一个由步进电机驱动的3支点扫描探针显微镜基座（英文）

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英文篇名：An SPM stage driven by three stepper motors 作者：白江华 ; Andres ; La ; Rosa 英文作者：BAI Jiang-hua;Andres La Rosa;Physics Department,Portland State University; 关键词：扫描探针显微镜 ; 步进电机 ; 射频控制 ; LabVIEW 英文关键词：scanning probe microscope(SPM);;stepper motors;;radio frequency(RF) control;;LabVIEW 中文刊名：CSKX 英文刊名：测试科学与仪器(英文版) 机构：波特兰州立大学物理系; 出版日期：2017-09-15 出版单位：Journal of Measurement Science and Instrumentation 年：2017 期：v.8;No.31 语种：英文; 页：CSKX201703011 页数：6 CN：03 ISSN：14-1357/TH 分类号：71-76

摘要

设计了一个由3个步进电机驱动的扫描探针显微镜(Scanning probe microscope,SPM)基座。这个基座比普通的由一个电机驱动的基座要灵活,但基座的控制也相对复杂。基座的3个电动机由一个Arduino单片机来控制。在Arduino单片机里面还设计了一个状态机,通过这个状态机单片机与电脑上位机和一个射频遥控器进行通信。另外,本项目还用两个5状态LED来显示有限状态机(Finite state machine,FSM)的不同状态以及电动机和基座的运动状态。最后,通过测试和调试,本基座在Z方向上能实现700纳米的机械控制分辨率。
        A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilities than that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stage actions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicate with a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicate the operation of the stage.Finally,the stage is fully tested and has a 700 nm resolution in Z motion of the SPM.

引文

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