摘要
结合工程需求,介绍了中小型反射镜支撑方法,对比各种方法的优劣和使用范围,重点阐述了柔性半运动学支撑的原理和设计方法,并运用该原理对一块口径为φ316mm的双曲面反射镜支撑进行柔性优化分析、设计、装调和检测。首先双曲面反射镜轴向采用3点柔性杆支撑,径向采用心轴支撑,并设计防转机构,以实现自由度完全约束;其次运用有限元方法对支撑结构优化设计;最后用4D干涉仪对双曲面反射镜光轴水平工况进行检测。检测结果显示,光轴水平时反射镜面型精度为0.0268λ,与加工后裸镜面型误差为0.0222λ,误差率为5.5%,基本跟有限元分析吻合,验证了理论设计和有限元分析的正确性。设计的反射镜支撑性能稳定可靠,达到预期效果,为中小型反射镜支撑提供参考。
Combining with engineering requirement,a flexure support design and optimization for middle-small spherical mirror was introduced in this paper. By being compared with the advantage and disadvantage as well as the employ area of all the means,the principle and design method of the flexure semi-kinematic support was expatiated based on these features and theory;a flexure support for a spherical mirror with an aperture of 316 mm was analyzed,designed,assembled and tested. Firstly,the axial support was three flexure bars and radial support was a center shaft with a flexure ring;furthermore,a non-rotation structure was designed to restrict all the freedom. Secondly,the structure design was optimized by using finite element analysis. Finally,the mirror surface was tested by 4 D interferometer in horizontal line status. The results showed that the surface error RMS of the mirror was 0.0268λ,and the dispersion refer to the machined was 0.0222λ,approximate error ratio was 5.5%.So that it was inosculate that the finite element result and the correctness of the theory and method were verified. As a result,the support structure was reliable and met the anticipative purpose;so it provided a reference for middle-small spherical mirrors or plate mirrors.
引文
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