(10):2529-2534.