集成光波导干涉芯片的设计及特性研究
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摘要
运用光波导的模式理论设计了多层集成光波导干涉芯片,对芯片的光波导结构和材料参数进行优化,并制作了集成干涉芯片.借助集成芯片的波导双通道,通过干涉获得了高对比度的远场干涉条纹.在实验误差范围内,当外界环境条件发生微小变化时,干涉条纹发生移动,符合杨氏双缝干涉理论的预期.芯片对水汽、酒精的探测灵敏度约为100ppm,并具有足够的温度稳定性.该集成干涉芯片具有低浓度环境气体检测的应用前景,可为集成高灵敏气体传感器的开发提供发展平台.
An optical waveguide interference chip with a multi-layer planar structure was designed,and the integrated chip was fabricated successfully after its structure and the material parameters were optimized using the mode theory of optical waveguide.Far-field interference fringes with a high contrast are achieved by the dual-guide waveguide structure inside the chip.Within an experimental error,experiments demonstrate that the interference fringe pattern generated from the integrated chip can be explained and predicted by Young′s doubleslit theory,and the fringe moves under a minor environment change.For humidity and alcohol gas,the detection sensitivity of the chip can reach about 100 ppm level with enough temperature stability during estimate test,which demonstrates its potential applications in sensing environment gas with low concentration and provides a new platform to develop an integrated gas sensor with high sensitivity.
An optical waveguide interference chip with a multi-layer planar structure was designed,and the integrated chip was fabricated successfully after its structure and the material parameters were optimized using the mode theory of optical waveguide.Far-field interference fringes with a high contrast are achieved by the dual-guide waveguide structure inside the chip.Within an experimental error,experiments demonstrate that the interference fringe pattern generated from the integrated chip can be explained and predicted by Young′s doubleslit theory,and the fringe moves under a minor environment change.For humidity and alcohol gas,the detection sensitivity of the chip can reach about 100 ppm level with enough temperature stability during estimate test,which demonstrates its potential applications in sensing environment gas with low concentration and provides a new platform to develop an integrated gas sensor with high sensitivity.
引文
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[2] LIU Song-hao,LI Chun-fei.Photonics technology and application[M].Guangdong:Guangdong Science and Technology Press,2006.刘颂豪,李淳飞.光子学技术与应用[M].广东:广东科技出版社,2006.
[3] TANG Tian-tong,WANG Zhao-hong.Optical integrated[M].Beijing:Science Press,2005.唐天同,王兆宏.集成光学[M].北京:科学出版社,2005.7-2003210
[4] WANG Zi-long.Progress on si-based optoelectronic devices and integration[J].Electronic Tehnology&Software Engineering,2014(6):259.王子龙.硅基集成光电子器件的新进展[J].电子技术与软件工程,2014(6):259.
[5] CHOLLET F.Devices based on co-integrated MEMS actuators and optical waveguide:a review[J].Micromachines,2016,7(2):18.
[6] OH M C,CHU W S,KIM K J,et al.Polymer waveguide integrated-optic current transducers[J].Optics Express,2011,19(10):9392-9400.
[7] CHEN Zi-ping,SHU Hao-wen,WANG Xing-jun.The latest research development of silicon based integrated optical waveguide amplifier[J].Scientia Sinica:Physica,Mechanica&Astronomica,2017,47(12):127301.陈子萍,舒浩文,王兴军.硅基集成光波导放大器的最新研究进展[J].中国科学:物理学力学天文学,2017,47(12):127301.
[8] ZHOU Ying-wu.Experimentally study on high-sensitivity fiber-optic refractometers based on Mach-Zehnder interference[J].Acta Photonica Sinica,2012,41(7):841-844.周赢武.基于光纤M-Z干涉的高灵敏度液体折射率传感器的实验研究[J].光子学报,2012,41(7):841-844.
[9] CHANG Jian-hua,YANG Zhen-bo,WANG Ting-ting.Oil level sensor based on all-fiber Mach-Zehnder interferometer[J].Chinese Journal of Electron Devices,2013,36(6):928-930.常建华,杨镇博,王婷婷.全光纤马赫-曾德干涉型高精度油罐液位传感器[J].电子器件,2013,36(6):928-930.
