基于LabVIEW的高精度激光干涉测距系统

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英文篇名：High-precision laser interferometric displacement measurement system based on LabVIEW 作者：严瑾 ; 李筠 ; 杨海马 英文作者：Yan Jin;Li Jun;Yang Haima;School of Optical-Electrical and computer Engineering,University of Shanghai for Science and Technology;Shanghai Institute of Technical Physics of Chinese Academy of Sciences; 关键词：激光干涉 ; 位移测量 ; 直线度 ; LabVIEW 英文关键词：laser interferometer;;displacement measurement;;straightness;;LabVIEW 中文刊名：DZCL 英文刊名：Electronic Measurement Technology 机构：上海理工大学光电信息与计算机工程学院;中国科学院上海技术物理研究所; 出版日期：2017-04-15 出版单位：电子测量技术 年：2017 期：v.40;No.276 语种：中文; 页：DZCL201704038 页数：6 CN：04 ISSN：11-2175/TN 分类号：177-182

摘要

微位移和直线度误差作为工业测量中重要的几何参数,其测量值对精密仪器的制造与检测有着广泛应用。但随着工业技术发展,就传统测量仪器自准直仪而言,存在精度不高、实时性不强、速度慢等缺点,无法完全满足当下高速、高精度、实时监测的的要求,提出一种基于LabVIEW的高精度激光干涉测距系统,对位移位置和直线度进行测量与分析。基于双频激光干涉测距原理,设计了光电测距仪测量得到带位移信号的光信号,经光电转换得到电信号,利用LabVIEW平台编写操作界面和数据处理与误差分析。对系统进行实验,表明对长度30cm导轨检测,相对误差小于0.2nm,系统具有结构简单、测量速度快、实时性强等优点,实现了位移与直线度的大范围、高精度的测量,可被在工业位移测量中广泛使用。
        Micro-displacement and straightness error as an important measurement of industrial geometric parameters,the measurement of precision instruments for manufacturing and testing has a wide range of applications.However,with the development of industrial technology,there are some shortcomings such as low accuracy,real-time performance and slow speed,which can not meet the requirement of high-speed,high-precision and real-time monitoring of traditional measuring instrument collimator.A high precision laser interferometer system based on LabVIEW is used to measure and analyze the displacement position and straightness.Based on the principle of dualfrequency laser interferometry,the optical signal with displacement signal is designed and the electric signal is obtained by photoelectric conversion.The user interface and data processing and error analysis are written by LabVIEW.The system has the advantages of simple structure,fast measurement speed and strong real-time performance.It can realize large-range and high-precision measurement of displacement and straightness,and can be measured by the system.It can be widely used in industrial displacement measurement.

引文

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