退火温度对溶胶-凝胶法制备的AZO薄膜性能影响的研究
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摘要
以溶胶-凝胶法制备Al掺杂的ZnO(AZO)薄膜。为了提高薄膜的结晶性,在氩气气氛中将所制备的薄膜分别在400℃、500℃和550℃温度下退火处理,研究不同退火温度对薄膜样品形貌和性能的影响。结果表明,所制备的AZO薄膜为六角纤锌矿结构,有很明显的c轴择优取向;随着退火温度增加,薄膜的结晶性与电导率均先增加后减小,其在可见光区域的平均透过率约为85%。当退火温度为500℃时,制备的AZO薄膜性能最佳,其品质因素可以达到2 051.04Ω~(-1)·cm~(-1)。
Al doped ZnO (AZO) thin films were prepared by sol-gel method. In order to improve the crystallinity of prepared thin films,the thin films were annealed under argon atmosphere at 400 ℃,500 ℃ and 550 ℃,respectively. Then,the effects of annealing temperature on the morphologies and properties of the AZO thin films were investigated. The results showed that the thin films with hexagonal wurtzite-structured grains,exhibited highly c-axis preferred orientation. With the increase of annealing temperature,the crystallinity and conductivity of the films increased firstly and then decreased. The average transmittance was found to be about 85% in the visible region. When the annealing temperature was 500 ℃,the performance of the AZO film was the best,and the figue of merit could reach 2 051.04 Ω~(-1)·cm~(-1).
Al doped ZnO (AZO) thin films were prepared by sol-gel method. In order to improve the crystallinity of prepared thin films,the thin films were annealed under argon atmosphere at 400 ℃,500 ℃ and 550 ℃,respectively. Then,the effects of annealing temperature on the morphologies and properties of the AZO thin films were investigated. The results showed that the thin films with hexagonal wurtzite-structured grains,exhibited highly c-axis preferred orientation. With the increase of annealing temperature,the crystallinity and conductivity of the films increased firstly and then decreased. The average transmittance was found to be about 85% in the visible region. When the annealing temperature was 500 ℃,the performance of the AZO film was the best,and the figue of merit could reach 2 051.04 Ω~(-1)·cm~(-1).
引文
[1]许莹,窦玉博,王娟.溶胶-凝胶法制备AZO薄膜及Al掺杂机理的研究[J].功能材料,2010,A02:300-303.
[2]Joydip Sengupta,Sahoo R K,Mukherjee C D.Effect of Annealing on the Structural,Topographical and Optical Properties of Sol-Gel Derived Zn O and AZO Thin Films[J].Materials Letters,2012,83:84-87.
[3]Nai-fei Ren,Li-jing Huang,Ming Zhou,et al.Introduction of Ag Nanoparticles and AZO Layer to Prepare AZO/Ag/FTO Trilayer Films with High Overall Photoelectric Properties[J].Ceramics International,2014,40:8693-8699.
[4]Chang R C,Li T C,Lin C W.Influence of Various Thickness Metallic Interlayers on Opto-Electric and Mechanical Properties of AZO Thin Films on PET Substrates[J].Applied Surface Science,2012,258:3732-3737.
[5]Constantinescu C,Matei A,Ionita I,et al.Azo-Derivatives Thin Films Grown by Matrix-Assisted Pulsed Laser Evaporation for NonLinear Optical Applications[J].Applied Surface Science,2014,302:69-73.
[6]Kyle W J,Srinivasan G,Robert A S,et al.Atmospheric Pressure Plasma Enhanced Chemicalm Vapor Deposition of Zinc Oxide and Aluminum Zinc Oxide[J].Thin Solid Films,2013,548:210-219.
[7]Qin Xiujuan,Zhao Lin,Shao Guangjie,et al.Influence of Solvents on Deposition Mechanism of Al-Doped Zn O Films Synthesized by Cold Wall Aerosol-Assisted Chemical Vapor Deposition[J].Thin Solid Films,2013,542:144-149.
[8]Dwivedi C,Dutta V.Size Controlled Synthesis of Zn O Nanoparticles Via.Electric Field Assisted Continuous Spray Pyrolysis(EACo SP)Reactor[J].Applied Physics,2012,A109(1):75-79.
[9]赵鹏程,张振中,姚斌,等.低温外延生长平整Zn O薄膜[J].发光学报,2014,35(5):543-546.
[10]刘细妹,胡跃辉,陈义川,等.Na-Mg共掺杂Zn O薄膜的溶胶凝胶法制备及性能研究[J].陶瓷学报,2014,35(3):287-290.
[11]Efafi B,Sasani Ghamsari M,Majles Ara M H.Sol-Gel Derived AZO Thin Film with Unusual Narrow Dual Emission[J].Journal of Luminescence,2014,154:32-35.
[12]孟占昆,潘国峰,侯庆忠.基于Al掺杂Zn O的丙酮气敏传感器以及紫外光激发对其气敏性能的影响[J].传感技术学报,2016,29(6):797-801.
[13]Patel K H,Rawal S K.Influence of Power and Temperature on Properties of Sputtered AZO Films[J].Thin Solid Films,2016,620:182-187.
[14]李晓东,邵世强.退火温度对AZO薄膜性能的影响[J].玻璃与搪瓷,2016,44(1):1-4.
