沉积时间对Sn-Mg共掺ZnO薄膜光电性能的影响
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摘要
采用超声喷雾热解法在石英玻璃衬底上,在衬底温度为440℃,喷嘴到衬底距离为4 cm,掺杂原子(Zn∶Mg∶Sn)比例为97.6∶2∶0.4,载气流量为0.8 L/min的固定条件下,制备了不同薄膜沉积时间(5 min、7 min、9 min、11 min)的Sn-Mg共掺的ZnO薄膜。并用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、光致发光谱(PL)、紫外可见分光光度计(UV-VIS)、薄膜测厚仪(SCG-10)和伏安特性曲线(I-V)对薄膜的结构、表面形貌、发光性能、透过率、膜厚和电学性能进行了一系列表征。当沉积时间为7 min时,XRD表明,薄膜的(101)峰强度最大,择优取向明显。SEM图显示薄膜表面致密光滑,颗粒均匀,尺寸最大且形貌最佳。PL谱在372 nm处的发射峰强度最大,峰形最尖锐,所有薄膜的透过率在可见光区域都超过了80%,表现出了很好的光透过性能。从薄膜的I-V特性曲线可计算出此时的电阻最小,导电性能最佳。
The ultrasonic spray pyrolysis was used on quartz glass substrate under the fixed conditions which are substrate temperature of 440 ℃,distance from nozzle to substrate of 4 cm,doped Zn∶Mg∶Sn of 97.6∶2∶0.4 and carrier gas flow of 0.8 L/min.Sn-Mg co-doped ZnO films with different deposition time of 5 min,7 min,9 min and 11 min were prepared.The film structure and surface morphology,luminescence properties,transmittance,the film thickness and electrical properties of the films were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM), photoluminescence(PL),ultraviolet visible(UV-VIS) spectrophotometer,film thickness(SCG-10) and current-voltage(I-V) curves.When the deposition time is 7 min,XRD pattern shows that the peak intensity of(101) film is maximum, and the preferred orientation of the growth is obvious.The SEM diagram shows that the surface of the film is dense and smooth,the particles are uniform,the size is the largest,and the shape is the best.The emission peak intensity is the largest,and the peak shape is the sharpest at 372 nm.The transmittance of all films is over 80% in the visible region,which shows excellent light transmission.By comparing and calculating with the change of the band gap value, the results show that when the deposition time is 7 min,the band gap value of the film is maximum.According to the I-V characteristic curve of the film,the resistance is the smallest,and the conductivity is the best.
The ultrasonic spray pyrolysis was used on quartz glass substrate under the fixed conditions which are substrate temperature of 440 ℃,distance from nozzle to substrate of 4 cm,doped Zn∶Mg∶Sn of 97.6∶2∶0.4 and carrier gas flow of 0.8 L/min.Sn-Mg co-doped ZnO films with different deposition time of 5 min,7 min,9 min and 11 min were prepared.The film structure and surface morphology,luminescence properties,transmittance,the film thickness and electrical properties of the films were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM), photoluminescence(PL),ultraviolet visible(UV-VIS) spectrophotometer,film thickness(SCG-10) and current-voltage(I-V) curves.When the deposition time is 7 min,XRD pattern shows that the peak intensity of(101) film is maximum, and the preferred orientation of the growth is obvious.The SEM diagram shows that the surface of the film is dense and smooth,the particles are uniform,the size is the largest,and the shape is the best.The emission peak intensity is the largest,and the peak shape is the sharpest at 372 nm.The transmittance of all films is over 80% in the visible region,which shows excellent light transmission.By comparing and calculating with the change of the band gap value, the results show that when the deposition time is 7 min,the band gap value of the film is maximum.According to the I-V characteristic curve of the film,the resistance is the smallest,and the conductivity is the best.
引文
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[17] Jo H B,Choi J,Byeon K J,et al.Superhydrophobic and superoleophobic surfaces using ZnO nano-in-micro hierarchical structures[J].Microelectronic Engineering,2014,116(12):51-57.
