一个用于纳米压痕和应力测试的全自动原子力显微镜系统（英文）

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英文篇名：An automated AFM for nanoindentation and force related measurements 作者：白江华 ; Andres ; La ; Rosa 英文作者：BAI Jiang-hua;Andres La Rosa;Department of Physics,Portland State University; 关键词：原子力显微镜 ; 纳米压痕 ; 超声检测 ; 压电陶瓷驱动 ; 水晶音叉 ; LabVIEW ; 锁相放大器 ; 8051单片机 英文关键词：atomic force microscope(AFM);;nano indentation;;acoustic sensing;;piezo drive;;crystal tuning fork;;LabVIEW;;lock-in amplifier;;8051 microcontroller 中文刊名：CSKX 英文刊名：测试科学与仪器(英文版) 机构：波特兰州立大学物理系; 出版日期：2018-12-15 出版单位：Journal of Measurement Science and Instrumentation 年：2018 期：v.9;No.36 语种：英文; 页：CSKX201804007 页数：7 CN：04 ISSN：14-1357/TH 分类号：45-51

摘要

本文设计了一台专门用于纳米压痕和应力测试的原子力显微镜。显微镜的基座由三个步进电机控制,显微镜的精确运动由MCL压电陶瓷控制。显微镜的主动传感器由水晶音叉与粘在音叉上的探针组成,探针与待测样品之间的应力作用由一个精密超声波传感器来测量,传感器的信号由两台锁相放大器来处理。最终,所有数据由FPGA卡集成接收并传给电脑控制器。显微镜的主控制器用LabVIEW编写,主要负责Z方向扫描、信号处理以及数据的图形化显示。控制器中植入了手动和自动两种模式,用来控制显微镜的运动和进行信号处理,在运行过程中用户可以在两种模式之间切换。调试与试运行结果显示,该原子力显微镜有简单灵活、使用方便等诸多优点。
        A fully automated atomic force microscope(AFM)is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A 32.768 kHz crystal tuning fork(TF)was used as the transducer with a probe attached.An acoustic sensor was used to measure the interactions between the probe and the sample.An SR850 lock-in amplifier was used to monitor the TF signals.An additional lock-in amplifier was used to monitor the acoustic signal.A field programmable gate array(FPGA)board was used to collect the data in automatic mode.The main controller was coded with LabVIEW,which was in charge of Z-axis scan,signal processing and data visualization.A manual mode and an automatic mode were implemented in the controller.Users can switch the two modes at any time during the operation.This AFM system showed several advantages during the test operations.It is simple,flexible and easy to use.

引文

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