[15]Ka Eun Lee,Mingsong Wang,Eui Jung Kim,et al.Structural,E-lectrical and Optical Properties of Sol-Gel AZO Thin Films[J].Current Applied Physics,2009,9:683-687.
[16]Ng A N,Chan K Y,Tohsophon T.Effects of Annealing Temperature on Zn O and AZO Films Prepared by Sol-Gel Technique[J].Applied Surface Science,2012,258(24):9604-9609.
[17]彭寿,汤永康,王芸,等.种子层及掺杂浓度对溶胶-凝胶法制备Zn O:Al薄膜光电性能的影响[J].硅酸盐通报,2016,35(2):543-549.
[18]姚函妤,沈鸿烈,唐群涛,等.不同溶剂和Al掺杂对微波辅助合成Zn O纳米颗粒性能的影响[J].人工晶体学报,2015,44(4):998-1002.
[19]Fernndez S,Martínez-Steele A,Gandía J J,et al.Radio Frequency Sputter Deposition of High-Quality Conductive and Transparent Zn O:Al Films on Polymer Substrates for Thin Film Solar Cells Applications[J].Thin Solid Films,2009,517(10):3152-3156.
[2]Joydip Sengupta,Sahoo R K,Mukherjee C D.Effect of Annealing on the Structural,Topographical and Optical Properties of Sol-Gel Derived Zn O and AZO Thin Films[J].Materials Letters,2012,83:84-87.
[3]Nai-fei Ren,Li-jing Huang,Ming Zhou,et al.Introduction of Ag Nanoparticles and AZO Layer to Prepare AZO/Ag/FTO Trilayer Films with High Overall Photoelectric Properties[J].Ceramics International,2014,40:8693-8699.
[4]Chang R C,Li T C,Lin C W.Influence of Various Thickness Metallic Interlayers on Opto-Electric and Mechanical Properties of AZO Thin Films on PET Substrates[J].Applied Surface Science,2012,258:3732-3737.
[5]Constantinescu C,Matei A,Ionita I,et al.Azo-Derivatives Thin Films Grown by Matrix-Assisted Pulsed Laser Evaporation for NonLinear Optical Applications[J].Applied Surface Science,2014,302:69-73.
[6]Kyle W J,Srinivasan G,Robert A S,et al.Atmospheric Pressure Plasma Enhanced Chemicalm Vapor Deposition of Zinc Oxide and Aluminum Zinc Oxide[J].Thin Solid Films,2013,548:210-219.
[7]Qin Xiujuan,Zhao Lin,Shao Guangjie,et al.Influence of Solvents on Deposition Mechanism of Al-Doped Zn O Films Synthesized by Cold Wall Aerosol-Assisted Chemical Vapor Deposition[J].Thin Solid Films,2013,542:144-149.
[8]Dwivedi C,Dutta V.Size Controlled Synthesis of Zn O Nanoparticles Via.Electric Field Assisted Continuous Spray Pyrolysis(EACo SP)Reactor[J].Applied Physics,2012,A109(1):75-79.
[9]赵鹏程,张振中,姚斌,等.低温外延生长平整Zn O薄膜[J].发光学报,2014,35(5):543-546.
[10]刘细妹,胡跃辉,陈义川,等.Na-Mg共掺杂Zn O薄膜的溶胶凝胶法制备及性能研究[J].陶瓷学报,2014,35(3):287-290.
[11]Efafi B,Sasani Ghamsari M,Majles Ara M H.Sol-Gel Derived AZO Thin Film with Unusual Narrow Dual Emission[J].Journal of Luminescence,2014,154:32-35.
[12]孟占昆,潘国峰,侯庆忠.基于Al掺杂Zn O的丙酮气敏传感器以及紫外光激发对其气敏性能的影响[J].传感技术学报,2016,29(6):797-801.
[13]Patel K H,Rawal S K.Influence of Power and Temperature on Properties of Sputtered AZO Films[J].Thin Solid Films,2016,620:182-187.
[14]李晓东,邵世强.退火温度对AZO薄膜性能的影响[J].玻璃与搪瓷,2016,44(1):1-4.
[15]Ka Eun Lee,Mingsong Wang,Eui Jung Kim,et al.Structural,E-lectrical and Optical Properties of Sol-Gel AZO Thin Films[J].Current Applied Physics,2009,9:683-687.
[16]Ng A N,Chan K Y,Tohsophon T.Effects of Annealing Temperature on Zn O and AZO Films Prepared by Sol-Gel Technique[J].Applied Surface Science,2012,258(24):9604-9609.
[17]彭寿,汤永康,王芸,等.种子层及掺杂浓度对溶胶-凝胶法制备Zn O:Al薄膜光电性能的影响[J].硅酸盐通报,2016,35(2):543-549.
[18]姚函妤,沈鸿烈,唐群涛,等.不同溶剂和Al掺杂对微波辅助合成Zn O纳米颗粒性能的影响[J].人工晶体学报,2015,44(4):998-1002.
[19]Fernndez S,Martínez-Steele A,Gandía J J,et al.Radio Frequency Sputter Deposition of High-Quality Conductive and Transparent Zn O:Al Films on Polymer Substrates for Thin Film Solar Cells Applications[J].Thin Solid Films,2009,517(10):3152-3156.
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