天光一号预放大器自动准直技术研究
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摘要
天光一号高功率KrF准分子激光装置采用光学角多路实现了六束激光的主振荡功率放大,其光路复杂,人工调节繁琐,指向精度难以保证,且激光波长为248 nm,属于深紫外波段,无法采用常用的光束自动准直方法。为了保障六束激光聚焦叠加并稳定精准地照射到靶面上,需开展适合天光一号装置激光参数及光路特性的自动准直技术研究。本文以预放大器三束输入、输出光路为研究对象,探索适合天光一号装置的自动准直方法,建立了预放大器光路自动准直系统,实现了快速、高精度光束的调节,验证了自动准直方案的可行性,为天光一号KrF准分子激光装置实现全光路自动准直奠定了技术基础。
The angular multiplexing technology is used in the Heaven-Ⅰ high power KrF excimer laser facility to amplify the six short light pulses. The complex optical system results in wasting time and labor in the beam path adjusting and the high-precision manual adjustment is very difficult. Because of its deep UV wavelength of 248 nm, the automatic collimation technology commonly used is not suitable for the Heaven-Ⅰ. In order to satisfy the requirement of the laser-matter interaction experiment, a new automatic collimation technology suitable for the Heaven-Ⅰ is necessary to be developed to improve the coincidence accuracy of the focal spot. In the paper, aiming at the three-beam propagation through the preamplifier, the automatic collimation technology suitable for Heaven-Ⅰ was studied and used in the three input and output laser beams of the preamplifier. The result shows that the automatic collimation system can realize the fast and high-precision adjustment, which sets up the technology foundation for automatic collimation of Heaven-Ⅰ high power KrF excimer laser facility.
The angular multiplexing technology is used in the Heaven-Ⅰ high power KrF excimer laser facility to amplify the six short light pulses. The complex optical system results in wasting time and labor in the beam path adjusting and the high-precision manual adjustment is very difficult. Because of its deep UV wavelength of 248 nm, the automatic collimation technology commonly used is not suitable for the Heaven-Ⅰ. In order to satisfy the requirement of the laser-matter interaction experiment, a new automatic collimation technology suitable for the Heaven-Ⅰ is necessary to be developed to improve the coincidence accuracy of the focal spot. In the paper, aiming at the three-beam propagation through the preamplifier, the automatic collimation technology suitable for Heaven-Ⅰ was studied and used in the three input and output laser beams of the preamplifier. The result shows that the automatic collimation system can realize the fast and high-precision adjustment, which sets up the technology foundation for automatic collimation of Heaven-Ⅰ high power KrF excimer laser facility.
引文
[1] LIU Daizhong,XU Renfang,FAN Dianyuan.Design and performance of a video-based laser beam automatic alignment system[J].Chinese Optics Letters,2004,2(2):92-94.
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[13] 曹军,宋文龙.基于参数自适应PID控制算法激光准直系统的研制[J].光电子激光,2003,14(12):1 328-1 343.CAO Jun,SONG Wenlong.Developing of a laser beam alignment system based on parameters self-adaptive PID control algorithm[J].Journal of Optoelectronics Laser,2003,14(12):1 328-1 343(in Chinese).
[14] 王国富,陈良益,何俊华.神光-Ⅲ 3ω光路自动准直系统设计[J].科学技术与工程,2007,7(7):1 355-1 358.WANG Guofu,CHEN Liangyi,HE Junhua.Design of SG-Ⅲ 3ω laser beam auto collimation system[J].Science Technology and Engineering,2007,7(7):1 355-1 358(in Chinese).
[15] LIU Daizhong,LU Fengnian,CAO Jinzhou,et al.Design and application of a laser beam alignment system based on the imaging properties of a multi-pass amplifier[J].Chinese Optics Letters,2006,4(10):601-604.
[16] BLISS E S,FELDMAN M,VANN C S,et al.Laser chain alignment with low power local light sources[J].SPIE,1995,2633:760-767.
[2] KROHA H.Laser-alignment system with transparent silicon strip sensors and its applications[J].Nuclear Physics B,1997,54(3):80-85.
[3] EATON D J,GAYHART A R.High speed pointing control system[J].SPIE,1992,1697:251-260.
