一种新型2自由度微操作平台设计与试验
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摘要
为了满足微操作平台结构紧凑、大运动行程、高固有频率、运动解耦和高运动精度的要求,设计了一种以杠杆柔性机构进行位移放大,以双复合平行四杆柔性机构为导向机构的新型二维微操作平台。采用伪刚体法和虚功原理建立了反映平台静刚度、位移放大率和固有频率的力学模型。制作样机并搭建了试验测试系统对平台性能进行测试,试验结果表明,平台位移放大率可达4.5倍,刚度为5.79 N/μm,固有频率为580 Hz,反映平台沿x和y方向的耦合度的指标分别为1.3‰和1.2‰,沿x和y轴方向的重复定位精度分别为0.68μm和0.72μm。所以,所设计的平台实现了设计目标。
A novel 2-DOF micro-manipulation stage is presented, in order to meet the requirements of compact structure,large motion range, high natural frequency, decoupling motion and high motion accuracy. The leverage flexure mechanism is designed for displacement amplification, and the double parallel four-bar flexure mechanism serves as the guide. The mechanical model characterized by static stiffness, displacement magnification and natural frequency is worked out by means of the pseudo rigid-body method and the virtual working principle. The prototype is manufactured; the experimental system is set up for performance test. Experimental results show that the rate of displacement amplification is up to 4.5, the stiffness is 5.79 N/μm, and the natural frequency is 580 Hz. The index indicating the coupling degree along the x and y directions is 1.3‰ and 1.2‰ respectively; the accuracy of repeat positioning along the x and y directions is 0.68 μm and 0.72 μm respectively. Therefore, via the presented stage, the design goals can be achieved.
A novel 2-DOF micro-manipulation stage is presented, in order to meet the requirements of compact structure,large motion range, high natural frequency, decoupling motion and high motion accuracy. The leverage flexure mechanism is designed for displacement amplification, and the double parallel four-bar flexure mechanism serves as the guide. The mechanical model characterized by static stiffness, displacement magnification and natural frequency is worked out by means of the pseudo rigid-body method and the virtual working principle. The prototype is manufactured; the experimental system is set up for performance test. Experimental results show that the rate of displacement amplification is up to 4.5, the stiffness is 5.79 N/μm, and the natural frequency is 580 Hz. The index indicating the coupling degree along the x and y directions is 1.3‰ and 1.2‰ respectively; the accuracy of repeat positioning along the x and y directions is 0.68 μm and 0.72 μm respectively. Therefore, via the presented stage, the design goals can be achieved.
引文
[1]胡俊峰,蔡建阳,郑昌虎等.基于Kriging模型的微夹持器优化设计[J].中国机械工程, 2016, 27(14):1968-1975.
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[12] Wang R, Zhang X. A planar 3-DOF nanopositioning plat-form with large magnification[J]. Precision Engineering, 2016,46(16):221-231.
[13]胡俊峰,郝亚洲,徐贵阳.传递矩阵法分析平面柔顺机构的振动特性[J].振动、测试与诊断, 2015, 35(6):1145-1204.
[2] Li Y, Xiao S, Xi L, et al. Design, modeling, control andexperiment for a 2-DOF compliant micro-motion stage[J].International Journal of Precision Engineering and Manufac-turing, 2014, 15(4):735-744.
[3]米凤文,戴旭涵,沈亦兵,等. 0.1μm大行程精密定位控制系统的研究[J].仪器仪表学报, 2000, 21(1):89-91.
[4]胡俊峰,徐贵阳,郝亚洲.一种新型空间微操作平台的设计和性能[J].机械设计与研究, 2014, 30(1):42-46.
[5]马立,谢炜,刘波,等.柔性铰链微操作平台的设计[J].光学精密工程, 2014, 22(2):338-345.
[6]沈剑英,张海军,赵云.压电陶瓷驱动器杠杆式柔性铰链机构放大率计算方法[J].农业机械学报, 2013, 44(9):267-271.
[7]田延岭,张大卫,闫兵,等.二自由度微定位平台的研制[J].光学精密工程, 2006, 14(1):94-99.
[8]刘定强,黄玉美,谢礼,等.压电型宏微双驱动精密定位系统点位协调控制[J].农业机械学报,2011,42(4):220-223.
[9] Li Y, Xu Q. Modeling and performance evaluation of a flex-ure-based XY parallel micromanipulator[J]. Mechanism&Machine Theory, 2009, 44(12):2127-2152.
[10] Li Y, Xu Q. A novel design and analysis of a 2-DOF com-pliant parallel micromanipulator for nanomanipulation[J].IEEE Transactions on Automation Science&Engineering,2006, 3(3):247-254.
[11]胡俊峰,郝亚洲,徐贵阳.压电陶瓷驱动的精密微操作平台特性与优化[J].纳米技术与精密工程, 2014, 12(5):365-372.
[12] Wang R, Zhang X. A planar 3-DOF nanopositioning plat-form with large magnification[J]. Precision Engineering, 2016,46(16):221-231.
[13]胡俊峰,郝亚洲,徐贵阳.传递矩阵法分析平面柔顺机构的振动特性[J].振动、测试与诊断, 2015, 35(6):1145-1204.