微造型表面纹理的制备及摩擦机理研究
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摘要
通过降低接触面积来减小表面纹理磨损,又通过对润滑油的存储实现动压润滑以及二次润滑来达到减摩抗磨的作用。在滑动接触过程中,接触条件不断变化,表面微造型加工质量的优劣以及是否依据其摩擦机理进行了纹理设计都会对摩擦特性的评估产生重要影响。本文对微造型纹理表面滑动接触中的摩擦机理进行了综述,介绍了表面微造型制备技术和表面微造型的应用,并探讨了表面微造型技术可能的发展方向。
Surface texture reduces wear by decreasing contact area. On the other hand it has the effect of frictionreduction and antiwear because of hydrodynamic lubrication by storing lubricating oil. Contact condition will be changing in the process of sliding contact. The quality of processing and whether the texture design is based on the friction mechanism will have a significant influence on evaluation of friction properties. Now the friction mechanism in sliding contact of textured surface is given in this paper. And the preparation technology of surface texture and its application are introduced. At last,this paper inquires into the development trend about the technology of surface texture.
Surface texture reduces wear by decreasing contact area. On the other hand it has the effect of frictionreduction and antiwear because of hydrodynamic lubrication by storing lubricating oil. Contact condition will be changing in the process of sliding contact. The quality of processing and whether the texture design is based on the friction mechanism will have a significant influence on evaluation of friction properties. Now the friction mechanism in sliding contact of textured surface is given in this paper. And the preparation technology of surface texture and its application are introduced. At last,this paper inquires into the development trend about the technology of surface texture.
引文
[1]国家自然科学基金委员会工程与材料科学部.机械工程学科发展战略报告(2011-2020)[R].北京:科学出版社,2010.
[2]王晓雷,王静秋,韩文非.边界润滑条件下表面微细织构减摩特性的研究[J].润滑与密封,2007,32(12):36-39.
[3]韩志武,任露泉,刘祖斌.激光织构仿生非光滑表面抗磨性能研究[J].摩擦学学报,2004,24(4):289-293.
[4]万轶,熊党生.激光表面织构化改善摩擦学性能的研究进展[J].摩擦学学报,2006,26(6):603-607.
[5]历建全,朱华.表面织构及其对摩擦学性能的影响[J].润滑与密封,2009,34(2):94-97.
[6]Wong H C,Umehara N,Kato K.The effect of surface roughness on friction of ceramics sliding in water[J].Wear,2001,218:237-243.
[7]赵文杰,王立平,薛群基.织构化提高表面摩擦学性能的研究进展[J].摩擦学学报,2011,31(6):621-631.
[8]Pettersson U,Jacobson S.Friction and wear properties of micro textured DLC coated surfaces in boundary lubricated sliding[J].Tribology Letters,2004,17(3):553-559.
[9]Suh A Y,Lee S C,Polycarpou A A.Adhesion and friction evaluation of textured slider surfaces in ultra-low flying head/disk interfaces[J].Tribology Letters,2004,17:739-749.
[10]佟瑞庭.纳观黏着滑动接触的多尺度耦合方法研究[D].西安:西北工业大学,2010.
[11]韩静.宏微观表面纹理的润滑及摩擦性能研究[D].徐州:中国矿业大学,2013.
[12]张菁.化学气相沉积技术发展趋势[J].表面技术,1996,25(2):1-3.
[13]胡昌义,李靖华.化学气相沉积技术与材料制备[J].稀有金属,2001,25(5):364-368.
[14]潘训刚.电子束物理气相沉积法制备Si C薄膜及性能研究[D].合肥:合肥工业大学,2012.
[15]孙立宁.抓住机遇,全面推动我国MEMS的发展[J].机器人技术与应用,2003(2):3-6.
[16]Deng T.Fabrication of functional devices using soft lithography and unconventional micropatterning[D].PHD Dissertation of Chemistry Harvard University,2001.
[17]Ma L.Robust mask-layout and process synthesis in MEMS using genetic algorithms[D].PHD Dissertation of California Institute of Technology Pasadena,California,2001.
[18]孙静,康琳,刘希,等.反应离子刻蚀与离子刻蚀方法的研究与比较[J].低温物理学报,2006,28(3):224-227.
[19]来五星,廖广兰,史铁林,等.反应离子刻蚀加工工艺技术的研究[J].半导体技术,2006,31(6):414-417.
[20]姚翔,沈荷生,丁桂甫,等.金刚石薄膜的反应离子刻蚀[J].微细加工技术,2000(3):23-28.
[21]Costa H L.Modification of surface topography:manufacturing methods and applications[J].Ph.D Thesis,University of Cambridge,2005:240.
[22]张云电,赵峰,黄文剑.摩擦副表面微坑超声加工方法的研究[J].中国机械工程,2004,14:1280-1282.
[23]Becker E P,Ludema K C.A qualitative empirical model of cylinder bore wear[J].Wear,1999,225(1):387-404.
[24]Li L,Chai D M.The research and application of honing technology[J].Key Engineering Materials,2001,202-203:385-388.
