锥–螺旋电极在真空等离子体生成中的作用
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摘要
为了研究真空脉冲放电中放电电流产生的磁场对生成的等离子体的束缚效果,设计了一种锥–螺旋状的真空放电电极结构,借助Ansoft Maxwell 3D电磁场仿真软件,对比分析了锥–筒状电极与锥–螺旋状电极的磁场分布,重点讨论了采用锥–螺旋状电极放电时电极内部自磁场、阴阳电极间的相对位置关系、螺旋状阳极的内径等因素对真空放电等离子体生成特性的影响,并通过朗缪尔探针法对相应条件下的真空放电等离子体参数进行了测量分析。实验与仿真结果表明:利用放电时电流流过螺旋状电极所产生的轴向磁场,可以有效约束部分向四周扩散的等离子体,增大了到达探针位置的等离子体密度;合理优化螺旋状放电阳极,可以增大电极内部的磁场强度,在电极轴向获得更高密度的金属等离子体。
In order to study the binding effect of the magnetic field generated by the discharge current in the vacuum pulse dischargeon the generated plasma, we newly designed a cone-spiral electrode structure used for vacuum discharge. Moreover, we simulated the magnetic field distributions of the cone-tubular and cone-spiral electrodes by the Maxwell 3D simulation software,and discussed the impact of factors that affect the generation characteristics of vacuum-arc discharge plasmas such as the self-magnetic field inside electrodes, relative positions between the cathode and anode, and the inner diameter of the spiral anode. Meanwhile, we measured the parameters of the metal plasmas by using a Langmuir probe. The experimental and simulation results indicate that using the axial magnetic field generated by the current flowing through the spiral electrode can constrain some of the spread plasmas effectively and increase the plasma density measured by the probe. Suitable optimizing of the spiral anode can increase the magnetic field strength within the electrode and obtain metal plasmas of higher density from the axial direction of the spiral electrode.
In order to study the binding effect of the magnetic field generated by the discharge current in the vacuum pulse dischargeon the generated plasma, we newly designed a cone-spiral electrode structure used for vacuum discharge. Moreover, we simulated the magnetic field distributions of the cone-tubular and cone-spiral electrodes by the Maxwell 3D simulation software,and discussed the impact of factors that affect the generation characteristics of vacuum-arc discharge plasmas such as the self-magnetic field inside electrodes, relative positions between the cathode and anode, and the inner diameter of the spiral anode. Meanwhile, we measured the parameters of the metal plasmas by using a Langmuir probe. The experimental and simulation results indicate that using the axial magnetic field generated by the current flowing through the spiral electrode can constrain some of the spread plasmas effectively and increase the plasma density measured by the probe. Suitable optimizing of the spiral anode can increase the magnetic field strength within the electrode and obtain metal plasmas of higher density from the axial direction of the spiral electrode.
引文
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[17]LIU W Z,WANG H,ZHANG D J.Impact of the electric field distribution on the generation characteristics of vacuum-arc discharge plasmas[J].IEEE Transactions on Plasma Science,2013,41(7):1690-1695.
[18]SOLOV'EV A A,SOCHUGOV N S,OSKOMOV K V,et al.Investigation of plasma characteristics in an unbalanced magnetron sputtering system[J].Plasma Physics Reports,2009,35(5):399-408
[19]KELLY P J,ARNELL R D.The determination of the current-voltage characteristics of a closed-field unbalanced magnetron sputtering system[J].Surface&Coatings Technology,1998,98(98):1370-1376
[20]丁健.载流有限长密绕螺线管的磁场分布[J].大学物理,2009,28(8):28-30.DING Jian.Magnetic field distribution of carrying tightly wound solenoid with finite length[J].University Physics,2009,28(8):28-30.
[21]HELMERSSON U,LATTEMANN M,BOHLMARK J,et al.Ionized physical vapor deposition(IPVD):a review of technology and applications[J].Thin Solid Films,2006,513(Supplement 1/2):1-24.
[2]YUSHKOV G Y,SAVKIN K P,NIKOLAEV A G.Formation of multicharged metal ions in vacuum arc plasma heated by Gyrotron radiation[J].Plasma Science and Technology,2011,13(5):596-599.
[3]FIETZKE F,ZIMMERMANN B.Plasma characterization and technological application of a hollow cathode plasma source with an axial magnetic field[J].Sci Verse Science Direct Journals,2010,8(33):1491-1496.