[4] 刘代中,徐仁芳,范滇元.激光聚变装置光束自动准直系统的研究进展[J].激光与光电子学进展,2004,41(2):1-5.LIU Daizhong,XU Renfang,FAN Dianyuan.Evolution of beam automatic alignment system in laser-fusion facility[J].Laser and Optoelectronics Progress,2004,41(2):1-5(in Chinese).
[5] 王大辉,赵学庆,张永生,等.电子束泵浦准分子激光放大器的双程光路自动准直[J].光学精密工程,2012,20(7):1 434-1 439.WANG Dahui,ZHAO Xueqing,ZHANG Yongsheng,et al.Automatic alignment of double paths in electron pumped excimer laser amplifier[J].Optics and Precision Engineering,2012,20(7):1 434-1 439(in Chinese).
[6] 史亚莉,高云国,张磊,等.提高CCD激光自准直测角精度的硬件方法[J].光学精密工程,2008,16(4):726-732.SHI Yali,GAO Yunguo,ZHANG Lei,et al.Improvement of measuring accuracy of CCD laser autocollimator by changing hardware parameters[J].Optics and Precision Engineering,2008,16(4):726-732(in Chinese).
[7] 高妍琦,朱宝强,刘代中,等.神光Ⅱ升级装置准直系统研究[J].物理学报,2011,60(6):41-46.GAO Yanqi,ZHU Baoqiang,LIU Daizhong,et al.Far field auto- alignment system used in SG-Ⅱ-up system[J].Acta Physica Sinica,2011,60(6):41-46(in Chinese).
[8] 赵会富,刘华,孙强,等.基于折射/全反射/反射/折射结构的LED准直系统的设计[J].光学精密工程,2011,19(7):1 472-1 478.ZHAO Huifu,LIU Hua,SUN Qiang,et al.Design of RIXR LED collimation system[J].Optics and Precision Engineering,2011,19(7):1 472-1 478(in Chinese).
[9] BOEGE S J,BLISS E S,CHOCOL C J,et al.NIF pointing and centering systems and target using a 351 nm laser source[J].SPIE,1997,3047:248-258.
[10] 刘代中,朱健强,徐仁芳,等.4程放大光路自动准直系统研究[J].强激光与粒子束,2004,16(5):582-586.LIU Daizhong,ZHU Jianqiang,XU Renfang,et al.Study on automatic laser alignment system of the four-pass amplifier system[J].High Power Laser and Particle Beams,2004,16(5):582-586(in Chinese).
[11] 潘高峰,张景旭,陈娟.一种共光路自动对准系统[J].中国激光,2008,35(10):1 500-1 502.PAN Gaofeng,ZHANG Jingxun,CHEN Juan.Common path auto-alignment system[J].Chinese Journal of Lasers,2008,35(10):1 500-1 502(in Chinese).
[12] 何为,徐庆浩,徐仁芳,等.激光核聚变装置中基于像传递的激光自动准直技术研究[J].光学学报,1999,19(9):1 279-1 283.HE Wei,XU Qinghao,XU Renfang,et al.Image transfer based automatic laser alignment technique for laser fusion facility[J].Acta Optica Sinica,1999,19(9):1 279-1 283(in Chinese).
[13] 曹军,宋文龙.基于参数自适应PID控制算法激光准直系统的研制[J].光电子激光,2003,14(12):1 328-1 343.CAO Jun,SONG Wenlong.Developing of a laser beam alignment system based on parameters self-adaptive PID control algorithm[J].Journal of Optoelectronics Laser,2003,14(12):1 328-1 343(in Chinese).
[14] 王国富,陈良益,何俊华.神光-Ⅲ 3ω光路自动准直系统设计[J].科学技术与工程,2007,7(7):1 355-1 358.WANG Guofu,CHEN Liangyi,HE Junhua.Design of SG-Ⅲ 3ω laser beam auto collimation system[J].Science Technology and Engineering,2007,7(7):1 355-1 358(in Chinese).
[15] LIU Daizhong,LU Fengnian,CAO Jinzhou,et al.Design and application of a laser beam alignment system based on the imaging properties of a multi-pass amplifier[J].Chinese Optics Letters,2006,4(10):601-604.
[16] BLISS E S,FELDMAN M,VANN C S,et al.Laser chain alignment with low power local light sources[J].SPIE,1995,2633:760-767.