红外上转换材料测试系统中截止滤光片的研制
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摘要
根据红外上转换材料测试实验系统的使用要求,选择Ta2O5和Si O2作为高低折射率膜料,通过椭偏仪测试膜料色散代入膜系软件进行设计优化,采用电子枪蒸镀的物理沉积技术,同时利用霍尔离子源辅助沉积提高膜料折射率,并通过调整工艺参数和改进光学监控方法解决了误差在监控波长处的累积问题,成功在石英基底上制备了干涉截止滤光片。镀膜后的石英基片在808、980、1064 nm波长处透射率小于0.01%,可见光波段的平均透射率大于90%。结果表明该干涉截止滤光片的镀制满足上转换实验系统的使用要求。
According to the requirement of testing system for infrared up-conversion materials, Ta2O5 and Si O2 are chosen as high and low refractive index materials. The film system is designed and optimized by film software after testing the dispersive curve of the materials by spectroscopic ellipsometer. The edge filter is prepared on the quartz substrate through electron-beam evaporation system, and the end-Hall ion source assisted deposition is used to improve the refractive index of the materials. By adjusting parameters of the filter and improving optical controlled method, the error accumulation of thickness at the monitor wavelengths is solved. The transmittance of the films at 808、980 and 1064 nm wavelengths are less than 0.01%, and the average transmission is over than 90% at visible band.The test results show that the edge filter meets the requirements of the testing system for infrared up-conversion materials.
According to the requirement of testing system for infrared up-conversion materials, Ta2O5 and Si O2 are chosen as high and low refractive index materials. The film system is designed and optimized by film software after testing the dispersive curve of the materials by spectroscopic ellipsometer. The edge filter is prepared on the quartz substrate through electron-beam evaporation system, and the end-Hall ion source assisted deposition is used to improve the refractive index of the materials. By adjusting parameters of the filter and improving optical controlled method, the error accumulation of thickness at the monitor wavelengths is solved. The transmittance of the films at 808、980 and 1064 nm wavelengths are less than 0.01%, and the average transmission is over than 90% at visible band.The test results show that the edge filter meets the requirements of the testing system for infrared up-conversion materials.
引文
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16 Zhang Jing,Fu Xiuhua,Pan Yonggang.Design and fabrication of satellite laser communication filter coating[J].Acta Photonica Sinica,2012,41(3):303-306.张静,付秀华,潘永刚.卫星激光通信滤光膜的研制[J].光子学.报,2012,41(3):303-306.
17 Zhang Dawei,Zhang Dongping,Fan Shuhai,et al..Application of ion-assisted technology in high power laser films[J].Laser&Optoelectronics Progress,2004,41(10):18-21.张大伟,张东平,范树海,等.离子束辅助技术在高功率激光薄膜中的应用[J].激光与光电子学进展,2004,41(10):18-21.
18 Guo Peitao,Xu Yiyu,Zhang Guangyong,et al..Surface morphology and optical of Ta2O5thin film[J].Vacuum,2007,44(5):32-35.郭培涛,薛亦渝,张光勇,等.氧化钽薄膜表面形貌和光学性能的研究[J].真空,2007,44(5):32-35.
19 Wang Chao,Zhuan Daming,Zhang Gong,et al..Growth of tantalum pentoxide films and its current voltage characteristics[J].Vacuum Science and Technology,2003,23(1):61-67.王超,庄大明,张弓,等.五氧化二钽薄膜的制备及其I-U特性[J].真空科学与技术,2003,23(1):61-67.
20 钟迪生.真空镀膜光学材料的选择与应用[M].沈阳:辽宁大学出版社,2001:245-252.
2 Wang M,Chen Z,Zheng W,et al..Lanthanide-doped upconversion nanoparticles electrostatically coupled with photosensitizers for near-infrared-triggered photodynamic therapy[J].Nanoscale,2014,6(14):8274-8282.
3 Wang X,Chen J T,Zhu H M,et al..One-step solvothermal synthesis of targetable optomagnetic upconversion nanoparticles for in vivo bimodal imaging[J].Anal Chem,2013,85(21):10225-10231.
4 Zheng Xiaopeng,Tian Gan,Gu Zhanjun.Applications of upconversion nanoparticles for cancer photodynamic therapy[J].Chin J Clin Oncol,2014,41(1):27-31.郑晓鹏,田甘,谷战军.荧光上转换纳米材料在光动力学治疗癌症中的应用[J].中国肿瘤临床,2014,41(1):27-31.