[4]杨乐,李自然,尹乐,等.脉冲等离子体推力器研究综述[J].火箭推进,2006,32(2):32-36.YANG Le,LI Ziran,YIN Le,et al.Review of pulsed plasma thruster[J].Journal of Rocket Propulsion,2006,32(2):32-36.
[5]柯建林,周长庚.脉冲束流引出时的等离子体鞘层变化[J].强激光与粒子束,2015,27(8):259-263.KE Jianlin,ZHOU Changgeng.Evolution of plasma sheath in pulsed ion beam extractions[J].High Power Laser and Particle Beams,2015,27(8):259-263.
[6]AOYAGI J,MUKAI M.Total impulse improvement of coaxial pulsed plasma thruster for small satellite[J].Vacuum,2008,83(1):72-76.
[7]刘文正,孔飞,张德金.真空脉冲放电金属等离子体生成及传播特性[J].强激光与粒子束,2012,24(2):491-496.LIU Wenzheng,KONG Fei,ZHANG Dejin.Generation and propagation characteristics of vacuum pulse discharge metal plasma[J].High Power Laser and Particle Beams,2012,24(2):491-496.
[8]操慧珺,楚豫川,曹勇,等.离子推进器中离子束中和及推进过程的全粒子数值模拟[J].高电压技术,2014,40(7):2119-2124.CAO Huijun,CHU Yuchuan,CAO Yong,et al.Full particle numerical simulations of ion beam neutralization and propagation process for ion thruster[J].High Voltage Engineering,2014,40(7):2119-2124.
[9]钟久明,刘树林,段江龙,等.短间隙短路放电的场增强因子研究[J].真空科学与技术学报,2015,35(9):1035-1040.ZHONG Jiuming,LIU Shulin,DUAN Jianglong,et al.Field enhancement factor in short-circuit discharge across narrow-gap[J].Chinese Journal of Vacuum Science and Technology,2015,35(9):1035-1040.
[10]ANDERS A.Discharge physics of high power impulse magnetron sputtering[J].Office of Scientific&Technical Information Technical Reports,2010,205(19):1-9.
[11]ANDERS A,YUSHKOV G,OKS E,et al.Ion charge state distributions of pulsed vacuum arc plasmas in strong magnetic fields[J].Review of Scientific Instruments,2008,69(3):1332-1335.
[12]FRANZ R,POLCIK P,ANDERS A.Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum,Argon,Nitrogen,and Oxygen[J].IEEE Transactions on Plasma Science,2013,41(8):1929-1937.
[13]MI X Z.Vacuum discharge physical and high power pulse technology[M].Beijing,China:China National Defense Industry Press,2007.
[14]LIU W Z,WANG H.Generation and propagation characteristics of vacuum discharge plasma with co-axial electrodes[J].High Power Laser and Particle Beams,2013,25(8):2111-2116.
[15]LIU W Z,WANG H,ZHANG D J,et al.Study on the discharge characteristics of a coaxial pulsed plasma thruster[J].Plasma Science and Technology,2014,16(4):344-351.
[16]王新新.X箍缩放电等离子体及其应用[J].高电压技术,2012,38(7):1537-1547.WANG Xinxin.X-pinch plasma and its applications[J].High Voltage Engineering,2012,38(7):1537-1547.
[17]LIU W Z,WANG H,ZHANG D J.Impact of the electric field distribution on the generation characteristics of vacuum-arc discharge plasmas[J].IEEE Transactions on Plasma Science,2013,41(7):1690-1695.
[18]SOLOV'EV A A,SOCHUGOV N S,OSKOMOV K V,et al.Investigation of plasma characteristics in an unbalanced magnetron sputtering system[J].Plasma Physics Reports,2009,35(5):399-408
[19]KELLY P J,ARNELL R D.The determination of the current-voltage characteristics of a closed-field unbalanced magnetron sputtering system[J].Surface&Coatings Technology,1998,98(98):1370-1376
[20]丁健.载流有限长密绕螺线管的磁场分布[J].大学物理,2009,28(8):28-30.DING Jian.Magnetic field distribution of carrying tightly wound solenoid with finite length[J].University Physics,2009,28(8):28-30.
[21]HELMERSSON U,LATTEMANN M,BOHLMARK J,et al.Ionized physical vapor deposition(IPVD):a review of technology and applications[J].Thin Solid Films,2006,513(Supplement 1/2):1-24.