[25]Brinksmeier E,Glabe R,Riemer O,et al.Precision cutting processes for the manufacture of micro molds[C].Proceedings of the 2nd International Conference on New Forming Technology,Bremen,2007:1-13.
[26]Flucke C,Glabe R,Brinks Meier E.Manufacturing of moulds for the replication of prismatic microstructures by a novel diamond cutting process[J].Industrial Diamond Review,2007,67:25-30.
[27]赵旸.摩擦副表面微凹坑超声复合加工工艺研究[D].扬州:扬州大学,2008.
[28]刘晋春,赵家齐,赵万生.特种加工(第4版)[M].北京:机械工业出版社,2006.
[29]刘战强,雷原忠.微切削加工技术[J].工具技术,2006,40(3):28-34.
[30]Chae J,Park S S,Freiheit T.Investigation of micro-cutting operations[J].International Journal of Machine Tools&Manufacture,2006,46:313-332.
[31]Liu X,De Vor R E,Kapoor S G,et al.The mechanics of ma-chining at microscale:assessment of the current state of the science[J].Transactions of the ASME,Journal of Manufacturing Science and Engineering,2004,126:666-678.
[32]Etsion I,Kligerman Y,Halperin G.Analytical and experimental investigation of laser-textured mechanical seal faces[J].Tribology Trans,1999,42(3):511-516.
[33]江海河.激光加工技术应用的发展及展望[J].光电子技术与信息,2001,14(4):1-12.
[34]宋威廉.用于激光加工的激光器及其特点[J].激光与红外,1997,27(6):323-325.
[35]姚斌,王大力.激光加工内腔技术的研究[J].制造技术与机床,2002(9):31-33.
[36]方志民,谢颂京,姚建华.激光加工在先进制造技术中的应用[J].机械工程师,2003:27-30.
[37]尹杰,董松金,刘言学,等.激光加工技术在工程机械制造中的应用探讨[J].工程机械,2011,42:50-53.
[38]李立青,郭艳玲,白基成,等.电火花加工技术研究的发展趋势预测[J].机床与液压,2008,36(2):174-178.
[39]李树林,殷建祥.气缸套内表面激光造型珩磨加工[J].内燃机配件,2008(6):10-13.
[40]刘小君,董磊,王森,等.微凹坑织构表面对脂润滑关节轴承摩擦特性的影响[J].摩擦学学报,2014,34(4):387-392.
[41]戴振东,佟金,任露泉.仿生摩擦学研究及发展[J].科学通报,2006,51(20):2353-2359.
[42]陈大融.空化与空蚀研究[J].中国基础科学,2010,12(6):3-7.
[43]黄继汤.空化与空蚀的原理及应用[M].北京:清华大学出版社,1991.
[44]Wang X L,Kato K,Adachi K,et al.Loads carrying capacity map for the surface texture design of Si C thrust bearing sliding in water[J].Tribolology International,2003,36:189-197.
[45]Brizmer V,Kligerman Y,Etsion I.A laser surface textured parallel thrust bearing[J].Tribology Transactions,2003,46:397-403.
[46]于海武.基于流体动压润滑效应的表面织构优化设计[D].南京:南京航空航天大学,2011.
[47]李宝玉.激光织构化轴承的润滑特性研究[D].广州:广东工业大学,2015.
[48]万轶,李建亮,熊党生.滑动速度对织构化表面润滑状态的影响[J].中南大学学报(自然科学版),2015,46(12):4442-4447.
[2]王晓雷,王静秋,韩文非.边界润滑条件下表面微细织构减摩特性的研究[J].润滑与密封,2007,32(12):36-39.
[3]韩志武,任露泉,刘祖斌.激光织构仿生非光滑表面抗磨性能研究[J].摩擦学学报,2004,24(4):289-293.
[4]万轶,熊党生.激光表面织构化改善摩擦学性能的研究进展[J].摩擦学学报,2006,26(6):603-607.
[5]历建全,朱华.表面织构及其对摩擦学性能的影响[J].润滑与密封,2009,34(2):94-97.
[6]Wong H C,Umehara N,Kato K.The effect of surface roughness on friction of ceramics sliding in water[J].Wear,2001,218:237-243.
[7]赵文杰,王立平,薛群基.织构化提高表面摩擦学性能的研究进展[J].摩擦学学报,2011,31(6):621-631.
[8]Pettersson U,Jacobson S.Friction and wear properties of micro textured DLC coated surfaces in boundary lubricated sliding[J].Tribology Letters,2004,17(3):553-559.
[9]Suh A Y,Lee S C,Polycarpou A A.Adhesion and friction evaluation of textured slider surfaces in ultra-low flying head/disk interfaces[J].Tribology Letters,2004,17:739-749.
[10]佟瑞庭.纳观黏着滑动接触的多尺度耦合方法研究[D].西安:西北工业大学,2010.
[11]韩静.宏微观表面纹理的润滑及摩擦性能研究[D].徐州:中国矿业大学,2013.
[12]张菁.化学气相沉积技术发展趋势[J].表面技术,1996,25(2):1-3.
