微型谐振气体传感器多场耦合非线性振动特性分析
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摘要
随着谐振子尺寸的不断减小,分子力等因素的影响越来越显著,微型谐振气体传感器的谐振子实际上处于多场耦合的工作环境中。考虑分子力、热应力和吸附气体浓度的影响,建立了谐振子的多场耦合动力学方程,利用多尺度法求出谐振子固有频率和瞬时频率,研究了谐振子固有频率随分子力、吸附气体浓度以及温度的变化规律,分析了系统参数对时域动态响应的影响。利用制造出的微型谐振气体传感器及测试系统,进行了扫频实验,得到微传感器的固有频率,与分析结果接近,验证了理论分析的正确性。研究结果对于传感器进一步微型化具有指导意义。
With the decrease of resonator size, the effects of molecular force etc. on the resonator behaviors become more obvious. The resonator of micro gas sensors usually operates in an environment of multi-field coupled interaction. In consideration of the factors of molecular force, thermal stress and density of gas, a multi-field coupled dynamic equation of the resonator was derived. Using the multi-scale method, the natural frequency and instant frequency of the sensor were obtained. The changes of the natural frequency of the sensor along with the variations of molecular force, gas density and temperature were investigated, the influences of system parameters on the time domain dynamic responses were analyzed. With a self-manufactured micro resonant gas sensor and its detecting system, the natural frequency was tested, which is in agreement with the calculated value. The correctness of the theoretical analysis was thus validated. The research results have guiding significance for the further miniaturization of such sensors.
With the decrease of resonator size, the effects of molecular force etc. on the resonator behaviors become more obvious. The resonator of micro gas sensors usually operates in an environment of multi-field coupled interaction. In consideration of the factors of molecular force, thermal stress and density of gas, a multi-field coupled dynamic equation of the resonator was derived. Using the multi-scale method, the natural frequency and instant frequency of the sensor were obtained. The changes of the natural frequency of the sensor along with the variations of molecular force, gas density and temperature were investigated, the influences of system parameters on the time domain dynamic responses were analyzed. With a self-manufactured micro resonant gas sensor and its detecting system, the natural frequency was tested, which is in agreement with the calculated value. The correctness of the theoretical analysis was thus validated. The research results have guiding significance for the further miniaturization of such sensors.
引文
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[4] SHIMIZU Y,EGASHIRA M.Basic aspects and challenges of semiconductor gas sensors[J].Mrs Bulletin,2013,24(6):18-24.
[5] LANGE D,GLEITNER A,IERLEM A.Complementary metal oxide semiconductor cantilever arrays on a single chip:mass-sensitive detection of volatile organic compounds[J].Analytical Chemistry,2002,74(13):3084-3095.
[6] FADEL L,LOCHON F,DU F.Chemical sensing:millimeter size resonant microcantilever performance[J].Journal of Micromechanics and Microengineering,2004,14(9):23-30.
[7] THOMAS B,MURALI K,NATALIJA B.Quantitative time-resolved measurement of membrane protein-ligand interactions using microcantilever array sensors[J].Nature Nanotechnology,2009,4(3):179-185.
[8] 李鹏,李昕欣,王跃林.用于化学气体检测的压阻检测式二氧化硅微悬臂梁传感器[J].传感技术学报,2007,20(10):2174-2177.LI Peng,LI Xinxin,WANG Yuelin.Piezoresistive silicon dioxide micorcantilever sensor for chemical gas detection[J].Chinese Journal of Sensors & Actuators,2007,20(10):2174-2177.
[9] 张建,丁建宁,王权,等.范德华力对硅基微悬臂梁抗粘附稳定性的影响[J].机械强度,2007,29(6):923-926.ZHANG Jian,DING Jianning,WANG Quan,et al.Adhesion stability of silicon microcantilevers under van der waals forces[J].Journal of Mechanical Strength,2007,29(6):923-926.
[10] ZIMMERMANN M,VOLDEN T,KIRSTEIN K U.A CMOS-based integrated-system architecture for a static cantilever array[J].Sensors and Actuators B,2008,131:254-264.
[11] 李强,霍丽华,高山,等.酞菁铜旋涂薄膜的制备与气敏性能研究[J].无机化学学报,2008,24(12):1970-1974.LI Qiang,HUO Lihua,GAO Shan,et al.Preparation and gas-sensing property of copper phthalocyanine spin-coating film[J].Chinese Journal of Inorganic Chemistry,2008,24(12):1970-1974.
[12] 刘丽丽,李守春,王连元,等.新型微气体传感器的ANSYS分析与优化[J].仪表技术与传感器,2016(2):1-12.LIU Lili,LI Shouchun,WANG Lianyuan,et al.Analysis and optimization of ANSYS applied on novel micro gas sensor[J].Instrument Technique and Sensor,2016(2):1-12.
[13] XU L,YANG Q.Time frequency property for a micro resonant gas sensor[J].AIP Advances,2013,3(10):102-112.
[14] GERHARD M,SEBASTIAN B,SUMIT P.Novel chemical sensor applications in commercial aircraft[J].Procedia Engineering,2011,25(1):16-22.
[15] PEDRO M D,PAHUD P.Vibration mechanics[M].Berlin:Springer Netherlands,1991.
[16] GERHARD M,SEBASTIAN B,SUMIT P.Novel chemical sensor applications in commercial aircraft[J].Procedia Engineering,2011,25(1):16-22.
[17] REDDY J N.Mechanics of composite materials[M].Berlin:Springer,1975.