太赫兹波段金属阵列结构的透射及反射宽谱偏振特性
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摘要
基于计算机仿真技术(CST)软件对二维金属光栅阵列在0.1~10THz波段的偏振特性进行了数值分析,利用光刻和金属薄膜工艺在500μm厚的高阻硅衬底上沉积了20nm厚的不同结构周期的金属铜光栅阵列,利用傅里叶变换光谱仪测量了该光栅阵列的透射及反射特性。结果表明:在太赫兹宽谱范围内,该光栅阵列的透射和反射都具有良好的偏振特性,且偏振特性范围可通过调整结构周期进行调节;该研究对太赫兹偏振器的进一步研究及应用提供了参考。
On the basis of computer simulation technology(CST)software,the polarization characteristics of twodimensional metal grating arrays in 0.1-10 THz region are numerically analyzed.Different periodic metal copper grating arrays with 20 nm thickness deposited on 500μm thick high-resistance silicon substrate are experimentally prepared by photo-lithography and thin-film technology.Then,the transmission and reflection characteristics of the structure are measured by Fourier transform spectrometer.Results show that the grating arrays have good polarization characteristics of the transmission and reflection in terahertz broad-band,and the polarization range can be adjusted by the structural period.Our results provide a reference for the further study and application of THz polarizer.
On the basis of computer simulation technology(CST)software,the polarization characteristics of twodimensional metal grating arrays in 0.1-10 THz region are numerically analyzed.Different periodic metal copper grating arrays with 20 nm thickness deposited on 500μm thick high-resistance silicon substrate are experimentally prepared by photo-lithography and thin-film technology.Then,the transmission and reflection characteristics of the structure are measured by Fourier transform spectrometer.Results show that the grating arrays have good polarization characteristics of the transmission and reflection in terahertz broad-band,and the polarization range can be adjusted by the structural period.Our results provide a reference for the further study and application of THz polarizer.
引文
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[30]Kong H,Li G F,Ma G H,et al.Terahertz wave transmission in subwavelength metal stripe[J].Acta Photonica Sinica,2012,41(8):888-892.孔辉,李高芳,马国宏,等.亚波长金属块阵列中太赫兹波的传输特性研究[J].光子学报,2012,41(8):888-892.
[31]Liu H Y.Research on terahertz polarization transmission characteristics of metal sub-wavelength slit array structure[J].Electro-Optic Technology Application,2013,28(4):34-36.刘海英.金属亚波长狭缝阵列结构的太赫兹偏振透射特性研究[J].光电技术应用,2013,28(4):34-36.
[32]Liu L M,Zhao G Z,Zhang G H,et al.Polarization characteristics of one-dimensional metallic wire-grating polarizer in terahertz frequency range[J].Chinese Journal of Lasers,2012,39(3):0311001.刘立明,赵国忠,张杲辉,等.太赫兹波段一维金属线栅的偏振特性研究[J].中国激光,2012,39(3):0311001.
[33]Lu X C,Han J G,Zhang W.Resonant terahertz reflection of periodic arrays of subwavelength metallic rectangles[J].Applied Physics Letters,2008,92(12):121103.
[2]Jiang C Y,Cai R,Liu J S,et al.Measurements of terahertz wavelength using metallic mesh Fabry-Perot interferometer[J].Acta Optica Sinica,2012,32(11):1112009.蒋呈阅,蔡瑞,刘劲松,等.金属网栅法布里珀罗干涉仪测量太赫兹波波长[J].光学学报,2012,32(11):1112009.
[3]Awartani O,Kudenov M W,O′Connor B T.Organic photovoltaic cells with controlled polarization sensitivity[J].Applied Physics Letters,2014,104(9):093306.
[4]Cao N W,Liu W Q,Zhang Y J.Quantitative study of improvements of the imaging contrast and imaging range by the polarization technique[J].Acta Physica Sinica,2000,49(1):61-66.曹念文,刘文清,张玉钧.偏振成像技术提高成像清晰度、成像距离的定量研究[J].物理学报,2000,49(1):61-66.
[5]Li H S,Li B,Wang S R.Polarization performance in space ultraviolet remote sensing spectral instruments[J].Acta Optica Sinica,2018,38(1):0112006.李寒霜,李博,王淑荣.空间紫外遥感光谱仪器偏振特性研究[J].光学学报,2018,38(1):0112006.
[6]Tonouchi M.Cutting-edge terahertz technology[J].Nature Photonics,2007,1(2):97-105.
[7]Carr G L,Martin M C,McKinney W R,et al.Highpower terahertz radiation from relativistic electrons[J].Nature,2002,420(6912):153-156.
[8]Li Z Y,Yao J Q,Xu D G,et al.High-power terahertz radiation from surface-emitted THz-wave parametric oscillator[J].Chinese Physics B,2011,20(5):054207.
[9]Nagatsuma T,Ducournau G,Renaud C C.Advances in terahertz communications accelerated by photonics[J].Nature Photonics,2016,10(6):371-379.
[10]Watts C M,Shrekenhamer D,Montoya J,et al.Terahertz compressive imaging with metamaterial spatial light modulators[J].Nature Photonics,2014,8(8):605-609.
