激光圆偏振干涉纳米位移测量信号处理方法

详细信息    查看全文 | 推荐本文 |

英文篇名：Signal Processing Method of Laser Circular Polarization Interference Nanometer Displacement Measurement 作者：章淼凌 ; 严利平 ; 楼盈天 ; 刘燕娜 ; 陈本永 英文作者：ZHANG Miao-ling;YAN Li-ping;LOU Ying-tian;LIU Yan-na;CHEN Ben-yong;Nanometer Measurement Laboratory,Zhejiang Sci-Tech University; 关键词：激光圆偏振干涉 ; 纳米位移测量 ; 信号处理 ; FPGA和DSP 英文关键词：laser circular polarization interferometer;;nanometer displacement measurement;;signal processing;;FPGA and DSP 中文刊名：ZJSG 英文刊名：Journal of Zhejiang Sci-Tech University 机构：浙江理工大学纳米测量技术实验室; 出版日期：2013-09-10 出版单位：浙江理工大学学报 年：2013 期：v.30 基金：国家自然科学基金项目(51205365);; 浙江省自然科学基金项目(Y1110495);; 浙江省教育厅科研项目(Y201019094和ZD2007004) 语种：中文; 页：ZJSG201305010 页数：5 CN：05 ISSN：33-1338/TS 分类号：50-53+73

摘要

介绍激光圆偏振干涉纳米位移测量系统的光路结构,针对A/D误差和直流噪声引入的位移误差,提出了基于正余弦信号切换的干涉条纹处理方法,以提高测量精度。设计基于FPGA和DSP架构的激光圆偏振干涉纳米位移测量系统,其中FPGA主要用于信号的采集、大数计数及与上位机通讯,DSP主要用于小数计算。位移实验结果表明:在0~7μm范围内,步长为100nm的测量结果其线性拟合相关系数为0.983 6,标准差为1.88nm;在0~15μm范围内步长为1μm的测量结果其线性拟相关系数为0.999 2,标准差为2.96nm。验证了所提出的干涉条纹处理方法和信号处理系统能够实现纳米级位移测量精度的要求。
        This paper introduces the light path structure of laser circular polarization interference nanometer displacement measuring system of;puts forward interference fringe processing method based on sine and cosine signal switching in allusion to A/D error and displacement error introduced by dc noise so as to improve the measuring accuracy;designs laser circular polarization interference nanometer displacement measuring system based on FPGA and DSP architecture.FPGA is mainly used for signal acquisition,large number counting and communication with upper computer.DSP is mainly used for small number calculation.The result of displacement experiment shows that,when the step length is 100nm,within the scope of 0~7μm,the correlation coefficient of linear fitting of the measuring result is 0.983 6 and standard deviation is 1.88nm;when the step length is 1μm,within the scope of 0~15μm,the correlation coefficient of linear fitting of the measuring result is 0.999 2 and standard deviation is 2.96nm.It verifies that interference fringe processing method proposed and signal processing system can achieve the requirement of nanoscale displacement measuring accuracy.

引文

[1]郭新军,王霁,严家骅,等.一种纳米精度偏振干涉仪光学系统的研究[J].红外与激光工程,2004,33(1):21-24.
    [2]Joo K N,Ellis J D,Buice E S,et al.High resolution heterodyne interferometer without detectable periodic nonlinearity[J].Optics Express,2010,18(2):1159-1165.
    [3]殷纯永.现代干涉测量技术[M].天津:天津大学出版社,1999:231-233.
    [4]闫冠屹,谌雅琴,孙利群,等.基于FPGA的单频激光干涉仪高速相位检测器设计与实现[J].光电子技术,2012,32(1):11-14.
    [5]赵思维,严利平,杨涛,等.基于DSP的激光外差干涉信号处理方法[J].浙江理工大学学报,2011,28(2):217-220.
    [6]王丽华,曲兴华.基于DSP的高精度激光干涉仪的研制[J].自动化仪表,2009,30(10):69-75.
    [7]张国雄,金篆芷.测控电路[M].北京:机械工业出版社,2000:204-205.
    [8]李怀琼,陈钱,王钰.新型光栅信号数字细分技术及其误差分析[J].计量学报,2001,22(4):281-283.
    [9]Chen Benyong,Luo Jianbo,Li Dacheng.Code counting of optical fringes:methodology and realization[J].Applied Optics,2005,2(44):217-223.
    [10]Yan Liping,Chen Benyong,Li Dacheng,et al.Signal processing method of a laser synthetic wavelength interferometer[J].Measurement Science and Technology,2010,21(1):1-8.
    [11]穆瑞珍,杨万福,陈本永.干涉条纹大数计数软件新方法及其实现[J].光学技术,2008,34(5):687-692.