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[19] YIN Lei,DING He-sheng,YUAN Zhao-lin,et al.Effects of annealing temperature on morphology,structure and optical properties of well-aligned ZnO nanowire arrays[J].Journal of Optoelectronics·Laser,2018,29(4):370-376.殷磊,丁和胜,袁兆林,等.退火温度对ZnO纳米线阵列形貌、结构和光学特性的影响[J].光电子·激光,2018,29(4):370-376.
[20] CHEN Xiang,YANG Wen-yu,ZHANG Hui-qin,et al.Preparation and optical and magnetic properties of chromium doped zinc oxide thin films by ultrasonic spray[J].Spectroscopy and spectral analysis,2016,36(5):1328-1333.陈翔, 杨文宇, 张慧钦,等.铬掺杂氧化锌薄膜的超声喷雾法制备及其光学与磁学性质[J].光谱学与光谱分析,2016,36(5):1328-1333.
[2] LEI Yong,LIU Zhen,FAN Chang-jun,et al.Polymer cascade light-emitting device[J].Spectroscopy and Spectral Analysis,2017,37(3):715-722.雷勇,刘振,范昌君,等.聚合物级联发光器件[J].光谱学与光谱分析,2017,37(3):715-722.
[3] ZHENG Teng, HU Cheng, TAN Xing-yi, et al.Microstruc-ture and optical properties of GZO:Ti thin films perpared by RF magnetron sputtering[J].Journal of Optoelectronics·Laser,2017,28(11):1218-1223.张腾,胡诚,谭兴毅,等.射频磁控溅射法制备GZO:Ti薄膜的微结构及其光学性质[J].光电子·激光,2017,28(11):1218-1223.
[4] LIU Shi,CHEN Yong-jian,CUI Hai-ning,et al.Defect luminescence of ZnO thin film and its potential application as white light source[J].Spectroscopy and Spectral Analysis,2016,36(5):1604-1614.刘石,陈永健,崔海宁,等.氧化锌薄膜的缺陷发光和它作为白光光源的潜在应用[J].光谱学与光谱分析,2016,36(5):1604-1614.
[5] HOU Qing-yu,DONG Hong-ying,MA Wen,et al.First-principles study on the influence of Ga high doping on the minimum optical band gap and absorption band edge of ZnO[J].Acta Physica Sinica,2013,62(15):157101-157101.侯清玉,董红英,马文,等.Ga高掺杂对ZnO的最小光学带隙和吸收带边影响的第一性原理研究[J].物理学报,2013,62(15):157101-157101.
[6] DING He-sheng,YIN Lei,YUAN Zhao-lin,et al.Fabrication and optoelectronic charateristics of ZnO nanocrystalline thin film/ p-Si heterojunction[J].Journal of Optoelectronics·Laser,2018,29(5):499-504丁和胜,殷磊,袁兆林,等.ZnO纳米晶薄膜/p-Si异质结制备及其光电特性[J].光电子·激光,2018,29(5):499-504.
[7] WANG Yu-xin,LIU Qi,LIU Zi-wei,et al.Effect of Al doping on optical properties of N-Al co-doped ZnO films[J].Journal of Liaoning Normal University (Natural Science Edition),2016,39(2):181-185.王玉新,刘奇,刘子伟,等.Al掺杂量对N-Al共掺ZnO薄膜光学性能的影响[J].辽宁师范大学学报(自然科学版),2016,39(2):181-185.
[8] He R,Hocking R K,Tsuzuki T.Co-doped ZnO nanopowders:Location of cobalt and reduction in photocatalytic activity[J].Materials Chemistry & Physics,2012,132(2-3):1035-1040.