[10] YANG Shen,RONG Qiang-zhou,SUN Hao,et al.High temperature probe sensor with high sensitivity based on Michelson interferometer[J].Acta Physica Sinica,2013,62(8):261-266.杨珅,荣强周,孙浩,等.基于Michelson干涉仪的高灵敏度光纤高温探针传感器[J].物理学报,2013,62(8):261-266.
[11] KIM S M,CHU W S,KIM S G,et al.Integrated-optic current sensors with a multimode interference waveguide device[J].Optics Express,2016,24(7):7426-7435.
[12] CHARRIER J,BRANDILYM L,LHERMITE H,et al.Evanescent wave optical micro-sensor based on chalcogenide glass[J].Sensors and Actuators B,2012,173(12):468-476.
[13] HEIDEMAN R G,LAMBECK P V.Remote opto-chemical sensing with extreme sensitivity:design,fabrication and performance of a pigtailed integrated optical phase-modulated Mach-Zehnder interferometer system[J].Sensors&Actuators B Chemical,1999,61(1-3):100-127.
[14] MAMTIMIN G,ABDURAHMAN R,YIMIT A.Application progress of optical waveguide sensor in the gas detection[J].Journal of Sensor Technology and Application,2013,1(1):1-8.姑丽各娜·买买提依明,热娜古丽·阿不都热合曼,阿布力孜·伊米提.光波导传感器在气体检测中的应用进展[J].传感器技术与应用,2013,1(1):1-8.
[15] SUN Chao,DING Jian-jun,ZHANG Gang,et al.Design of high precision optical fiber sensor system based on reflective TDM[J].Optical Communication Technology,2018,42(1):20-23.孙超,丁建军,张冈,等.基于反射型TDM的高精度光纤传感器系统设计[J].光通信技术,2018,42(1):20-23.
[16] ZHANG Min,FU Hai-wei,DING Ji-jun,et al.High sensitivity interferometer microfiber ammonia sensor based on optical fiber taper[J].Acta Photonica Sinica,2018,47(3):0306002.张敏,傅海威,丁继军,等.基于熔融拉锥的高灵敏干涉型微光纤氨气传感器[J].光子学报,2018,47(3):0306002.
[17] SUN Sheng-he.Development trend of modern sensor[J].Journal of Electronic Measurement and Instrument,2009,23(1):1-10.孙圣和.现代传感器发展方向[J].电子测量与仪器学报,2009,23(1):1-10.
[18] SUN Sheng-he.Development trend of modern sensor(Continued)[J].Journal of Electronic Measurement and Instrument,2009,23(2):1-9.孙圣和.现代传感器发展方向(续)[J].电子测量与仪器学报,2009,23(2):1-9.
[19] DU Bin,TONG Zhao-yang,MU Xi-hui,et al.Application and research progress of biochemical sensors based on composite optical waveguide[J].Materials Review,2017,31(21):32-36.杜斌,童朝阳,穆晞惠,等.基于复合光波导的生化传感器应用研究进展[J].材料导报,2017,31(21):32-36.
[20] OZHIKANDATHIL J,PACKIRISAMY M.Nano-islands integrated evanescence-based lab-on-a-chip on silica-on-silicon and polydimethylsiloxane hybrid platform for detection of recombinant growth hormone[J].Biomicrofluidics,2012,6(4):2157-2167.
[21] WANG Fu-zhen,MA Wen-cun.Application technology of vapor deposition[M].Beijing:Mechanical Industry Press,2007,320-330.王福贞,马文存.气相沉积应用技术[M].北京:机械工业出版社,2007,320-330.
[22] ZHAO Kai-hua,ZHONG Xi-hua.Optics[M].Beijing:Beijing University Press,1984,160-180.赵凯华,钟锡华.光学[M].北京:北京大学出版社,1984,160-180.
[23] YMETI A,GREVE J,KANGER J S,et al.Realization of a multi-channel integrated Young interferometer chemical sensor[J].Applied Optics,2003,42(28):5649-5660.
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