[11]Tu S,Zhang W T,Xiong X M,et al.Principal component analysis for transgenic cotton seeds based on terahertz time domain spectroscopy system[J].Acta Photonica Sinica,2015,44(4):0430001.涂闪,张文涛,熊显名,等.基于太赫兹时域光谱系统的转基因棉花种子主成分特性分析[J].光子学报,2015,44(4):0430001.
[12]Wang H,Zhao G Z.Terahertz spectroscopic inspection of several kinds of plastic[J].Acta Photonica Sinica,2010,39(7):1185-1188.王鹤,赵国忠.几种塑料的太赫兹光谱检测[J].光子学报,2010,39(7):1185-1188.
[13]Melo A M,Kornberg M A,Kaufmann P,et al.Metal mesh resonant filters for terahertz frequencies[J].Applied Optics,2008,47(32):6064-6069.
[14]Yuan M H,Zhao D.A tunable terahertz bandpass filter with a slit aperture flanked by symmetrically distributed parallel grooves on both sides[J].Acta Photonica Sinica,2015,44(3):0323003.袁明辉,赵堤.一种双面周期开槽型可调太赫兹带通滤波器[J].光子学报,2014,44(3):0323003.
[15]Lin C J,Li Y T,Hsieh C F,et al.Manipulating terahertz wave by a magnetically tunable liquid crystal phase grating[J].Optics Express,2008,16(5):2995-3001.
[16]Doradla P,Alavi K,Joseph C S,et al.Terahertz polarization imaging for colon cancer detection[C].SPIE,2014,8985:89850K.
[17]Hangyo M,Tani M,Nagashima T.Terahertz timedomain spectroscopy of solids:a review[J].International Journal of Infrared and Millimeter Waves,2005,26(12):1661-1690.
[18]Huang Z,Park H,Parrott E P J,et al.Robust thinfilm wire-grid THz polarizer fabricated via a low-cost approach[J].IEEE Photonics Technology Letters,2013,25(1):81-84.
[19]Kaveev A K,Kropotov G I,Tsygankova E V,et al.Terahertz polarization conversion with quartz waveplate sets[J].Applied Optics,2013,52(4):B60-B69.
[20]Costley A E,Hursey K H,Neill G F,et al.Freestanding fine-wire grids:their manufacture,performance,and use at millimeter and submillimeter wavelengths[J].Journal of the Optical Society of America,1977,67(7):979-981.
[21]Ren X P,Fan R H,Peng R W,et al.Nonperiodic metallic gratings transparent for broadband terahertz waves[J].Physical Review B,2015,91(4):045111.
[22]Suzuki T,Nagai M,Kishi Y.Extreme-sensitivity terahertz polarizer inspired by an anisotropic cutthrough metamaterial[J].Optics Letters,2016,41(2):325-328.
[23]Yang Y P,Cui B,Geng Z X,et al.Terahertz magnetic and electric Mie resonances of an all-dielectric onedimensional grating[C]∥40th International Conference on Infrared,Millimeter,and Terahertz Waves.[S.l.]:IEEE,2015:928-936.
[24]Zhang B H,Gong Y D.Achromatic terahertz quarter waveplate based on silicon grating[J].Optics Express,2015,23(11):14897-14902.
[25]Chen H T,Padilla W J,Zide J M O,et al.Active terahertz metamaterial devices[J].Nature,2006,444(7119):597-600.
[26]Chen H T,Padilla W J,Cich M J,et al.Ametamaterial solid-state terahertz phase modulator[J].Nature Photonics,2009,3(3):148-151.
[27]Yang Y M,Huang R,Cong L Q,et al.Modulating the fundamental inductive-capacitive resonance in asymmetric double-split ring terahertz metamaterials[J].Applied Physics Letters,2011,98(12):121114.
[28]Karl N,Reichel K,Chen H T,et al.An electrically driven terahertz metamaterial diffractive modulator with more than 20dB of dynamic range[J].Applied Physics Letters,2014,104(9):091115.
[29]Zou T B,Hu F R,Xiao J,et al.Design of a polarization-insensitive and broadband terahertz absorber using metamaterials[J].Acta Physica Sinia,2014,63(17):178103.邹涛波,胡放荣,肖靖,等.基于超材料的偏振不敏感太赫兹宽带吸波体设计[J].物理学报,2014,63(17):178103.
[30]Kong H,Li G F,Ma G H,et al.Terahertz wave transmission in subwavelength metal stripe[J].Acta Photonica Sinica,2012,41(8):888-892.孔辉,李高芳,马国宏,等.亚波长金属块阵列中太赫兹波的传输特性研究[J].光子学报,2012,41(8):888-892.
[31]Liu H Y.Research on terahertz polarization transmission characteristics of metal sub-wavelength slit array structure[J].Electro-Optic Technology Application,2013,28(4):34-36.刘海英.金属亚波长狭缝阵列结构的太赫兹偏振透射特性研究[J].光电技术应用,2013,28(4):34-36.
[32]Liu L M,Zhao G Z,Zhang G H,et al.Polarization characteristics of one-dimensional metallic wire-grating polarizer in terahertz frequency range[J].Chinese Journal of Lasers,2012,39(3):0311001.刘立明,赵国忠,张杲辉,等.太赫兹波段一维金属线栅的偏振特性研究[J].中国激光,2012,39(3):0311001.
[33]Lu X C,Han J G,Zhang W.Resonant terahertz reflection of periodic arrays of subwavelength metallic rectangles[J].Applied Physics Letters,2008,92(12):121103.