微纳米覆盖层材料的力学性能表征探讨
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摘要
使用Agilent公司G200微/纳米压痕仪对多种微纳米覆盖层材料的力学性能进行了测量。结果表明,通过连续刚度法测量微纳米涂层材料,可以获得涂层硬度和弹性模量,并能得到涂层硬度或弹性模量随厚度的变化规律;通过试验也可以看到,纳米压痕法测量膜材的力学性能存在明显的表面效应;基材对膜材的力学性能没有影响;膜材厚度越大,同一深度测得的膜材的弹性模量越高。
Mechanical properties of various covering materials were measured using G200 micro/nano indenter made by Agilent company,USA. It was indicated that hardness and Young's modulus of the coating and their changes with thickness of the coating could be accurately measured by means of continuous stiffness measurement. It was further shown by experimental results that there was a surface effect while measuring mechanical properties of the coatings by means of nano indentation;there was almost no effect of the base material on mechanical properties of the coating;Young's modulus of the coating increased with the thickness of the coating raised at the same deepness.
Mechanical properties of various covering materials were measured using G200 micro/nano indenter made by Agilent company,USA. It was indicated that hardness and Young's modulus of the coating and their changes with thickness of the coating could be accurately measured by means of continuous stiffness measurement. It was further shown by experimental results that there was a surface effect while measuring mechanical properties of the coatings by means of nano indentation;there was almost no effect of the base material on mechanical properties of the coating;Young's modulus of the coating increased with the thickness of the coating raised at the same deepness.
引文
[1]张泰华.微/纳米力学测试技术-仪器化压入的测量、分析、应用及其标准化[M].北京:科学出版社,2013.
[2]刘美华,李鸿琦,王静,等.纳米压痕测量精度的影响因素[J].机械工程材料,2008,32(8):4.
[3]ISO 14577-1:2015 Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1:Test method.
[4]徐连勇,荆洪阳,霍立兴,等.金属基陶瓷涂层弹性模量和界面断裂强度[J].焊接学报,2006,27(8):55.
[5]戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术,2003,23(3):147.
[6]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876.
[7]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876.
[8]马亚鑫,高怡斐,曾雨吟.纳米压痕法测定镍基定向凝固高温合金相的力学性能[J].物理测试,2015,33(2):16.
[2]刘美华,李鸿琦,王静,等.纳米压痕测量精度的影响因素[J].机械工程材料,2008,32(8):4.
[3]ISO 14577-1:2015 Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1:Test method.
[4]徐连勇,荆洪阳,霍立兴,等.金属基陶瓷涂层弹性模量和界面断裂强度[J].焊接学报,2006,27(8):55.
[5]戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术,2003,23(3):147.
[6]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876.
[7]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876.
[8]马亚鑫,高怡斐,曾雨吟.纳米压痕法测定镍基定向凝固高温合金相的力学性能[J].物理测试,2015,33(2):16.