微量程段的热式气体质量流量传感器研制
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摘要
研制了一种微量程段的热式气体质量流量传感器。传感器芯片通过微机电系统(MEMS)工艺制备,芯片包括上下游测温电阻器和环境电阻器,其中测温电阻器有4只,对称分布在芯片中央位置,构成惠斯通电桥,芯片工作中采用恒压模式驱动。当气体流过芯片表面时,会导致检测电桥不平衡,流量信号变化转换为相应的电压信号。通过实验标定了传感器的输出曲线并对传感器的精度进行了测试,测试结果表明:研制的传感器在流量0~5 m L/min的量程范围内,具有响应速度快、精度高的优点。
A micro-range thermal gas mass flow sensor is researched and fabricated. The sensor chip is fabricated by micro-electro-mechanical system( MEMS) process,includes two upstream,and two downstream temperature measurement resistors and environmental resistors. The four upstream and downstreammeasuring resistors are symmetrically distributed in the center of chip,which constitute a Wheatstone bridge. During operation,the chip is driven by constant voltage mode. When the gas flows over the surface of the chip,the bridge is unbalanced and changes of flow signal is transformed to voltage signal. Output curre of sensor is calibrated through experiments and the precision of the sensor is tested. Test result shows that at the flow range of 0 ~ 5 m L/min the sensor has the advantages of fast response,high precision,and so on.
A micro-range thermal gas mass flow sensor is researched and fabricated. The sensor chip is fabricated by micro-electro-mechanical system( MEMS) process,includes two upstream,and two downstream temperature measurement resistors and environmental resistors. The four upstream and downstreammeasuring resistors are symmetrically distributed in the center of chip,which constitute a Wheatstone bridge. During operation,the chip is driven by constant voltage mode. When the gas flows over the surface of the chip,the bridge is unbalanced and changes of flow signal is transformed to voltage signal. Output curre of sensor is calibrated through experiments and the precision of the sensor is tested. Test result shows that at the flow range of 0 ~ 5 m L/min the sensor has the advantages of fast response,high precision,and so on.
引文
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[5]黄修铜.数字型车用热膜式空气流量传感器设计[D].武汉:华中科技大学,2014:8-10.
[6]Hung Shih-Ta,Wong Shwin-Chung,Fang Weileun.The development and application of microthermal sensors with a meshmembrane supporting structure[J].Sensors and Actuators A:Physical,2000,84(1):70-75.
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