[13]胡昌义,李靖华.化学气相沉积技术与材料制备[J].稀有金属,2001,25(5):364-368.
[14]潘训刚.电子束物理气相沉积法制备Si C薄膜及性能研究[D].合肥:合肥工业大学,2012.
[15]孙立宁.抓住机遇,全面推动我国MEMS的发展[J].机器人技术与应用,2003(2):3-6.
[16]Deng T.Fabrication of functional devices using soft lithography and unconventional micropatterning[D].PHD Dissertation of Chemistry Harvard University,2001.
[17]Ma L.Robust mask-layout and process synthesis in MEMS using genetic algorithms[D].PHD Dissertation of California Institute of Technology Pasadena,California,2001.
[18]孙静,康琳,刘希,等.反应离子刻蚀与离子刻蚀方法的研究与比较[J].低温物理学报,2006,28(3):224-227.
[19]来五星,廖广兰,史铁林,等.反应离子刻蚀加工工艺技术的研究[J].半导体技术,2006,31(6):414-417.
[20]姚翔,沈荷生,丁桂甫,等.金刚石薄膜的反应离子刻蚀[J].微细加工技术,2000(3):23-28.
[21]Costa H L.Modification of surface topography:manufacturing methods and applications[J].Ph.D Thesis,University of Cambridge,2005:240.
[22]张云电,赵峰,黄文剑.摩擦副表面微坑超声加工方法的研究[J].中国机械工程,2004,14:1280-1282.
[23]Becker E P,Ludema K C.A qualitative empirical model of cylinder bore wear[J].Wear,1999,225(1):387-404.
[24]Li L,Chai D M.The research and application of honing technology[J].Key Engineering Materials,2001,202-203:385-388.
[25]Brinksmeier E,Glabe R,Riemer O,et al.Precision cutting processes for the manufacture of micro molds[C].Proceedings of the 2nd International Conference on New Forming Technology,Bremen,2007:1-13.
[26]Flucke C,Glabe R,Brinks Meier E.Manufacturing of moulds for the replication of prismatic microstructures by a novel diamond cutting process[J].Industrial Diamond Review,2007,67:25-30.
[27]赵旸.摩擦副表面微凹坑超声复合加工工艺研究[D].扬州:扬州大学,2008.
[28]刘晋春,赵家齐,赵万生.特种加工(第4版)[M].北京:机械工业出版社,2006.
[29]刘战强,雷原忠.微切削加工技术[J].工具技术,2006,40(3):28-34.
[30]Chae J,Park S S,Freiheit T.Investigation of micro-cutting operations[J].International Journal of Machine Tools&Manufacture,2006,46:313-332.
[31]Liu X,De Vor R E,Kapoor S G,et al.The mechanics of ma-chining at microscale:assessment of the current state of the science[J].Transactions of the ASME,Journal of Manufacturing Science and Engineering,2004,126:666-678.
[32]Etsion I,Kligerman Y,Halperin G.Analytical and experimental investigation of laser-textured mechanical seal faces[J].Tribology Trans,1999,42(3):511-516.
[33]江海河.激光加工技术应用的发展及展望[J].光电子技术与信息,2001,14(4):1-12.
[34]宋威廉.用于激光加工的激光器及其特点[J].激光与红外,1997,27(6):323-325.
[35]姚斌,王大力.激光加工内腔技术的研究[J].制造技术与机床,2002(9):31-33.
[36]方志民,谢颂京,姚建华.激光加工在先进制造技术中的应用[J].机械工程师,2003:27-30.
[37]尹杰,董松金,刘言学,等.激光加工技术在工程机械制造中的应用探讨[J].工程机械,2011,42:50-53.
[38]李立青,郭艳玲,白基成,等.电火花加工技术研究的发展趋势预测[J].机床与液压,2008,36(2):174-178.
[39]李树林,殷建祥.气缸套内表面激光造型珩磨加工[J].内燃机配件,2008(6):10-13.
[40]刘小君,董磊,王森,等.微凹坑织构表面对脂润滑关节轴承摩擦特性的影响[J].摩擦学学报,2014,34(4):387-392.
[41]戴振东,佟金,任露泉.仿生摩擦学研究及发展[J].科学通报,2006,51(20):2353-2359.
[42]陈大融.空化与空蚀研究[J].中国基础科学,2010,12(6):3-7.
[43]黄继汤.空化与空蚀的原理及应用[M].北京:清华大学出版社,1991.
[44]Wang X L,Kato K,Adachi K,et al.Loads carrying capacity map for the surface texture design of Si C thrust bearing sliding in water[J].Tribolology International,2003,36:189-197.
[45]Brizmer V,Kligerman Y,Etsion I.A laser surface textured parallel thrust bearing[J].Tribology Transactions,2003,46:397-403.
[46]于海武.基于流体动压润滑效应的表面织构优化设计[D].南京:南京航空航天大学,2011.
[47]李宝玉.激光织构化轴承的润滑特性研究[D].广州:广东工业大学,2015.
[48]万轶,李建亮,熊党生.滑动速度对织构化表面润滑状态的影响[J].中南大学学报(自然科学版),2015,46(12):4442-4447.