5 Wang Wei.Research and application of rare earth up conversion luminescent materials[J].Guangzhou Chemical Industry,2014,42(11):32-34.王伟.稀土上转换发光材料的研究与应用[J].广州化工,2014,42(11):32-34.
6 Yang Jianhu,Dai Shixun,Jiang Zhonghong.Upconversion emission of rare earth ions and its recent developments[J].Progress In Physics,2003,23(3):284-298.杨建虎,戴世勋,姜中宏.稀土离子的上转换发光及研究进展[J].物理学进展,2003,23(3):284-298.
7 Shentu Guoliang,Zheng Mingyang,Zhang Qiang.The new development of up-conversion single-photon detector[J].Science China,2014,44(3):389-393.申屠国樑,郑名扬,张强.上转换单光子探测器最新进展[J].中国科学:信息科学,2014,44(3):389-393.
8 Chen Jun,Wang Qingsong.Recent progress of infrared upconversion device based on the integration of OLED[J].Chinese Optics,2015,8(1):17-27.陈俊,王青松.基OLED显示单元的红外上转换器件研究进展[J].中国光学,2015,8(1):17-27.
9 Pan Yongqiang,Wu Zhensen,Hang Lingxia,et al..Study on surface roughness of Zr O2thin films[J].Journal of Applied Optics,2008,29(4):606-609.潘永强,吴振森,杭凌侠,等.二氧化锆薄膜表面.粗糙度研究[J].应用光学,2008,29(4):606-609.
10 Qi Hongji,Cheng Chuanfu,Yuan Jingmei,et al..Morphology analysis and growth mechanism of zirconium dioxide thin films[J].Acta Optica Sinica,2003,23(8):974-979.齐红基,程传福,袁景梅,等.沉积工艺对二氧化锆薄膜生长特性影响的研究[J].光学学报,2003,23(8):974-979.
11 Chen Tao,Luo Chongtai,Wang Duoshu,et al..Stress distributions of titanium oxide film grown by electron-beam evaporation[J].Chinese Journal of Vacuum Science and Technology,2007,27(2):168-171.陈焘,罗崇泰,王多书,等.电子束蒸发制备二氧化钛薄膜应力测量[J].真空科学与技术学报,2007,27(2):168-171.
12 Dai Wuning,Dai Guoguang,Jin Hui.The tantalum oxide coating material[J].Optical Instruments,2001,23(5-6):221-225.代武宁,代国光,金辉.五氧化二钽镀膜材料[J].光学仪器,2001,23(5-6):221-225.
13 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006:103-161.
14 Yang Yongliang,Liu Guojun,Fu Xiuhua,et al..Study and fabrication of filter film in laser identification between friend or foe system[J].Acta Optica Sinica,2012,32(1):0131002.杨永亮,刘国军,付秀华,等.激光敌我识别系统中滤光膜的研制[J].光学学报,2012,32(1):0131002.
15 Tan Tianya,Zhan Meiqiong,Tian Guanglei,et al..Development of coatings on the crystals for diode pumped lasers[J].Laser&Optoelectronics Progress,2004,41(7):31-34.谭天亚,占美琼,田光磊,等.全固态激光器用晶体镀膜的研究进展[J].激光与光电子学进展,2004,41(7):31-34.
16 Zhang Jing,Fu Xiuhua,Pan Yonggang.Design and fabrication of satellite laser communication filter coating[J].Acta Photonica Sinica,2012,41(3):303-306.张静,付秀华,潘永刚.卫星激光通信滤光膜的研制[J].光子学.报,2012,41(3):303-306.
17 Zhang Dawei,Zhang Dongping,Fan Shuhai,et al..Application of ion-assisted technology in high power laser films[J].Laser&Optoelectronics Progress,2004,41(10):18-21.张大伟,张东平,范树海,等.离子束辅助技术在高功率激光薄膜中的应用[J].激光与光电子学进展,2004,41(10):18-21.
18 Guo Peitao,Xu Yiyu,Zhang Guangyong,et al..Surface morphology and optical of Ta2O5thin film[J].Vacuum,2007,44(5):32-35.郭培涛,薛亦渝,张光勇,等.氧化钽薄膜表面形貌和光学性能的研究[J].真空,2007,44(5):32-35.
19 Wang Chao,Zhuan Daming,Zhang Gong,et al..Growth of tantalum pentoxide films and its current voltage characteristics[J].Vacuum Science and Technology,2003,23(1):61-67.王超,庄大明,张弓,等.五氧化二钽薄膜的制备及其I-U特性[J].真空科学与技术,2003,23(1):61-67.
20 钟迪生.真空镀膜光学材料的选择与应用[M].沈阳:辽宁大学出版社,2001:245-252.
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