[9] LIU Xi-mei,HU Yue-hui,CHEN Yi-chuan,et al.Influence of thickness on structure and photoelectric properties of Mg-Sn Co doped ZnO film[J].Journal of Synthetic Optics,2015,44(1):95-100.刘细妹,胡跃辉,陈义川,等.厚度对Mg-Sn共掺ZnO薄膜结构和光电性能的影响[J].人工晶体学报,2015,44(1):95-100.
[10] Ismail A S,Mamat M H,Sin N D M,et al.Fabrication of hierarchical Sn-doped ZnO nanorod arrays through sonicated Sol-Gel immersion for room temperature, resistive-type humidity sensor applications[J].Ceramics International,2016,42(8):9785-9795.
[11] ZENG Yu-jia,YE Zhi-zhen,LU Jian-guo,et al.Effects of substrate temperature on properties of Al+N co-doped p-type ZnO films[J].Journal of Inorganic Materials,2005,20(3):750-754.
[12] WANG Yu-xin,LIU Qi,ZANG Gu-dan,et al.Effect of substrate temperature on optical proties of Na-Mg co-doped ZnO thin films[J].Journal of Optoelectronics·Laser,2017,28(12):1316-1319.王玉新,刘奇,臧谷丹,等.衬底温度对Na-Mg共掺ZnO薄膜光学性能的影响[J].光电子·激光,2017,28(12):1316-1319.
[13] WANG Yu-xin,LIU Qi,ZANG Gu-dan,et al.Effect of spin-coating times on the structure and optical transmittance of NiO films[J].Journal of Liaoning Normal University (Natural Science Edition),2017,40(3):313-317.王玉新, 刘奇, 臧谷丹,等.旋涂次数对NiO薄膜结构和光透过性能的影响[J].辽宁师范大学学报(自然科学版),2017,40(3):313-317.
[14] Ma Z Q,Zhao W G,Wang Y.Electrical properties of Na/Mg co-doped ZnO thin films[J].Thin Solid Films, 2007,515(24):8611-8614.
[15] Wang W,Wang Y X,Yang H B.Supramolecular transformations within discrete coordination-driven supramolecular architectures[J].Chemical Society Reviews,2016,45(9):2656-2656.
[16] ZHOU Xiong-tu,ZENG Xiang-yao,ZHANG Yong-ai,et al.Preparation of Al doped four acicular ZnO nanostructures and their photoluminescence and field emission properties[J].Chinese Journal of Luminescence,2013,34(11):1424-1429.周雄图,曾祥耀,张永爱,等.Al掺杂四针状ZnO纳米结构的制备及其光致发光和场发射特性[J].发光学报,2013,34(11):1424-1429.
[17] Jo H B,Choi J,Byeon K J,et al.Superhydrophobic and superoleophobic surfaces using ZnO nano-in-micro hierarchical structures[J].Microelectronic Engineering,2014,116(12):51-57.
[18] Argha Sarkar, Santanu Maity, P Chankraborty, et al.Effect of annealing temperature on Mg-Al co doped ZnO Nano particles synthesized via sol-gel method for gas sensing application[J].Materials today:proceedings,2017,4(9):10367-10371.
[19] YIN Lei,DING He-sheng,YUAN Zhao-lin,et al.Effects of annealing temperature on morphology,structure and optical properties of well-aligned ZnO nanowire arrays[J].Journal of Optoelectronics·Laser,2018,29(4):370-376.殷磊,丁和胜,袁兆林,等.退火温度对ZnO纳米线阵列形貌、结构和光学特性的影响[J].光电子·激光,2018,29(4):370-376.
[20] CHEN Xiang,YANG Wen-yu,ZHANG Hui-qin,et al.Preparation and optical and magnetic properties of chromium doped zinc oxide thin films by ultrasonic spray[J].Spectroscopy and spectral analysis,2016,36(5):1328-1333.陈翔, 杨文宇, 张慧钦,等.铬掺杂氧化锌薄膜的超声喷雾法制备及其光学与磁学性质[J].光谱学与光谱分析,2016,36(5):1328-1333.
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